Abstract: There exist a pattern-dense region where patterns having an F-letter shape are dense and a pattern-interspersed region where small rectangular dummy patterns are interspersed. In the pattern-interspersed region, the dummy patterns are arranged in a manner that at least one dummy pattern exists in a scan target range of a mask pattern defect inspecting apparatus. With the dummy patterns formed in the pattern-interspersed region at the intervals as described above, when one scan target range is scanned by the mask pattern defect inspecting apparatus, at least one dummy pattern is included in the scan target range in the pattern-interspersed region. Therefore, mix-up of alignment in this range is prevented from occurring, which makes it possible to perform proper defect inspection.

Abstract: Exposure for performing patterning in which micropatterns differing in pitch exist in close vicinity to one another is handled, and micropatterns are formed with high accuracy with sufficient manufacture process margins without using a photomask complicated in manufacturing process at high manufacture cost like an alternating phase shift mask. A light intensity distribution of irradiation light constituted of double pole illuminations is formed to correspond to L&S patterns. The double pole illumination is constituted of a pair of illumination modes, and the double pole illumination is constituted of a pair of illumination modes.

Abstract: Double exposure is performed by using a pair of photomasks, an attenuated phase shift mask or the like which is not an alternating phase shift mask, and a pattern is transferred onto a photoresist. Here, on the occasion of performing exposure with the photomask for forming a finer pattern, double pole illumination is used as an illumination system.

Abstract: A micropattern is formed with high accuracy with a sufficient manufacture process margin without using a photomask complicated in manufacture process at high manufacture cost like an alternating phase shift mask. Double exposure is performed by using a pair of photomasks such as an ordinary chrome mask, an attenuated phase shift mask or the like which is not an alternating phase shift mask, and a pattern is transferred onto a photoresist. Here, on the occasion of performing exposure with the photomask for forming a finer pattern, double pole illumination is used as an illumination system.

Abstract: An amount is flare is measured by a method including steps of applying a photosensitive material to a substrate; exposing a part of the photosensitive material using a mask including a transmitting section which has no pattern so that the part of the photosensitive material varies in thickness; and measuring an amount of flare based on a distribution of film amounts of the photosensitive material remaining in a first region corresponding to the transmitting section and on a second region other than the first region after the step of exposing.

Abstract: In an image display device which employs pulse width modulation driving, a voltage which is less than a voltage supplied to signal lines is applied to pixel electrodes. Tones are displayed by shifting phases of waveforms of the signal lines and scanning lines, and polarities of pixels in a signal line direction are inverted alternately. This prevents increase in power consumption which is caused by pulse intervals which become too small at high tone levels, in addition to preventing change in tone level due to external factors such as temperature, or signal delays in a driver or wiring.

Abstract: An image display apparatus comprising an image display device, a shield member, and a drive mechanism. The drive mechanism drives the shield member in synchronization with display of the image.

Abstract: There exist a pattern-dense region where patterns having an F-letter shape are dense and a pattern-interspersed region where small rectangular dummy patterns are interspersed. In the pattern-interspersed region, the dummy patterns are arranged in a manner that at least one dummy pattern exists in a scan target range of a mask pattern defect inspecting apparatus. With the dummy patterns formed in the pattern-interspersed region at the intervals as described above, when one scan target range is scanned by the mask pattern defect inspecting apparatus, at least one dummy pattern is included in the scan target range in the pattern-interspersed region. Therefore, mix-up of alignment in this range is prevented from occurring, which makes it possible to perform proper defect inspection.

Abstract: An active matrix substrate includes: a base plate; pixel electrodes formed on the base plate; pixel switching elements, each being connected to associated one of the pixel electrodes; gate lines for controlling operations of the pixel switching elements; data lines, each being connected to associated ones of the pixel electrodes by way of associated ones of the pixel switching elements so as to supply a data signal therethrough; data line switching elements, each having one of its terminals connected to associated one of the data lines; signal input terminals, each being electrically connected to another terminal at associated ones of the data line switching elements; a data line branching section provided between the signal input terminals and the data line switching elements; and a control line connected to the data line switching elements to selectively turn ON or OFF the data line switching elements.

Abstract: Input position is accurately detected. In an x-detection period of a non-display period, a source drive circuit simultaneously applies to all signal wiring lines a pulse of a peak value proportional to a distance from a gate drive circuit. A coordinate detection circuit obtains an x-coordinate on the basis of a voltage induced at a pen corresponding to the peak value (x-coordinate) of the applied pulse. In a y-detection period, a pulse generation circuit applies one pulse to a common line. The pen detects a potential variation in amplitude proportional to a distance (y-coordinate) from the source drive circuit, generated approximately simultaneously on all the signal wiring lines via a capacitance. The coordinate detection circuit obtains the y-coordinate similarly to the case of x-coordinate detection.

Abstract: There exist a pattern-dense region where patterns having an F-letter shape are dense and a pattern-interspersed region where small rectangular dummy patterns are interspersed. In the pattern-interspersed region, the dummy patterns are arranged in a manner that at least one dummy pattern exists in a scan target range of a mask pattern defect inspecting apparatus. With the dummy patterns formed in the pattern-interspersed region at the intervals as described above, when one scan target range is scanned by the mask pattern defect inspecting apparatus, at least one dummy pattern is included in the scan target range in the pattern-interspersed region. Therefore, mix-up of alignment in this range is prevented from occurring, which makes it possible to perform proper defect inspection.

Abstract: A fixing band-tightening apparatus comprises a holding section for gripping a shaft section at both ends in an axial direction, the holding section being provided rotatably in a circumferential direction in accordance with a driving action of a rotary driving source, a stopper section arranged in a lateral direction substantially horizontal with respect to the holding section, for positioning a projection of a fixing band in the lateral direction except for a vertical direction, and a band-tightening section for forcibly nipping the projection of the fixing band positioned by the stopper section to tighten the fixing band.

Abstract: A display device includes an ID storage section which is a read-only storage and stores a display ID being exclusive to the display device and readable by a computer. An ID judgment section judges whether or not the display device is entitled to reception of content data, based on the display ID read out from the display device. When the display device is authenticated, a communication section of a content data delivery device delivers the content data to the display device. As a result, individual authentication of the display device and selective delivery of the content data to the display device, by the content data delivery device, can be realized. Namely, it is possible to provide the display device, which ensures individual authentication, and to which content data can be selectively delivered.

Abstract: A display device includes a display panel, a first protection layer having viscoelasticity, and a second protection layer having an elastic modulus higher than first protection layer. The first protection layer covers one face of the display panel and the second protection layer is arranged on the first protection layer to cover the display panel.

Abstract: A coordinate input system includes: a digitizer for indicating coordinate positions; a controller for extracting a plurality of coordinate data units from the indicated coordinate positions; a temporary storage memory for sequentially storing the extracted coordinate data units; a cosine value deriving section for defining vectors each connecting two of points associated with the respective coordinate data units and for deriving a cosine value of an angle formed by adjacent two of the vectors sandwiching a point selected from the points; and a control circuit for discarding one of the coordinate data units associated with the selected point when the cosine value is smaller than a given value and for transmitting and inputting one of the coordinate data units associated with the selected point when the cosine value is equal to or larger than the given value.

Abstract: A display device is arranged in such a manner that rows on the screen on which pixel electrodes are provided in a matrix manner are sequentially selected so as to be scanned by scanning signal lines formed on a substrate, and a data signal is supplied from gray scale signal lines, which are formed on a counter substrate facing the substrate, to the pixel electrodes on the selected row, so that the display is carried out. Also, an idle period, (i) which is longer than a scanning period for scanning the screen once and (ii) during which period all scanning signal lines are in the state of non-scanning, is provided, and the scanning period and the idle period constitute one vertical period. With this arrangement, it is possible to (1) provide a driving method of a display device by which method the reduction of power consumption is sufficiently realized without causing the degradation of the display qualities, and (2) provide a display device using the same.

Abstract: An exposure measurement apparatus is configured by including a size measurer measuring respective sizes of at least a pair of transferred patterns having mutually different optimal focus positions out of a plurality of transferred patterns formed by being transferred onto a transfer object, a difference value calculator obtaining a difference value between the size of one transferred pattern and the size of the other transferred pattern, a focus variation amount calculator calculating a focus variation amount of the transfer object using the difference value, and an exposure variation amount calculator calculating an exposure error amount of a wafer.

Abstract: Data (pattern data) (21) of a mask data (2) to form a mask pattern is made into an octagon. An electron-beam lithography system has a high resolution, and it requires a polygonal pattern data having many more vertexes such as an octagon. With the use of such a pattern data, a photomask (3) having a mask pattern (22) being an aperture closer to a circle (approximated circle) can be obtained. Backed by this, it is possible to form resist patterns at smaller pitches without causing failures in manufacturing a device such as a reduction in resist film thickness, a disconnection between actual patterns such as of contact holes, and so forth. Further, it is possible to eliminate the factor of mask manufacturing process from the optical proximity correction to simplify the optical proximity correction, so that desired macro actual patterns can be formed easily and accurately.

Abstract: A programmable logic IC and a ROM are set in a controller section between a display and ICs (an IC for wireless communication and an IF IC). In each of plural program sets stored in the ROM, a series of operation up to the time that image data, after being read from the IC for wireless communication and converted into a logic signal, is sent to the display is described. On the other hand, the programmable logic IC changes the program set being read, according to what is displayed on the display, television images, a monitor image supplied from a computer, or image data from a memory card. This makes it possible to attain an image-display-device controller circuit that has a small circuit scale, consumes a small amount of power, and is small in size and weight are small, but can change operation.

Abstract: A shape value of a pattern having a pivotal characteristic is measured (step S1), an exposure energy variation is detected from the measured value, a first data base is accessed using a result of the measurement of the shape value (Step S2), an exposure energy is calculated (Step S3), a shape value of an isolated pattern is measured (Step S4), a second data base is accessed using a result of the measurement (Step S5), and a focal variation is determined using the calculated proper exposure energy (Step S6).