Abstract: A system includes an electrode. The electrode includes a showerhead having a first stem portion and a head portion. A plurality of dielectric layers is vertically stacked between the electrode and a first surface of a conducting structure. The plurality of dielectric layers includes M dielectric layers arranged adjacent to the head portion and P dielectric portions arranged around the first stem portion. The plurality of dielectric layers defines a first gap between the electrode and one of the plurality of dielectric layers, a second gap between adjacent ones of the plurality of dielectric layers, and a third gap between a last one of the plurality of dielectric layers and the first surface. A number of the plurality of dielectric layers and sizes of the first gap, the second gap, and the third gap are selected to prevent parasitic plasma between the first surface and the electrode.

Abstract: Systems and methods for separating a mixture comprising C4 hydrocarbons and a solvent have been disclosed. The mixture is produced as a bottom stream of a rectifier column. The mixture is processed in at least two heating and flash-evaporating cycles to remove at least some C4 hydrocarbons as vapor streams. The resulted liquid stream is further degassed in a degasser column to produce a recycle vapor stream and a lean solvent stream.

Abstract: A system includes an electrode. The electrode includes a showerhead having a first stem portion and a head portion. A plurality of dielectric layers is vertically stacked between the electrode and a first surface of a conducting structure. The plurality of dielectric layers includes M dielectric layers arranged adjacent to the head portion and P dielectric portions arranged around the first stem portion. The plurality of dielectric layers defines a first gap between the electrode and one of the plurality of dielectric layers, a second gap between adjacent ones of the plurality of dielectric layers, and a third gap between a last one of the plurality of dielectric layers and the first surface. A number of the plurality of dielectric layers and sizes of the first gap, the second gap, and the third gap are selected to prevent parasitic plasma between the first surface and the electrode.

Abstract: A system includes an electrode. The electrode includes a showerhead having a first stem portion and a head portion. A plurality of dielectric layers is vertically stacked between the electrode and a first surface of a conducting structure. The plurality of dielectric layers includes M dielectric layers arranged adjacent to the head portion and P dielectric portions arranged around the first stem portion. The plurality of dielectric layers defines a first gap between the electrode and one of the plurality of dielectric layers, a second gap between adjacent ones of the plurality of dielectric layers, and a third gap between a last one of the plurality of dielectric layers and the first surface. A number of the plurality of dielectric layers and sizes of the first gap, the second gap, and the third gap are selected to prevent parasitic plasma between the first surface and the electrode.

Abstract: Systems and methods for separating a mixture comprising C4 hydrocarbons and a solvent have been disclosed. The mixture is produced as a bottom stream of a rectifier column. The mixture is processed in at least two heating and flash-evaporating cycles to remove at least some C4 hydrocarbons as vapor streams. The resulted liquid stream is further degassed in a degasser column to produce a recycle vapor stream and a lean solvent stream.

Abstract: Systems and methods for producing dicyclopentadiene via thermal dimerization of cyclopentadiene. The feed stream comprising cyclopentadiene is flowed through four shell and tube heat exchangers in series. Each of the shell and tube heat exchangers comprise a shell and one or more tubes disposed in the shell. The feed stream is flowed in the tubes while the heat transfer medium is flowed in the shell to absorb the exothermic heat released by the dimerization of cyclopentadiene in the tubes. In this way, the temperature in the tubes is controlled at a level where the conversion rate of cyclopentadiene is above 99% and the occurrence of runaway reaction is substantially prevented.

Abstract: Methods and systems for producing light olefins are disclosed. A feedstock comprising crude oil is distilled to produce a plurality of streams including a naphtha stream and a vacuum residue stream. The naphtha is fed to a steam cracking unit to produce light olefins, C4 hydrocarbons, pyrolysis gasoline and pyrolysis oil. The vacuum residue stream is hydrocracked to produce additional naphtha and heavy unconverted oil. The heavy unconverted oil and the pyrolysis oil from steam cracking unit can be deasphalted to produce deasphalted oil and pitch product. The deasphalted oil can be further hydrocracked to produce naphtha. The pitch product can be gasified to produce synthesis gas, which is further used to produce methanol. The methanol can be used to react with isobutylene of the C4 hydrocarbon stream from steam cracker to produce methyl tert-butyl ether (MTBE).

Abstract: Methods and systems for producing light olefins are disclosed. A feedstock comprising crude oil is distilled to produce a plurality of streams including a naphtha stream and a vacuum residue stream. The naphtha is fed to a steam cracking unit to produce light olefins, C4 hydrocarbons, pyrolysis gasoline and pyrolysis oil. The vacuum residue stream is hydrocracked to produce additional naphtha and heavy unconverted oil. The heavy unconverted oil and the pyrolysis oil from steam cracking unit can be deasphalted to produce deasphalted oil and pitch product. The deasphalted oil can be further hydrocracked to produce naphtha. The pitch product can be gasified to produce synthesis gas, which is further used to produce methanol. The methanol can be used to react with isobutylene of the C4 hydrocarbon stream from steam cracker to produce methyl tert-butyl ether (MTBE).

Abstract: Systems and methods for producing dicyclopentadiene via thermal dimerization of cyclopentadiene. The feed stream comprising cyclopentadiene is flowed through four shell and tube heat exchangers in series. Each of the shell and tube heat exchangers comprise a shell and one or more tubes disposed in the shell. The feed stream is flowed in the tubes while the heat transfer medium is flowed in the shell to absorb the exothermic heat released by the dimerization of cyclopentadiene in the tubes. In this way, the temperature in the tubes is controlled at a level where the conversion rate of cyclopentadiene is above 99% and the occurrence of runaway reaction is substantially prevented.

Abstract: Methods and systems for separating C3 hydrocarbons from lighter hydrocarbons, carbon monoxide, carbon dioxide, and water are provided. In certain embodiments, the methods include feeding a gaseous mixture including C1, C2, and C3 hydrocarbons and benzene solvent to the absorber column where benzene solvent selectively absorbs C3 hydrocarbons. The methods can further include removing a first stream comprising benzene solvent and absorbed C3 hydrocarbons from the absorber column, and feeding the first stream to a stripper column where benzene solvent is separated from C3 hydrocarbons, and removing a second stream comprising C3 hydrocarbons from the stripper column.

Abstract: Methods and systems for treating pygas are disclosed. Methods include depentanizing the pygas to produce a C5 stream and a C6+ stream before hydrotreating the C6+ stream, to integrate the processing of pygas with the production of isoprene, piperylene, and dicyclopentadiene. Systems include a depentanizer added before a pygas hydrotreatment unit.

Abstract: Methods and systems for recovering dicyclopentadiene from pygas are provided. Methods can include heating pygas to generated heated pygas, recovering a C5 fraction from the heated pygas, and dimerizing cyclopentadiene from the C5 fraction to form dicyclopentadiene. Methods can further include recovering the C5 fraction from the pygas in a depentanizer column. Other methods can include heating pygas including dicyclopentadiene to form cyclopentadiene and hydrogenating cyclopentadiene in the pygas to form cyclopentane.

Abstract: The present disclosure provides methods and system for the cooling of process plant water. A system can include a first heat exchanger for exchanging heat between a first process water stream and a refrigerant; a multiphase pump, coupled to the first heat exchanger, to increase the pressure of the refrigerant; a second heat exchanger, coupled to the multiphase pump and the first heat exchanger, for exchanging heat between a second process water stream and the refrigerant; a first expansion valve, coupled to the second heat exchanger, for lowering the temperature of the refrigerant; a vapor-liquid separator, coupled to the first expansion valve and the multiphase pump, for separating the liquid and vapor phases of the refrigerant; and a second expansion valve, coupled to the vapor-liquid separator and the first heat exchanger, for lowering the temperature of the liquid phase of the refrigerant.

Abstract: Various implementations of hybrid ceramic faceplates for substrate processing showerheads are provided. The hybrid ceramic showerhead faceplates may include an electrode embedded within the ceramic material of the faceplate, as well as a pattern of through-holes. The electrode may be fully encapsulated within the ceramic material with respect to the through-holes. In some implementations, a heater element may also be embedded within the hybrid ceramic showerhead faceplate. A DC voltage source may be electrically connected with the hybrid ceramic showerhead faceplate during use. The hybrid ceramic faceplates may be easily removable from the substrate processing showerheads for easy cleaning and faceplate replacement.

Abstract: Methods and systems for recovering dicyclopentadiene from pygas are provided. Methods can include heating pygas to generated heated pygas, recovering a C5 fraction from the heated pygas, and dimerizing cyclopentadiene from the C5 fraction to form dicyclopentadiene. Methods can further include recovering the C5 fraction from the pygas in a depentanizer column. Other methods can include heating pygas including dicyclopentadiene to form cyclopentadiene and hydrogenating cyclopentadiene in the pygas to form cyclopentane.

Abstract: A system includes an electrode. The electrode includes a showerhead having a first stem portion and a head portion. A plurality of dielectric layers is vertically stacked between the electrode and a first surface of a conducting structure. The plurality of dielectric layers includes M dielectric layers arranged adjacent to the head portion and P dielectric portions arranged around the first stem portion. The plurality of dielectric layers defines a first gap between the electrode and one of the plurality of dielectric layers, a second gap between adjacent ones of the plurality of dielectric layers, and a third gap between a last one of the plurality of dielectric layers and the first surface. A number of the plurality of dielectric layers and sizes of the first gap, the second gap, and the third gap are selected to prevent parasitic plasma between the first surface and the electrode.

Abstract: A system for reducing parasitic plasma in a semiconductor process comprises a first surface and a plurality of dielectric layers that are arranged between an electrode and the first surface. The first surface and the electrode have substantially different electrical potentials. The plurality of dielectric layers defines a first gap between the electrode and one of the plurality of dielectric layers, a second gap between adjacent ones of the plurality of dielectric layers, and a third gap between a last one of the plurality of dielectric layers and the first surface. A number of the plurality of dielectric layers and sizes of the first gap, the second gap and the third gap are selected to prevent parasitic plasma between the first surface and the electrode during the semiconductor process.

Abstract: Methods and systems for separating C3 hydrocarbons from lighter hydrocarbons, carbon monoxide, carbon dioxide, and water are provided. In certain embodiments, the methods include feeding a gaseous mixture including C1, C2, and C3 hydrocarbons and benzene solvent to the absorber column where benzene solvent selectively absorbs C3 hydrocarbons. The methods can further include removing a first stream comprising benzene solvent and absorbed C3 hydrocarbons from the absorber column, and feeding the first stream to a stripper column where benzene solvent is separated from C3 hydrocarbons, and removing a second stream comprising C3 hydrocarbons from the stripper column.