Abstract: In accordance with an embodiment of the invention, there is provided a soft protrusion structure for an electrostatic chuck, which offers a non-abrasive contact surface for wafers, workpieces or other substrates, while also having improved manufacturability and compatibility with grounded surface platen designs. The soft protrusion structure comprises a photo-patternable polymer.

Abstract: A system for providing automated assistance to an agent includes a database that stores an automated assistance session in association with a client terminal. The automated assistance session comprises communications between the client terminal and an agent terminal during a communication session. The automated assistance session is restored in response to a connection being reestablished with the client terminal after the client terminal disconnects during the communication session. A client communication is received from the client terminal, and a plurality of statements is determined based on the client communication and the communications of the automated assistance session stored in the database. The statements are configured to be manually selected by an agent or automatically selected by an automated agent. The automated agent is engaged for automatically selecting one of the statements in response to a predetermined condition.

Abstract: A device may provision two or more servers, each of the servers including a network interface. In addition, the device may enable the network interface in each of the provisioned servers, create a shared volume, assign the shared volume to each of the provisioned servers, and enable a clustering application on each of the provisioned servers to form a cluster comprising the provisioned servers, the cluster having a heartbeat via the network interfaces.

Abstract: In one embodiment, a method of fabricating an electrostatic clamp includes forming an insulator body, forming an electrode on the insulator body, and depositing a layer stack on the electrode, the layer stack comprising an aluminum oxide layer that is deposited using atomic layer deposition (ALD).

Abstract: In accordance with an embodiment of the invention, there is provided an electrostatic chuck. The electrostatic chuck comprises an electrode, and a surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck, the surface layer including a charge control layer comprising a surface resistivity of greater than about 1011 ohms per square.

Abstract: A device may provision two or more servers, each of the servers including a network interface. In addition, the device may enable the network interface in each of the provisioned servers, create a shared volume, assign the shared volume to each of the provisioned servers, and enable a clustering application on each of the provisioned servers to form a cluster comprising the provisioned servers, the cluster having a heartbeat via the network interfaces.

Abstract: In accordance with an embodiment of the invention, there is provided an electrostatic chuck. The electrostatic chuck comprises a surface layer activated by a voltage in an electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck. The surface layer includes a plurality of polymer protrusions and a charge control layer to which the plurality of polymer protrusions adhere, the plurality of polymer protrusions extending to a height above portions of the charge control layer surrounding the plurality of polymer protrusions to support the substrate upon the plurality of polymer protrusions during electrostatic clamping of the substrate.

Abstract: A device may provision two or more servers, each of the servers including a network interface. In addition, the device may enable the network interface in each of the provisioned servers, create a shared volume, assign the shared volume to each of the provisioned servers, and enable a clustering application on each of the provisioned servers to form a cluster comprising the provisioned servers, the cluster having a heartbeat via the network interfaces.

Abstract: In accordance with an embodiment of the invention, there is provided a soft protrusion structure for an electrostatic chuck, which offers a non-abrasive contact surface for wafers, workpieces or other substrates, while also having improved manufacturability and compatibility with grounded surface platen designs. The soft protrusion structure comprises a photo-patternable polymer.

Abstract: A device may provision two or more servers, each of the servers including a first network interface. In addition, the device may enable a second network interface in each of the provisioned servers, create a shared volume, assign the shared volume to each of the provisioned servers, and enable a clustering application on each of the provisioned servers to form a cluster comprising the provisioned servers, the cluster having a heartbeat via the second network interfaces.

Abstract: A reusable pallet container is disclosed. According to one embodiment of the disclosure, a pallet container for holding vehicle windshields for storage, transportation or otherwise is disclosed. The pallet container includes a frame structure defining a base, and a periphery, wherein one or more side restraints are provided to be mounted on-board the pallet container to inhibit movement of windshields internally of the pallet container, wherein at least one of said one or more side restraints comprises a flexible fluid containing device.

Abstract: A pallet container for holding vehicle windshields for storage, transportation or otherwise, the pallet container comprising a frame structure defining a base, and a periphery, wherein one or more side restraints are provided to be mounted on-board the pallet to inhibit movement of windshields internally of the pallet container, wherein a said side restraint comprises a flexible fluid containing device. In an alternative realisation the pallet container is expandable in height and length and/or collapsible by means of opposed pivoted side frames and a connecting frame.

Abstract: In accordance with an embodiment of the invention, there is provided an electrostatic chuck comprising a conductive path covering at least a portion of a workpiece-contacting surface of a gas seal ring of the electrostatic chuck, the conductive path comprising at least a portion of an electrical path to ground; and a main field area of a workpiece-contacting surface of the electrostatic chuck comprising a surface resistivity in the range of from about 108 to about 1012 ohms per square.

Abstract: In accordance with an embodiment of the invention, there is provided a coated graphite article. The article comprises graphite; and a conductive coating overlaying at least a portion of the graphite. The conductive coating comprises a through-thickness resistance of less than about 50 ohms as measured through the thickness of the graphite and the conductive coating. In accordance with another embodiment of the invention, there is provided a method for manufacturing a graphite article comprising a conductive coating. The method comprises treating graphite of the article with a reactive ion etch process; and after treating the graphite with the reactive ion etch process, applying the conductive coating over at least a portion of the graphite. In a further embodiment according to the invention, there is provided a method for refurbishing a graphite article comprising graphite and an overlaying conductive coating.

Abstract: In accordance with an embodiment of the invention, there is provided an electrostatic chuck. The electrostatic chuck comprises an electrode, and a surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck, the surface layer including a charge control layer comprising a surface resistivity of greater than about 1011 ohms per square.

Abstract: A device may provision two or more servers, each of the servers including a first network interface. In addition, the device may enable a second network interface in each of the provisioned servers, create a shared volume, assign the shared volume to each of the provisioned servers, and enable a clustering application on each of the provisioned servers to form a cluster comprising the provisioned servers, the cluster having a heartbeat via the second network interfaces.

Abstract: An apparatus provides automated assistance to an agent. The apparatus includes a receiver that receives a client communication from a client terminal via a network. A processor processes the client communication and determines a plurality of agent statements based on the client communication. The plurality of agent statements is displayed on a display. An input receives an agent communication from the agent. The agent communication is selected from a custom statement input by the agent and one of the plurality of agent statements selected by the agent. A transmitter transmits the agent communication to the client terminal via the network.

Abstract: In accordance with an embodiment of the invention, there is provided an electrostatic chuck. The electrostatic chuck comprises a surface layer activated by a voltage in an electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck. The surface layer includes a plurality of polymer protrusions and a charge control layer to which the plurality of polymer protrusions adhere, the plurality of polymer protrusions extending to a height above portions of the charge control layer surrounding the plurality of polymer protrusions to support the substrate upon the plurality of polymer protrusions during electrostatic clamping of the substrate.

Abstract: A reusable pallet container is disclosed. According to one embodiment of the disclosure, a pallet container for holding vehicle windshields for storage, transportation or otherwise is disclosed. The pallet container includes a frame structure defining a base, and a periphery, wherein one or more side restraints are provided to be mounted on-board the pallet container to inhibit movement of windshields internally of the pallet container, wherein at least one of said one or more side restraints comprises a flexible fluid containing device.

Abstract: In accordance with an embodiment of the invention, there is provided an electrostatic chuck comprising an electrode, and a surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck. The surface layer includes a plurality of protrusions extending to a height above portions of the surface layer surrounding the protrusions to support the substrate upon the protrusions during electrostatic clamping of the substrate. The protrusions are substantially equally spaced across the surface layer as measured by a center to center distance between pairs of neighboring protrusions.