Abstract: Methods, systems, and devices for memory cell formation in three dimensional memory arrays using atomic layer deposition (ALD) are described. The method may include depositing a stack of layers over a substrate and forming multiple piers through the stacks of layers. The method may further include forming multiple cavities through the stacks of layers and forming multiple voids between layers of the stacks of layers. Additionally, the method may include forming multiple word lines based on depositing a conductive material in the voids and forming multiple memory cells based on depositing an active material on an inside surface of the cavities using ALD.

Abstract: Methods, systems, and devices for word line structures for three-dimensional memory arrays are described. A memory device may include word line structures that support accessing memory cells arranged in a three-dimensional level architecture. The word line structures may be arranged above a substrate and be separated from each other by respective dielectric layers. Each word line structure may include word line members and a word line plate that is connected to each word line member. Each word line plate may include a contact that may be coupled with a word line decoder operable to bias the word line plate. To couple the word line plate to the word line decoder, the memory device may include first vias that extend through holes in the word line plates and are coupled with second vias that extend from a respective contact through openings in the word line plates above the contact.

Abstract: Methods, systems, and devices for decoding architecture for memory tiles are described. Word line tiles of a memory array may each include multiple word line plates, which may each include a sheet of conductive material that includes a first portion extending in a first direction within a plane along with multiple fingers extending in a second direction within the plane. A pillar tile may include one or more pillars that extend vertically between the word line plate fingers. Memory cells may each be couple with a respective word line plate finger and a respective pillar. Word line decoding circuitry, pillar decoding circuitry, or both, may be located beneath the memory array and in some cases may be shared between adjacent pillar tiles.

Abstract: Techniques for electronic memory are described. A method for forming a memory array may include forming memory cells, a dielectric material between word lines, and a sealing material on sidewalls of the dielectric material. The method may also include removing at least a portion of the sealing material to expose the dielectric material. Also, the method may include forming one or more voids in the dielectric material, where the one or more voids may separate the word lines from one another. The memory array may include the memory cells, the word lines, pillars, and piers, where the word lines may be separated from one another by the one or more voids to form air gaps.

Abstract: Methods, systems, and devices for decoding for a memory device are described. A decoder of a memory device may include transistors in a first layer between a memory array and a second layer that includes one or more components associated with the memory array. The second layer may include CMOS pre-decoding circuitry, among other components. The decoder may include CMOS transistors in the first layer. The CMOS transistors may control which voltage source is coupled with an access line based on a gate voltage applied to a p-type transistor and a n-type transistor. For example, a first gate voltage applied to a p-type transistor may couple a source node with the access line and bias the access line to a source voltage. A second gate voltage applied to the n-type transistor may couple a ground node with the access line and bias the access line to a ground voltage.

Abstract: Methods, systems, and devices for dense piers for three-dimensional memory arrays are described. In some examples, a memory device may include pier structures formed in contact with features formed from alternating layers of materials deposited over a substrate. For example, a memory device may include alternating layers of a first material and a second material. In some examples, the alternating layers may be formed into a pair of interleaved comb structures. Pier structures may be formed in contact with the cross sectional patterns, and may provide mechanical support of cross-sectional pattern of the remaining material. In some examples, the piers may further act as a separator between memory cells or other features of the memory device. For example, the piers may extend into at least a portion of the interleaved comb structures, and may accordingly act as barriers during subsequent depositions of materials.

Abstract: Methods, systems, and devices for sparse piers for three-dimensional memory arrays are described. A semiconductor device, such as a memory die, may include pier structures formed in contact with features formed from alternating layers of materials deposited over a substrate, which may provide mechanical support for subsequent processing. For example, a memory die may include alternating layers of a first material and a second material, which may be formed into various cross-sectional patterns. In some examples, the alternating layers may be formed into one or more pairs of interleaved comb structures. Pier structures may be formed in contact with the cross sectional patterns to provide mechanical support between instances of the cross-sectional patterns, or between layers of the cross-sectional patterns (e.g., when one or more layers are removed from the cross-sectional patterns), or both.

Abstract: Methods, systems, and devices for word line structures for three-dimensional memory arrays are described. A memory device may include word line structures that support accessing memory cells arranged in a three-dimensional level architecture. The word line structures may be arranged above a substrate and be separated from each other by respective dielectric layers. Each word line structure may include word line members and a word line plate that is connected to each word line member. Each word line plate may include a contact that may be coupled with a word line decoder operable to bias the word line plate. To couple the word line plate to the word line decoder, the memory device may include first vias that extend through holes in the word line plates and are coupled with second vias that extend from a respective contact through openings in the word line plates above the contact.

Abstract: Methods, systems, and devices related to techniques to access a self-selecting memory device are described. A self-selecting memory cell may store one or more bits of data represented by different threshold voltages of the self-selecting memory cell. A programming pulse may be varied to establish the different threshold voltages by modifying one or more time durations during which a fixed level of voltage or current is maintained across the self-selecting memory cell. The self-selecting memory cell may include a chalcogenide alloy. A non-uniform distribution of an element in the chalcogenide alloy may determine a particular threshold voltage of the self-selecting memory cell. The shape of the programming pulse may be configured to modify a distribution of the element in the chalcogenide alloy based on a desired logic state of the self-selecting memory cell.

Abstract: Methods, systems, and devices for chalcogenide memory device compositions are described. A memory cell may use a chalcogenide material having a composition as described herein as a storage materials, a selector materials, or as a self-selecting storage material. A chalcogenide material as described herein may include a sulfurous component, which may be completely sulfur (S) or may be a combination of sulfur and one or more other elements, such as selenium (Se). In addition to the sulfurous component, the chalcogenide material may further include one or more other elements, such as germanium (Ge), at least one Group-III element, or arsenic (As).

Abstract: Methods, systems, and devices for voltage equalization for pillars of a memory array are described. In some examples, a memory array may be configured with conductive pillars that are each coupled with a respective set of memory cells, and may be selectively coupled with an access line. To support a dissipation or equalization of charge from unselected pillars, the memory array may be configured with a material layer or level that provides a dissipative coupling, such as a coupling having a relatively high resistance or a degree of capacitance, with a ground voltage or other voltage source (e.g., to support a passive equalization). Additionally, or alternatively, a memory array may be configured to support an active dissipation of accumulated charge or voltage by selectively coupling pillars that have been operated in a floating condition with a ground voltage or other voltage source (e.g., to perform a dynamic equalization).

Abstract: Methods, systems, and devices for techniques for parallel memory cell access are described. A memory device may include multiple tiers of memory cells. During a first duration, a first voltage may be applied to a set of word lines coupled with a tier of memory cells to threshold one or more memory cells included in a first subset of memory cells of the tier. During a second duration, a second voltage may be applied to the set of word lines to write a first logic state to the one or more memory cells of the first subset and to threshold one or more memory cells included in a second subset of memory cells of the tier. During a third duration, a third voltage may be applied to the set of word lines to write a second logic state to the one or more memory cells of the second subset.

Abstract: Systems, methods, and apparatus related to memory devices. In one approach, a vertical three-dimensional cross-point memory device uses digit line decoders that include, on the digit line side of memory cells, a current limiter and sensing circuit configured to control program current in either of positive or negative program polarities, as selected by a controller. Two current limiters are each used on the digit line side of each memory cell. A negative polarity current limiter is used for pull-up, and a positive polarity current limiter is used for pull-down. A negative polarity sensing circuit is used between the respective digit line decoder and a positive supply voltage. A positive polarity sensing circuit is used between the respective digit line decoder and a negative supply voltage. The current limiter and sensing circuit pair of the same polarity is coupled to each digit line decoder based on the selected program polarity.

Abstract: Methods, systems, and devices for a decoding architecture for memory devices are described. Word line plates of a memory array may each include a sheet of conductive material that includes a first portion extending in a first direction within a plane along with multiple fingers extending in a second direction within the plane. Two word line plates in a same plane may be activated via a shared electrode. Memory cells coupled with the two word line plates sharing the electrode, or a subset thereof, may represent a logical page for accessing memory cells. A memory cell may be accessed via a first voltage applied to a word line plate coupled with the memory cell and a second voltage applied to a pillar electrode coupled with the memory cell. Parallel or simultaneous access operations may be performed for two or more memory cells within a same page of memory cells.

Abstract: Apparatuses and methods for implementing artificial synapses utilizing SSM cells. A leaky-integrate-and-fire circuit can provide a feedback signal to an SSM cell responsive to a threshold quantity of pulses being applied to the gate from the signal line. A resulting state of the SSM cell can be dependent on a time difference between a latest of the threshold quantity of pulses and an initial pulse of the feedback signal.

Abstract: The present disclosure provides a memory device and accessing/de-selecting methods thereof. The memory device comprises a memory layer including a vertical three-dimensional (3D) memory array of memory cells formed therein, wherein a memory cell is accessed through a word line and a digit line orthogonal to each other, and the digit line is in a form of conductive pillar extending vertically; a pillar selection layer formed under the memory layer and having thin film transistors (TFTs) formed therein for accessing memory cells; and a peripheral circuit layer formed under the pillar selection layer and having a sense amplifier and a decoding circuitry for word lines and bit lines, wherein a TFT is configured for each pillar.

Abstract: Methods, systems, and devices for decoding architecture for memory tiles are described. Word line tiles of a memory array may each include multiple word line plates, which may each include a sheet of conductive material that includes a first portion extending in a first direction within a plane along with multiple fingers extending in a second direction within the plane. A pillar tile may include one or more pillars that extend vertically between the word line plate fingers. Memory cells may each be couple with a respective word line plate finger and a respective pillar. Word line decoding circuitry, pillar decoding circuitry, or both, may be located beneath the memory array and in some cases may be shared between adjacent pillar tiles.

Abstract: Apparatuses and methods for implementing artificial synapses utilizing SSM cells. A leaky-integrate-and-fire circuit can provide a feedback signal to an SSM cell responsive to a threshold quantity of pulses being applied to the gate from the signal line. A resulting state of the SSM cell can be dependent on a time difference between a latest of the threshold quantity of pulses and an initial pulse of the feedback signal.

Abstract: Methods, systems, and devices for a decoding architecture for memory devices are described. Word line plates of a memory array may each include a sheet of conductive material that includes a first portion extending in a first direction within a plane along with multiple fingers extending in a second direction within the plane. Two word line plates in a same plane may be activated via a shared electrode. Memory cells coupled with the two word line plates sharing the electrode, or a subset thereof, may represent a logical page for accessing memory cells. A memory cell may be accessed via a first voltage applied to a word line plate coupled with the memory cell and a second voltage applied to a pillar electrode coupled with the memory cell. Parallel or simultaneous access operations may be performed for two or more memory cells within a same page of memory cells.

Abstract: Methods, systems, and devices for decoding for a memory device are described. A decoder may include a first vertical n-type transistor and a second vertical n-type transistor that extends in a third direction relative to a die of a memory array. The first vertical n-type transistor may be configured to selectively couple an access line with a source node and the second n-type transistor may be configured to selectively couple the access line with a ground node. To activate the access line coupled with the first and second vertical n-type transistors, the first vertical n-type transistor may be activated, the second vertical n-type transistor may be deactivated, and the source node coupled with the first vertical n-type transistor may have a voltage applied that differs from a ground voltage.