Patents by Inventor Shyam Surthi

Shyam Surthi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240130124
    Abstract: An electronic device comprising a cell region comprising stacks of alternating dielectric materials and conductive materials. A pillar region is adjacent to the cell region and comprises storage node segments adjacent to adjoining oxide materials and adjacent to a tunnel region. The storage node segments are separated by a vertical portion of the tunnel region. A high-k dielectric material is adjacent to the conductive materials of the cell region and to the adjoining oxide materials of the pillar region. Additional electronic devices are disclosed, as are methods of forming an electronic device and related systems.
    Type: Application
    Filed: May 25, 2023
    Publication date: April 18, 2024
    Inventors: Shyam Surthi, Richard J. Hill, Gurtej S. Sandhu, Byeung Chul Kim, Francois H. Fabreguette, Chris M. Carlson, Michael E. Koltonski, Shane J. Trapp
  • Publication number: 20240071966
    Abstract: Memory array structures might include a first data line selectively connected to a first plurality of memory cells, a second data line selectively connected to a second plurality of memory cells, a solid first dielectric extending between a first portion of the first data line and a first portion of the second data line, a second dielectric containing a void extending between a second portion of the first data line and a second portion of the second data line, and a top contact overlying and in contact with the first portion of the first data line.
    Type: Application
    Filed: October 6, 2022
    Publication date: February 29, 2024
    Applicant: MICRON TECHNOLOGY, INC.
    Inventor: Shyam Surthi
  • Patent number: 11871572
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include control gate regions. High-k dielectric material is adjacent to the control gate regions and is configured as an arrangement of first vertically-extending linear segments which are vertically spaced from one another. Charge-blocking material is adjacent to the high-k dielectric material and is configured as an arrangement of second vertically-extending linear segments which are vertically spaced from one another. Charge-storage material is adjacent to the charge-blocking material and is configured as an arrangement of third vertically-extending linear segments which are vertically spaced from one another. Gate-dielectric material is adjacent to the charge-storage material. Channel material extends vertically along the stack and is adjacent to the gate-dielectric material.
    Type: Grant
    Filed: December 23, 2021
    Date of Patent: January 9, 2024
    Inventors: Shyam Surthi, Davide Resnati, Paolo Tessariol, Richard J. Hill, John D. Hopkins
  • Publication number: 20230320085
    Abstract: A memory array comprising strings of memory cells comprises a vertical stack comprising vertically-alternating insulative tiers and conductive tiers directly above a conductor tier. Channel-material-string constructions of memory-cell strings extend through the insulative and conductive tiers. The channel material of the channel-material-string constructions directly electrically couples with conductor material of the conductor tier. The vertical stack comprising a memory-cell region comprises memory cells. Individual of the insulative tiers in the memory-cell region laterally-outward of the channel-material-string constructions have at least a majority of their insulative matter being void space. The vertical stack comprises an upper region directly above the memory-cell region.
    Type: Application
    Filed: March 31, 2022
    Publication date: October 5, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Shyam Surthi, Richard J. Hill
  • Publication number: 20230262981
    Abstract: Some embodiments include a memory array having a vertical stack of alternating insulative levels and wordline levels. The wordline levels have conductive terminal ends within control gate regions. The control gate regions are vertically spaced from one another by first insulative regions which include first insulative material. Charge-storage material is laterally outward of the conductive terminal ends, and is configured as segments. The segments of the charge-storage material are arranged one atop another and are vertically spaced from one another by second insulative regions which include second insulative material. The second insulative material has a different dielectric constant than the first insulative material. Charge-tunneling material extends vertically along the stack, and is adjacent to the segments of the charge-trapping material. Channel material extends vertically along the stack, and is adjacent to the charge-tunneling material.
    Type: Application
    Filed: April 24, 2023
    Publication date: August 17, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Byeung Chul Kim, Francois H. Fabreguette, Richard J. Hill, Purnima Narayanan, Shyam Surthi
  • Patent number: 11729982
    Abstract: Some embodiments include an integrated assembly having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include conductive structures. Channel material extends vertically through the stack. The conductive structures have proximal regions near the channel material, and have distal regions further from the channel material than the proximal regions. The insulative levels have first regions vertically between the proximal regions of neighboring conductive structures, and have second regions vertically between the distal regions of the neighboring conductive structures. Voids are within the insulative levels and extend across portions of the first and second regions. Some embodiments include methods for forming integrated assemblies.
    Type: Grant
    Filed: October 21, 2021
    Date of Patent: August 15, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Shyam Surthi, Richard J. Hill
  • Publication number: 20230189515
    Abstract: A microelectronic device comprises a stack structure, a staircase structure, an etch stop material, and insulative material. The stack structure comprises conductive structures, and air gaps vertically alternating with the conductive structures. The staircase structure is within the stack structure and has steps comprising edges of at least some of the conductive structures of the stack structure. The etch stop material continuously extends over the conductive structures and at least partially defines horizontal boundaries of the air gaps. The insulative material overlies the etch stop material. Additional microelectronic devices, memory devices, electronic systems, and methods are also disclosed.
    Type: Application
    Filed: December 13, 2021
    Publication date: June 15, 2023
    Inventors: Byeung Chul Kim, Shyam Surthi
  • Patent number: 11672120
    Abstract: Some embodiments include a memory array having a vertical stack of alternating insulative levels and wordline levels. The wordline levels have conductive terminal ends within control gate regions. The control gate regions are vertically spaced from one another by first insulative regions which include first insulative material. Charge-storage material is laterally outward of the conductive terminal ends, and is configured as segments. The segments of the charge-storage material are arranged one atop another and are vertically spaced from one another by second insulative regions which include second insulative material. The second insulative material has a different dielectric constant than the first insulative material. Charge-tunneling material extends vertically along the stack, and is adjacent to the segments of the charge-trapping material. Channel material extends vertically along the stack, and is adjacent to the charge-tunneling material.
    Type: Grant
    Filed: May 24, 2021
    Date of Patent: June 6, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Byeung Chui Kim, Francois H. Fabreguette, Richard J. Hill, Purnima Narayanan, Shyam Surthi
  • Patent number: 11672118
    Abstract: An electronic device comprising a cell region comprising stacks of alternating dielectric materials and conductive materials. A pillar region is adjacent to the cell region and comprises storage node segments adjacent to adjoining oxide materials and adjacent to a tunnel region. The storage node segments are separated by a vertical portion of the tunnel region. A high-k dielectric material is adjacent to the conductive materials of the cell region and to the adjoining oxide materials of the pillar region. Additional electronic devices are disclosed, as are methods of forming an electronic device and related systems.
    Type: Grant
    Filed: September 4, 2020
    Date of Patent: June 6, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Shyam Surthi, Richard J. Hill, Gurtej S. Sandhu, Byeung Chul Kim, Francois H. Fabreguette, Chris M. Carlson, Michael E. Koltonski, Shane J. Trapp
  • Patent number: 11631697
    Abstract: Some embodiments include a memory array which has a vertical stack of alternating insulative levels and wordline levels. A channel material extends vertically along the stack. The channel material includes a semiconductor composition and has first segments alternating with second segments. The first segments are adjacent the wordline levels and the second segments are adjacent the insulative levels. The first segments have a first dopant distribution and the second segments have a second dopant distribution which is different from the first dopant distribution. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: February 15, 2022
    Date of Patent: April 18, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Shyam Surthi, Byeung Chul Kim, Richard J. Hill, Francois H. Fabreguette, Gurtej S. Sandhu
  • Patent number: 11605645
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and wordline levels. The wordline levels have primary regions of a first vertical thickness, and have terminal projections of a second vertical thickness which is greater than the first vertical thickness. The terminal projections include control gate regions. Charge-blocking regions are adjacent the control gate regions, and are vertically spaced from one another. Charge-storage regions are adjacent the charge-blocking regions and are vertically spaced from one another. Gate-dielectric material is adjacent the charge-storage regions. Channel material is adjacent the gate dielectric material. Some embodiments included methods of forming integrated assemblies.
    Type: Grant
    Filed: May 10, 2021
    Date of Patent: March 14, 2023
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, Shyam Surthi
  • Patent number: 11587948
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include control gate regions and second regions proximate to the control gate regions. High-k dielectric material wraps around ends of the control gate regions, and is not along the second regions. Charge-blocking material is adjacent to the high-k dielectric material. Charge-storage material is adjacent to the charge-blocking material. The charge-storage material is configured as segments which are vertically stacked one atop another, and which are vertically spaced from one another by gaps. Gate-dielectric material is adjacent to the charge-storage material. Channel material extends vertically along the stack and is adjacent to the gate-dielectric material. Some embodiments include integrated assemblies, and methods of forming integrated assemblies.
    Type: Grant
    Filed: July 7, 2021
    Date of Patent: February 21, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Shyam Surthi, Richard J. Hill, Byeung Chul Kim, Akira Goda
  • Publication number: 20230043163
    Abstract: Some embodiments include an integrated assembly having a stack of alternating first and second levels. A panel extends through the stack. The first levels have proximal regions adjacent the panel, and have distal regions further from the panel than the proximal regions. The distal regions have first conductive structures, and the proximal regions have second conductive structures. Detectable interfaces are present where the first conductive structures join to the second conductive structures. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: August 6, 2021
    Publication date: February 9, 2023
    Applicant: Micron Technology, Inc.
    Inventor: Shyam Surthi
  • Publication number: 20230034157
    Abstract: Some embodiments include an integrated assembly having a stack of alternating insulative levels and conductive levels. A pillar of channel material extends through the stack. The conductive levels have terminal regions adjacent the pillar. Charge-storage-material-segments are adjacent the conductive levels of the stack, and are between the channel material and the terminal regions. Tunneling material is between the charge-storage-material-segments and the channel material. Charge-blocking-material is between the charge-storage-material-segments and the terminal regions. Ribbons of dielectric material extend vertically across the insulative levels and are laterally inset relative to the terminal regions. The ribbons have first regions adjacent the conductive levels and have second regions between the first regions, with the second regions being laterally inset relative to the first regions. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: July 30, 2021
    Publication date: February 2, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Byeung Chul Kim, Davide Resnati, Gianpietro Carnevale, Shyam Surthi
  • Patent number: 11563031
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include control gate regions and distal regions proximate the control gate regions. The control gate regions have front surfaces, top surfaces and bottom surfaces. The top and bottoms surfaces extend back from the front surfaces. High-k dielectric material is along the control gate regions. The high-k dielectric material has first regions along the top and bottom surfaces, and has second regions along the front surfaces. The first regions are thicker than the second regions. Charge-blocking material is adjacent to the second regions of the high-k dielectric material. Charge-storage material is adjacent to the charge-blocking material. Gate-dielectric material is adjacent to the charge-storage material. Channel material is adjacent to the gate-dielectric material. Some embodiments include integrated assemblies.
    Type: Grant
    Filed: July 7, 2021
    Date of Patent: January 24, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Shyam Surthi, Richard J. Hill
  • Patent number: 11557608
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include control gate regions and include second regions proximate to the control gate regions. High-k dielectric structures are directly against the control gate regions and extend entirely across the insulative levels. Charge-blocking material is adjacent to the high-k dielectric structures. Charge-storage material is adjacent to the charge-blocking material. The charge-storage material is configured as segments which are vertically stacked one atop another, and which are vertically spaced from one another. Gate-dielectric material is adjacent to the charge-storage material. Channel material extends vertically along the stack and is adjacent to the gate-dielectric material. Some embodiments include integrated assemblies, and methods of forming integrated assemblies.
    Type: Grant
    Filed: August 4, 2021
    Date of Patent: January 17, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Byeung Chul Kim, Francois H. Fabreguette, Richard J. Hill, Shyam Surthi
  • Publication number: 20230011076
    Abstract: Some embodiments include an integrated assembly having a vertical stack of alternating first and second levels. A panel extends through the stack. The first levels have proximal regions adjacent the panel, and have distal regions further from the panel than the proximal regions. The distal regions include conductive structures. The conductive structures have a first thickness. The proximal regions include insulative structures. The insulative structures have a second thickness at least about as large as the first thickness. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: July 12, 2021
    Publication date: January 12, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Shyam Surthi, Matthew Thorum
  • Publication number: 20220359565
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include terminal regions, and include nonterminal regions proximate the terminal regions. The terminal regions are vertically thicker than the nonterminal regions, and are configured as segments which are vertically stacked one atop another and which are vertically spaced from one another. Blocks are adjacent to the segments and have approximately a same vertical thickness as the segments. The blocks include high-k dielectric material, charge-blocking material and charge-storage material. Channel material extends vertically along the stack and is adjacent to the blocks. Some embodiments include integrated assemblies. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: July 18, 2022
    Publication date: November 10, 2022
    Applicant: Micron Technology, Inc.
    Inventors: John D. Hopkins, Shyam Surthi, Jordan D. Greenlee
  • Patent number: 11495610
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers. The second tiers comprise doped silicon dioxide and the first tiers comprise a material other than doped silicon dioxide. The stack comprises laterally-spaced memory-block regions. Channel-material-string constructions extend through the first tiers and the second tiers in the memory-block regions. The doped silicon dioxide that is in the second tiers is etched selectively relative to said other material that is in the first tiers and selectively relative to and to expose an undoped silicon dioxide-comprising string of a charge-blocking material that is part of individual of the channel-material-string constructions. Structure independent of method is disclosed.
    Type: Grant
    Filed: July 6, 2020
    Date of Patent: November 8, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Collin Howder, Shyam Surthi, Matthew Thorum
  • Patent number: 11417682
    Abstract: Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and conductive levels. The conductive levels include terminal regions, and include nonterminal regions proximate the terminal regions. The terminal regions are vertically thicker than the nonterminal regions, and are configured as segments which are vertically stacked one atop another and which are vertically spaced from one another. Blocks are adjacent to the segments and have approximately a same vertical thickness as the segments. The blocks include high-k dielectric material, charge-blocking material and charge-storage material. Channel material extends vertically along the stack and is adjacent to the blocks. Some embodiments include integrated assemblies. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: April 14, 2021
    Date of Patent: August 16, 2022
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, Shyam Surthi, Jordan D. Greenlee