Patents by Inventor Sandy Shih-Hsun Chao

Sandy Shih-Hsun Chao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for providing fluid to a semiconductor device processing apparatus
    Patent number: 7418978
    Abstract: In a first aspect, a valve assembly is provided that includes a valve assembly output adapted to output at least one of DI water and a chemical. A first valve of the valve assembly includes (1) a first input adapted to receive the chemical; (2) a first output adapted to circulate the chemical to a chemical return; and (3) a second output adapted to output the chemical to the valve assembly output. The valve assembly also includes a second valve positioned downstream from the first valve. The second valve includes (1) an input adapted to receive deionized (DI) water; and (2) an output adapted to output DI water to the valve assembly output. A check valve is coupled between the second output of the first valve and the output of the second valve, and the first valve, second valve and check valve are included in a single manifold.
    Type: Grant
    Filed: January 28, 2005
    Date of Patent: September 2, 2008
    Assignee: Applied Materials, Inc.
    Inventors: Sandy Shih-Hsun Chao, Songjae Lee, Ho Seon Shin
  • Carrier head with a vibration reduction feature for a chemical mechanical polishing system
    Patent number: 6739958
    Abstract: Embodiments of the present invention are directed to a carrier head for positioning a substrate on a polishing surface. The carrier head includes a housing connectable to a drive shaft to rotate therewith; a base; a detachable plate removably mounted on top of the housing; a gimbal mechanism connecting the housing to the base to permit the base to move with respect to the housing such that the base remains substantially parallel to the polishing surface; and a flexible membrane defining a mounting surface for the substrate.
    Type: Grant
    Filed: March 19, 2002
    Date of Patent: May 25, 2004
    Assignee: Applied Materials Inc.
    Inventors: Sandy Shih-Hsun Chao, Andrew Nagengast
  • Carrier head with a vibration reduction feature for a chemical mechanical polishing system
    Publication number: 20030181151
    Abstract: Embodiments of the present invention are directed to a carrier head for positioning a substrate on a polishing surface. The carrier head includes a housing connectable to a drive shaft to rotate therewith; a base; a detachable plate removably mounted on top of the housing; a gimbal mechanism connecting the housing to the base to permit the base to move with respect to the housing such that the base remains substantially parallel to the polishing surface; and a flexible membrane defining a mounting surface for the substrate.
    Type: Application
    Filed: March 19, 2002
    Publication date: September 25, 2003
    Applicant: Applied Materials, Inc.
    Inventors: Sandy Shih-Hsun Chao, Andrew Nagengast
  • Mobile device display screen with graphical user interface for supporting service maintenance and tracking activities in semiconductor tool
    Patent number: D788134
    Type: Grant
    Filed: October 10, 2014
    Date of Patent: May 30, 2017
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Vincent Wong, Ronald Ramnarine, Robert Housley, Sandy Shih-Hsun Chao, Mukesh Shah, Robert Ahrens
  • Display screen with graphical user interface for supporting service maintenance and tracking activities in semiconductor tool
    Patent number: D814488
    Type: Grant
    Filed: October 10, 2014
    Date of Patent: April 3, 2018
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Vincent Wong, Ronald Ramnarine, Robert Housley, Sandy Shih-Hsun Chao, Mukesh Shah, Robert Ahrens