Patents by Inventor Shyam Surthi

Shyam Surthi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210280602
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and wordline levels. The wordline levels have primary regions of a first vertical thickness, and have terminal projections of a second vertical thickness which is greater than the first vertical thickness. The terminal projections include control gate regions. Charge-blocking regions are adjacent the control gate regions, and are vertically spaced from one another. Charge-storage regions are adjacent the charge-blocking regions and are vertically spaced from one another. Gate-dielectric material is adjacent the charge-storage regions. Channel material is adjacent the gate dielectric material. Some embodiments included methods of forming integrated assemblies.
    Type: Application
    Filed: May 10, 2021
    Publication date: September 9, 2021
    Applicant: Micron Technology, Inc.
    Inventors: John D. Hopkins, Shyam Surthi
  • Patent number: 11107830
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include control gate regions and include second regions proximate to the control gate regions. High-k dielectric structures are directly against the control gate regions and extend entirely across the insulative levels. Charge-blocking material is adjacent to the high-k dielectric structures. Charge-storage material is adjacent to the charge-blocking material. The charge-storage material is configured as segments which are vertically stacked one atop another, and which are vertically spaced from one another. Gate-dielectric material is adjacent to the charge-storage material. Channel material extends vertically along the stack and is adjacent to the gate-dielectric material. Some embodiments include integrated assemblies, and methods of forming integrated assemblies.
    Type: Grant
    Filed: August 22, 2019
    Date of Patent: August 31, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Byeung Chul Kim, Francois H Fabreguette, Richard J. Hill, Shyam Surthi
  • Patent number: 11081498
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include control gate regions and distal regions proximate the control gate regions. The control gate regions have front surfaces, top surfaces and bottom surfaces. The top and bottoms surfaces extend back from the front surfaces. High-k dielectric material is along the control gate regions. The high-k dielectric material has first regions along the top and bottom surfaces, and has second regions along the front surfaces. The first regions are thicker than the second regions. Charge-blocking material is adjacent to the second regions of the high-k dielectric material. Charge-storage material is adjacent to the charge-blocking material. Gate-dielectric material is adjacent to the charge-storage material. Channel material is adjacent to the gate-dielectric material. Some embodiments include integrated assemblies.
    Type: Grant
    Filed: August 22, 2019
    Date of Patent: August 3, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Shyam Surthi, Richard J. Hill
  • Patent number: 11081497
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include control gate regions and second regions proximate to the control gate regions. High-k dielectric material wraps around ends of the control gate regions, and is not along the second regions. Charge-blocking material is adjacent to the high-k dielectric material. Charge-storage material is adjacent to the charge-blocking material. The charge-storage material is configured as segments which are vertically stacked one atop another, and which are vertically spaced from one another by gaps. Gate-dielectric material is adjacent to the charge-storage material. Channel material extends vertically along the stack and is adjacent to the gate-dielectric material. Some embodiments include integrated assemblies, and methods of forming integrated assemblies.
    Type: Grant
    Filed: August 22, 2019
    Date of Patent: August 3, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Shyam Surthi, Richard J. Hill, Byeung Chul Kim, Akira Goda
  • Publication number: 20210233933
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include terminal regions, and include nonterminal regions proximate the terminal regions. The terminal regions are vertically thicker than the nonterminal regions, and are configured as segments which are vertically stacked one atop another and which are vertically spaced from one another. Blocks are adjacent to the segments and have approximately a same vertical thickness as the segments. The blocks include high-k dielectric material, charge-blocking material and charge-storage material. Channel material extends vertically along the stack and is adjacent to the blocks. Some embodiments include integrated assemblies. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: April 14, 2021
    Publication date: July 29, 2021
    Applicant: Micron Technology, Inc.
    Inventors: John D. Hopkins, Shyam Surthi, Jordan D. Greenlee
  • Patent number: 11037956
    Abstract: Some embodiments include a memory array having a vertical stack of alternating insulative levels and wordline levels. The wordline levels have conductive terminal ends within control gate regions. The control gate regions are vertically spaced from one another by first insulative regions which include first insulative material. Charge-storage material is laterally outward of the conductive terminal ends, and is configured as segments. The segments of the charge-storage material are arranged one atop another and are vertically spaced from one another by second insulative regions which include second insulative material. The second insulative material has a different dielectric constant than the first insulative material. Charge-tunneling material extends vertically along the stack, and is adjacent to the segments of the charge-trapping material. Channel material extends vertically along the stack, and is adjacent to the charge-tunneling material.
    Type: Grant
    Filed: August 7, 2020
    Date of Patent: June 15, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Byeung Chul Kim, Francois H. Fabreguette, Richard J. Hill, Purnima Narayanan, Shyam Surthi
  • Patent number: 11031414
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and wordline levels. The wordline levels have primary regions of a first vertical thickness, and have terminal projections of a second vertical thickness which is greater than the first vertical thickness. The terminal projections include control gate regions. Charge-blocking regions are adjacent the control gate regions, and are vertically spaced from one another. Charge-storage regions are adjacent the charge-blocking regions and are vertically spaced from one another. Gate-dielectric material is adjacent the charge-storage regions. Channel material is adjacent the gate dielectric material. Some embodiments included methods of forming integrated assemblies.
    Type: Grant
    Filed: June 6, 2019
    Date of Patent: June 8, 2021
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, Shyam Surthi
  • Patent number: 11024644
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include terminal regions, and include nonterminal regions proximate the terminal regions. The terminal regions are vertically thicker than the nonterminal regions, and are configured as segments which are vertically stacked one atop another and which are vertically spaced from one another. Blocks are adjacent to the segments and have approximately a same vertical thickness as the segments. The blocks include high-k dielectric material, charge-blocking material and charge-storage material. Channel material extends vertically along the stack and is adjacent to the blocks. Some embodiments include integrated assemblies. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: August 22, 2019
    Date of Patent: June 1, 2021
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, Shyam Surthi, Jordan D. Greenlee
  • Publication number: 20210143171
    Abstract: Some embodiments include a memory device having a vertical stack of alternating insulative levels and conductive levels. Memory cells are along the conductive levels. The conductive levels have control gate regions which include a first vertical thickness, have routing regions which include a second vertical thickness that is less than the first vertical thickness, and have tapered transition regions between the first vertical thickness and the second vertical thickness. Charge-blocking material is adjacent to the control gate regions. Charge-storage material is adjacent to the charge-blocking material. Dielectric material is adjacent to the charge-storage material. Channel material extends vertically along the vertical stack and is adjacent to the dielectric material. The memory cells include the control gate regions, and include regions of the charge-blocking material, the charge-storage material, the dielectric material and the channel material.
    Type: Application
    Filed: November 12, 2019
    Publication date: May 13, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Byeung Chul Kim, Shyam Surthi
  • Publication number: 20210057434
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include control gate regions and second regions proximate to the control gate regions. High-k dielectric material wraps around ends of the control gate regions, and is not along the second regions. Charge-blocking material is adjacent to the high-k dielectric material. Charge-storage material is adjacent to the charge-blocking material. The charge-storage material is configured as segments which are vertically stacked one atop another, and which are vertically spaced from one another by gaps. Gate-dielectric material is adjacent to the charge-storage material. Channel material extends vertically along the stack and is adjacent to the gate-dielectric material. Some embodiments include integrated assemblies, and methods of forming integrated assemblies.
    Type: Application
    Filed: August 22, 2019
    Publication date: February 25, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Shyam Surthi, Richard J. Hill, Byeung Chul Kim, Akira Goda
  • Publication number: 20210057435
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include control gate regions and distal regions proximate the control gate regions. The control gate regions have front surfaces, top surfaces and bottom surfaces. The top and bottoms surfaces extend back from the front surfaces. High-k dielectric material is along the control gate regions. The high-k dielectric material has first regions along the top and bottom surfaces, and has second regions along the front surfaces. The first regions are thicker than the second regions. Charge-blocking material is adjacent to the second regions of the high-k dielectric material. Charge-storage material is adjacent to the charge-blocking material. Gate-dielectric material is adjacent to the charge-storage material. Channel material is adjacent to the gate-dielectric material. Some embodiments include integrated assemblies.
    Type: Application
    Filed: August 22, 2019
    Publication date: February 25, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Shyam Surthi, Richard J. Hill
  • Publication number: 20210057437
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include control gate regions. High-k dielectric material is adjacent to the control gate regions and is configured as an arrangement of first vertically-extending linear segments which are vertically spaced from one another. Charge-blocking material is adjacent to the high-k dielectric material and is configured as an arrangement of second vertically-extending linear segments which are vertically spaced from one another. Charge-storage material is adjacent to the charge-blocking material and is configured as an arrangement of third vertically-extending linear segments which are vertically spaced from one another. Gate-dielectric material is adjacent to the charge-storage material. Channel material extends vertically along the stack and is adjacent to the gate-dielectric material.
    Type: Application
    Filed: August 22, 2019
    Publication date: February 25, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Shyam Surthi, Davide Resnati, Paolo Tessariol, Richard J. Hill, John D. Hopkins
  • Publication number: 20210057436
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include control gate regions and include second regions proximate to the control gate regions. High-k dielectric structures are directly against the control gate regions and extend entirely across the insulative levels. Charge-blocking material is adjacent to the high-k dielectric structures. Charge-storage material is adjacent to the charge-blocking material. The charge-storage material is configured as segments which are vertically stacked one atop another, and which are vertically spaced from one another. Gate-dielectric material is adjacent to the charge-storage material. Channel material extends vertically along the stack and is adjacent to the gate-dielectric material. Some embodiments include integrated assemblies, and methods of forming integrated assemblies.
    Type: Application
    Filed: August 22, 2019
    Publication date: February 25, 2021
    Applicant: Micron Technology, Inc.
    Inventors: Byeung Chul Kim, Francois H. Fabreguette, Richard J. Hill, Shyam Surthi
  • Publication number: 20210057438
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include terminal regions, and include nonterminal regions proximate the terminal regions. The terminal regions are vertically thicker than the nonterminal regions, and are configured as segments which are vertically stacked one atop another and which are vertically spaced from one another. Blocks are adjacent to the segments and have approximately a same vertical thickness as the segments. The blocks include high-k dielectric material, charge-blocking material and charge-storage material. Channel material extends vertically along the stack and is adjacent to the blocks. Some embodiments include integrated assemblies. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: August 22, 2019
    Publication date: February 25, 2021
    Applicant: Micron Technology, Inc.
    Inventors: John D. Hopkins, Shyam Surthi, Jordan D. Greenlee
  • Patent number: 10930652
    Abstract: Methods of forming semiconductor device structures include forming trenches in an array region and in a buried digit line end region, forming a metal material in the trenches, filling the trenches with a mask material, removing the mask material in the trenches to expose a portion of the metal material, and removing the exposed portion of the metal material. A plurality of conductive contacts is formed in direct contact with the metal material in the buried digit line end region. Methods of forming a buried digit line contact include forming conductive contacts physically contacting metal material in trenches in a buried digit line end region. Vertical memory devices and apparatuses include metallic connections disposed between a buried digit line and a conductive contact in a buried digit line end region.
    Type: Grant
    Filed: May 16, 2019
    Date of Patent: February 23, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Shyam Surthi, Suraj Mathew
  • Patent number: 10923480
    Abstract: Systems, apparatuses, and methods related to capacitance reduction in a semiconductor device are described. An example method may include forming an oxide only spacer over a portion of a sense line, formed on a semiconductor substrate, to separate the sense line from a storage node contact region of a semiconductor device and to reduce a capacitance between the sense line and the storage node contact region. The method may further include forming the storage node contact region in an active area of the semiconductor device neighboring the sense line and conductively connecting the sense line to the storage node contact region to enable a storage node to be sensed by the sense line.
    Type: Grant
    Filed: May 10, 2019
    Date of Patent: February 16, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Shyam Surthi, Litao Yang, Gurtej S. Sandhu, Richard J. Hill
  • Publication number: 20200388627
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and wordline levels. The wordline levels have primary regions of a first vertical thickness, and have terminal projections of a second vertical thickness which is greater than the first vertical thickness. The terminal projections include control gate regions. Charge-blocking regions are adjacent the control gate regions, and are vertically spaced from one another. Charge-storage regions are adjacent the charge-blocking regions and are vertically spaced from one another. Gate-dielectric material is adjacent the charge-storage regions. Channel material is adjacent the gate dielectric material. Some embodiments included methods of forming integrated assemblies.
    Type: Application
    Filed: June 6, 2019
    Publication date: December 10, 2020
    Applicant: Micron Technology, Inc.
    Inventors: John D. Hopkins, Shyam Surthi
  • Publication number: 20200373322
    Abstract: Some embodiments include a memory array which has a vertical stack of alternating insulative levels and wordline levels. A channel material extends vertically along the stack. The channel material includes a semiconductor composition and has first segments alternating with second segments. The first segments are adjacent the wordline levels and the second segments are adjacent the insulative levels. The first segments have a first dopant distribution and the second segments have a second dopant distribution which is different from the first dopant distribution. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: May 20, 2019
    Publication date: November 26, 2020
    Applicant: Micron Technology, Inc.
    Inventors: Shyam Surthi, Byeung Chul Kim, Richard J. Hill, Francois H. Fabreguette, Gurtej S. Sandhu
  • Publication number: 20200373325
    Abstract: Some embodiments include a memory array having a vertical stack of alternating insulative levels and wordline levels. The wordline levels have conductive terminal ends within control gate regions. The control gate regions are vertically spaced from one another by first insulative regions which include first insulative material. Charge-storage material is laterally outward of the conductive terminal ends, and is configured as segments. The segments of the charge-storage material are arranged one atop another and are vertically spaced from one another by second insulative regions which include second insulative material. The second insulative material has a different dielectric constant than the first insulative material. Charge-tunneling material extends vertically along the stack, and is adjacent to the segments of the charge-trapping material. Channel material extends vertically along the stack, and is adjacent to the charge-tunneling material.
    Type: Application
    Filed: August 7, 2020
    Publication date: November 26, 2020
    Applicant: Micron Technology, Inc.
    Inventors: Byeung Chul Kim, Francois H. Fabreguette, Richard J. Hill, Purnima Narayanan, Shyam Surthi
  • Publication number: 20200357803
    Abstract: Systems, apparatuses, and methods related to capacitance reduction in a semiconductor device are described. An example method may include forming an oxide only spacer over a portion of a sense line, formed on a semiconductor substrate, to separate the sense line from a storage node contact region of a semiconductor device and to reduce a capacitance between the sense line and the storage node contact region. The method may further include forming the storage node contact region in an active area of the semiconductor device neighboring the sense line and conductively connecting the sense line to the storage node contact region to enable a storage node to be sensed by the sense line.
    Type: Application
    Filed: May 10, 2019
    Publication date: November 12, 2020
    Inventors: Shyam Surthi, Litao Yang, Gurtej S. Sandhu, Richard J. Hill