Patents by Inventor Shu Qin

Shu Qin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9136282
    Abstract: Methods of forming thin-film transistors and memories are disclosed. In one such method, polycrystalline silicon is hydrogen plasma doped to form doped polycrystalline silicon. The doped polycrystalline silicon is then annealed. The hydrogen plasma doping and the annealing are decoupled.
    Type: Grant
    Filed: January 19, 2015
    Date of Patent: September 15, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Shu Qin, Haitao Liu, Zhenyu Lu
  • Publication number: 20150221540
    Abstract: Various embodiments of microelectronic devices and methods of manufacturing are described herein. In one embodiment, a method for enhancing wafer bonding includes positioning a substrate assembly on a unipolar electrostatic chuck in direct contact with an electrode, electrically coupling a conductor to a second substrate positioned on top of the first substrate, and applying a voltage to the electrode, thereby creating a potential differential between the first substrate and the second substrate that generates an electrostatic force between the first and second substrates.
    Type: Application
    Filed: February 5, 2014
    Publication date: August 6, 2015
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Shu Qin, Ming Zhang
  • Patent number: 9093367
    Abstract: Some embodiments include methods of forming one or more doped regions in a semiconductor substrate. Plasma doping may be used to form a first dopant to a first depth within the substrate. The first dopant may then be impacted with a second dopant to knock the first dopant to a second depth within the substrate. In some embodiments the first dopant is p-type (such as boron) and the second dopant is neutral type (such as germanium). In some embodiments the second dopant is heavier than the first dopant.
    Type: Grant
    Filed: June 27, 2013
    Date of Patent: July 28, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Lequn Jennifer Liu, Shu Qin, Allen McTeer, Yongjun Jeff Hu
  • Publication number: 20150206906
    Abstract: Methods of forming thin-film transistors and memories are disclosed. In one such method, polycrystalline silicon is hydrogen plasma doped to form doped polycrystalline silicon. The doped polycrystalline silicon is then annealed. The hydrogen plasma doping and the annealing are decoupled.
    Type: Application
    Filed: January 19, 2015
    Publication date: July 23, 2015
    Applicant: Micron Technology, Inc.
    Inventors: Shu Qin, Haitao Liu, Zhenyu Lu
  • Publication number: 20150179936
    Abstract: Some embodiments include a memory cell having a first electrode, and an intermediate material over and directly against the first electrode. The intermediate material includes stabilizing species corresponding to one or both of carbon and boron. The memory cell also has a switching material over and directly against the intermediate material, an ion reservoir material over the switching material, and a second electrode over the ion reservoir material. Some embodiments include methods of forming memory cells.
    Type: Application
    Filed: February 10, 2015
    Publication date: June 25, 2015
    Inventors: Martin Schubert, Shu Qin, Scott E. Sills, Durai Vishak Nirmal Ramaswamy, Allen McTeer, Yongjun Jeff Hu
  • Patent number: 8981334
    Abstract: Some embodiments include a memory cell having a first electrode, and an intermediate material over and directly against the first electrode. The intermediate material includes stabilizing species corresponding to one or both of carbon and boron. The memory cell also has a switching material over and directly against the intermediate material, an ion reservoir material over the switching material, and a second electrode over the ion reservoir material. Some embodiments include methods of forming memory cells.
    Type: Grant
    Filed: November 1, 2013
    Date of Patent: March 17, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Martin Schubert, Shu Qin, Scott E. Sills, D.V. Nirmal Ramaswamy, Allen McTeer, Yongjun Jeff Hu
  • Patent number: 8975603
    Abstract: Systems and methods for plasma doping microfeature workpieces are disclosed herein. In one embodiment, a method of implanting boron ions into a region of a workpiece includes generating a plasma in a chamber, selectively applying a pulsed electrical potential to the workpiece with a duty cycle of between approximately 20 percent and approximately 50 percent, and implanting an ion specie into the region of the workpiece.
    Type: Grant
    Filed: February 3, 2014
    Date of Patent: March 10, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Shu Qin, Allen McTeer
  • Patent number: 8940592
    Abstract: Methods of forming thin-film transistors and memories are disclosed. In one such method, polycrystalline silicon is hydrogen plasma doped to form doped polycrystalline silicon. The doped polycrystalline silicon is then annealed. The hydrogen plasma doping and the annealing are decoupled.
    Type: Grant
    Filed: January 11, 2013
    Date of Patent: January 27, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Shu Qin, Haitao Liu, Zhenyu Lu
  • Patent number: 8822877
    Abstract: Rapid thermal processing systems and associated methods are disclosed herein. In one embodiment, a method for heating a microelectronic substrate include generating a plasma, applying the generated plasma to a surface of the microelectronic substrate, and raising a temperature of the microelectronic substrate with the generated plasma applied to the surface of the microelectronic substrate. The method further includes continuing to apply the generated plasma until the microelectronic substrate reaches a desired temperature.
    Type: Grant
    Filed: April 23, 2013
    Date of Patent: September 2, 2014
    Assignee: Micron Technology, Inc.
    Inventor: Shu Qin
  • Publication number: 20140197134
    Abstract: Systems and methods for plasma processing of microfeature workpieces are disclosed herein. In one embodiment, a method includes generating a plasma in a chamber while a microfeature workpiece is positioned in the chamber, measuring optical emissions from the plasma, and determining a parameter of the plasma based on the measured optical emissions. The parameter can be an ion density or another parameter of the plasma.
    Type: Application
    Filed: March 18, 2014
    Publication date: July 17, 2014
    Applicant: Micron Technology, Inc.
    Inventors: Shu Qin, Allen McTeer
  • Publication number: 20140197416
    Abstract: Methods of forming thin-film transistors and memories are disclosed. In one such method, polycrystalline silicon is hydrogen plasma doped to form doped polycrystalline silicon. The doped polycrystalline silicon is then annealed. The hydrogen plasma doping and the annealing are decoupled.
    Type: Application
    Filed: January 11, 2013
    Publication date: July 17, 2014
    Applicant: Micron Technology, Inc.
    Inventors: Shu Qin, Haitao Liu, Zhenyu Lu
  • Publication number: 20140144379
    Abstract: Systems and methods for plasma doping microfeature workpieces are disclosed herein. In one embodiment, a method of implanting boron ions into a region of a workpiece includes generating a plasma in a chamber, selectively applying a pulsed electrical potential to the workpiece with a duty cycle of between approximately 20 percent and approximately 50 percent, and implanting an ion specie into the region of the workpiece.
    Type: Application
    Filed: February 3, 2014
    Publication date: May 29, 2014
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Shu Qin, Allen McTeer
  • Publication number: 20140118905
    Abstract: A protective case is used for protecting an electronic device. The protective case includes a housing, a first sealing member, a second sealing member and two slidable covers. The housing includes a main plate and a peripheral wall, the main plate and the peripheral cooperatively define a receptacle. The first sealing member is received in the receptacle and is secured on the main plate. The second sealing member includes a sealing ring for abutting against the peripheral wall. The two slidable covers slidably engage with the peripheral wall of the housing and latched to the housing.
    Type: Application
    Filed: August 22, 2013
    Publication date: May 1, 2014
    Applicants: FIH (HONG KONG) LIMITED, SHENZHEN FUTAIHONG PRECISION INDUSTRY CO., LTD.
    Inventors: HUAN-CHANG CHUNG, ZHONG-SHU QIN, GANG YANG
  • Patent number: 8709927
    Abstract: Methods of implanting dopant ions in a substrate include depositing a sacrificial material on a substrate. Dopant ions are implanted into the substrate while sputtering the sacrificial material, without substantially sputtering the substrate. Substantially no sacrificial material remains on the substrate after the implanting of the dopant ions. Some methods include forming a sacrificial material over a substrate and implanting dopant ions into the substrate while removing substantially all the sacrificial material from the substrate. Substantially no sputtering of the substrate occurs during the implanting of the dopant ions. Methods of doping a substrate include implanting dopant ions into a substrate having a sacrificial material thereon and sputtering the sacrificial material while implanting the dopant ions without substantially sputtering the substrate. Substantially no sacrificial material remains on the substrate after implanting the dopant ions.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: April 29, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Shu Qin, Li Li
  • Patent number: 8671879
    Abstract: Systems and methods for plasma processing of microfeature workpieces are disclosed herein. In one embodiment, a method includes generating a plasma in a chamber while a microfeature workpiece is positioned in the chamber, measuring optical emissions from the plasma, and determining a parameter of the plasma based on the measured optical emissions. The parameter can be an ion density or another parameter of the plasma.
    Type: Grant
    Filed: January 12, 2009
    Date of Patent: March 18, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Shu Qin, Allen McTeer
  • Patent number: 8642135
    Abstract: Systems and methods for plasma doping microfeature workpieces are disclosed herein. In one embodiment, a method of implanting boron ions into a region of a workpiece includes generating a plasma in a chamber, selectively applying a pulsed electrical potential to the workpiece with a duty cycle of between approximately 20 percent and approximately 50 percent, and implanting an ion specie into the region of the workpiece.
    Type: Grant
    Filed: September 1, 2005
    Date of Patent: February 4, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Shu Qin, Allen McTeer
  • Publication number: 20140016996
    Abstract: A latching structure is configured for a portable electronic device including a first housing and a second housing. The latching structure includes a latching groove and a hook. The latching groove is defined the first housing, and a removable portion is formed in the latching groove. The hook is formed on a second housing. The hook latches in the latching groove. The removable portion is separated from the first housing to expose the latching groove for pushing the hook out of the latching groove.
    Type: Application
    Filed: June 5, 2013
    Publication date: January 16, 2014
    Inventors: HUAN-CHANG CHUNG, GANG YANG, ZHONG-SHU QIN
  • Publication number: 20130288466
    Abstract: Some embodiments include methods of forming one or more doped regions in a semiconductor substrate. Plasma doping may be used to form a first dopant to a first depth within the substrate. The first dopant may then be impacted with a second dopant to knock the first dopant to a second depth within the substrate. In some embodiments the first dopant is p-type (such as boron) and the second dopant is neutral type (such as germanium). In some embodiments the second dopant is heavier than the first dopant.
    Type: Application
    Filed: June 27, 2013
    Publication date: October 31, 2013
    Inventors: Lequn Jennifer Liu, Shu Qin, Allen McTeer, Yongjun Jeff Hu
  • Publication number: 20130233834
    Abstract: Rapid thermal processing systems and associated methods are disclosed herein. In one embodiment, a method for heating a microelectronic substrate include generating a plasma, applying the generated plasma to a surface of the microelectronic substrate, and raising a temperature of the microelectronic substrate with the generated plasma applied to the surface of the microelectronic substrate. The method further includes continuing to apply the generated plasma until the microelectronic substrate reaches a desired temperature.
    Type: Application
    Filed: April 23, 2013
    Publication date: September 12, 2013
    Applicant: MICRON TECHNOLOGY, INC.
    Inventor: Shu Qin
  • Patent number: 8524572
    Abstract: Some embodiments include methods of processing a unit containing crystalline material. A damage region may be formed within the crystalline material, and a portion of the unit may be above the damage region. A chuck may be used to bend the unit and thereby induce cleavage along the damage region to form a structure from the portion of the unit above the damage region. Some embodiments include methods of forming semiconductor-on-insulator constructions. A unit may be formed to have dielectric material over monocrystalline semiconductor material. A damage region may be formed within the monocrystalline semiconductor material, and a portion of the monocrystalline semiconductor material may be between the damage region and the dielectric material. The unit may be incorporated into an assembly with a handle component, and a chuck may be used to contort the assembly and thereby induce cleavage along the damage region.
    Type: Grant
    Filed: October 6, 2011
    Date of Patent: September 3, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Shu Qin, Ming Zhang