Abstract: An electron beam apparatus which can stably achieve high spatial resolution also during low acceleration observation using CeB6 for the CFE electron source is provided. In an electron beam apparatus having a CFE electron source, the emitter of the electron beam of the CFE electron source is Ce hexaboride or a hexaboride of a lanthanoid metal heavier than Ce, the hexaboride emits the electron beam from the {310} plane, and the number of the atoms of the lanthanoid metal on the {310} plane is larger than the number of boron molecules comprising six boron atoms on the {310} plane.

Abstract: An electron source that can be used stably for a long time even when hexaboride is used, and an electron beam device using the electron source are provided. The invention is directed to an electron source which includes a filament made of a metal, a metal tube that is fixed to the filament and has a plurality of recesses disposed at least in two axial directions so as to surround a central axis at an outer periphery, and a columnar hexaboride tip that emits an electron, is disposed so as to protrude from the inside of the metal tube to a side opposite to the filament, and is in contact with a bottom of each of the plurality of recesses of the metal tube.

Abstract: The disclosure provides a charged particle detector including a scintillator that emits light with stable intensity and obtains high light emission intensity regardless of an energy of an incident electron. The disclosure provides the charged particle detector including: a first light-emitting part (21) in which a layer containing Ga1-x-yAlxInyN (where 0?x<1, 0?y<1) and a layer containing GaN are alternately laminated; a second light-emitting part (23) in which the layer containing Ga1-x-yAlxInyN (where 0?x<1, 0?y<1) and the layer containing GaN are alternately laminated; and a non-light-emitting part (22) that is interposed between the first light-emitting part (21) and the second light-emitting part (23) (see FIG. 2).

Abstract: An electron beam apparatus which can stably achieve high spatial resolution also during low acceleration observation using CeB6 for the CFE electron source is provided. In an electron beam apparatus having a CFE electron source, the emitter of the electron beam of the CFE electron source is Ce hexaboride or a hexaboride of a lanthanoid metal heavier than Ce, the hexaboride emits the electron beam from the {310} plane, and the number of the atoms of the lanthanoid metal on the {310} plane is larger than the number of boron molecules comprising six boron atoms on the {310} plane.

Abstract: Since a diffraction phenomenon occurs in the electron beam passing through a differential evacuation hole, an electron beam whose probe diameter is narrowed cannot pass through a hole having an aspect ratio of a predetermined value or more, and accordingly, a degree in vacuum on the electron beam side cannot be improved. By providing a differential evacuation hole with a high aspect ratio in an ion beam device, it becomes possible to obtain an observed image on a sample surface, with the sample being placed under the atmospheric pressure or a pressure similar thereto, in a state where the degree of vacuum on the ion beam side is stabilized. Moreover, by processing the differential evacuation hole by using an ion beam each time it is applied, both a normal image observation with high resolution and an image observation under atmospheric pressure or a pressure similar thereto can be carried out.

Abstract: The purpose of the present invention is to eliminate the effort in placement and extraction of samples in observations using transmitted charged particles. A charged particle beam device (601) is characterized by having: a charged particle optical lens tube that irradiates a sample (6) with a primary charged particle beam; a sample stage on which a light emitting member (500) that emits light because of charged particles that have come by transmission internally in the sample (6) or scattering therefrom or a sample platform (600) having the light emitting member (500) is attachably and detachably disposed; and a detector (503) that detects the light emitted by the light emitting member.

Abstract: A macromolecules containing metal and a use thereof as a catalyst, said macromolecules containing metal being obtained by causing a ligand to react with a zinc compound or a cobalt compound, said ligand having an imidazole group that is bonded to a macromolecule via a linker.

Abstract: In order to provide a stable hexaboride single-crystal field emission electron source capable of heat-flashing, this field emission electron source is provided with a metal filament, a metal tube joined thereto, a hexaboride tip that emits electrons, and graphite sheets that are independent of the metal tube and the hexaboride tip. The hexaboride tip is arranged so as not to be in structural contact with the metal tube due to the graphite sheets. The hexaboride tip, the graphite sheets, and the metal tube are configured so as to be mechanically and electrically in contact with one another.

Abstract: The objective of the present invention is to provide a charged particle detector and a charged particle beam device with which it is possible to acquire a high luminous output while rapidly eliminating charged particles that are incident to a scintillator. In order to achieve said objective the present invention proposes: a charged particle detector provided with a light-emitting unit including a laminated structure obtained by laminating a GaInN-containing layer and a GaN layer, and provided with a conductive layer that is in contact with the GaInN-containing layer on the charged particle incidence surface side of the laminated structure; and a charged particle beam device.

Abstract: Provided is a charged particle beam device including a charged particle optical column that irradiates a specimen with a primary charged particle beam, and a specimen base rotating unit that is capable of rotating the specimen base in a state of an angle formed by a surface of the specimen base and an optical axis of the primary charged particle beam being inclined to a non-perpendicular angle, in which the specimen base is configured to include a detecting element that detects a charged particle scattered or transmitted inside the specimen, and transmitted charged particle images of the specimen corresponding to each angle is acquired by irradiating the specimen in a state of the specimen base rotating unit being rotated at a plurality of different angles.

Abstract: A time measurement device measures a time interval between input timings of first and second pulsed target signals. The device includes: a processor; a number-of-periods detector that detects, by using a clock signal with a predetermined clock frequency and a predetermined clock period, the time interval in units of the clock period; and a phase detection unit including a band-pass filter. The band-pass filter receives at least one of the first and second target signals as a filtering target signal and extracts a signal component of the clock frequency from the filtering target signal. The phase detection unit detects a phase difference between the extracted signal and the clock signal. The processor derives, by using a result detected by the number-of-periods detector and the detected phase difference, the time interval at a resolution finer than the clock period.

Abstract: A time measurement device measures a time interval between input timings of first and second pulsed target signals. The device includes: a processor; a number-of-periods detector that detects, by using a clock signal with a predetermined clock frequency and a predetermined clock period, the time interval in units of the clock period; and a phase detection unit including a band-pass filter. The band-pass filter receives at least one of the first and second target signals as a filtering target signal and extracts a signal component of the clock frequency from the filtering target signal. The phase detection unit detects a phase difference between the extracted signal and the clock signal. The processor derives, by using a result detected by the number-of-periods detector and the detected phase difference, the time interval at a resolution finer than the clock period.

Abstract: An ion pump and a charged particle beam device each includes two opposite flat-plate cathodes, an anode with a cylindrical shape having openings that face the respective flat-plate cathodes, a voltage application unit configured to apply a potential higher than potentials of the flat-plate cathodes to the anode, a magnetic field application unit configured to apply a magnetic field along an axial direction of the cylindrical shape of the anode, and a cathode bar arranged within the anode. The surface of the cathode bar is formed with a material that forms a non-evaporative getter alloy film on the anode or the flat-plate cathodes.

Abstract: An electronic microscope has a great depth of focus compared with an optical microscope. Thus, information is superimposed in the depth direction in one image. Thus, observation of a three-dimensional structure inside a specimen with use of the electronic microscope requires accurate specification of a three-dimensional position or density of a structure inside the specimen. Furthermore, the specimen on a slide glass that is observed with the optical microscope may not be put in a TEM device in the related art. Thus, a very complicated preparation of the specimen is required for performing three-dimensional internal structure observation, with the electronic microscope, of a location that is observed with the optical microscope.

Abstract: The objective of the present invention is to simply perform image observation through transmitted charged particles. A sample irradiated by a charged particle beam is disposed directly or via a predetermined member on a light-emitting element (23) whereinto charged particles that have traversed or scattered inside the sample enter, causing a light to be emitted therefrom, which is collected and detected efficiently using a light transmission means (203) to generate a transmission charged particle image of the sample.

Abstract: Provided is a catalyst for transesterification reactions, which contains an iron salen complex. Also provided is a method for producing an ester compound, which is characterized by carrying out a transesterification reaction between a starting material ester and a starting material alcohol with use of the catalyst.

Abstract: In a floor panel provided with upper and lower members which have concave spaces and side surfaces having heights and are formed as a box shape, and structured such that the upper and lower members are combined up and down so as to communicate the respective concave spaces so as to form an internal space in an inner portion, the floor panel has a joint portion in which height leading end portions of the side surfaces of the upper and lower members are folded so as to enwrap each other so as to be connected, and the joint portion is arranged in a height midstream portion of the side surface of the floor panel, and is arranged at a position which is retreated to an inner side of the floor panel in relation to the side surface in both height end sides of the floor panel.

Abstract: Provided is a base isolation floor structure containing a base isolation frame containing plural frames, and plural base isolation bearings that support the base isolation frame, in which the base isolation bearing contains a base isolation structure that has plural rolling member and is disposed horizontally movably freely on a floor surface, a connecting member that is disposed above the base isolation structure and is connected to the base isolation frame, an elastic plate member that is disposed between the connecting member and the base isolation structure, and a rod member having one end thereof that extends downward and is fixed to the base isolation structure, and the other end thereof that extends upward and is inserted with an allowance into a through hole formed in the connecting member.

Abstract: Since a diffraction phenomenon occurs in the electron beam passing through a differential evacuation hole, an electron beam whose probe diameter is narrowed cannot pass through a hole having an aspect ratio of a predetermined value or more, and accordingly, a degree in vacuum on the electron beam side cannot be improved. By providing a differential evacuation hole with a high aspect ratio in an ion beam device, it becomes possible to obtain an observed image on a sample surface, with the sample being placed under the atmospheric pressure or a pressure similar thereto, in a state where the degree of vacuum on the ion beam side is stabilized. Moreover, by processing the differential evacuation hole by using an ion beam each time it is applied, both a normal image observation with high resolution and an image observation under atmospheric pressure or a pressure similar thereto can be carried out.

Abstract: The invention provides a floor panel which can reduce a material cost and achieve a weight saving, by easily carrying out a press drawing process. In a floor panel in which an upper member and a lower member are joined in their peripheral edge portions and an internal space is formed in an inner portion of the floor panel, an opening portion intruding approximately as a rectangular shape into an inner side of the floor panel is formed in a side plate portion of each of the upper member and the lower member, and a shape of the opening portion is formed as such a curved shape that two internal corner portions intrude into the inner side of the floor panel than the other approximately linear portions than the internal corner portions, in a whole or a part of a horizontal cross section.