Patents by Inventor Masayuki Miyazaki

Masayuki Miyazaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10355079
    Abstract: Hydrogen atoms and crystal defects are introduced into an n-semiconductor substrate by proton implantation. The crystal defects are generated in the n-semiconductor substrate by electron beam irradiation before or after the proton implantation. Then, a heat treatment for generating donors is performed. The amount of crystal defects is appropriately controlled during the heat treatment for generating donors to increase a donor generation rate. In addition, when the heat treatment for generating donors ends, the crystal defects formed by the electron beam irradiation and the proton implantation are recovered and controlled to an appropriate amount of crystal defects. Therefore, for example, it is possible to improve a breakdown voltage and reduce a leakage current.
    Type: Grant
    Filed: July 30, 2018
    Date of Patent: July 16, 2019
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Takashi Yoshimura, Masayuki Miyazaki, Hiroshi Takishita, Hidenao Kuribayashi
  • Publication number: 20190181221
    Abstract: Proton irradiation is performed a plurality of times from rear surface of an n-type semiconductor substrate, which is an n? drift layer, forming an n-type FS layer having lower resistance than the n-type semiconductor substrate in the rear surface of the n? drift layer. When the proton irradiation is performed a plurality of times, the next proton irradiation is performed to as to compensate for a reduction in mobility due to disorder which remains after the previous proton irradiation. In this case, the second or subsequent proton irradiation is performed at the position of the disorder which is formed by the previous proton irradiation. In this way, even after proton irradiation and a heat treatment, the disorder is reduced and it is possible to prevent deterioration of characteristics, such as increase in leakage current. It is possible to form an n-type FS layer including a high-concentration hydrogen-related donor layer.
    Type: Application
    Filed: February 4, 2019
    Publication date: June 13, 2019
    Inventors: Hiroshi TAKISHITA, Takashi YOSHIMURA, Masayuki MIYAZAKI, Hidenao KURIBAYASHI
  • Patent number: 10306339
    Abstract: It is necessary to increase the scale of a sensor network to achieve high resource exploration efficiency. On the other hand, since there are increasing needs to extend the area of an exploration region and to detect deeper geological stratum and crust structures more accurately, the large-scale sensor network needs to be operated for a long period of several weeks or longer. In order to solve the problem, a sensor unit needs to be turned on always to perform measurement always. However, an auxiliary measurement unit is activated intermittently since the auxiliary measurement unit needs to acquire data at necessary timings only. On the other hand, during collection and transmission of data and charging of a battery, a sensor terminal detects whether power is supplied from a data collection and charging device and automatically turns off the sensor unit and the auxiliary measurement unit to activate a data transmission unit.
    Type: Grant
    Filed: July 9, 2014
    Date of Patent: May 28, 2019
    Assignee: HITACHI, LTD.
    Inventors: Yasutaka Serizawa, Ryosuke Fujiwara, Masayuki Miyazaki
  • Patent number: 10208400
    Abstract: A method, for manufacturing a silicon carbide semiconductor device, includes: forming a silicon carbide epitaxial film on a silicon carbide substrate; flattening a surface of the epitaxial film by using chemical mechanical polishing such that the surface of the epitaxial film has an arithmetic mean roughness Ra of 0.3 nm or less; thermally oxidizing the surface of the epitaxial film to form a sacrificial oxide; removing the sacrificial oxide; and cleaning, by using deionized water, a surface of the epitaxial film exposed by the removing of the sacrificial oxide.
    Type: Grant
    Filed: January 11, 2017
    Date of Patent: February 19, 2019
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Masayuki Miyazaki
  • Patent number: 10199453
    Abstract: Proton irradiation is performed a plurality of times from rear surface of an n-type semiconductor substrate, which is an n? drift layer, forming an n-type FS layer having lower resistance than the n-type semiconductor substrate in the rear surface of the n? drift layer. When the proton irradiation is performed a plurality of times, the next proton irradiation is performed to as to compensate for a reduction in mobility due to disorder which remains after the previous proton irradiation. In this case, the second or subsequent proton irradiation is performed at the position of the disorder which is formed by the previous proton irradiation. In this way, even after proton irradiation and a heat treatment, the disorder is reduced and it is possible to prevent deterioration of characteristics, such as increase in leakage current. It is possible to form an n-type FS layer including a high-concentration hydrogen-related donor layer.
    Type: Grant
    Filed: July 25, 2018
    Date of Patent: February 5, 2019
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Hiroshi Takishita, Takashi Yoshimura, Masayuki Miyazaki, Hidenao Kuribayashi
  • Publication number: 20180350901
    Abstract: Hydrogen atoms and crystal defects are introduced into an n-semiconductor substrate by proton implantation. The crystal defects are generated in the n-semiconductor substrate by electron beam irradiation before or after the proton implantation. Then, a heat treatment for generating donors is performed. The amount of crystal defects is appropriately controlled during the heat treatment for generating donors to increase a donor generation rate. In addition, when the heat treatment for generating donors ends, the crystal defects formed by the electron beam irradiation and the proton implantation are recovered and controlled to an appropriate amount of crystal defects. Therefore, for example, it is possible to improve a breakdown voltage and reduce a leakage current.
    Type: Application
    Filed: July 30, 2018
    Publication date: December 6, 2018
    Inventors: Takashi YOSHIMURA, Masayuki MIYAZAKI, Hiroshi TAKISHITA, Hidenao KURIBAYASHI
  • Publication number: 20180331176
    Abstract: Proton irradiation is performed a plurality of times from rear surface of an n-type semiconductor substrate, which is an n? drift layer, forming an n-type FS layer having lower resistance than the n-type semiconductor substrate in the rear surface of the n? drift layer. When the proton irradiation is performed a plurality of times, the next proton irradiation is performed to as to compensate for a reduction in mobility due to disorder which remains after the previous proton irradiation. In this case, the second or subsequent proton irradiation is performed at the position of the disorder which is formed by the previous proton irradiation. In this way, even after proton irradiation and a heat treatment, the disorder is reduced and it is possible to prevent deterioration of characteristics, such as increase in leakage current. It is possible to form an n-type FS layer including a high-concentration hydrogen-related donor layer.
    Type: Application
    Filed: July 25, 2018
    Publication date: November 15, 2018
    Inventors: Hiroshi TAKISHITA, Takashi YOSHIMURA, Masayuki MIYAZAKI, Hidenao KURIBAYASHI
  • Patent number: 10128360
    Abstract: A method of producing a semiconductor device is disclosed in which, after proton implantation is performed, a hydrogen-induced donor is formed by a furnace annealing process to form an n-type field stop layer. A disorder generated in a proton passage region is reduced by a laser annealing process to form an n-type disorder reduction region. As such, the n-type field stop layer and the n-type disorder reduction region are formed by the proton implantation. Therefore, it is possible to provide a stable and inexpensive semiconductor device which has low conduction resistance and can improve electrical characteristics, such as a leakage current, and a method for producing the semiconductor device.
    Type: Grant
    Filed: December 11, 2017
    Date of Patent: November 13, 2018
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Masayuki Miyazaki, Takashi Yoshimura, Hiroshi Takishita, Hidenao Kuribayashi
  • Publication number: 20180321588
    Abstract: To provide a photocurable resin composition comprising an N-vinyl amide compound, a polyfunctional (meth)acrylate monomer and a photopolymerization initiator and having excellent adhesion to an optical substrate and free from an appearance defect such as a crack or shrinkage and a laminate having a coat layer obtained by curing the photocurable resin composition.
    Type: Application
    Filed: November 10, 2016
    Publication date: November 8, 2018
    Applicant: TOKUYAMA CORPORATION
    Inventors: Masayuki MIYAZAKI, Junji MOMODA, Junji TAKENAKA, Takashi TAMUKAI
  • Publication number: 20180301337
    Abstract: To enhance efficiency of a process of implanting impurities into a silicon carbide semiconductor layer. To provide a method of manufacturing a semiconductor device including a silicon carbide semiconductor layer, the method of manufacturing including: implanting impurities multiple times to an impurity implantation region in the silicon carbide semiconductor layer to different depths, with temperature of the silicon carbide semiconductor layer being set to be equal to or lower than 150° C. In the implanting, impurities may be implanted multiple times to the impurity implantation region to different depths, with temperature of the silicon carbide semiconductor layer being set to be equal to or higher than room temperature.
    Type: Application
    Filed: May 23, 2018
    Publication date: October 18, 2018
    Inventors: Katsushi NISHIYAMA, Masayuki MIYAZAKI, Shoji KITAMURA
  • Patent number: 10104016
    Abstract: Provided are a device, a system, and a method in which redundancy is changed in accordance with a line state, and thus the optimal redundancy can be set while the current settings are compared to the previous settings. A communication device measures line quality information from a received packet, and generates a redundancy change instruction based on information regarding a line. In a case where the communication device acquires line quality information for the second and subsequent times, the communication device compares the previous redundancy change instruction and the previous line quality information, to the current line quality information, and sets redundancy. Thus, it is possible to suppress the occurrence of congestion and satisfy a target value of the line quality, and to search for a condition which causes the redundancy to be the minimum.
    Type: Grant
    Filed: December 12, 2014
    Date of Patent: October 16, 2018
    Assignee: HITACHI, LTD.
    Inventors: Takashi Takeuchi, Masayuki Miyazaki, Ryosuke Fujiwara
  • Publication number: 20180246236
    Abstract: Provided is a sensor apparatus including: a normal operation unit including a first sensor and a storage device; an external environment detection unit including a second sensor; a power supply switch unit configured to control supply of electric power to the normal operation unit; and a power supply configured to supply the electric power to the normal operation unit via the power supply switch unit. In the sensor apparatus, in an operational mode, the normal operation unit records data measured by the first sensor into the storage device, and, in a non-operational mode, when a measured value obtained by the second sensor satisfies a predetermined condition, the external environment detection unit controls the power supply switch unit so that the power supply switch unit supplies the electric power to the normal operation unit, and the normal operation unit records the data measured by the first sensor into the storage device.
    Type: Application
    Filed: April 7, 2017
    Publication date: August 30, 2018
    Inventors: Masaki MURATA, Shiro MAZAWA, Xiaoyun LU, Masayuki MIYAZAKI, Hisato KESSOKU
  • Patent number: 10056449
    Abstract: Proton irradiation is performed a plurality of times from rear surface of an n-type semiconductor substrate, which is an n? drift layer, forming an n-type FS layer having lower resistance than the n-type semiconductor substrate in the rear surface of the n? drift layer. When the proton irradiation is performed a plurality of times, the next proton irradiation is performed to as to compensate for a reduction in mobility due to disorder which remains after the previous proton irradiation. In this case, the second or subsequent proton irradiation is performed at the position of the disorder which is formed by the previous proton irradiation. In this way, even after proton irradiation and a heat treatment, the disorder is reduced and it is possible to prevent deterioration of characteristics, such as increase in leakage current. It is possible to form an n-type FS layer including a high-concentration hydrogen-related donor layer.
    Type: Grant
    Filed: July 28, 2017
    Date of Patent: August 21, 2018
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Hiroshi Takishita, Takashi Yoshimura, Masayuki Miyazaki, Hidenao Kuribayashi
  • Patent number: 10056451
    Abstract: Hydrogen atoms and crystal defects are introduced into an n? semiconductor substrate by proton implantation. The crystal defects are generated in the n? semiconductor substrate by electron beam irradiation before or after the proton implantation. Then, a heat treatment for generating donors is performed. The amount of crystal defects is appropriately controlled during the heat treatment for generating donors to increase a donor generation rate. In addition, when the heat treatment for generating donors ends, the crystal defects formed by the electron beam irradiation and the proton implantation are recovered and controlled to an appropriate amount of crystal defects. Therefore, for example, it is possible to improve a breakdown voltage and reduce a leakage current.
    Type: Grant
    Filed: July 17, 2017
    Date of Patent: August 21, 2018
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Takashi Yoshimura, Masayuki Miyazaki, Hiroshi Takishita, Hidenao Kuribayashi
  • Patent number: 10050106
    Abstract: A p+ collector layer is provided in a rear surface of a semiconductor substrate which will be an n? drift layer and an n+ field stop layer is provided in a region which is deeper than the p+ collector layer formed on the rear surface side. A front surface element structure is formed on the front surface of the semiconductor substrate and then protons are radiated to the rear surface of the semiconductor substrate at an acceleration voltage corresponding to the depth at which the n+ field stop layer is formed. A first annealing process is performed at an annealing temperature corresponding to the proton irradiation to change the protons into donors, thereby forming a field stop layer. Then, annealing is performed using annealing conditions suitable for the conditions of a plurality of proton irradiation processes to recover each crystal defect formed by each proton irradiation process.
    Type: Grant
    Filed: June 3, 2016
    Date of Patent: August 14, 2018
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Masayuki Miyazaki, Takashi Yoshimura, Hiroshi Takishita, Hidenao Kuribayashi
  • Patent number: 10045375
    Abstract: In a multi-hop radio communication network including a base station (a radio station connected to a management server), each radio station in the network is given a data transmission opportunity in turn according to a predetermined transmission order, and transmits data via broadcast or multicast upon occurrence of transmission timing. The radio station having received the data adds data of the radio station to the received data and then forwards the packet via broadcast or multicast when it is the radio station's turn for transmission.
    Type: Grant
    Filed: February 5, 2014
    Date of Patent: August 7, 2018
    Assignee: Hitachi, Ltd.
    Inventors: Yasutaka Serizawa, Masayuki Miyazaki, Kenichiro Yamane, Tatsuki Inuduka, Ryo Nakano, Satoru Harada
  • Patent number: 9980286
    Abstract: A packet collision among a plurality of access points is avoided and QoS is ensured. An access point that shares a wireless channel with a plurality of access points to carry out communication is provided with a function for determining, based on information contained in a polling communication signal or a broadcast signal transmitted from another access point, an access point (preceding AP) that is to perform polling communication immediately before the own station to form a group within which the order of the polling communication is determined, and after determining that a polling communication period of the preceding AP has ended, starting the polling communication period of the own station in a wireless network.
    Type: Grant
    Filed: March 10, 2014
    Date of Patent: May 22, 2018
    Assignee: Hitachi, Ltd.
    Inventors: Haruki Nishimura, Ryosuke Fujiwara, Masayuki Miyazaki, Makoto Katagishi
  • Patent number: 9967895
    Abstract: Provided is a wireless transmission system including a plurality of access points and an access controller. The access controller determines a start standard time for a polling period for the plurality of access points to perform polling communication with a plurality of wireless terminals. The access controller generates a scheduling setting information indicating timings when the plurality of access points perform polling communication with the plurality of wireless terminals during the polling period. The access controller transmits, to each of the plurality of access points, a polling period start signal including the start standard time and a corresponding portion of the scheduling setting information for each of the plurality of access points. The plurality of access points perform polling communication with the plurality of wireless terminals based on respective polling period start signals.
    Type: Grant
    Filed: July 29, 2014
    Date of Patent: May 8, 2018
    Assignee: Hitachi, Ltd.
    Inventors: Haruki Nishimura, Ryosuke Fujiwara, Makoto Katagishi, Masayuki Miyazaki
  • Publication number: 20180118069
    Abstract: The present disclosure describes, in an armrest capable of being displaced between a stored position and a deployed position, a vehicular seat capable of preventing foreign matter from entering the interior thereof through a gap formed between the armrest (in particular, the vicinity of the center of displacement thereof) and a mounted portion. The present disclosure relates to a vehicular seat provided with an armrest. Both ends of a first shaft are pivotably supported by first holes formed in a plurality of guide members, and both ends of a second shaft are inserted into second holes to be movable along the holes. Between a side surface side of the armrest and the guide members, a plate member which covers at least a part of the second holes is provided.
    Type: Application
    Filed: April 13, 2016
    Publication date: May 3, 2018
    Inventors: Masayuki Miyazaki, Toru Inagaki, Toshihiko Tsuda
  • Publication number: 20180108765
    Abstract: A method of producing a semiconductor device is disclosed in which, after proton implantation is performed, a hydrogen-induced donor is formed by a furnace annealing process to form an n-type field stop layer. A disorder generated in a proton passage region is reduced by a laser annealing process to form an n-type disorder reduction region. As such, the n-type field stop layer and the n-type disorder reduction region are formed by the proton implantation. Therefore, it is possible to provide a stable and inexpensive semiconductor device which has low conduction resistance and can improve electrical characteristics, such as a leakage current, and a method for producing the semiconductor device.
    Type: Application
    Filed: December 11, 2017
    Publication date: April 19, 2018
    Inventors: Masayuki MIYAZAKI, Takashi YOSHIMURA, Hiroshi TAKISHITA, Hidenao KURIBAYASHI