Patents by Inventor Robert T. Caveney
Robert T. Caveney has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11978649Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.Type: GrantFiled: December 7, 2021Date of Patent: May 7, 2024Assignee: Brooks Automation US, LLCInventors: Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew, Jairo Moura
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Patent number: 11978648Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.Type: GrantFiled: May 23, 2023Date of Patent: May 7, 2024Assignee: Brooks Automation US, LLCInventors: Daniel Babbs, Robert T Caveney, Robert C May, Krzysztof A Majczak
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Patent number: 11978651Abstract: A transport apparatus including a drive section connected to a frame and including a multi-drive shaft spindle, with at least one coaxial shaft spindle, more than one different interchangeable motor module arranged in a stack, each having a motor operably coupled thereto and defining a corresponding independent drive axis, and a can seal disposed between the stator and rotor of each motor module and hermetically sealing the stator and rotor from each other, at least one of the motor modules is selectable for placement in the stack from other different interchangeable motor modules, each having a different predetermined characteristic, independent of placement in the stack, that defines a different predetermined drive characteristic of the corresponding drive axis, independent of shaft spindle location, so that selection of the at least one motor module determines the different predetermined drive characteristic of the corresponding axis different from another of the independent drive axis.Type: GrantFiled: March 15, 2022Date of Patent: May 7, 2024Assignee: Brooks Automation US, LLCInventor: Robert T. Caveney
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Patent number: 11972965Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.Type: GrantFiled: February 15, 2022Date of Patent: April 30, 2024Assignee: Brooks Automation US, LLCInventors: Jairo T. Moura, Robert T. Caveney, Bing Yin, Nathan Spiker, Vincent W. Tsang
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Publication number: 20240109187Abstract: A sealed actuator including stacked motor modules. Each motor module has a motor module housing, a motor stator attached to a respective motor module housing, a motor rotor in communication with a respective motor stator, and a stator seal disposed between the motor stator and motor rotor, surrounding the motor rotor and having a sealing surface interface, that interfaces with a respective sealing housing surface of the motor module housing, facing the motor rotor to seal the motor stator from the motor rotor. The motor module housings are stacked against each other and the sealing housing surface interfaced, at the sealing surface interface facing the rotors, to the respective stacked stator seals of the motor module housings forms a substantially continuous seal interface of the stacked motor modules sealed by the stacked stator seals to form a continuous barrier seal between the motor rotors and the motor stators.Type: ApplicationFiled: October 3, 2023Publication date: April 4, 2024Inventor: Robert T. CAVENEY
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Publication number: 20240063682Abstract: A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment, where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, and at least one seal configured to isolate the isolated environment where the at least one seal is integral to the at least one stator.Type: ApplicationFiled: October 24, 2023Publication date: February 22, 2024Inventors: Jairo T. MOURA, Ulysses GILCHRIST, Robert T. CAVENEY
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Patent number: 11894252Abstract: A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.Type: GrantFiled: February 21, 2023Date of Patent: February 6, 2024Assignee: Brooks Automation US, LLCInventors: Robert T. Caveney, Ulysses Gilchrist, Alexander Krupyshev
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Publication number: 20240001535Abstract: A substrate processing apparatus including a frame, a SCARA arm mounted to the frame at a shoulder joint having two links with at least one end effector dependent therefrom, the links defining an upper arm and a forearm, each end effector pivotally joined to the forearm at a wrist to rotate about a wrist axis, a drive section with at least one degree of freedom operably coupled to the arm to rotate the arm about a shoulder axis articulating extension and retraction, wherein the end effector is coupled to a wrist joint pulley so that extension and retraction effects rotation of the pulley and end effector as a unit about the wrist axis, wherein a height of the end effector is within a stack height profile of the wrist joint so that a total stack height is sized to conform with and pass through a pass-through of a slot valve.Type: ApplicationFiled: June 30, 2023Publication date: January 4, 2024Inventors: Vincent W. Tsang, Robert T. Caveney
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Publication number: 20230377924Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.Type: ApplicationFiled: May 23, 2023Publication date: November 23, 2023Inventors: Daniel BABBS, Robert T CAVENEY, Robert C MAY, Krzysztof A MAJCZAK
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Patent number: 11799346Abstract: A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment, where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, and at least one seal configured to isolate the isolated environment where the at least one seal is integral to the at least one stator.Type: GrantFiled: November 5, 2019Date of Patent: October 24, 2023Assignee: BROOKS AUTOMATION US, LLCInventors: Jairo T. Moura, Ulysses Gilchrist, Robert T. Caveney
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Publication number: 20230330839Abstract: A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.Type: ApplicationFiled: March 28, 2023Publication date: October 19, 2023Inventors: Robert T. CAVENEY, Alexander G. KRUPYSHEV, Martin R. ELLIOT, Christopher HOFMEISTER
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Publication number: 20230271792Abstract: A substrate processing apparatus includes a frame and a transport apparatus connected to the frame. The transport apparatus has an upper arm link, a forearm link rotatably coupled to the upper arm link about an elbow axis, at least a third arm link rotatably coupled to the forearm about a wrist axis, and an end effector rotatably coupled to the third arm link about a knuckle axis. A two degree of freedom drive system is operably connected to at least one of the upper arm link, the forearm link, and the third arm link for effecting extension and retraction of the end effector wherein a height of the end effector is within the stack height profile of the wrist axis so that a total stack height of the end effector and wrist axis is sized to conform within a pass through of a slot valve.Type: ApplicationFiled: December 20, 2022Publication date: August 31, 2023Inventors: Christopher A. Bussiere, Robert T. Caveney
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Patent number: 11691267Abstract: A substrate processing apparatus including a frame, a SCARA arm mounted to the frame at a shoulder joint having two links with at least one end effector dependent therefrom, the links defining an upper arm and a forearm, each end effector pivotally joined to the forearm at a wrist to rotate about a wrist axis, and a drive section with at least one degree of freedom operably coupled to the arm to rotate the arm about a shoulder axis articulating extension and retraction, wherein the end effector is coupled to a wrist joint pulley so that extension and retraction effects rotation of the pulley and end effector as a unit about the wrist axis, and wherein a height of the end effector is within a stack height profile of the wrist joint so that a total stack height is sized to conform with and pass through a pass-through of a slot valve.Type: GrantFiled: December 7, 2021Date of Patent: July 4, 2023Assignee: Brooks Automation US, LLCInventors: Vincent W. Tsang, Robert T. Caveney
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Publication number: 20230197493Abstract: A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.Type: ApplicationFiled: February 21, 2023Publication date: June 22, 2023Inventors: Robert T. Caveney, Ulysses Gilchrist, Alexander Krupyshev
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Patent number: 11658051Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.Type: GrantFiled: September 14, 2021Date of Patent: May 23, 2023Assignee: Brooks Automation US, LLCInventors: Daniel Babbs, Robert T Caveney, Robert C May, Krzysztof A Majczak
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Publication number: 20230143307Abstract: A linear electrical machine including a frame with a level reference plane, an array of electromagnets connected to the frame and coupled to an alternating current power source energizing each electromagnet, at least one reaction platen of paramagnetic, diamagnetic, or non-magnetic conductive material disposed to cooperate with the electromagnets of the array of electromagnets so that excitation of the electromagnets with alternating current generates levitation and propulsion forces against the reaction platen that controllably levitate and propel the reaction platen along at least one drive line, in a controlled attitude relative to the drive plane, and a controller operably coupled to the array of electromagnets and the alternating current power source and configured so as to sequentially excite the electromagnets with multiphase alternating current with a predetermined excitation characteristic so that each reaction platen is levitated and propelled with up to six degrees of freedom.Type: ApplicationFiled: October 27, 2022Publication date: May 11, 2023Inventors: Jairo T. Moura, Vincent Tsang, Karanjit Saini, Robert T. Caveney, Robert C. May, Daniel Babbs
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Publication number: 20230129289Abstract: A vacuum substrate transport apparatus including a frame, a drive section having a drive axis, at least one arm, having an end effector for holding a substrate, having at least one degree of freedom axis effecting extension and retraction, and a bearing defining a guideway that defines the axis, the bearing including at least one rolling load bearing element disposed in a bearing case, interfacing between a bearing raceway and bearing rail to support arm loads, and effecting sliding of the case along the rail, and at least one rolling, substantially non-load bearing, spacer element disposed in the case, intervening between each of the load bearing elements, wherein the spacer element is a sacrificial buffer material compatible with sustained substantially unrestricted service commensurate with a predetermined service duty of the apparatus in a vacuum environment at temperatures over 260° C. for a specified predetermined service period.Type: ApplicationFiled: December 22, 2022Publication date: April 27, 2023Inventors: Daniel BABBS, Robert Chris May, Robert T. Caveney
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Patent number: 11613002Abstract: A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.Type: GrantFiled: August 11, 2020Date of Patent: March 28, 2023Assignee: Brooks Automation US, LLCInventors: Robert T. Caveney, Alexander G. Krupyshev, Martin R. Elliot, Christopher Hofmeister
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Publication number: 20230064130Abstract: An automated cryogenic storage system includes a freezer and an automation system to provide automated transfer of samples to and from the freezer. The freezer includes a bearing and a drive shaft though the freezer, the drive shaft being coupled to a rack carrier inside the freezer and adapted to be coupled to a motor. The automation module includes a rack puller that is automatically positioned above an access port of the freezer. The rack puller engages with a sample rack within the freezer, and elevates the rack into an insulating sleeve external to the freezer. From the insulating sleeve, samples can be added to and removed from the sample rack before it is returned to the freezer.Type: ApplicationFiled: July 13, 2022Publication date: March 2, 2023Inventors: Robert T. Caveney, Frank Hunt, Lingchen Sun, Julian D. Warhurst, Bruce S. Zandi, Anthony C. Bonora
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Patent number: 11587813Abstract: A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.Type: GrantFiled: November 20, 2018Date of Patent: February 21, 2023Assignee: Brooks Automation US, LLCInventors: Robert T. Caveney, Ulysses Gilchrist, Alexander Krupyshev