Abstract: A film-forming apparatus and film-forming method comprising, a chamber, a first gas supply unit supplying a reaction gas for a film-forming process to the chamber, a substrate-supporting portion supporting a substrate placed in the chamber, a heating unit heating the substrate from below the substrate-supporting portion, a rotary drum supporting the substrate-supporting portion on a top thereof, and including the heating unit disposed therein, a rotary shaft disposed in a lower part of the chamber, and rotating the rotary drum, a reflector reflecting heat from the heating unit, surrounding the rotary drum, and being disposed so as to have an upper end higher in height than an upper end of the substrate-supporting portion, and a second gas supply unit supplying a hydrogen gas or an inert gas between the rotary drum and the reflector.

Abstract: A vapor growth apparatus including: a reaction chamber configured to lod a wafer; a gas supply mechanism which supplies process gas into the reaction chamber; a support unit for placing the wafer; a heater for heating the wafer from below; a rotation control unit for rotating the wafer; a gas exhaust mechanism including an exhaust port which exhausts gas from the reaction chamber; a reflector provided below the heater for reflecting heat from the heater onto a rear face of the wafer; and a vertical drive unit for vertically moving the reflector.

Abstract: A vehicle wheel bearing apparatus has an outer member, an inner member, double row balls freely rollably contained between the inner raceway surfaces and the outer raceway surfaces, respectively, of the inner member and the outer member. The inner ring is axially secured relative to the wheel hub by a caulked portion. A tapered auxiliary raceway surface is formed on the outer circumference of the inner ring near its inner raceway surface. A chamfered portion is formed between the outer circumference and the caulked end face of the inner ring. The chamfered portion has a circular arc cross-section. The radius of curvature of the circular arc cross-section of the chamfered portion is set within a range of R1.2-R3.0 mm.

Abstract: An apparatus for bending a workpiece comprises a stretching device for stretching the workpiece. In the process for bending the workpiece, an inclination angle made by a direction a tension force is acted to the workpiece and a direction a stretching forth is applied to the workpiece by the stretching member is detected. The tension force acted to the workpiece is controlled in such a manner that the stretching force from the stretching member is controlled in consideration of the inclination angle. Accordingly, the amount of the spring back after bending is uniform and an accuracy of the dimension of the bent workpiece is improved.