Patents by Inventor Stephen J. Kramer

Stephen J. Kramer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11520240
    Abstract: A method of aligning a wafer for semiconductor fabrication processes may include applying a magnetic field to a wafer, detecting one or more residual magnetic fields from one or more alignment markers within the wafer, responsive to the detected one or more residual magnetic fields, determining locations of the one or more alignment markers. The marker locations may be determined relative to an ideal grid, followed by determining a geometrical transformation model for aligning the wafer, and aligning the wafer responsive to the geometrical transformation model. Related methods and systems are also disclosed.
    Type: Grant
    Filed: May 7, 2021
    Date of Patent: December 6, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Nikolay A. Mirin, Robert Dembi, Richard T. Housley, Xiaosong Zhang, Jonathan D. Harms, Stephen J. Kramer
  • Publication number: 20220108927
    Abstract: A method for measuring overlay between an interest level and a reference level of a wafer includes applying a magnetic field to a wafer, detecting at least one residual magnetic field emitted from at least one registration marker of a first set of registration markers within the wafer, responsive to the detected one or more residual magnetic fields, determining a location of the at least one registration marker of the first set registration markers, determining a location of at least one registration marker of a second set of registration markers, and responsive to the respective determined locations of the at least one registration marker of the first set of registration markers and the at least one registration marker of the second set of registration markers, calculating a positional offset between an interest level of the wafer and a reference level of the wafer. Related methods and systems are also disclosed.
    Type: Application
    Filed: December 15, 2021
    Publication date: April 7, 2022
    Inventors: Nikolay A. Mirin, Robert Dembi, Richard T. Housley, Xiaosong Zhang, Jonathan D. Harms, Stephen J. Kramer
  • Patent number: 11257962
    Abstract: A transistor comprises a channel region between a source region and a drain region, a dielectric material adjacent to the channel region, an electrode adjacent to the dielectric material, and an electrolyte between the dielectric material and the electrode. Related semiconductor devices comprising at least one transistors, related electronic systems, and related methods are also disclosed.
    Type: Grant
    Filed: May 2, 2019
    Date of Patent: February 22, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Yunfei Gao, Kamal M. Karda, Stephen J. Kramer, Gurtej S. Sandhu, Sumeet C. Pandey, Haitao Liu
  • Patent number: 11251096
    Abstract: A method for measuring overlay between an interest level and a reference level of a wafer includes applying a magnetic field to a wafer, detecting at least one residual magnetic field emitted from at least one registration marker of a first set of registration markers within the wafer, responsive to the detected one or more residual magnetic fields, determining a location of the at least one registration marker of the first set registration markers, determining a location of at least one registration marker of a second set of registration markers, and responsive to the respective determined locations of the at least one registration marker of the first set of registration markers and the at least one registration marker of the second set of registration markers, calculating a positional offset between an interest level of the wafer and a reference level of the wafer. Related methods and systems are also disclosed.
    Type: Grant
    Filed: September 5, 2018
    Date of Patent: February 15, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Nikolay A. Mirin, Robert Dembi, Richard T. Housley, Xiaosong Zhang, Jonathan D. Harms, Stephen J. Kramer
  • Patent number: 11158670
    Abstract: Memory cells are disclosed. Magnetic regions within the memory cells include an alternating structure of magnetic sub-regions and coupler sub-regions. The coupler material of the coupler sub-regions antiferromagnetically couples neighboring magnetic sub-regions and effects or encourages a vertical magnetic orientation exhibited by the neighboring magnetic sub-regions. Neighboring magnetic sub-regions, spaced from one another by a coupler sub-region, exhibit oppositely directed magnetic orientations. The magnetic and coupler sub-regions may each be of a thickness tailored to form the magnetic region in a compact structure. Interference between magnetic dipole fields emitted from the magnetic region on switching of a free region in the memory cell may be reduced or eliminated. Also disclosed are semiconductor device structures, spin torque transfer magnetic random-access memory (STT-MRAM) systems, and methods of fabrication.
    Type: Grant
    Filed: February 20, 2020
    Date of Patent: October 26, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Wayne I. Kinney, Witold Kula, Stephen J. Kramer
  • Publication number: 20210263429
    Abstract: A method of aligning a wafer for semiconductor fabrication processes may include applying a magnetic field to a wafer, detecting one or more residual magnetic fields from one or more alignment markers within the wafer, responsive to the detected one or more residual magnetic fields, determining locations of the one or more alignment markers. The marker locations may be determined relative to an ideal grid, followed by determining a geometrical transformation model for aligning the wafer, and aligning the wafer responsive to the geometrical transformation model. Related methods and systems are also disclosed.
    Type: Application
    Filed: May 7, 2021
    Publication date: August 26, 2021
    Inventors: Nikolay A. Mirin, Robert Dembi, Richard T. Housley, Xiaosong Zhang, Jonathan D. Harms, Stephen J. Kramer
  • Patent number: 11009798
    Abstract: A method of aligning a wafer for semiconductor fabrication processes may include applying a magnetic field to a wafer, detecting one or more residual magnetic fields from one or more alignment markers within the wafer, responsive to the detected one or more residual magnetic fields, determining locations of the one or more alignment markers. The marker locations may be determined relative to an ideal grid, followed by determining a geometrical transformation model for aligning the wafer, and aligning the wafer responsive to the geometrical transformation model. Related methods and systems are also disclosed.
    Type: Grant
    Filed: September 5, 2018
    Date of Patent: May 18, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Nikolay A. Mirin, Robert Dembi, Richard T. Housley, Xiaosong Zhang, Jonathan D. Harms, Stephen J. Kramer
  • Publication number: 20200350440
    Abstract: A transistor comprises a channel region between a source region and a drain region, a dielectric material adjacent to the channel region, an electrode adjacent to the dielectric material, and an electrolyte between the dielectric material and the electrode. Related semiconductor devices comprising at least one transistors, related electronic systems, and related methods are also disclosed.
    Type: Application
    Filed: May 2, 2019
    Publication date: November 5, 2020
    Inventors: Yunfei Gao, Kamal M. Karda, Stephen J. Kramer, Gurtej S. Sandhu, Sumeet C. Pandey, Haitao Liu
  • Publication number: 20200194497
    Abstract: Memory cells are disclosed. Magnetic regions within the memory cells include an alternating structure of magnetic sub-regions and coupler sub-regions. The coupler material of the coupler sub-regions antiferromagnetically couples neighboring magnetic sub-regions and effects or encourages a vertical magnetic orientation exhibited by the neighboring magnetic sub-regions. Neighboring magnetic sub-regions, spaced from one another by a coupler sub-region, exhibit oppositely directed magnetic orientations. The magnetic and coupler sub-regions may each be of a thickness tailored to form the magnetic region in a compact structure. Interference between magnetic dipole fields emitted from the magnetic region on switching of a free region in the memory cell may be reduced or eliminated. Also disclosed are semiconductor device structures, spin torque transfer magnetic random-access memory (STT-MRAM) systems, and methods of fabrication.
    Type: Application
    Filed: February 20, 2020
    Publication date: June 18, 2020
    Inventors: Wayne I. Kinney, Witold Kula, Stephen J. Kramer
  • Patent number: 10586830
    Abstract: Memory cells are disclosed. Magnetic regions within the memory cells include an alternating structure of magnetic sub-regions and coupler sub-regions. The coupler material of the coupler sub-regions antiferromagnetically couples neighboring magnetic sub-regions and effects or encourages a vertical magnetic orientation exhibited by the neighboring magnetic sub-regions. Neighboring magnetic sub-regions, spaced from one another by a coupler sub-region, exhibit oppositely directed magnetic orientations. The magnetic and coupler sub-regions may each be of a thickness tailored to form the magnetic region in a compact structure. Interference between magnetic dipole fields emitted from the magnetic region on switching of a free region in the memory cell may be reduced or eliminated. Also disclosed are semiconductor device structures, spin torque transfer magnetic random-access memory (STT-MRAM) systems, and methods of fabrication.
    Type: Grant
    Filed: August 24, 2018
    Date of Patent: March 10, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Wayne I. Kinney, Witold Kula, Stephen J. Kramer
  • Publication number: 20200073257
    Abstract: A method of aligning a wafer for semiconductor fabrication processes may include applying a magnetic field to a wafer, detecting one or more residual magnetic fields from one or more alignment markers within the wafer, responsive to the detected one or more residual magnetic fields, determining locations of the one or more alignment markers. The marker locations may be determined relative to an ideal grid, followed by determining a geometrical transformation model for aligning the wafer, and aligning the wafer responsive to the geometrical transformation model. Related methods and systems are also disclosed.
    Type: Application
    Filed: September 5, 2018
    Publication date: March 5, 2020
    Inventors: Nikolay A. Mirin, Robert Dembi, Richard T. Housley, Xiaosong Zhang, Jonathan D. Harms, Stephen J. Kramer
  • Publication number: 20200075432
    Abstract: A method for measuring overlay between an interest level and a reference level of a wafer includes applying a magnetic field to a wafer, detecting at least one residual magnetic field emitted from at least one registration marker of a first set of registration markers within the wafer, responsive to the detected one or more residual magnetic fields, determining a location of the at least one registration marker of the first set registration markers, determining a location of at least one registration marker of a second set of registration markers, and responsive to the respective determined locations of the at least one registration marker of the first set of registration markers and the at least one registration marker of the second set of registration markers, calculating a positional offset between an interest level of the wafer and a reference level of the wafer. Related methods and systems are also disclosed.
    Type: Application
    Filed: September 5, 2018
    Publication date: March 5, 2020
    Inventors: Nikolay A. Mirin, Robert Dembi, Richard T. Housley, Xiaosong Zhang, Jonathan D. Harms, Stephen J. Kramer
  • Publication number: 20180366516
    Abstract: Memory cells are disclosed. Magnetic regions within the memory cells include an alternating structure of magnetic sub-regions and coupler sub-regions. The coupler material of the coupler sub-regions antiferromagnetically couples neighboring magnetic sub-regions and effects or encourages a vertical magnetic orientation exhibited by the neighboring magnetic sub-regions. Neighboring magnetic sub-regions, spaced from one another by a coupler sub-region, exhibit oppositely directed magnetic orientations. The magnetic and coupler sub-regions may each be of a thickness tailored to form the magnetic region in a compact structure. Interference between magnetic dipole fields emitted from the magnetic region on switching of a free region in the memory cell may be reduced or eliminated. Also disclosed are semiconductor device structures, spin torque transfer magnetic random-access memory (STT-MRAM) systems, and methods of fabrication.
    Type: Application
    Filed: August 24, 2018
    Publication date: December 20, 2018
    Inventors: Wayne I. Kinney, Witold Kula, Stephen J. Kramer
  • Patent number: 10121824
    Abstract: Memory cells are disclosed. Magnetic regions within the memory cells include an alternating structure of magnetic sub-regions and coupler sub-regions. The coupler material of the coupler sub-regions antiferromagnetically couples neighboring magnetic sub-regions and effects or encourages a vertical magnetic orientation exhibited by the neighboring magnetic sub-regions. Neighboring magnetic sub-regions, spaced from one another by a coupler sub-region, exhibit oppositely directed magnetic orientations. The magnetic and coupler sub-regions may each be of a thickness tailored to form the magnetic region in a compact structure. Interference between magnetic dipole fields emitted from the magnetic region on switching of a free region in the memory cell may be reduced or eliminated. Also disclosed are semiconductor device structures, spin torque transfer magnetic random-access memory (STT-MRAM) systems, and methods of fabrication.
    Type: Grant
    Filed: July 6, 2017
    Date of Patent: November 6, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Wayne I. Kinney, Witold Kula, Stephen J. Kramer
  • Publication number: 20170309680
    Abstract: Memory cells are disclosed. Magnetic regions within the memory cells include an alternating structure of magnetic sub-regions and coupler sub-regions. The coupler material of the coupler sub-regions antiferromagnetically couples neighboring magnetic sub-regions and effects or encourages a vertical magnetic orientation exhibited by the neighboring magnetic sub-regions. Neighboring magnetic sub-regions, spaced from one another by a coupler sub-region, exhibit oppositely directed magnetic orientations. The magnetic and coupler sub-regions may each be of a thickness tailored to form the magnetic region in a compact structure. Interference between magnetic dipole fields emitted from the magnetic region on switching of a free region in the memory cell may be reduced or eliminated. Also disclosed are semiconductor device structures, spin torque transfer magnetic random access memory (STT-MRAM) systems, and methods of fabrication.
    Type: Application
    Filed: July 6, 2017
    Publication date: October 26, 2017
    Inventors: Wayne I. Kinney, Witold Kula, Stephen J. Kramer
  • Patent number: 9711565
    Abstract: Memory cells are disclosed. Magnetic regions within the memory cells include an alternating structure of magnetic sub-regions and coupler sub-regions. The coupler material of the coupler sub-regions antiferromagnetically couples neighboring magnetic sub-regions and effects or encourages a vertical magnetic orientation exhibited by the neighboring magnetic sub-regions. Neighboring magnetic sub-regions, spaced from one another by a coupler sub-region, exhibit oppositely directed magnetic orientations. The magnetic and coupler sub-regions may each be of a thickness tailored to form the magnetic region in a compact structure. Interference between magnetic dipole fields emitted from the magnetic region on switching of a free region in the memory cell may be reduced or eliminated. Also disclosed are semiconductor device structures, spin torque transfer magnetic random access memory (STT-MRAM) systems, and methods of fabrication.
    Type: Grant
    Filed: May 29, 2016
    Date of Patent: July 18, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Wayne I. Kinney, Witold Kula, Stephen J. Kramer
  • Patent number: 9676944
    Abstract: Methods of increasing the solubility of a base in supercritical carbon dioxide include forming a complex of a Lewis acid and the base, and dissolving the complex in supercritical carbon dioxide. The Lewis acid is soluble in supercritical carbon dioxide, and the base is substantially insoluble in supercritical carbon dioxide. Methods for increasing the solubility of water in supercritical carbon dioxide include dissolving an acid or a base in supercritical carbon dioxide to form a solution and dissolving water in the solution. The acid or the base is formulated to interact with water to solubilize the water in the supercritical carbon dioxide. Some compositions include supercritical carbon dioxide, a hydrolysable metallic compound, and at least one of an acid and a base. Some compositions include an alkoxide and at least one of an acid and a base.
    Type: Grant
    Filed: December 16, 2014
    Date of Patent: June 13, 2017
    Assignees: Micron Technology, Inc., Idaho Research Foundation
    Inventors: Chien M. Wai, Hiroyuki Ohde, Stephen J. Kramer
  • Patent number: 9666639
    Abstract: Spin Torque Transfer (STT) memory cell structures and methods are described herein. One or more STT memory cell structures comprise a STT stack including: a pinned ferromagnetic material in contact with an antiferromagnetic material; a tunneling barrier material positioned between a ferromagnetic storage material and the pinned ferromagnetic material; a multiferroic material in contact with the ferromagnetic storage material; and a first electrode and a second electrode, wherein the antiferromagnetic material, the pinned ferromagnetic material, and the ferromagnetic storage material are located between the first electrode and the second electrode. The STT memory cell structure can include a third electrode and a fourth electrode, wherein at least a first portion of the multiferroic material is located between the third and the fourth electrode.
    Type: Grant
    Filed: November 13, 2012
    Date of Patent: May 30, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Stephen J. Kramer, Gurtej S. Sandhu
  • Publication number: 20160276405
    Abstract: Memory cells are disclosed. Magnetic regions within the memory cells include an alternating structure of magnetic sub-regions and coupler sub-regions. The coupler material of the coupler sub-regions antiferromagnetically couples neighboring magnetic sub-regions and effects or encourages a vertical magnetic orientation exhibited by the neighboring magnetic sub-regions. Neighboring magnetic sub-regions, spaced from one another by a coupler sub-region, exhibit oppositely directed magnetic orientations. The magnetic and coupler sub-regions may each be of a thickness tailored to form the magnetic region in a compact structure. Interference between magnetic dipole fields emitted from the magnetic region on switching of a free region in the memory cell may be reduced or eliminated. Also disclosed are semiconductor device structures, spin torque transfer magnetic random access memory (STT-MRAM) systems, and methods of fabrication.
    Type: Application
    Filed: May 29, 2016
    Publication date: September 22, 2016
    Inventors: Wayne I. Kinney, Witold Kula, Stephen J. Kramer
  • Patent number: 9406874
    Abstract: Methods of forming magnetic memory cells are disclosed. Magnetic and non-magnetic materials are formed into a primal precursor structure in an initial stress state of essentially no strain, compressive strain, or tensile strain. A stress-compensating material, e.g., a non-sacrificial, conductive material, is formed to be disposed on the primal precursor structure to form a stress-compensated precursor structure in a net beneficial stress state. Thereafter, the stress-compensated precursor structure may be patterned to form a cell core of a memory cell. The net beneficial stress state of the stress-compensated precursor structure lends to formation of one or more magnetic regions, in the cell core, exhibiting a vertical magnetic orientation without deteriorating a magnetic strength of the one or more magnetic regions. Also disclosed are memory cells, memory cell structures, semiconductor device structures, and spin torque transfer magnetic random access memory (STT-MRAM) systems.
    Type: Grant
    Filed: December 24, 2014
    Date of Patent: August 2, 2016
    Assignee: Micron Technology, Inc.
    Inventors: Witold Kula, Gurtej S. Sandhu, Stephen J. Kramer