Abstract: A getter device including a substrate formed of a first getter material having a composition for gettering a first gas specie, and a second getter material contacting an external surface of the substrate and having a composition for gettering a second gas specie. The substrate has internal porosity connected to openings at its external surface, and the second getter material covers at least a portion of the external surface of the substrate but is absent from at least part of the internal porosity within the substrate so that the first getter material is exposed within the internal porosity for gettering the first gas specie. According to a second aspect, a substrate is formed of a material transparent to radiation, and a film of getter material is deposited on the substrate to be sufficiently thin and/or porous so that the film is also transparent to the radiation transmitted through the substrate.

Abstract: A fluid system installed on a vehicle and a method for assessing a property of a fluid flowing in the fluid system. The fluid system and method entail flowing at least a portion of the fluid through a passage within a freestanding portion of a micromachined tube supported above a substrate so as to define a gap therebetween, vibrating the freestanding portion of the micromachined tube at a resonant frequency thereof, sensing the movement of the freestanding portion of the micromachined tube so as to measure at least one of the vibration frequency and deflection of the freestanding portion relative to the substrate and produce therefrom at least one output corresponding to at least one of the mass flow rate, specific gravity, and density of the portion of the fluid flowing through the passage, and then using the output to compute the property of the fluid.

Abstract: An anchor for a medical implant, a method of manufacturing an anchor, and a delivery system and method for delivering a medical implant, such as for monitoring physiological parameters, for example, for diagnosing and/or monitoring and/or treating cardiovascular diseases, such as CHF and CHD. The anchor includes a base member, arms, legs, features for securing the medical implant to the base member, and features for connecting the anchor to a connector. The anchor has a deployed configuration in which the arms radially project from a first end of the base member and the legs radially project from an opposite end of the base member. When deployed, the arms and legs terminate at extremities that are opposing but not aligned with each other.

Abstract: A microfluidic device and method for assessing properties of a fluid. The device includes a base supported by a substrate and a tube extending from the base and spaced apart from the substrate surface. The tube has an internal passage, first and second portions adjacent the base and defining, respectively, an inlet and outlet of the passage, and a distal portion. A drive electrode is located on the substrate surface adjacent the distal portion of the tube. Sensing electrodes are located on the substrate surface adjacent the first and second portions of the tube, and are adapted for sensing deflections of the first and second portions when vibrated with the drive electrode and from which the fluid property is determined. A pair of electrodes is located on the substrate surface between the drive and sensing electrodes, and are operated to enhance the performance of the microfluidic device, such as by supplementing the drive or sensing electrodes.

Abstract: A microfluidic device a micromachined freestanding member adapted to sense one or more properties of a fluid flowing through the freestanding member. The freestanding member is supported by a substrate and spaced apart and separated from the substrate to enable the freestanding member to move relative to the substrate under the influence of a vibration-inducing element. Movement of the freestanding member relative to the substrate is then sensed by a sensing element. The freestanding member has an inlet, an outlet, an internal passage that fluidically couples the inlet and outlet, and a wall that defines and separates first and second passage portions of the internal passage that are arranged in fluidic series so that a fluid flowing through the internal passage flows through the first and second passage portions in opposite directions.

Abstract: A micromachined fluid sensing device and a method for its fabrication. The sensing device incorporates a bypass passage, preferably an integral bypass passage within the device, that enables a volume of fluid to be delivered to the device, with a limited portion of the fluid passing through a passage within the device in which one or more properties of the fluid are sensed, such as but not limited to density, specific gravity, and chemical concentrations. The device is suitable for monitoring the fuel concentration in a fuel mixture for a fuel cell.

Abstract: A system for non-invasively monitoring one or more physiological parameters such as pressure and/or pressure gradients in a cardiac conduit adapted for blood bypass flow. The system includes the conduit, at least one sensing device chronically located within the conduit, and a non-implantable readout device. The sensing device includes at least one inductor coil and at least one sensor for monitoring the one or more physiological parameters for diagnosis of the condition of the conduit after the conduit is implanted in a patient. The readout device includes at least one inductor coil allowing electromagnetic telecommunication and electromagnetic wireless powering of the sensing device through the inductor coil thereof.

Abstract: A method of monitoring physiological parameters for diagnosis and treatment of congestive heart failure in a patient. The method includes implanting at least one sensing device in a cavity of the patient's cardiovascular system, preferably so that the sensing device passes through and is anchored to a septum of the heart and, to minimize the risk of thrombogenicity, a larger portion of the sensing device is located in the right side of the heart and a smaller portion of the sensing device is located in the left side of the heart. Electromagnetic telecommunication and/or wireless powering of the sensing device is performed with an external readout device. The method can be used to perform effective monitoring, management, and tailoring of treatments for patients suffering from congestive heart failure, as well as many other diseases.

Abstract: A fluid system installed on a vehicle and a method for assessing a property of a fluid flowing in the fluid system. The fluid system and method entail flowing at least a portion of the fluid through a passage within a freestanding portion of a micromachined tube supported above a substrate so as to define a gap therebetween, vibrating the freestanding portion of the micromachined tube at a resonant frequency thereof, sensing the movement of the freestanding portion of the micromachined tube so as to measure at least one of the vibration frequency and deflection of the freestanding portion relative to the substrate and produce therefrom at least one output corresponding to at least one of the mass flow rate, specific gravity, and density of the portion of the fluid flowing through the passage, and then using the output to compute the property of the fluid.

Abstract: A medical treatment procedure and system that makes use of a bidirectional flow sensor unit to monitor, detect, and control the flow of one or more fluids to and from a patient. The sensor unit measures both flow rate and flow direction of a fluid of a conduit through which a first fluid flows to or from the patient in a first direction, and through which it is possible that the first fluid or a second fluid may flow in a reverse direction through the conduit from or to, respectively, the patient. The sensor unit measures the flow rate of the first fluid as the first fluid flows through the bidirectional flow sensor unit, and senses if the first fluid or the second fluid flows through the bidirectional flow sensor unit in the reverse direction. A signal is relayed to indicate the occurrence of a reverse flow condition.

Abstract: A process for producing a tube suitable for microfluidic devices. The process uses first and second wafers, each having a substantially uniform doping level. The first wafer has a first portion into which a channel is etched partially therethrough between second and third portions of the first wafer. The first wafer is then bonded to the second wafer so that a first portion of the second wafer overlies the first portion of the first wafer and encloses the channel to define a passage. The second wafer is then thinned so that the first portion thereof defines a thinned wall of the passage. Second and third portions of the second wafer and part of the second and third portions of the first wafer are then removed, and the thinned wall defined by the second wafer is bonded to a substrate such that the passage projects over a recess in the substrate surface. The second and third portions of the first wafer are then removed to define a tube with a freestanding portion.

Abstract: A micromachined fluid sensing device and a method for its fabrication. The sensing device incorporates a bypass passage, preferably an integral bypass passage within the device, that enables a volume of fluid to be delivered to the device, with a limited portion of the fluid passing through a passage within the device in which one or more properties of the fluid are sensed, such as but not limited to density, specific gravity, and chemical concentrations. The device is suitable for monitoring the fuel concentration in a fuel mixture for a fuel cell.

Abstract: A delivery method and system for noninvasively monitoring cardiac physiologic parameters used to evaluate patients with cardiovascular conditions. The system includes an implantable sensing device configured for chronic implantation in a cavity of the cardiovascular system, such as the heart, pulmonary artery (PA), etc. The method involves introducing the sensing device through a cardiovascular cavity that is upstream in the vasculature from the cavity where implantation is intended and has a larger diameter than the intended cavity, and thereafter blood flow through the cardiovascular system delivers the device to the intended cavity. The device is sized and configured so as to secure itself within the intended cavity when the device moves through the cavity to a point where the diameter narrows sufficiently to secure the device and so as to be oriented once secured to sense a pressure either within, upstream (wedge), or downstream (distal) of the cavity.

Abstract: A process for producing a tube suitable for microfluidic devices. The process uses a uniformly-doped first material having a first portion into which a channel is etched partially through the first material between second and third portions of the first material. The first material is then bonded to a second material so that a first portion of the second material overlies the first portion of the first material and encloses the channel to define a passage. The second and third portions of the second material and part of the second and third portions of the first material are then removed, and the first portion of the second material is bonded to a substrate such that the passage projects over a recess in the substrate surface. The second and third portions of the first material are then removed to define a tube with a freestanding portion.

Abstract: A method and device for assessing rheological properties of a fluid, including lubricity and viscosity. The invention utilizes a tube into which the fluid is introduced, and relies on tracking the movement of particles intentionally introduced into the fluid to assess the rheological properties of the fluid. The method and device generally entail introducing at least one solid particle into the fluid to cause the particle to flow through the portion of the tube, and assessing a rheological property of the fluid within the tube by tracking the movement of the particle through the portion relative to the flow of the fluid through the portion.

Abstract: A treatment system and method for treating a fluid withdrawn and then returned to a living body. The system includes outgoing and incoming fluid lines connected to the living body for transporting the fluid from the living body, through the treatment system, and back to the living body, a device for altering at least the density of the fluid as it flows through the system, and a sensing unit within the system and comprising a device for sensing the density of the fluid as the fluid flows through the sensing unit. The sensing device may be a micromachined Coriolis-based sensor also capable of sensing mass flow rate.

Abstract: The present invention defines an implantable microfabricated sensor device for measuring a physiologic parameter of interest within a patient. The sensor device includes a substrate and a sensor, integrally formed with the substrate, that is responsive to the physiologic parameter of interest. At least one conductive path is integrally formed with said substrate and coupled to the sensor. Connected to the conductive path is an active circuit. The active circuit is further electrically connected to the sensor.

Abstract: A fluid delivery system and method that combine a fluid source and an inline unit capable of delivering a precise amount of a therapeutic fluid to a patient based on specific data associated with the fluid, such as its identity, density, dosage, and dosage rate, so that the correct fluid is safely delivered in controlled amounts specific to its characteristics, purpose, and intended destination. The inline unit includes a flow controller and a flow sensor that produces a signal corresponding to the flow rate of the fluid flowing therethrough. The system further includes memory containing the data associated with the fluid, and electronic circuitry that causes the controller to regulate flow from the fluid source at the prescribed dosage rate and to deliver the prescribed dosage amount from the fluid source based on the signal from the sensor and the data contained by the memory.

Abstract: Micromachine fluidic apparatus incorporates a free-standing tube section and electrodes to actuate or control the movement of the tube section, or to sense the movement of the tube section, or both. Electronic circuitry, which may be disposed on the same substrate as the fluidic portion of the apparatus, is used in conjunction with the tube and electrodes in conjunction with a variety of different applications, including fluid flow measurement, fluid density measurement, fluid viscosity measurement, fluid transport, separation and/or mixing. According to a particular embodiment, the free-standing section of the tube is resonated for fluid flow and density measurements according to the Coriolis effect. Capacitive/electrostatic actuation techniques are used to control or resonate the free-standing section of the tube, and to detect variations in tube movement.

Abstract: The present invention relates to an implantable microfabricated sensor device and system for measuring a physiologic parameter of interest within a patient. The implantable device is micro electromechanical system (MEMS) device and includes a substrate having an integrated inductor and at least one sensor formed thereon. A plurality of conductive paths electrically connect the integrated inductor with the sensor. Cooperatively, the integrated inductor, sensor and conductive paths defining an LC tank resonator.