Display screen with graphical user interface for supporting service maintenance and tracking activities in semiconductor tool

- LAM RESEARCH CORPORATION
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Description

FIG. 1 depicts an isometric view of a display screen with graphical user interface for supporting service maintenance and tracking activities in semiconductor tool, shown on a mobile device which forms no part of the claimed design;

FIG. 2 depicts a front view thereof;

FIG. 3 depicts a rear view of the mobile device.

FIG. 4 depicts a top view of the mobile device.

FIG. 5 depicts a bottom view of the mobile device.

FIG. 6 depicts a right side view of the mobile device.

FIG. 7 depicts a left side view of the mobile device.

FIG. 8 depicts a front view of a second embodiment of a display screen with a graphical user interface for supporting service maintenance and tracking activities in semiconductor tool.

FIG. 9 depicts a front view of a third embodiment of a display screen with a graphical user interface for supporting service maintenance and tracking activities in semiconductor tool; and,

FIG. 10 depicts a front view of a fourth embodiment of a display screen with a graphical user interface for supporting service maintenance and tracking activities in semiconductor tool.

The broken lines in the drawings illustrate the display screen and portions of the graphical user interface and form no part of the claimed design. The broken lines seen in FIGS. 1 to 7 illustrate the mobile device and form no part of the claimed design.

Claims

We claim the ornamental design for a display screen with graphical user interface for supporting service maintenance and tracking activities in semiconductor tool, as shown and described.

Referenced Cited
U.S. Patent Documents
5923553 July 13, 1999 Yi
6317750 November 13, 2001 Tortolani
7120511 October 10, 2006 Tanzer et al.
D548242 August 7, 2007 Viegers
D570857 June 10, 2008 Nguyen
D570858 June 10, 2008 Loehr
D578132 October 7, 2008 Lee
D589527 March 31, 2009 Shamma
D593114 May 26, 2009 Vakkalanka
D594019 June 9, 2009 Ball
D622730 August 31, 2010 Krum
D625315 October 12, 2010 Jewitt
D625316 October 12, 2010 Jewitt
D625317 October 12, 2010 Jewitt
D634749 March 22, 2011 Brown
D636779 April 26, 2011 Boush et al.
D656944 April 3, 2012 Lee
D658667 May 1, 2012 Cho
8209223 June 26, 2012 Fink
8239359 August 7, 2012 Barsook
D667835 September 25, 2012 Chaudri
D669090 October 16, 2012 Rosen
8302020 October 30, 2012 Louch
D673165 December 25, 2012 Ospina Gonzalez
D678309 March 19, 2013 Kobayashi
D684160 June 11, 2013 Truelove
D684161 June 11, 2013 Truelove
D684164 June 11, 2013 Friedlander
D684177 June 11, 2013 Winther
D685811 July 9, 2013 Shia et al.
D685812 July 9, 2013 Bork
D685815 July 9, 2013 Bork et al.
D687458 August 6, 2013 Philopoulos
D687850 August 13, 2013 Rhee
D688258 August 20, 2013 Rhee
D688259 August 20, 2013 Pearcy et al.
D688682 August 27, 2013 Talbot
D688684 August 27, 2013 Rhee
D688685 August 27, 2013 Rhee et al.
D689086 September 3, 2013 Philopoulos
D690312 September 24, 2013 Cherian et al.
D691160 October 8, 2013 Schupp et al.
D693361 November 12, 2013 Arnold et al.
D696684 December 31, 2013 Yuk et al.
D696688 December 31, 2013 Yuk et al.
D700194 February 25, 2014 Kim et al.
8667540 March 4, 2014 Hoshall
8875126 October 28, 2014 Feeser et al.
D719968 December 23, 2014 Ebtekar et al.
9032296 May 12, 2015 Jeffs et al.
D732563 June 23, 2015 Kitch et al.
D732564 June 23, 2015 Kitch et al.
D733738 July 7, 2015 Omiya
D734353 July 14, 2015 Soojun et al.
D735222 July 28, 2015 Ebtekar et al.
D737840 September 1, 2015 Omiya
9129087 September 8, 2015 Grab et al.
D741351 October 20, 2015 Kito et al.
D742908 November 10, 2015 Lee et al.
D751592 March 15, 2016 Link
9311053 April 12, 2016 Baughman
D757060 May 24, 2016 Lee
D757077 May 24, 2016 Blank et al.
D760756 July 5, 2016 Koeten et al.
D762232 July 26, 2016 Howard et al.
D762234 July 26, 2016 Li et al.
D788134 May 30, 2017 Wong et al.
20020183880 December 5, 2002 Arima et al.
20030231213 December 18, 2003 Gould
20050004780 January 6, 2005 Lin et al.
20060259198 November 16, 2006 Brcka et al.
20070157124 July 5, 2007 Haug
20070211058 September 13, 2007 Iguchi
20070255444 November 1, 2007 Kauffman et al.
20070282781 December 6, 2007 Mathiesen et al.
20080098333 April 24, 2008 Champion
20080184117 July 31, 2008 Alsbury
20090228408 September 10, 2009 Kaushal et al.
20100153848 June 17, 2010 Saha
20120036552 February 9, 2012 Dare
20120239317 September 20, 2012 Lin
20130061267 March 7, 2013 Cansino
20130100475 April 25, 2013 Kuroyanagi
20130104042 April 25, 2013 Meaney et al.
20130174223 July 4, 2013 Dykeman et al.
20140033256 January 30, 2014 Cox
20140115470 April 24, 2014 Meaney et al.
20140115471 April 24, 2014 Demkin et al.
20140173517 June 19, 2014 Chaudhri
20160103445 April 14, 2016 Patrick et al.
20160104128 April 14, 2016 Gosselin et al.
Foreign Patent Documents
0020843010028 November 2012 EM
0013536010046 February 2013 EM
2005-527986 September 2005 JP
2016/057551 April 1916 WO
2016/057565 April 1916 WO
Other references
  • U.S. Appl. No. 29/504,990, “Mobile device graphical user interface design for supporting service maintenance and tracking activities in semiconductor tool,” Vincent Wong et al., filed Oct. 10, 2014.
  • U.S. Appl. No. 14/876,203, “Mobile device user interface for supporting service maintenance and tracking activities in semiconductor tool,” Simon Gosselin et al., filed Oct. 6, 2015.
  • U.S. Appl. No. 14/876,213, “Mobile connectivity and control of semiconductor manufacturing equipment,” Roger Patrick et al., filed Oct. 6, 2015.
  • TW patent application No. 104301852, Office Action dated Nov. 13, 2015.
  • TW patent application No. 104301861, Office Action dated Jan. 21, 2016.
  • KR patent application No. 30-2015-0018420, Office Action dated Nov. 12, 2015.
  • KR patent application No. 30-2015-0018445, Office Action dated Nov. 12, 2015.
  • WO patent application No. PCT/US2015/054306, International Search Report and Written Opinion dated Mar. 18, 2016.
  • WO patent application No. PCT/US2015/054290, International Search Report and Written Opinion dated Mar. 18, 2016.
  • KR patent application No. 30-2015-0018420, Decision of Grant of Design mailed Mar. 2, 2016.
  • KR patent application No. 30-2015-0018445, Decision of Grant of Design mailed Mar. 2, 2016.
  • TW patent application No. 104301852, Notice of Allowance dated Apr. 19, 2016.
  • TW patent application No. 105300569, Notice of Allowance dated Apr. 18, 2016.
  • TW patent application No. 104301861, Notice of Allowance dated May 26, 2016.
  • U.S. Appl. No. 29/504,990, Office Action dated Oct. 6, 2016.
  • U.S. Ex Parte Action Quayle dated Oct. 10, 2016 issued in Design U.S. Appl. No. 29/504,990.
  • U.S. Notice of Allowance dated Mar. 28, 2017 issued in Design U.S. Appl. No. 29/504,990.
  • TW Notice of Allowance dated Jun. 16, 2016, issued in Taiwanese patent application No. 105301175, Translation Only.
  • US Office Action [Ex Parte Quayle] dated Oct. 6, 2016 issued in Design U.S. Appl. No. 29/504,990.
  • US Office Action dated Oct. 19, 2017 issued in U.S. Appl. No. 14/876,213.
  • US Office Action dated Jan. 23, 2018 issued in U.S. Appl. No. 14/876,203.
  • Taiwan Notice of Allowance and Search Report dated Jun. 16, 2016 issued in application No. TW 105301175.
  • PCT International Preliminary Report on Patentability and Written Opinion dated Apr. 20, 2017 issued in PCT/US2015/054306.
  • PCT International Preliminary Report on Patentability and Written Opinion dated Apr. 20, 2017 issued in PCT/US2015/054290.
  • Ramirez-Hernández, Jose A., et al. (Aug. 2010) “Optimal Preventive Maintenance Scheduling in Semiconductor Manufacturing Systems: Software Tool and Simulation Case Studies,” IEEE Transactions on Semiconductor Manufacturing, 23(3):477-489.
  • Yao, Xiaodong, et al. (Aug. 2004) “Optimal Preventive Maintenance Scheduling in Semiconductor Manufacturing,” IEEE Transactions on Semiconductor Manufacturing, 17(3):345-356.
  • Yung-Cheng, Jonathan Chang, and Fan-Tien Cheng, (2005) “Application Development of Virtual Metrology in Semiconductor Industry,” Industrial Electronics Society, 2005. IECON 2005. 31st Annual Conference of IEEE. IEEE, 124-129.
Patent History
Patent number: D814488
Type: Grant
Filed: Oct 10, 2014
Date of Patent: Apr 3, 2018
Assignee: LAM RESEARCH CORPORATION (Fremont, CA)
Inventors: Vincent Wong (Pleasanton, CA), Ronald Ramnarine (Fremont, CA), Robert Housley (Los Gatos, CA), Sandy Shih-Hsun Chao (Fremont, CA), Mukesh Shah (Fremont, CA), Robert Ahrens (San Jose, CA)
Primary Examiner: Melanie H Tung
Assistant Examiner: Bao-Yen Nguyen
Application Number: 29/504,989
Classifications