Patents by Inventor Weileun Fang
Weileun Fang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20110125001Abstract: The present invention discloses a method for assembling a 3D microelectrode structure. Firstly, 2D microelectrode arrays are stacked to form a 3D microelectrode array via an auxiliary tool. Then, the 3D microelectrode array is assembled to a carrier chip to form a 3D microelectrode structure. The present invention uses an identical auxiliary tool to assemble various types of 2D microelectrode arrays having different shapes of probes to the same carrier chip. Therefore, the method of the present invention increases the design flexibility of probes. The present invention also discloses a 3D microelectrode structure, which is fabricated according to the method of the present invention and used to perform 3D measurement of biological tissues.Type: ApplicationFiled: November 25, 2009Publication date: May 26, 2011Inventors: Weileun FANG, Yu-Tao Lee, Yen-Chung Chang
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Patent number: 7849742Abstract: An out-of-plane sensing device is provided. A proof mass is movable with respect to a substrate. A frame is positioned on the substrate and encloses the proof mass. At least one spring connects the proof mass to the frame so that the spring will exert a force on the proof mass to make the proof mass move back to its equilibrium position when the proof mass moves perpendicularly to the substrate. An electrode extends from the proof mass toward the frame. A counter electrode extends from the frame toward the proof mass, wherein the projection of the electrode onto the substrate overlaps with that of the counter electrode onto the substrate.Type: GrantFiled: November 21, 2007Date of Patent: December 14, 2010Assignee: Pixart Imaging Inc.Inventors: Chuanwei Wang, Ming Han Tsai, Chih Ming Sun, Weileun Fang
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Publication number: 20100253457Abstract: A movable inductor using magnetism is provided. The movable inductor includes a substrate; a first structure layer disposed on the substrate, and having two protruding portions respectively disposed at two sides thereof; at least two fixing elements disposed on the substrate, and connected with the protruding portions; and a thermal bonding layer at least disposed on the fixing elements.Type: ApplicationFiled: June 23, 2009Publication date: October 7, 2010Applicant: National Tsing Hua UniversityInventors: Yu-Che Huang, Ben-Hwa Jang, Weileun Fang
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Publication number: 20100212425Abstract: Disclosed is a novel three-axis capacitive-type accelerometer implemented on SOI wafer. The accelerometer consists of four springs, one proof mass, four pairs of gap-closing sensing electrodes (each pair of gap-closing sensing electrode containing one movable electrode and one stationary electrode), and several metal-vias as the electrical interconnections. The movable electrodes are on the proof mass, whereas the stationary electrodes are fixed to the substrate. The three-axis accelerometer has five merits.Type: ApplicationFiled: September 9, 2009Publication date: August 26, 2010Applicant: National Tsing Hua UniversityInventors: Chia-Pao Hsu, Weileun Fang, Ming-Ching Wu
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Patent number: 7623303Abstract: A solid tunable micro optical device for an micro-optical system is provided. The sold tunable micro optical device includes a first annular piece, a micro-lens with a spherical surface configured on the first annular piece, and a deforming device coupled to the first annular piece for deforming the micro-lens.Type: GrantFiled: October 23, 2007Date of Patent: November 24, 2009Assignee: National Tsing Hua UniversityInventors: Weileun Fang, Sz-Yuan Lee, Hsi-Wen Tung, Wen-Chih Chen
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Publication number: 20090194892Abstract: A method of manufacturing an optical component is provided. The method comprises steps of providing a first liquid; providing a fluid, disposed above the first liquid, wherein an interface exists between the first liquid and the fluid; providing a polymer precursor at the interface; and solidifying the polymer precursor so as to form the optical component made by a polymer.Type: ApplicationFiled: January 21, 2009Publication date: August 6, 2009Applicant: NATIONAL TSING HUA UNIVERSITYInventors: Chih-Chun Lee, Sheng-Yi Hsiao, Weileun Fang
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Publication number: 20090101622Abstract: A method for fabricating micromachined structures is provided. A structure including a dielectric layer, a metal layer and a passivation layer is formed, wherein the dielectric layer has a via thereon. An etching window is formed on the passivation layer. An etching solution is poured into the via through the etching window to perform a process of etching. After etching, the etching solution is removed and the passivation layer is removed. Finally, the structure is etched again to form the micromachined structure.Type: ApplicationFiled: November 21, 2007Publication date: April 23, 2009Applicant: PIXART IMAGING INC.Inventors: Chuanwei WANG, Ming Han Tsai, Chih Ming Sun, Weileun Fang
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Publication number: 20090103170Abstract: A solid tunable micro optical device for an micro-optical system is provided. The sold tunable micro optical device includes a first annular piece, a micro-lens with a spherical surface configured on the first annular piece, and a deforming device coupled to the first annular piece for deforming the micro-lens.Type: ApplicationFiled: October 23, 2007Publication date: April 23, 2009Applicant: NATIONAL TSING HUA UNIVERSITYInventors: Weileun FANG, Sz-Yuan LEE, Hsi-Wen TUNG, Wen-Chih CHEN
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Publication number: 20090090184Abstract: An out-of-plane sensing device is provided. A proof mass is movable with respect to a substrate. A frame is positioned on the substrate and encloses the proof mass. At least one spring connects the proof mass to the frame so that the spring will exert a force on the proof mass to make the proof mass move back to its equilibrium position when the proof mass moves perpendicularly to the substrate. An electrode extends from the proof mass toward the frame. A counter electrode extends from the frame toward the proof mass, wherein the projection of the electrode onto the substrate overlaps with that of the counter electrode onto the substrate.Type: ApplicationFiled: November 21, 2007Publication date: April 9, 2009Applicant: PIXART IMAGING INC.Inventors: Chuanwei WANG, Ming Han Tsai, Chih Ming Sun, Weileun Fang
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Publication number: 20090075406Abstract: A method for manufacturing an MEMS device is provided. The method includes steps of a) providing a first substrate having a concavity located thereon, b) providing a second substrate having a connecting area and an actuating area respectively located thereon, c) forming plural microstructures in the actuating area, d) mounting a conducting element in the connecting area and the actuating area, e) forming an insulating layer on the conducting element and f) connecting the first substrate to the connecting area to form the MEMS device. The concavity contains the plural microstructures.Type: ApplicationFiled: December 2, 2008Publication date: March 19, 2009Applicant: WALSIN LIHWA CORP.Inventors: Mingching Wu, Hsueh-An Yang, Hung-Yi Lin, Weileun Fang
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Publication number: 20090047527Abstract: A magnetic element and its manufacturing method are provided. A magnetic element includes an actuation part having a first surface and a second surface, a torsion bar connected to the actuation part, and a frame connected to the first torsion bar, wherein the first surface of the actuation part is an uneven surface. The manufacturing method of the magnetic element starts with forming an passivation layer on a substrate and defining a special area by the mask method, then continues with forming the adhesion layer and electroplate-initializing layer on the substrate sequentially. The photoresist layer are formed and the magnetic-inductive material is electroformed on the electroplate area. Finally, the substrate is etched and the passivation layer is removed to obtain the magnetic element. The manufacturing method of magnetic element of the present invention can be applied in the microelectromechanical system field and other categories.Type: ApplicationFiled: January 14, 2008Publication date: February 19, 2009Applicant: NATIONAL TSING HUA UNIVERSITYInventors: Hsueh-An Yang, Weileun Fang, Tsung-Lin TANG
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Publication number: 20080197951Abstract: A method for driving a magnetic element is provided. The method includes steps of: a) providing a first magnetic field, b) providing a second magnetic field interacting with the first magnetic field to generate a magnetostatic field, c) putting the magnetic element into the magnetostatic field, and d) generating a magnetic torque by modulating the first magnetic field and the second magnetic field so as to drive the magnetic element.Type: ApplicationFiled: August 21, 2007Publication date: August 21, 2008Applicant: NATIONAL TSING HUA UNIVERSITYInventors: Hsueh-An YANG, Weileun FANG, Tsung-Lin TANG
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Publication number: 20080140195Abstract: A novel multifunctional nano-probe interface is proposed for applications in neural stimulation and detecting. The nano-probe interface structure consists of a carbon nanotube coated with a thin isolation layer, a micro-electrode substrate array, and a controller IC for neural cell recording and stimulation. The micro-electrode substrate array contains wires connecting the carbon nanotube with the controller IC, as well as microfluidic channels for supplying neural tissues with essential nutrition and medicine. The carbon nanotube is disposed on the micro-electrode substrate array made by silicon, coated with a thin isolation layer around thereof, and employed as a nano-probe for neural recording and stimulation.Type: ApplicationFiled: July 11, 2007Publication date: June 12, 2008Applicant: NATIONAL TSING HUA UNIVERSITYInventors: Huan-Chieh Su, Hsieh Chen, Hsin Chen, Yen-Chung Chang, Shih-Rung Yeh, Weileun Fang, Chien-Chung Fu, Shiang-Cheng Lu, Tri-Rung Yew
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Publication number: 20080001690Abstract: A method for manufacturing a magnetic-induction element is provided. The method includes steps of: a) providing a substrate, b) forming an adhesive layer on the substrate, c) forming a seed layer on the adhesive layer, d) removing a part of the seed layer to reveal a part of the adhesive layer, e) partially forming a resistance on the seed layer and the revealed part of the adhesive layer, f) forming a magnetic-induction layer on the seed layer and the revealed part of the adhesive layer, g) removing the resistance, and h) removing a part of the substrate and the revealed part of the adhesive layer.Type: ApplicationFiled: January 5, 2007Publication date: January 3, 2008Applicant: National Tsing Hua UniversityInventors: Huseh-An Yang, Weileun Fang, Tsung-Lin Tang
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Patent number: 7247247Abstract: A selective etching method with lateral protection function is provided. The steps includes: (a) providing a substrate; (b) forming a plurality of tunnels; (c) forming a lateral strengthening structure at a peripheral wall of the tunnels; (d) removing a bottom portion of the lateral strengthening structure, and a part of the substrate by an etching process so as to form a lower structure and expose an unstrengthened structure; and (f) etching the unstrengthened structure laterally so as to form an upper structure.Type: GrantFiled: May 6, 2004Date of Patent: July 24, 2007Assignee: Walsin Lihwa CorporationInventors: Jerwei Hsieh, Huai-Yuan Chu, Julius Ming-Lin Tsai, Weileun Fang
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Patent number: 7196449Abstract: A two-axis device is provided. The two-axis device includes a first substrate having a plurality of electrodes, a first connecting layer located on the first substrate, an actuating layer, a second connecting layer and a cover. The actuating layer is connected to the first substrate via the first connecting layer and includes a circular portion, an actuating portion, a first shaft and a second shaft. The second connecting layer is connected to the actuating layer and the cover is connected to the actuating layer via the second connecting layer. In addition, a vacuum concavity is formed by the first substrate, the first connecting layer, the actuating layer, the second connecting layer and the cover. The actuating portion and the first shaft are located in the vacuum concavity, and the second shaft extends outside of the vacuum concavity.Type: GrantFiled: September 28, 2004Date of Patent: March 27, 2007Assignee: Walsin Lihwa Corp.Inventors: Mingching Wu, Hsueh-An Yang, Hung-Yi Lin, Weileun Fang
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Publication number: 20070045755Abstract: The invention relates to a single-chip gyro device, which includes a substrate, a plurality of metal layers and a plurality of dielectric layers, and a plurality of metal side walls. Each of the dielectric layers is located between two adjacent layers selected from a layer group consisting of the metal layers and the substrate. The metal side walls are located on edges of the plurality of dielectric layers so as to prevent the dielectric layers from being undercut and form a mechanical structure together with the metal layers and the dielectric layers to connect the circuit formed on the substrate.Type: ApplicationFiled: November 30, 2005Publication date: March 1, 2007Applicant: Analog Integrations CorporationInventors: Jung-Hung Wen, Weileun Fang
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Patent number: 7180144Abstract: A corner-compensation method for fabricating MEMS (Micro-Electro-Mechanical System) is provided.Type: GrantFiled: May 13, 2005Date of Patent: February 20, 2007Assignee: Walsin Lihwa Corp.Inventors: Jerwei Hsieh, Weileun Fang
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Patent number: 7088030Abstract: A high-aspect-ratio-microstructure (HARM) is provided. The structure includes: a substrate; a lower structure with a comb shape fixedly mounted on said substrate and having first plural comb fingers, wherein each of the first plural comb fingers has a thin slot thereon; an upper structure with a comb shape having second plural comb fingers, wherein the lower structure and the upper structure have a height difference therebetween so as to form an uneven surface; and a lateral strengthening structure formed at vertically peripheral walls of the first plural comb fingers and the second plural comb fingers for protecting the plural first and second comb fingers.Type: GrantFiled: May 6, 2004Date of Patent: August 8, 2006Assignee: Walsin Lihwa CorporationInventors: Jerwei Hsieh, Huai-Yuan Chu, Julius Ming-Lin Tsai, Weileun Fang
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Publication number: 20050280331Abstract: A two-axis device is provided. The two-axis device includes a first substrate having a plurality of electrodes, a first connecting layer located on the first substrate, an actuating layer, a second connecting layer and a cover. The actuating layer is connected to the first substrate via the first connecting layer and includes a circular portion, an actuating portion, a first shaft and a second shaft. The second connecting layer is connected to the actuating layer and the cover is connected to the actuating layer via the second connecting layer. In addition, a vacuum concavity is formed by the first substrate, the first connecting layer, the actuating layer, the second connecting layer and the cover. The actuating portion and the first shaft are located in the vacuum concavity, and the second shaft extends outside of the vacuum concavity.Type: ApplicationFiled: September 28, 2004Publication date: December 22, 2005Applicant: Walsin Lihwa Corp.Inventors: Mingching Wu, Hsueh-An Yang, Hung-Yi Lin, Weileun Fang