Abstract: In a surface processing method for processing a surface of a member made of silicon carbide (SiC) and having a fragmental layer on a surface thereof, the surface of the member having the fragmental layer is modified into a dense layer to reduce the number of particles generated from the surface of the member when the member is applied to a plasma processing apparatus. Here, the SiC of the surface of the member is recrystallized by heating the fragmental layer.

Abstract: A substrate processing apparatus is used for radiating UV rays onto a target film formed on a target surface of a substrate to perform a curing process of the target film. The apparatus includes a hot plate configured to heat the substrate to a predetermined temperature, a plurality of support pins disposed on the hot plate to support the substrate, and a UV radiating device configured to radiate UV rays onto the target surface of the substrate supported on the support pins. The support pins are preset to provide a predetermined thermal conductivity to conduct heat of the substrate to the hot plate. The hot plate is preset to have a predetermined thermal capacity sufficient to absorb heat conducted through the support pins.

Abstract: The present invention is a transfer mask for exposure comprising a mask portion having a plurality of cells, each of which an opening of a predetermined pattern is formed in. When one side of the plurality of cells is exposed to a charged particle beam, each of the plurality of cells is adapted to make the charged particle beam pass through itself to the other side thereof based on the pattern of the opening formed in the cell. Thus, when a substrate to be processed is arranged on the other side of the cell, the pattern of the opening formed in the cell is transferred to the substrate to be processed and hence an exposure pattern is formed on the substrate to be processed. The feature of the present invention is that a part of or all the plurality of cells can be exchanged at the mask portion.

Abstract: In a method of reusing a consumable part for use in a plasma processing apparatus, a silicon carbide (SiC) lump is formed by depositing SiC by chemical vapor deposition (CVD), and a consumable part for the plasma processing apparatus is manufactured by processing the SiC lump, the consumable part having a predetermined shape. A first plasma process is performed on a substrate by using the manufactured consumable part. A surface of the consumable part that has been eroded by the plasma process is subjected to a clean process for a specific period of time. SiC is deposited on the cleaned surface of the eroded consumable part by CVD. A consumable part having the predetermined shape is remanufactured by processing the eroded consumable part having the surface on which the SiC is deposited. A second plasma process is performed on a substrate by using the remanufactured consumable part.

Abstract: By steps of forming first masks 13, 14 each having a first pattern on a first surface of a substrate 11 on which a membrane is to be formed, etching the first surface of the substrate 11 by using the first masks 13, 14 to forming first support beams 15, positioning a second surface of the substrate 11 on the basis of the first pattern on the first surface, forming a second mask 17 having a second pattern on the second surface of the substrate 11 based on the alignment and etching the second surface of the substrate 11 in dry by using the second mask 17 to form the second support beams 20, a membrane member 22a where the first and second support beams 15, 20 are formed on both surfaces of the membrane 12 is manufactured. Consequently, it is possible to provide the membrane member that is sufficient in strength and is hard to be deformed by heat.

Abstract: In an image processing apparatus, when an output image generator generates an output image in which an individual image of each part of a product model is arranged around a parts assembly image of the entire product model with a specific part highlighted, a boundary information calculator calculates boundary information for each part highlighted. An individual image arrangement calculator obtains a center position of the highlighted part on the parts assembly image based on the boundary information, obtains a straight line dividing the parts assembly image to equally distribute the parts into respective areas, and calculates a position of arrangement of the individual image of each part corresponding to the highlighted part distributed in each of the areas. The output image generated by the output image generator includes a leading line extending from the individual image of each part to the corresponding part on the parts assembly image.

Abstract: A substrate processing apparatus is used for radiating UV rays onto a target film formed on a target surface of a substrate to perform a curing process of the target film. The apparatus includes a hot plate configured to heat the substrate to a predetermined temperature, a plurality of support pins disposed on the hot plate to support the substrate, and a UV radiating device configured to radiate UV rays onto the target surface of the substrate supported on the support pins. The support pins are preset to provide a predetermined thermal conductivity to conduct heat of the substrate to the hot plate. The hot plate is preset to have a predetermined thermal capacity sufficient to absorb heat conducted through the support pins.

Abstract: A disclosed part identification image generation device includes a model management unit that manages a 3D model; a model region calculation unit that projects the shape of the 3D model and computes model region information; a part region calculation unit that projects the shape of a part of the 3D model and computes part region information; an image data processing unit that clips an image of the 3D model from a projection image of the 3D model to generate an entire model image, clips an image of the part from the projection image of the 3D model to generate a part highlight image, and computes part positional information; a part resolution ratio calculation unit that calculates part resolution ratio; and an image data management unit that manages the entire model image, the part highlight image, the part positional information, and the part resolution ratio as part catalog image data.

Abstract: An image searching device including a database, a user interface, a search unit, and an output unit. The search unit includes a data management unit configured to manage data on a model to be searched and acquired from the database and create an image to be displayed on a screen of the user interface; a determination unit configured to determine and extract parts each having a boundary included in a closed region as candidate parts; a part selection unit configured to display single images of the candidate parts on the screen of the user interface to enable selection of a target part; and an image switching unit configured to create data on a part emphasis frame and switch the screen displayed on the user interface from the single images of the candidate parts to a full image in which the target part is highlighted with the part emphasis frame.

Abstract: In an image search apparatus, a data manager responds to an instruction for a first search condition issued via a user interface to manage data of a target model acquired from a database and generates an image to be displayed on a user interface. A determination processor responds to an instruction for a second search condition issued by positioning a pointer on the whole model image to compare a closed area defined by the specified position with boundary information of each part image, retrieves candidate part images, and prioritizes the candidate part images in order of increasing area calculated based on the boundary information. A parts selection processor displays the retrieved candidate part images on the user interface according to the order of increasing area in response to an instruction for a third search condition for choosing a target part image from among the candidate part images.

Abstract: The present invention provides a membrane structure having favorable pressure resistance and a manufacturing method of the same. After forming an opening (21a) on a substrate (21) by Deep Digging Reactive Ion Etching (DRIE), vertical streak formed by DRIE on the side face (inner peripheral face) of the opening (21a) is removed by performing light etching with an alkali etchant. The level of overhang of an overhanging section (21b) formed when forming an opening (22a) of a BOX layer (22) is suppressed by suppressing the overetching level when forming the BOX layer (22) by etching.

Abstract: A change rate prediction method according to which there can be eliminated the need for experimentally determining electron beam intensities for making a change rate of a specification value of a predetermined film on a substrate uniform. The distribution of the shrinkage rate of a low-k film on a wafer upon the low-k film being modified is measured while changing the inputted current value inputted to a central electron beam tube of an electron beam irradiating mechanism, the relationship between the inputted current value and the shrinkage rate measured directly below the electron beam tube is calculated, and a dose distribution calculated through simulation is converted into a low-k film shrinkage rate distribution based on the ratio between the inputted current value and the dose and a power curve giving the relationship between the inputted current value and the measured shrinkage rate.

Abstract: A parts managing system extracts data on each part configuring a designated three-dimensional model, with reference to three-dimensional model data and part configuration information, and stores and manages the data in an extracted-data storing unit. The parts managing system searches the extracted-data storing unit using specified retrieval information and displays each part unit that is retrieved and an assembly diagram in which only the retrieved part is highlighted.

Abstract: A part identification image processor includes a model manager to manage a 3D model, a model region calculator, a part region calculator, an image data processor, and an image data manager. The model region calculator projects the 3D model in a direction specified by visual point information and computes model region information with an aspect ratio specified by image size information. The part region calculator projects a part constituting the 3D model in the direction and computes part region information. The image data processor cuts an entire model image and a part highlight image from the 3D model projection image according to the model region information and the part region information and computes part position information. The image data manager manages the entire model image, the part highlight image, and part position information as image data for a parts catalog.

Abstract: A method of preparing a parts catalog that converts a first parts catalog data, including an exploded view of a product and a parts table of parts in the exploded view, into a second parts catalog data, including part numbers and part names of the parts in the exploded view. The parts catalog preparation method includes a reading step and three extracting steps. The reading step reads the first parts catalog data. The first extracting step extracts the exploded view and the parts table from the first parts catalog data. The second extracting step extracts part information for each part in the parts table. The third extracting step extracts region information for each part. The region information includes information on a minimum region enclosing one of the parts in the exploded view and information on a position of a number connected with one of the parts by a lead line.

Abstract: A method of generating parts catalog data for a visually three-dimensional parts catalog of a product includes inputting data of a part of the product either as three-dimensional data or as a data combination of two-dimensional data and position information of the part in a three-dimensional model of the product.

Abstract: A change rate prediction method according to which there can be eliminated the need for experimentally determining electron beam intensities for making a change rate of a specification value of a predetermined film on a substrate uniform. The distribution of the shrinkage rate of a low-k film on a wafer upon the low-k film being modified is measured while changing the inputted current value inputted to a central electron beam tube of an electron beam irradiating mechanism, the relationship between the inputted current value and the shrinkage rate measured directly below the electron beam tube is calculated, and a dose distribution calculated through simulation is converted into a low-k film shrinkage rate distribution based on the ratio between the inputted current value and the dose and a power curve giving the relationship between the inputted current value and the measured shrinkage rate.

Abstract: A parts catalog system includes an image generator, an attribute data generator, a database, and a catalog generator. The image generator generates an illustration image of a part and installation diagram data in which the part is installed in a unit from three-dimensional model data. The attribute data generator generates attribute data including region information by determining a region of the illustration image in the installation diagram based on the three-dimensional model data. The catalog generator generates a keyword to search the part and stores the keyword in the database in association with the illustration image, the installation diagram data, and the attribute data.

Abstract: A parts selecting apparatus includes a unit configured to extract parts included in a two-dimensional closed area from a plurality of parts constituting a three dimensional object in response to a user action specifying the two-dimensional closed area on a display screen that displays a two-dimensional image of the three-dimensional object, and to cause information identifying the extracted parts to be displayed, a unit configured to cause a two-dimensional image of the three-dimensional object with a selected part being highlighted to be displayed on the display screen in response to a user action selecting the selected part from the extracted parts, and a unit configured to switch the two-dimensional image of the three-dimensional object with the selected part being highlighted to another two-dimensional image for which at least one of a view angle or a magnification is changed.

Abstract: By steps of forming first masks 13, 14 each having a first pattern on a first surface of a substrate 11 on which a membrane is to be formed, etching the first surface of the substrate 11 by using the first masks 13, 14 to forming first support beams 15, positioning a second surface of the substrate 11 on the basis of the first pattern on the first surface, forming a second mask 17 having a second pattern on the second surface of the substrate 11 based on the alignment and etching the second surface of the substrate 11 in dry by using the second mask 17 to form the second support beams 20, a membrane member 22a where the first and second support beams 15, 20 are formed on both surfaces of the membrane 12 is manufactured. Consequently, it is possible to provide the membrane member that is sufficient in strength and is hard to be deformed by heat.