Abstract: A vapor deposition apparatus is provided, which does not cause changes in composition, decomposition and quality change of an organic vapor deposition material. The organic vapor deposition material is placed on a conveying unit by an amount for a single substrate, and conveyed into a vapor deposition vessel preliminarily heated. Since a small amount of the organic vapor deposition material is heated and exhausted through generation of an organic material vapor under heating condition for each substrate, neither decomposition nor quality change with moisture occurs because heating time is short. Even though different organic compounds are mixed, no change in composition occurs so that an organic vapor deposition material in which a base material is mixed with a coloring substance can be pooled in a pooling tank and then placed in the conveying unit.

Abstract: An inkjet printhead substrate includes: a heat generating element configured to generate energy for ejecting ink; an electric wire electrically connecting the heat generating element and an electrode lead provided on a flexible film wiring substrate; a protecting film configured to protect the electric wire; an electrode pad to which the electrode lead is connected, the electrode pad being formed by providing an opening in the protecting film at a position above the electric wire; a region to which a sealing resin configured to protect an electrically connected portion of the electrode pad and the electrode lead is to be applied; and an ink-detecting electrode composed of a metal wire and formed at the region to which the sealing resin is to be applied. The metal wire has a smaller width than an opening provided in the protecting film from which the metal wire is exposed.

Abstract: Even when a contact connection failure of electrical connection occurs between a recording head including a recording element substrate, and a recording apparatus, continuous driving of the same heat generating resistive element is suppressed. Blocks in which heat generating resistive elements are not driven are prepared beforehand in a selection target of blocks to be driven in a time-division manner. When an input signal is in a predetermined condition, the block selection target is set to blocks in which heat generating resistive elements are not driven.

Abstract: An inkjet recording head includes a connection-state output circuit provided on the recording element substrate of a recording head, where the connection-state output circuit externally transmits data of the connection state of each of input signal ends. An output from the connection-state output circuit is activated when the same logic as that used when signals are pulled up and/or pulled down is used.

Abstract: A switch valve having a long span of life is provided. The switch valve 70 of the present invention has a low-melting-point metal 76 having a surface on which a blocking member contacts, with the low-melting-point metal 76 melted, thereby a closed state appears in which an inner space of the switch valve 70 is split up into an inner space and an outer space of the blocking member 72. When the inner space and the outer space of the blocking member 72 are connected in the inner space of the switch valve 70, outside devices are blocked from each other in the closed state. The outside devices are connected to each other in an opened state in which the lower end of the blocking member 72 is spaced away from the low-melting-point metal 76.

Abstract: A dense cathode electrode layer having a step coverage is to be formed on an electron injection layer. The electron injection layer in which fine particles of an electron injection material is dispersed in an organic thin film having an electron transport property is formed by vapor co-depositing the electron transport material and the electron injection material; and a cathode electrode layer made of an alloy layer of MgAg is formed by a sputtering method. Since lower portions of the fine particles of the electron injection material dispersed in the surface of the organic thin film are buried in the organic thin film, the electron injection particles are not peeled off even if sputtering particles collide with the electron injection particles, and the upper portions are in contact with the cathode electrode layer formed by sputtering particles.

Abstract: A liquid discharge head substrate includes an external terminal, a diode, a first conductive layer, a second conductive layer, and a third conductive layer. The external terminal is configured to connect to an external. The first conductive layer is connected to the external terminal for causing an input current to flow from the external terminal, and the diode includes an anode and a cathode. The second conductive layer is connected to the first conductive layer and one electrode of the anode and cathode, and causes a surge current generated when a surge voltage is applied from the external terminal, to flow from the first conductive layer to the one electrode. The third conductive layer is connected to the other electrode of the anode and the cathode and passes the surge current flowing from the one electrode to the other electrode.

Abstract: A display device free from a deterioration in luminescence efficiency is provided. In the display device of the present invention, since an inorganic film is formed after concave parts in which luminescence portions are positioned are filled with a filling film, no crack is formed in the inorganic film. Since the inorganic film is made of a material having high gas tightness and heat conductivity (such as, diamond-like carbon or AlN), water and oxygen will hardly penetrate the luminescence portions, and heat of the luminescence portions will be conducted to the inorganic film, so that the luminescence portions do not reach high temperatures. Further, since a gap between first and second panels is filled with a resin film, the atmosphere does not enter from the outside. Because the luminescence portions are free from damage from water, oxygen and heat, the display device of the present invention has a prolonged life.

Abstract: A switch valve having a long span of life is provided. The switch valve 70 of the present invention has a low-melting-point metal 76 having a surface on which a blocking member contacts, with the low-melting-point metal 76 melted, thereby a closed state appears in which an inner space of the switch valve 70 is split up into an inner space and an outer space of the blocking member 72. When the inner space and the outer space of the blocking member 72 are connected in the inner space of the switch valve 70, outside devices are blocked from each other in the closed state. The outside devices are connected to each other in an opened state in which the lower end of the blocking member 72 is spaced away from the low-melting-point metal 76.

Abstract: A film forming source capable of forming a thin film having a good film quality is provided. Since each switch valve becomes a closed state when a blocking member closely contacts a melted metal, a gas blocking performance in the closed state is high, and no dust is generated. When vapors of different vapor deposition materials are generated in a plurality of vapor generating units, the vapor generated in a selected vapor generating unit is not mixed with the vapor from another vapor deposition apparatus. Therefore, a vapor deposition material not to be film-formed is not mixed in, and contamination due to dust generation does not occur. Consequently, a thin film having good film quality can be obtained.

Abstract: An organic thin film having excellent film quality is formed. A vapor generator of the present invention has an evaporation chamber, a dispense head and a tank. A vapor deposition material is in the liquid state, stored in the tank, and fed to the dispense head from the tank. The dispense head dispenses the vapor deposition material fed inside thereof from a dispense orifice and disposes the vapor deposition material on a heating member inside the evaporation chamber. The dispense head accurately feeds the vapor deposition material by a required amount. Because only the required amount of the vapor deposition material is heated, an organic thin film excellent in film quality is formed without deterioration.

Abstract: A display device free from a deterioration in luminescence efficiency is provided. In the display device of the present invention, since an inorganic film is formed after concave parts in which luminescence portions are positioned are filled with a filling film, no crack is formed in the inorganic film. Since the inorganic film is made of a material having high gas tightness and heat conductivity (such as, diamond-like carbon or AlN), water and oxygen will hardly penetrate the luminescence portions, and heat of the luminescence portions will be conducted to the inorganic film, so that the luminescence portions do not reach high temperatures. Further, since a gap between first and second panels is filled with a resin film, the atmosphere does not enter from the outside. Because the luminescence portions are free from damage from water, oxygen and heat, the display device of the present invention has a prolonged life.

Abstract: A print head is provided that well preserves ink characteristics upon printing by way of performing effective ink preliminary heating. The print head has heaters, and ejection openings formed at locations corresponding to the heaters. Viewed from the side from which ink is ejected, a sub-heater is established in the print head between the ink supply port and the print elements such as to surround the ink supply port.

Abstract: A technology for organic material vapor deposition is provided, which can enhance efficiency in the evaporation material, prevent time-degradation of the evaporation material, and surely prevent any mask deformation by heat during vapor deposition. An organic material evaporation source including: a shower-plate shape emission part having a plurality of emission orifices arranged within a plane thereof; a feeding pipe provided inside the emission part for feeding the vapor of introduced organic evaporation material into the emission part via the blowout orifices by emitting the vapor toward the bottom part of the emission part; and a cooling means provided at least in a position on the emission orifice side of the emission part. The cooling means is formed by, for example, covering the entire emission part, and has vapor passage holes for allowing the organic evaporation material vapor to pass in positions corresponding to the emission orifice of the emission part.

Abstract: A dense cathode electrode layer having a step coverage is to be formed on an electron injection layer. The electron injection layer in which fine particles of an electron injection material is dispersed in an organic thin film having an electron transport property is formed by vapor co-depositing the electron transport material and the electron injection material; and a cathode electrode layer made of an alloy layer of MgAg is formed by a sputtering method. Since lower portions of the fine particles of the electron injection material dispersed in the surface of the organic thin film are buried in the organic thin film, the electron injection particles are not peeled off even if sputtering particles collide with the electron injection particles, and the upper portions are in contact with the cathode electrode layer formed by sputtering particles.

Abstract: A thin film of a uniform film thickness is formed even without increasing the film deposition rate. The temperature of an evaporation device disposed in an evaporation chamber is raised in advance, and an organic material is dropped from a supply unit onto an evaporation surface of the evaporation device; and when the organic material is evaporated, a heated carrier gas is introduced into the evaporation chamber, and is mixed in the evaporation chamber and is introduced into a discharger. While a molecular flow is formed in the discharger in a case that only the organic material vapor is introduced into the discharger, the pressure within the discharger is raised due to the carrier gas, so that a viscous flow is formed and the mixed gas is filled in the discharger and is uniformly discharged. The organic material may be supplied by a small amount and the film deposition rate may not become too high.

Abstract: A thin film having a uniform film thickness is formed without increasing the film deposition rate. When an organic material is supplied from a supply unit to an evaporation chamber and evaporated on an evaporation surface of an evaporation device, a heating filter provided in advance is heated, and a carrier gas is made to flow therein to be heated and is introduced into the evaporation chamber. Organic material vapor thus produced and the carrier gas are mixed; and the mixed gas is introduced into a discharger. Whereas a molecular flow is formed in the discharger in a case that only the organic material vapor is introduced into the discharger, the pressure inside the discharger is raised by the carrier gas so that a viscous flow is formed. Thus, the mixed gas is filled in the discharger and uniformly discharged. It is preferable that the organic material be supplied by a small amount so as not to make the film deposition rate too high.

Abstract: Contamination of organic EL device is prevented. After a colored layer of the first color is formed, a positioning device moves relatively a substrate and a mask inside the same vacuum chamber, and an opening of the mask is moved to a position above the region where a colored layer of the next color is to be formed. As a result, since the colored layers of two or more colors can be formed without changing the mask and the moving distance of the substrate during deposition becomes short, dust is not generated and contamination of the organic EL device is prevented.

Abstract: Even when a contact connection failure of electrical connection occurs between a recording head including a recording element substrate, and a recording apparatus, continuous driving of the same heat generating resistive element is suppressed. Blocks in which heat generating resistive elements are not driven are prepared beforehand in a selection target of blocks to be driven in a time-division manner. When an input signal is in a predetermined condition, the block selection target is set to blocks in which heat generating resistive elements are not driven.

Abstract: A vapor deposition apparatus capable of forming an organic thin film having a good film quality is provided. The vapor deposition apparatus of the present invention possesses an evaporating chamber and a vapor deposition case; and the vapor deposition case is connected with the evaporating chamber by a small hole. Since a vapor deposition material is fed into the evaporating chamber based on an amount necessary for each substrate, a large amount of the vapor deposition material is not heated for a long time period. Since the vapor deposition material is evaporated in the evaporating chamber, no liquid drops reach a substrate even during bumping. When the vapor deposition material is evaporated by irradiation with a laser beam, the vapor deposition material can be less chemically denatured.