Patents by Inventor Terry L. Gilton

Terry L. Gilton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20040161874
    Abstract: A method of metal doping a chalcogenide material includes forming a metal over a substrate. A chalcogenide material is formed on the metal. Irradiating is conducted through the chalcogenide material to the metal effective to break a chalcogenide bond of the chalcogenide material at an interface of the metal and chalcogenide material and diffuse at least some of the metal outwardly into the chalcogenide material. A method of metal doping a chalcogenide material includes surrounding exposed outer surfaces of a projecting metal mass with chalcogenide material. Irradiating is conducted through the chalcogenide material to the projecting metal mass effective to break a chalcogenide bond of the chalcogenide material at an interface of the projecting metal mass outer surfaces and diffuse at least some of the projecting metal mass outwardly into the chalcogenide material. In certain aspects, the above implementations are incorporated in methods of forming non-volatile resistance variable devices.
    Type: Application
    Filed: February 13, 2004
    Publication date: August 19, 2004
    Inventors: John T. Moore, Terry L. Gilton
  • Publication number: 20040161894
    Abstract: In one implementation, a non-volatile resistance variable device includes a body formed of a voltage or current controlled resistance setable material, and at least two spaced electrodes on the body. The body includes a surface extending from one of the electrodes to the other of the electrodes. The surface has at least one surface striation extending from proximate the one electrode to proximate the other electrode at least when the body of said material is in a highest of selected resistance setable states. In one implementation, a method includes structurally changing a non-volatile device having a body formed of a voltage or current controlled resistance setable material and at least two spaced electrodes on the body. The body has a surface extending from one of the electrodes to the other of the electrodes, and the surface is formed to comprise at least one surface striation extending from proximate the one electrode to proximate the other electrode.
    Type: Application
    Filed: February 13, 2004
    Publication date: August 19, 2004
    Inventor: Terry L. Gilton
  • Publication number: 20040157417
    Abstract: The invention relates to the fabrication of a resistance variable material cell or programmable metallization cell. The processes described herein can form a metal-rich metal chalcogenide, such as, for example, silver-rich silver selenide. Advantageously, the processes can form the metal-rich metal chalcogenide without the use of photodoping techniques and without direct deposition of the metal. For example, the process can remove selenium from silver selenide. One embodiment of the process implants oxygen to silver selenide to form selenium oxide. The selenium oxide is then removed by annealing, which results in silver-rich silver selenide. Advantageously, the processes can dope silver into a variety of materials, including non-transparent materials, with relatively high uniformity and with relatively precise control.
    Type: Application
    Filed: February 3, 2004
    Publication date: August 12, 2004
    Inventors: John T. Moore, Terry L. Gilton, Kristy A. Campbell
  • Publication number: 20040157416
    Abstract: A method of metal doping a chalcogenide material includes forming a metal over a substrate. A chalcogenide material is formed on the metal. Irradiating is conducted through the chalcogenide material to the metal effective to break a chalcogenide bond of the chalcogenide material at an interface of the metal and chalcogenide material and diffuse at least some of the metal outwardly into the chalcogenide material. A method of metal doping a chalcogenide material includes surrounding exposed outer surfaces of a projecting metal mass with chalcogenide material. Irradiating is conducted through the chalcogenide material to the projecting metal mass effective to break a chalcogenide bond of the chalcogenide material at an interface of the projecting metal mass outer surfaces and diffuse at least some of the projecting metal mass outwardly into the chalcogenide material. In certain aspects, the above implementations are incorporated in methods of forming non-volatile resistance variable devices.
    Type: Application
    Filed: February 10, 2004
    Publication date: August 12, 2004
    Inventors: John T. Moore, Terry L. Gilton
  • Patent number: 6762057
    Abstract: A sample separation apparatus including a porous, or rough, capillary column. The porous capillary column includes a matrix which defines pores, and may be formed from a material such as porous silicon. Alternatively, the capillary column may have a rough surface of hemispherical grain silicon. The capillary column is defined in a surface of a substrate, such as silicon. The sample separation apparatus may include a stationary phase or a capture substrate disposed on the surfaces thereof. The sample separation apparatus may also include a detector positioned proximate the capillary column. A variation of the sample separation apparatus includes an electrode proximate each end of the capillary column. The sample separation apparatus may be employed to effect various types of chromatographic separation, electrophoretic separation, and analyte identification.
    Type: Grant
    Filed: November 18, 1999
    Date of Patent: July 13, 2004
    Assignee: Micron Technology, Inc.
    Inventor: Terry L. Gilton
  • Patent number: 6756301
    Abstract: A method of forming a metal seed layer, preferably a copper layer, for subsequent electrochemical deposition. The metal seed layer is formed by the oxidation-reduction reaction of a metal salt with a reducing agent present in a layer on the substrate to be plated. Metal interconnects for semiconductor devices may be produced by the method, which has the advantage of forming the metal seed layer by a simple electrochemical plating process that may be combined with the plating of the interconnect itself as a single-bath operation.
    Type: Grant
    Filed: November 1, 2002
    Date of Patent: June 29, 2004
    Assignee: Micron Technology, Inc.
    Inventors: Terry L. Gilton, Dinesh Chopra
  • Patent number: 6749715
    Abstract: A method and apparatus for analyzing a semiconductor surface obtains a sample from a localized section of a wafer. The sample is obtained by isolating a section of a wafer with a sampling apparatus, dispensing liquid onto the isolated section of the wafer, dissolving compounds of interest in the liquid, removing a portion of the liquid, and analyzing the liquid and dissolved compounds of interest. The liquid can be an etching solution, an organic solvent, or other suitable solvent. Samples and analyses can, thus, be obtained as a function of position on the wafer. Analyses as a function of depth can also be determined by sampling and analyzing an isolated portion of the wafer as a function of time.
    Type: Grant
    Filed: May 24, 2001
    Date of Patent: June 15, 2004
    Assignee: Micron Technology, Inc.
    Inventors: Terry L. Gilton, Troy R. Sorensen
  • Patent number: 6751114
    Abstract: A method for reading and verifying the state of a memory cell during a write operation before writing allows a decision to be made whether to write to the cell or not based on the current state of the cell.
    Type: Grant
    Filed: March 28, 2002
    Date of Patent: June 15, 2004
    Assignee: Micron Technology, Inc.
    Inventors: Terry L. Gilton, John T. Moore
  • Patent number: 6750154
    Abstract: A method for moving resist stripper across the surface of a semiconductor substrate. The method includes applying a wet chemical resist stripper, such as an organic or oxidizing wet chemical resist stripper, to at least a portion of a photomask positioned over the semiconductor substrate. A carrier fluid, such as a gas, is then directed toward the semiconductor substrate so as to move the resist stripper across the substrate. The carrier fluid may be directed toward the substrate as the resist stripper is being applied thereto or following application of the resist stripper. A system for effecting the method is also disclosed.
    Type: Grant
    Filed: July 8, 2002
    Date of Patent: June 15, 2004
    Assignee: Micron Technology, Inc.
    Inventor: Terry L. Gilton
  • Publication number: 20040102046
    Abstract: A semiconductor processing method includes forming an antireflective coating comprising Ge and Se over a substrate to be patterned. Photoresist is formed over the antireflective coating. The photoresist is exposed to actinic radiation effective to pattern the photoresist. The antireflective coating reduces reflection of actinic radiation during the exposing than would otherwise occur under identical conditions in the absence of the antireflective coating. After the exposing, the substrate is patterned through openings in the photoresist and the antireflective coating using the photoresist and the antireflective coating as a mask. In one implementation, after patterning the substrate, the photoresist and the antireflective coating are chemically etched substantially completely from the substrate using a single etching chemistry.
    Type: Application
    Filed: November 21, 2003
    Publication date: May 27, 2004
    Inventors: Terry L. Gilton, Steve W. Bowes, John T. Moore, Joseph F. Brooks, Kristy A. Campbell
  • Patent number: 6737726
    Abstract: In one implementation, a non-volatile resistance variable device includes a body formed of a voltage or current controlled resistance setable material, and at least two spaced electrodes on the body. The body includes a surface extending from one of the electrodes to the other of the electrodes. The surface has at least one surface striation extending from proximate the one electrode to proximate the other electrode at least when the body of said material is in a highest of selected resistance setable states. In one implementation, a method includes structurally changing a non-volatile device having a body formed of a voltage or current controlled resistance setable material and at least two spaced electrodes on the body. The body has a surface extending from one of the electrodes to the other of the electrodes, and the surface is formed to comprise at least one surface striation extending from proximate the one electrode to proximate the other electrode.
    Type: Grant
    Filed: October 3, 2002
    Date of Patent: May 18, 2004
    Assignee: Micron Technology, Inc.
    Inventor: Terry L. Gilton
  • Publication number: 20040084666
    Abstract: The invention includes a switchable circuit device. The device comprises a first conductive layer and a porous silicon matrix over the first conductive layer. A material is dispersed within pores of the porous silicon matrix, and the material has two stable states. A second conductive layer is formed over the porous silicon matrix. A current flow between the first and second conductive layers is influenced by which of the stable states the material is in.
    Type: Application
    Filed: October 27, 2003
    Publication date: May 6, 2004
    Inventor: Terry L. Gilton
  • Patent number: 6727192
    Abstract: A method of metal doping a chalcogenide material includes forming a metal over a substrate. A chalcogenide material is formed on the metal. Irradiating is conducted through the chalcogenide material to the metal effective to break a chalcogenide bond of the chalcogenide material at an interface of the metal and chalcogenide material and diffuse at least some of the metal outwardly into the chalcogenide material. A method of metal doping a chalcogenide material includes surrounding exposed outer surfaces of a projecting metal mass with chalcogenide material. Irradiating is conducted through the chalcogenide material to the projecting metal mass effective to break a chalcogenide bond of the chalcogenide material at an interface of the projecting metal mass outer surfaces and diffuse at least some of the projecting metal mass outwardly into the chalcogenide material. In certain aspects, the above implementations are incorporated in methods of forming non-volatile resistance variable devices.
    Type: Grant
    Filed: March 1, 2001
    Date of Patent: April 27, 2004
    Assignee: Micron Technology, Inc.
    Inventors: John T. Moore, Terry L. Gilton
  • Publication number: 20040071012
    Abstract: A non-volatile memory device, such as a Programmable Conductor Random Access Memory (PCRAM) device, having an exemplary memory stored state retention characteristic is disclosed. There is provided a method for retaining stored states in a random access memory device generally comprising the steps of programming a memory cell or an array of memory cells by applying a first voltage to the cells and stabilizing the cells by applying a second voltage to the cells, which is less than the first voltage. The second voltage, which acts as a stabilizing voltage, may be a read-out voltage. The second voltage may also be continuously applied to the cells. The second voltage may also be provided as a sweep voltage, a pulse voltage, or a step voltage.
    Type: Application
    Filed: November 5, 2003
    Publication date: April 15, 2004
    Inventors: Terry L. Gilton, Kristy A. Campbell
  • Patent number: 6713339
    Abstract: The invention includes a switchable circuit device. The device comprises a first conductive layer and a porous silicon matrix over the first conductive layer. A material is dispersed within pores of the porous silicon matrix, and the material has two stable states. A second conductive layer is formed over the porous silicon matrix. A current flow between the first and second conductive layers is influenced by which of the stable states the material is in.
    Type: Grant
    Filed: June 21, 2002
    Date of Patent: March 30, 2004
    Assignee: Micron Technology, Inc.
    Inventor: Terry L. Gilton
  • Patent number: 6709887
    Abstract: A method of metal doping a chalcogenide material includes forming a metal over a substrate. A chalcogenide material is formed on the metal. Irradiating is conducted through the chalcogenide material to the metal effective to break a chalcogenide bond of the chalcogenide material at an interface of the metal and chalcogenide material and diffuse at least some of the metal outwardly into the chalcogenide material. A method of metal doping a chalcogenide material includes surrounding exposed outer surfaces of a projecting metal mass with chalcogenide material. Irradiating is conducted projecting metal mass outer surfaces and diffuse at least some of the projecting metal mass outwardly into the chalcogenide material. In certain aspects, the above implementations are incorporated in methods of forming non-volatile resistance variable devices.
    Type: Grant
    Filed: October 31, 2001
    Date of Patent: March 23, 2004
    Assignee: Micron Technology, Inc.
    Inventors: John T. Moore, Terry L. Gilton
  • Patent number: 6710423
    Abstract: A method of metal doping a chalcogenide material includes forming a metal over a substrate. A chalcogenide material is formed on the metal. Irradiating is conducted through the chalcogenide material to the metal effective to break a chalcogenide bond of the chalcogenide material at an interface of the metal and chalcogenide material and diffuse at least some of the metal outwardly into the chalcogenide material. A method of metal doping a chalcogenide material includes surrounding exposed outer surfaces of a projecting metal mass with chalcogenide material. Irradiating is conducted through the chalcogenide material to the projecting metal mass effective to break a chalcogenide bond of the chalcogenide material at an interface of the projecting metal mass outer surfaces and diffuse at least some of the projecting metal mass outwardly into the chalcogenide material. In certain aspects, the above implementations are incorporated in methods of forming non-volatile resistance variable devices.
    Type: Grant
    Filed: August 23, 2002
    Date of Patent: March 23, 2004
    Assignee: Micron Technology, Inc.
    Inventors: John T. Moore, Terry L. Gilton
  • Publication number: 20040053461
    Abstract: The present invention provides a design for a PCRAM element which incorporates multiple metal-containing germanium-selenide glass layers of diverse stoichiometries. The present invention also provides a method of fabricating the disclosed PCRAM structure.
    Type: Application
    Filed: August 29, 2002
    Publication date: March 18, 2004
    Inventors: John T. Moore, Terry L. Gilton, Kristy A. Campbell
  • Publication number: 20040042259
    Abstract: A resistance variable memory element with improved data retention and switching characteristics switched between resistance memory states upon the application of write pulses having the same polarity. The resistance variable memory element can be provided having at least one silver-selenide layer in between glass layers, the glass layers are a chalcogenide glass having a GexSe100-x composition.
    Type: Application
    Filed: August 29, 2002
    Publication date: March 4, 2004
    Inventors: Kristy A. Campbell, John T. Moore, Terry L. Gilton
  • Publication number: 20040043816
    Abstract: A method for transferring data from a display device to an electronic device includes displaying a visual pattern on the display device. The visual pattern represents the data being transferred. In the electronic device, the visual pattern is received and processed to obtain the data represented by the visual pattern. The visual pattern may be formed by an array of data elements, each data element representing at least one bit of data being transferred to the electronic device. A series of such arrays may be sequentially displayed on the display device. The visual pattern may alternatively be formed by a bar code that represents bits of data being transferred to the electronic device. A series of bar codes may be sequentially displayed on the display device.
    Type: Application
    Filed: August 27, 2002
    Publication date: March 4, 2004
    Inventor: Terry L. Gilton