Abstract: A method for manufacturing an MEMS device is provided. The method includes steps of a) providing a first substrate having a concavity located thereon, b) providing a second substrate having a connecting area and an actuating area respectively located thereon, c) forming plural microstructures in the actuating area, d) mounting a conducting element in the connecting area and the actuating area, e) forming an insulating layer on the conducting element and f) connecting the first substrate to the connecting area to form the MEMS device. The concavity contains the plural microstructures.

Abstract: A corner-compensation method for fabricating MEMS (Micro-Electro-Mechanical System) is provided.

Abstract: A corner-compensation method for fabricating MEMS (Micro-Electro-Mechanical System) is provided.

Abstract: The optical microelectromechanical components and the fabrication method thereof are provided. The method for fabricating an optical microelectromechanical component includes steps of (a) providing a substrate; (b) depositing an oxide layer on the substrate as a first mask; (c) performing a plurality of first etchings on the substrate to form a plurality of trenches with a plurality of depths; (d) depositing a first polysilicon layer on the trenches to form refilled trenches.

Abstract: A selective etching method with lateral protection function is provided. The steps includes: (a) providing a substrate; (b) forming a plurality of tunnels; (c) forming a lateral strengthening structure at a peripheral wall of the tunnels; (d) removing a bottom portion of the lateral strengthening structure, and a part of the substrate by an etching process so as to form a lower structure and expose an unstrengthened structure; and (f) etching the unstrengthened structure laterally so as to form an upper structure.

Abstract: A high-aspect-ratio-microstructure (HARM) is provided. The structure includes: a substrate; a lower structure with a comb shape fixedly mounted on said substrate and having first plural comb fingers, wherein each of the first plural comb fingers has a thin slot thereon; an upper structure with a comb shape having second plural comb fingers, wherein the lower structure and the upper structure have a height difference therebetween so as to form an uneven surface; and a lateral strengthening structure formed at vertically peripheral walls of the first plural comb fingers and the second plural comb fingers for protecting the plural first and second comb fingers.

Abstract: A corner-compensation method for fabricating MEMS (Micro-Electro-Mechanical System) is provided.

Abstract: A method and/or an apparatus for determining the dynamic response of a microstructure is disclosed. A piezocomposite ultrasonic transducer device formed of a piezoelectric material and a polymer material around said piezoelectric ceramic material is used to provide a pulsed bulk acoustic wave having a bandwidth of at least 20% to excite a microstructure. The microstructure is attached onto the transducer, and the pulsed bulk acoustic wave generated through the transducer in response to a pulse voltage excites the microstructure to vibrate. Meanwhile, the dynamic response of the microstructure can be monitored by a laser Doppler vibrometer, and shown by an oscilloscope.

Abstract: A hearing aid device includes a microphone, an amplifier, and a speaker. The microphone has bandpass filters, which separate incoming acoustic signals into a multiple channels. Both the microphone and the speaker have a series of amplifying elements, each with a different amplification level. By choosing which amplifying elements to switch on in the microphone and the speaker, the wearer of the hearing aid device may adjust for different amplification levels in each channel.

Abstract: A method and/or an apparatus for determining the dynamic response of a microstructure is disclosed. A piezocomposite ultrasonic transducer device formed of a piezoelectric material and a polymer material around said piezoelectric ceramic material is used to provide a pulsed bulk acoustic wave having a bandwidth of at least 20% to excite a microstructure. The microstructure is attached onto the transducer, and the pulsed bulk acoustic wave generated through the transducer in response to a pulse voltage excites the microstructure to vibrate. Meanwhile, the dynamic response of the microstructure can be monitored by a laser Doppler vibrometer, and shown by an oscilloscope.

Abstract: A micro-mechanical actuator is disclosed for actuating an object in a micro-electro-mechanical system. One end of the object is flexibly connected a substrate, and another end is flexibly connected to an auxiliary lever which is further connected to an actuating force generator. The auxiliary lever receives an actuating force generated from the actuating force generator to perform a levering operation about a fulcrum. The position of the fulcrum allows an portion of the auxiliary lever connected to the object has a shift larger than a shift of another portion of the auxiliary lever connected to the actuating force generator in response to the actuating force.

Abstract: A micro-mechanical actuator is disclosed for actuating an object in a micro-electro-mechanical system. One end of the object is flexibly connected a substrate, and another end is flexibly connected to an auxiliary lever which is further connected to an actuating force generator. The auxiliary lever receives an actuating force generated from the actuating force generator to perform a levering operation about a fulcrum. The position of the fulcrum allows an portion of the auxiliary lever connected to the object has a shift larger than a shift of another portion of the auxiliary lever connected to the actuating force generator in response to the actuating force.

Abstract: An actuating mechanism for rotating a micro-mirror is disclosed. The actuating mechanism includes a first linking rod consisting of a first and a second portions, a second linking rod consisting of a third and a fourth portions, a first fulcrum positioned between the first and second portions, and a second fulcrum positioned at one side of the fourth portion opposite to the third portion. The first and third portions are flexibly connected to a shaft that the micro-mirror rotates with, and the second and fourth portions are coupled to respective actuators. When actuating forces are applied to move the second and fourth portions, the first and third portions are levered to rotate the shaft and thus the micro-mirror due to the effect of the fulcrums.