Patents by Inventor Michael C. Smayling

Michael C. Smayling has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20160133625
    Abstract: An integrated circuit includes a gate electrode level region that includes a plurality of linear-shaped conductive structures. Each of the plurality of linear-shaped conductive structures is defined to extend lengthwise in a first direction. Some of the plurality of linear-shaped conductive structures form one or more gate electrodes of corresponding transistor devices. A local interconnect conductive structure is formed between two of the plurality of linear-shaped conductive structures so as to extend in the first direction along the two of the plurality of linear-shaped conductive structures.
    Type: Application
    Filed: January 13, 2016
    Publication date: May 12, 2016
    Inventors: Michael C. Smayling, Scott T. Becker
  • Publication number: 20160133626
    Abstract: An integrated circuit includes a gate electrode level region that includes a plurality of linear-shaped conductive structures. Each of the plurality of linear-shaped conductive structures is defined to extend lengthwise in a first direction. Some of the plurality of linear-shaped conductive structures form one or more gate electrodes of corresponding transistor devices. A local interconnect conductive structure is formed between two of the plurality of linear-shaped conductive structures so as to extend in the first direction along the two of the plurality of linear-shaped conductive structures.
    Type: Application
    Filed: January 14, 2016
    Publication date: May 12, 2016
    Inventors: Michael C. Smayling, Scott T. Becker
  • Patent number: 9336344
    Abstract: A layer of a mask material is deposited on a substrate. A beam of energy is scanned across the mask material in a rasterized linear pattern and in accordance with a scan pitch that is based on a pitch of conductive structure segments to be formed on the substrate. The beam of energy is defined to transform the mask material upon which the beam of energy is incident into a removable state. During scanning the beam of energy across the mask material, the beam of energy is turned on at locations where a conductive structure is to be formed on the substrate, and the beam of energy is turned off at locations where a conductive structure is not to be formed on the substrate.
    Type: Grant
    Filed: February 21, 2014
    Date of Patent: May 10, 2016
    Assignee: Tela Innovations, Inc.
    Inventors: Michael C. Smayling, Scott T. Becker
  • Publication number: 20160079381
    Abstract: A semiconductor chip region includes a first conductive structure (CS) that forms a gate electrode (GE) of a first transistor of a first transistor type (TT) and a GE of a first transistor of a second TT, a second CS that forms a GE of a second transistor of the first TT, a third CS that forms a GE of a second transistor of the second TT, a fourth CS that forms a GE of a third transistor of the first TT, and a fifth CS that forms a GE of a third transistor of the second TT. Diffusion terminals of the first and second transistors of the first TT are electrically connected. Diffusion terminals of the first and second transistors of the second TT are electrically connected. Diffusion terminals of the second and third transistors of both the first TT and second TT are electrically connected.
    Type: Application
    Filed: November 19, 2015
    Publication date: March 17, 2016
    Inventors: Scott T. Becker, Michael C. Smayling
  • Patent number: 9281371
    Abstract: A number of first hard mask portions are formed on a dielectric layer to vertically shadow a respective one of a number of underlying gate structures. A number of second hard mask filaments are formed adjacent to each side surface of each first hard mask portion. A width of each second hard mask filament is set to define an active area contact-to-gate structure spacing. A first passage is etched between facing exposed side surfaces of a given pair of neighboring second hard mask filaments and through a depth of the semiconductor wafer to an active area. A second passage is etched through a given first hard mask portion and through a depth of the semiconductor wafer to a top surface of the underlying gate structure. An electrically conductive material is deposited within both the first and second passages to respectively form an active area contact and a gate contact.
    Type: Grant
    Filed: December 10, 2014
    Date of Patent: March 8, 2016
    Assignee: Tela Innovations, Inc.
    Inventor: Michael C. Smayling
  • Publication number: 20160027770
    Abstract: A linear-shaped core structure of a first material is formed on an underlying material. A layer of a second material is conformally deposited over the linear-shaped core structure and exposed portions of the underlying material. The layer of the second material is etched so as to leave a filament of the second material on each sidewall of the linear-shaped core structure, and so as to remove the second material from the underlying material. The linear-shaped core structure of the first material is removed so as to leave each filament of the second material on the underlying material. Each filament of the second material provides a mask for etching the underlying material. Each filament of the second material can be selectively etched further to adjust its size, and to correspondingly adjust a size of a feature to be formed in the underlying material.
    Type: Application
    Filed: October 5, 2015
    Publication date: January 28, 2016
    Inventors: Michael C. Smayling, Scott T. Becker
  • Patent number: 9240413
    Abstract: An integrated circuit includes a gate electrode level region that includes a plurality of linear-shaped conductive structures. Each of the plurality of linear-shaped conductive structures is defined to extend lengthwise in a first direction. Some of the plurality of linear-shaped conductive structures form one or more gate electrodes of corresponding transistor devices. A local interconnect conductive structure is formed between two of the plurality of linear-shaped conductive structures so as to extend in the first direction along the two of the plurality of linear-shaped conductive structures.
    Type: Grant
    Filed: February 24, 2014
    Date of Patent: January 19, 2016
    Assignee: Tela Innovations, Inc.
    Inventors: Michael C. Smayling, Scott T. Becker
  • Publication number: 20150363542
    Abstract: Problematic open areas are identified in a semiconductor wafer layout. The problematic open areas have a size variation relative to one or more neighboring open areas of the layout sufficient to cause adverse microloading variation. In one embodiment, the adverse microloading variation is controlled by shifting a number of layout features to interdict the problematic open areas. In another embodiment, the adverse microloading variation is controlled by defining and placing a number of dummy layout features to shield actual layout features that neighbor the problematic open areas. In another embodiment, the adverse microloading variation is controlled by utilizing sacrificial layout features which are actually fabricated on the wafer temporarily to eliminate microloading variation, and which are subsequently removed from the wafer to leave behind the desired permanent structures.
    Type: Application
    Filed: August 24, 2015
    Publication date: December 17, 2015
    Inventors: Brian Reed, Michael C. Smayling, Scott T. Becker
  • Patent number: 9159627
    Abstract: A linear-shaped core structure of a first material is formed on an underlying material. A layer of a second material is conformally deposited over the linear-shaped core structure and exposed portions of the underlying material. The layer of the second material is etched so as to leave a filament of the second material on each sidewall of the linear-shaped core structure, and so as to remove the second material from the underlying material. The linear-shaped core structure of the first material is removed so as to leave each filament of the second material on the underlying material. Each filament of the second material provides a mask for etching the underlying material. Each filament of the second material can be selectively etched further to adjust its size, and to correspondingly adjust a size of a feature to be formed in the underlying material.
    Type: Grant
    Filed: November 14, 2011
    Date of Patent: October 13, 2015
    Assignee: Tela Innovations, Inc.
    Inventors: Michael C. Smayling, Scott T. Becker
  • Publication number: 20150270218
    Abstract: A semiconductor chip region includes a first conductive structure (CS) that forms a gate electrode (GE) of a first transistor of a first transistor type (TT) and a GE of a first transistor of a second TT, a second CS that forms a GE of a second transistor of the first TT, a third CS that forms a GE of a second transistor of the second TT, a fourth CS that forms a GE of a third transistor of the first TT, a fifth CS that forms a GE of a third transistor of the second TT, another CS that forms a GE of a fourth transistor of the first TT, and another CS that forms a GE of a fourth transistor of the second TT. The second and third transistors of the first and second TT's have a common diffusion terminal electrical connection and specified gate electrode electrical connections.
    Type: Application
    Filed: June 4, 2015
    Publication date: September 24, 2015
    Inventors: Scott T. Becker, Michael C. Smayling
  • Publication number: 20150249041
    Abstract: A semiconductor chip includes a region that includes a first conductive structure (CS) that forms a gate electrode (GE) of a first transistor of a first transistor type. The region includes a second CS that forms a GE of a second transistor of the first transistor type and a GE of a first transistor of a second transistor type. The region includes another CS that forms a GE of a second transistor of the second transistor type. The GE's of the first and second transistors of the first transistor type are separated by a gate pitch. The GE's of the first and second transistors of the second transistor type are separated by the gate pitch. The first CS has a total length that is greater than one-half of the total length of the second CS. The second and third CS's have at least one respective end aligned with each other.
    Type: Application
    Filed: May 13, 2015
    Publication date: September 3, 2015
    Inventors: Scott T. Becker, Michael C. Smayling
  • Patent number: 9122832
    Abstract: Problematic open areas are identified in a semiconductor wafer layout. The problematic open areas have a size variation relative to one or more neighboring open areas of the layout sufficient to cause adverse microloading variation. In one embodiment, the adverse microloading variation is controlled by shifting a number of layout features to interdict the problematic open areas. In another embodiment, the adverse microloading variation is controlled by defining and placing a number of dummy layout features to shield actual layout features that neighbor the problematic open areas. In another embodiment, the adverse microloading variation is controlled by utilizing sacrificial layout features which are actually fabricated on the wafer temporarily to eliminate microloading variation, and which are subsequently removed from the wafer to leave behind the desired permanent structures.
    Type: Grant
    Filed: July 30, 2009
    Date of Patent: September 1, 2015
    Assignee: Tela Innovations, Inc.
    Inventors: Brian Reed, Michael C. Smayling, Scott T. Becker
  • Patent number: 9035359
    Abstract: A first linear-shaped conductive structure (LCS) forms gate electrodes (GE's) of a first transistor of a first transistor type and a first transistor of a second transistor type. A second LCS forms a GE of a second transistor of the first transistor type. A third LCS forms a GE of a second transistor of the second transistor type. A fourth LCS forms a GE of a third transistor of the first transistor type. A fifth LCS forms a GE of a third transistor of the second transistor type. A sixth LCS forms a GE of a fourth transistor of the first transistor type and a fourth transistor of the second transistor type. Transistors of the first transistor type are collectively separated from transistors of the second transistor type by an inner region. The second, third, fourth, and fifth LCS's have respective electrical connection areas arranged relative to the inner region.
    Type: Grant
    Filed: June 13, 2014
    Date of Patent: May 19, 2015
    Assignee: Tela Innovations, Inc.
    Inventors: Scott T. Becker, Michael C. Smayling
  • Patent number: 9009641
    Abstract: A first transistor has source and drain regions within a first diffusion fin. The first diffusion fin projects from a surface of a substrate. The first diffusion fin extends lengthwise in a first direction from a first end to a second end of the first diffusion fin. A second transistor has source and drain regions within a second diffusion fin. The second diffusion fin projects from the surface of the substrate. The second diffusion fin extends lengthwise in the first direction from a first end to a second end of the second diffusion fin. The second diffusion fin is positioned next to and spaced apart from the first diffusion fin. Either the first end or the second end of the second diffusion fin is positioned in the first direction between the first end and the second end of the first diffusion fin.
    Type: Grant
    Filed: January 12, 2013
    Date of Patent: April 14, 2015
    Assignee: Tela Innovations, Inc.
    Inventors: Scott T. Becker, Michael C. Smayling, Dhrumil Gandhi, Jim Mali, Carole Lambert, Jonathan R. Quandt, Daryl Fox
  • Publication number: 20150091190
    Abstract: A number of first hard mask portions are formed on a dielectric layer to vertically shadow a respective one of a number of underlying gate structures. A number of second hard mask filaments are formed adjacent to each side surface of each first hard mask portion. A width of each second hard mask filament is set to define an active area contact-to-gate structure spacing. A first passage is etched between facing exposed side surfaces of a given pair of neighboring second hard mask filaments and through a depth of the semiconductor wafer to an active area. A second passage is etched through a given first hard mask portion and through a depth of the semiconductor wafer to a top surface of the underlying gate structure. An electrically conductive material is deposited within both the first and second passages to respectively form an active area contact and a gate contact.
    Type: Application
    Filed: December 10, 2014
    Publication date: April 2, 2015
    Inventor: Michael C. Smayling
  • Patent number: 8951916
    Abstract: A number of first hard mask portions are formed on a dielectric layer to vertically shadow a respective one of a number of underlying gate structures. A number of second hard mask filaments are formed adjacent to each side surface of each first hard mask portion. A width of each second hard mask filament is set to define an active area contact-to-gate structure spacing. A first passage is etched between facing exposed side surfaces of a given pair of neighboring second hard mask filaments and through a depth of the semiconductor wafer to an active area. A second passage is etched through a given first hard mask portion and through a depth of the semiconductor wafer to a top surface of the underlying gate structure. An electrically conductive material is deposited within both the first and second passages to respectively form an active area contact and a gate contact.
    Type: Grant
    Filed: September 23, 2013
    Date of Patent: February 10, 2015
    Assignee: Tela Innovations, Inc.
    Inventor: Michael C. Smayling
  • Patent number: 8952425
    Abstract: An integrated circuit includes at least four linear-shaped conductive structures formed to extend lengthwise in a parallel direction to each other and each respectively including a gate electrode portion and an extending portion that extends away from the gate electrode portion. The gate electrode portions of the linear-shaped conductive structures respectively form gate electrodes of different transistors, such that at least one of the linear-shaped conductive structures forms a gate electrode of a transistor of a first transistor type and does not form a gate electrode of any transistor of a second transistor type, and such that at least one of the linear-shaped conductive structures forms a gate electrode of a transistor of the second transistor type and does not form a gate electrode of any transistor of the first transistor type. Extending portions of the at least four linear-shaped conductive structures include at least two different extending portion lengths.
    Type: Grant
    Filed: February 22, 2013
    Date of Patent: February 10, 2015
    Assignee: Tela Innovations, Inc.
    Inventors: Scott T. Becker, Michael C. Smayling
  • Patent number: 8946781
    Abstract: An integrated circuit includes four parallel positioned linear-shaped structures each including a gate electrode portion and an extension portion. Gate electrode portions of two of the four linear-shaped structures respectively form gate electrodes of first and second transistors of a first transistor type. Gate electrode portions of two of the four linear-shaped structures respectively form a gate electrodes of first and second transistors of a second transistor type. Four contacting structures are respectively connected to the extension portions of the four linear-shaped structures such that each extension portion has a respective contact-to-end distance. At least two of the contact-to-end distances are different. A fifth linear-shaped structure forms gate electrodes of transistors respectively positioned next to the first transistors of the first and second transistor types.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: February 3, 2015
    Assignee: Tela Innovations, Inc.
    Inventors: Scott T. Becker, Michael C. Smayling
  • Patent number: 8921897
    Abstract: A first linear-shaped conductive structure (LSCS) forms gate electrodes of a first p-transistor and a first n-transistor. A second LSCS forms a gate electrode of a second p-transistor. A third LSCS forms a gate electrode of a second n-transistor, and is separated from the second LSCS by a first end-to-end spacing (EES). A fourth LSCS forms a gate electrode of a third p-transistor. A fifth LSCS forms a gate electrode of a third n-transistor, and is separated from the fourth LSCS by a second EES. A sixth LSCS forms gate electrodes of a fourth p-transistor and a fourth n-transistor. An end of the second LSCS adjacent to the first EES is offset from an end of the fourth LSCS adjacent to the second EES, and/or an end of the third LSCS adjacent to the first EES is offset from an end of the fifth LSCS adjacent to the second EES.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: December 30, 2014
    Assignee: Tela Innovations, Inc.
    Inventors: Scott T. Becker, Michael C. Smayling
  • Patent number: 8921896
    Abstract: A first linear-shaped conductive structure (LSCS) forming gate electrodes of both a first p-transistor and a first n-transistor. A second LSCS forming a gate electrode of a second p-transistor and including an extension portion extending away therefrom. A third LSCS forming a gate electrode of a second n-transistor and including an extension portion extending away therefrom. A fourth LSCS forming a gate electrode of a third p-transistor and including an extension portion extending away therefrom. A fifth LSCS forming a gate electrode of a third n-transistor and including an extension portion extending away therefrom. A sixth LSCS forming gate electrodes of both a fourth p-transistor and a fourth n-transistor. Four contact structures respectively contacting the extension portions of the second, third, fourth, and fifth LSCS's, such that at least two of the extension portions extend different distances beyond their contact structure.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: December 30, 2014
    Assignee: Tela Innovations, Inc.
    Inventors: Scott T. Becker, Michael C. Smayling