Abstract: An ink-jet printing apparatus includes an ink-jet head unit including an ink-jet head, and a control device which controls an ink ejection timing of the ink-jet head and includes a comparator comparing first printing pattern information that is stored and second printing pattern information that is input with each other, a control signal generator generating a first head control signal based on the first printing pattern information when a difference between the first printing pattern information and the second printing pattern information is a reference value or less and generating a second head control signal different from the first head control signal based on the second printing pattern information when the difference between the first printing pattern information and the second printing pattern information exceeds the reference value, and a data output unit providing the first head control signal or the second head control signal to the ink-jet head unit.

Abstract: An inkjet printing apparatus includes a surface acoustic wave module including an inner passage and a surface acoustic wave generator around the inner passage; and an outflow passage connected to the surface acoustic wave module to discharge ink, where the outflow passage includes a first outflow passage connected to the inner passage to discharge first ink particles and a second outflow passage connected to the inner passage to discharge second ink particles having an average diameter smaller than that of the first ink particles, and the surface acoustic wave generator is closer to the second outflow passage than the first outflow passage.

Abstract: An imprint device according to an embodiment includes: a stage, which supports a substrate; a press roller, which presses a film with respect to the substrate; a first load cell and a second load cell, which are disposed corresponding to opposite ends of the press roller, respectively; and a controller, which monitors a release state of the film based on an output of the first load cell and an output of the second load cell.

Abstract: An inkjet printing apparatus includes a print head including an inkjet head having a nozzle surface; nozzles disposed on the nozzle surface, that spray an ink from the nozzles; and a heater that heats a temperature of the inkjet head to a reference temperature. The nozzles include a first nozzle having a first diameter; and a second nozzle having a second diameter different from the first diameter of the first nozzle, the nozzle surface includes a first area in which the first nozzle is disposed and a second area in which the second nozzle is disposed, the first area has a first temperature in case that the heater heats the inkjet head to the reference temperature, and the second area has a second temperature different from the first temperature in case that the heater heats the inkjet head to the reference temperature.

Abstract: An inkjet printing apparatus includes: an airflow stage extending in a first direction; a print head unit disposed above the airflow stage; and an electric field generating unit that moves in the first direction and generates electric field above the airflow stage.

Abstract: An atomic layer deposition apparatus includes a substrate support which supports a substrate; a process module on the substrate support; a first gas pipe which supplies a first gas to the process module; a second gas pipe which supplies a second gas to the process module; and an exhaust part which discharges the first and second gases supplied to the process module. The process module includes: a first gas supply flow path portion connected to the first gas pipe; a second gas supply flow path portion under the first gas supply flow path portion and connected to the second gas pipe; and a gas exhaust flow path portion connected to the exhaust part. The gas exhaust flow path is spaced apart from the first and second gas supply flow path portions with the substrate therebetween, and the first and second gases pass through a process area in a laminar flow.

Abstract: An inkjet printing apparatus according to an embodiment includes a stage where a target substrate is disposed, and an inkjet head that discharges ink on the target substrate. The inkjet head includes a tank that stores the ink, nozzles that are provided on the tank and discharge the ink, and a damper that is disposed in the tank, and the damper comprises a protruding portion that protrudes toward the nozzles from the damper.

Abstract: An inkjet printing apparatus includes a surface acoustic wave module including an inner passage and a surface acoustic wave generator around the inner passage; and an outflow passage connected to the surface acoustic wave module to discharge ink, where the outflow passage includes a first outflow passage connected to the inner passage to discharge first ink particles and a second outflow passage connected to the inner passage to discharge second ink particles having an average diameter smaller than that of the first ink particles, and the surface acoustic wave generator is closer to the second outflow passage than the first outflow passage.

Abstract: An inkjet device includes: a stage in which a substrate is installed; a substrate mover which moves the substrate in a first direction; a processor which moves in the first direction together with the substrate mover; and an inkjet head disposed on the stage, where the processor includes a suction portion.

Abstract: An inkjet printing device includes a stage part including a stage, an inkjet head part including at least one inkjet head that disposes an ink on the stage, the ink including dipoles and a solvent having the dipoles, a heat treatment device that removes the solvent, a first sensing part that measures a position of the ink disposed on the stage, a second sensing part that measures a position of the inkjet head, and a third sensing part that measures a position of each of the dipoles disposed on the stage. A dipole aligning method includes disposing an ink on a substrate, the ink including dipoles and a solvent having the dipoles, generating an electric field on the substrate and disposing the dipoles on the substrate by the electric field, removing the solvent, and measuring a position of each of the dipoles disposed on the substrate.

Abstract: Provided are an inkjet printing apparatus and a printing method of a bipolar element by using the inkjet printing apparatus. The inkjet printing apparatus includes: a stage that moves in a first direction; an inkjet device that sprays ink on the stage; a.

Abstract: An inkjet printing apparatus may form a material layer on a substrate. The inkjet printing apparatus includes a stage, an ink-receiving member, and an inkjet head. The stage may support the substrate. The inkjet head overlaps at least one of the stage and the ink-receiving member, may provide a first set of ink to the substrate, and may provide a second set of ink to the ink-receiving member when the substrate is supported by the stage.

Abstract: A sputtering apparatus includes: a first cylindrical target and a second cylindrical target, which are arranged in a first direction and parallel to each other; a first magnet disposed in the first cylindrical target; a second magnet disposed in the second cylindrical target; and a substrate holder spaced apart from the first and second cylindrical targets in a second direction which is perpendicular to the first direction, wherein each of a first angle formed by a first imaginary straight line from a center of the first magnet to a cylindrical axis of the first cylindrical target with a first perpendicular line and a second angle formed by a second imaginary straight line from a center to of the second magnet to a cylindrical axis of the second cylindrical target with a second perpendicular line is in a range of about 30 degrees to about 180 degrees.

Abstract: Provided are an inkjet printing apparatus and a method for inspecting an inkjet head using same. The inkjet printing apparatus comprises: an inspection stage unit on which an inspection substrate is seated; an inkjet head unit including at least one inkjet head that ejects ink containing dipoles and a solvent in which the dipoles disperse, on the inspection stage unit; and a particle count inspection unit that is located so as to be spaced apart from the inkjet head unit in one direction. The particle count inspection unit comprises: a first heat treatment unit that is located on the top portion of the inspection stage unit; and a first sensing unit that is located on the bottom portion of the inspection stage unit and measures the number of dipoles sprayed onto the inspection substrate.

Abstract: A vapor deposition apparatus for providing a deposition film on a substrate, the vapor deposition apparatus includes a plurality of first nozzle parts which injects a first raw material toward the substrate; a plurality of second nozzle parts which is alternately disposed together with the plurality of first nozzle parts and injects a second raw material toward the substrate; a diffuser unit which distributes the second raw material to the plurality of second nozzle parts; and a supply unit which supplies the second raw material to the diffuser unit.

Abstract: A plasma processing apparatus including: a chamber configured to provide a space for processing a substrate; a substrate stage configured to support the substrate within the chamber and including a first electrode, the first electrode configured to receive a first radio frequency signal; a second electrode disposed on an upper portion of the chamber to face the first electrode, the second electrode configured to receive a second radio frequency signal; a gas supply unit configured to supply a process gas onto the substrate within the chamber; and a thermal control unit configured to circulate a heat transfer medium through a first fluid passage provided in the first electrode and a second fluid passage provided in the second electrode to maintain the first and second electrodes at the same temperature.

Abstract: An in-line manufacturing apparatus includes a carrier that transports a substrate, a plurality of process chambers subjected to a manufacturing process on the substrate transported through the carrier, and a cooling part disposed adjacent to the carrier and movable with the carrier.

Abstract: An inkjet printing apparatus includes a print head including an inkjet head having a nozzle surface; nozzles disposed on the nozzle surface, that spray an ink from the nozzles; and a heater that heats a temperature of the inkjet head to a reference temperature. The nozzles include a first nozzle having a first diameter; and a second nozzle having a second diameter different from the first diameter of the first nozzle, the nozzle surface includes a first area in which the first nozzle is disposed and a second area in which the second nozzle is disposed, the first area has a first temperature in case that the heater heats the inkjet head to the reference temperature, and the second area has a second temperature different from the first temperature in case that the heater heats the inkjet head to the reference temperature.

Abstract: A vapor deposition apparatus for providing a deposition film on a substrate, the vapor deposition apparatus includes a plurality of first nozzle parts which injects a first raw material toward the substrate; a plurality of second nozzle parts which is alternately disposed together with the plurality of first nozzle parts and injects a second raw material toward the substrate; a diffuser unit which distributes the second raw material to the plurality of second nozzle parts; and a supply unit which supplies the second raw material to the diffuser unit.

Abstract: A method of manufacturing a metal oxide film includes injecting a reaction gas and metal precursors into a chamber, forming a first metal precursor film on a substrate in a plasma OFF state, forming a first sub-metal oxide film by oxidizing the first metal precursor film in a plasma ON state, and forming a second metal precursor film on the first sub-metal oxide film in the plasma OFF state, where the metal oxide film has an amorphous phase, a thickness of about 20 nanometer (nm) to about 130 nm, and a dielectric constant of about 10 to about 50.