Patents by Inventor Xiaoyan Zhang

Xiaoyan Zhang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230143401
    Abstract: Methods and an apparatus for removing particles or photoresist on substrates. In an embodiment, a method comprises the following steps: transferring one or more substrates into a DIO3 solution accommodated in a DIO3 bath; after the one or more substrates are processed in the DIO3 bath, taking the one or more substrates out from the DIO3 bath and transferring the one or more substrates into a SPM solution accommodated in a SPM bath; after the one or more substrates are processed in the SPM bath, taking the one or more substrates out from the SPM bath and rinsing the one or more substrates; and transferring the one or more substrates to one or more single chambers to perform single substrate cleaning and drying process. The method combines DIO3 and SPM in one cleaning sequence, which can remove particles or photoresist, especially remove photoresist treated by medium dose or high dose of ion implantation.
    Type: Application
    Filed: April 21, 2020
    Publication date: May 11, 2023
    Applicant: ACM RESEARCH (SHANGHAI), INC.
    Inventors: Xiaoyan Zhang, Wenjun Wang, Fuping Chen, Jun Wang, Shena Jia, Deyun Wang, Hui Wang, Guangyu Xia, He Wang
  • Patent number: 11638937
    Abstract: A method for effectively cleaning vias (20034), trenches (20036) or recessed areas on a substrate (20010) using an ultra/mega sonic device (1003, 3003, 16062, 17072), comprising: applying liquid (1032) into a space between a substrate (20010) and an ultra/mega sonic device (1003, 3003, 16062, 17072); setting an ultra/mega sonic power supply at frequency f1 and power P1 to drive said ultra/mega sonic device (1003, 3003, 16062, 17072); after the ratio of total bubbles volume to volume inside vias (20034), trenches (20036) or recessed areas on the substrate (20010) increasing to a first set value, setting said ultra/mega sonic power supply at frequency f2 and power P2 to drive said ultra/mega sonic device (1003, 3003, 16062, 17072); after the ratio of total bubbles volume to volume inside the vias (20034), trenches (20036) or recessed areas reducing to a second set value, setting said ultra/mega sonic power supply at frequency f1 and power P1 again; repeating above steps till the substrate (20010) being cleaned.
    Type: Grant
    Filed: July 16, 2021
    Date of Patent: May 2, 2023
    Assignee: ACM RESEARCH, INC.
    Inventors: Hui Wang, Xi Wang, Fuping Chen, Fufa Chen, Jian Wang, Xiaoyan Zhang, Yinuo Jin, Zhaowei Jia, Jun Wang, Xuejun Li
  • Patent number: 11633765
    Abstract: A system for controlling damages in cleaning a semiconductor wafer comprising features of patterned structures, the system comprising: a wafer holder for temporary restraining a semiconductor wafer during a cleaning process; an inlet for delivering a cleaning liquid over a surface of the semiconductor wafer; a sonic generator configured to alternately operate at a first frequency and a first power level for a first predetermined period of time and at a second frequency and a second power level for a second predetermined period of time, to impart sonic energy to the cleaning liquid, the first predetermined period of time and the second predetermined period of time consecutively following one another; and a controller programmed to provide the cleaning parameters, wherein at least one of the cleaning parameters is determined such that a percentage of damaged features as a result of the imparting sonic energy is lower than a predetermined threshold.
    Type: Grant
    Filed: September 9, 2021
    Date of Patent: April 25, 2023
    Assignee: ACM Research (Shanghai) Inc.
    Inventors: Hui Wang, Fufa Chen, Fuping Chen, Jian Wang, Xi Wang, Xiaoyan Zhang, Yinuo Jin, Zhaowei Jia, Liangzhi Xie, Jun Wang, Xuejun Li
  • Publication number: 20230087950
    Abstract: In the technical field of lithium ion batteries, disclosed is a wet synthesis method of a high-nickel NCMA quaternary precursor. The method includes synthesizing solid tiny crystal nuclei of the NCMA quaternary precursor in a first reactor, and prompting the crystal nuclei of the quaternary precursor to grow to a certain particle size in a second reactor, wherein in the first reactor, an upper feeding mode is used to continuously produce the solid tiny crystal nuclei of the NCMA quaternary precursor. In the second reactor, an upper-and-lower dual feeding mode is used to prompt the continuous growth of the solid tiny crystal nuclei of the NCMA quaternary precursor. During a washing process, the NCMA quaternary precursor is washed with a mixed alkali solution of sodium carbonate and sodium hydroxide at certain concentration, so that Na can be reduced below 50 ppm and sulfur can be reduced below 800 ppm.
    Type: Application
    Filed: February 18, 2020
    Publication date: March 23, 2023
    Inventors: Zhongqiang LIU, Xiaoyan ZHANG, Bihuang HU, Feng XIONG, Lixia FAN, Yanmiao HE, Donghua NING, Kaizhong FU, Sikang CHEN, Shibo ZHONG, Ying WAN, Rui YAO, Mengdi LI
  • Publication number: 20230057568
    Abstract: The present description relates to compounds useful for improving pre-mRNA splicing in a cell. In particular, another aspect of the present description relates to substituted thieno [3,2-d]pyrimidine compounds, forms, and pharmaceutical compositions thereof and methods of use for treating or ameliorating familial dysautonomia.
    Type: Application
    Filed: December 7, 2020
    Publication date: February 23, 2023
    Applicant: PTC THERAPEUTICS, INC.
    Inventors: Nanjing ZHANG, Michael A. ARNOLD, Amal DAKKA, Gary Mitchell KARP, Tom Tuan LUONG, Christie MORRILL, Jana NARASIMHAN, Nikolai A. NARYSHKIN, Anthony TURPOFF, Jiashi WANG, Xiaoyan ZHANG
  • Patent number: 11581205
    Abstract: A method for cleaning semiconductor substrate without damaging patterned structure on the substrate using ultra/mega sonic device comprising applying liquid into a space between a substrate and an ultra/mega sonic device; setting an ultra/mega sonic power supply at frequency f1 and power P1 to drive said ultra/mega sonic device; before bubble cavitation in said liquid damaging patterned structure on the substrate, setting said ultra/mega sonic power supply at frequency f2 and power P2 to drive said ultra/mega sonic device; after temperature inside bubble cooling down to a set temperature, setting said ultra/mega sonic power supply at frequency f1 and power P1 again; repeating above steps till the substrate being cleaned. Normally, if f1=f2, then P2 is equal to zero or much less than P1; if P1=P2, then f2 is higher than f1; if the f1<f2, then, P2 can be either equal or less than P1.
    Type: Grant
    Filed: January 4, 2021
    Date of Patent: February 14, 2023
    Assignee: ACM Research, Inc.
    Inventors: Hui Wang, Fufa Chen, Fuping Chen, Jian Wang, Xi Wang, Xiaoyan Zhang, Yinuo Jin, Zhaowei Jia, Liangzhi Xie, Jun Wang, Xuejun Li
  • Publication number: 20230017467
    Abstract: A polyurethane composition includes, based on the total weight of the composition, A) 20-35 wt % of polyurethane prepolymer PU-1 which is a reaction product of ethylene oxide (EO)-terminated polyether triol with an aromatic polyisocyanate, and B) 0.2-3 wt % of polyurethane prepolymer PU-2 which is a reaction product of polyester polyol with an aromatic polyisocyanate. The composition has a low TVOC content, has a good adhesion without the need of primer, can cure rapidly with a high initial bonding strength, while keeping good mechanical properties.
    Type: Application
    Filed: December 3, 2020
    Publication date: January 19, 2023
    Applicant: SIKA TECHNOLOGY AG
    Inventors: Junjie YANG, Xiaoyan ZHANG
  • Patent number: 11547071
    Abstract: A method for disinfecting explants of Kadsura coccinea stems with buds and a method for directly inducing rapid proliferation of sterile buds by using the explants of Kadsura coccinea stems with buds involve processes such as selection, treatment and disinfection of explants, primary culture, subculture proliferation culture. The problem of difficulty in tissue culture and primary culture of Kadsura coccinea stems is solved, and the advantages include low contamination rate of explants, high propagation rate and robust proliferation of axillary buds. This allows obtaining sterile axillary buds of Kadsura coccinea through tissue culture, and provides support for tissue culture, rapid propagation and factory seedling of Kadsura coccinea in the future.
    Type: Grant
    Filed: June 4, 2020
    Date of Patent: January 10, 2023
    Assignee: CENTRAL SOUTH UNIVERSITY OF FORESTRY AND TECHNOLOGY
    Inventors: Ze Li, Yang Liu, Hui Zhang, Xiaoqin Zhang, Xiaohui Gao, Fangfang Ma, Jiayue Zhong, Xiaoyan Zhang, Sen Wang, Xiaofeng Tan, Ao Yang, Fen Bao, Ruonan Ma
  • Publication number: 20220375927
    Abstract: The present disclosure relates to a semiconductor device and a fabrication method thereof. The semiconductor device includes a substrate, a nitride semiconductor layer disposed on the substrate, a first gate stack in contact with the nitride semiconductor layer, and a resistor laterally spaced apart from the first gate stack and electrically connected to first gate stack. The resistor comprises a first conductive terminal in contact with the nitride semiconductor layer, a second conductive terminal in contact with the nitride semiconductor layer; a first doped region of the nitride semiconductor layer between the first conductive terminal and the second conductive terminal; and a first conductive region of the nitride semiconductor layer in contact with the first conductive terminal and the second conductive terminal.
    Type: Application
    Filed: December 25, 2020
    Publication date: November 24, 2022
    Inventors: Danfeng MAO, King Yuen WONG, Jinhan ZHANG, Xiaoyan ZHANG, Wei WANG, Jianjian SHENG
  • Publication number: 20220375928
    Abstract: The present disclosure relates to a semiconductor device and a fabrication method thereof. The semiconductor device includes a substrate, a first nitride semiconductor layer disposed on the substrate, a second nitride semiconductor layer disposed on the first nitride semiconductor layer and having a bandgap greater than that of the first nitride semiconductor layer. The semiconductor device further includes a first gate conductor disposed on a first region of the second nitride semiconductor layer, a first source electrode disposed on a first side of the first gate conductor, a first field plate disposed on a second side of the first gate conductor; and a capacitor having a first conductive layer and a second conductive layer and disposed on a second region of the second nitride semiconductor layer. Wherein the first conductive layer of the capacitor and the first source electrode have a first material, and the second conductive layer of the capacitor and the first field plate have a second material.
    Type: Application
    Filed: December 25, 2020
    Publication date: November 24, 2022
    Inventors: Danfeng MAO, King Yuen WONG, Jinhan ZHANG, Xiaoyan ZHANG, Wei WANG, Jianjian SHENG
  • Publication number: 20220375925
    Abstract: The present disclosure relates to a semiconductor device and a fabrication method thereof. The semiconductor device includes a substrate, a first nitride semiconductor layer disposed on the substrate, a second nitride semiconductor layer disposed on the first nitride semiconductor layer and having a bandgap greater than that of the first nitride semiconductor layer. The semiconductor device further includes a first gate conductor disposed on a first region of the second nitride semiconductor layer, a passivation layer covering the first gate conductor, and a second gate conductor disposed on the passivation layer and on a second region of the second nitride semiconductor layer, wherein the first region is laterally spaced apart from the second region.
    Type: Application
    Filed: December 25, 2020
    Publication date: November 24, 2022
    Inventors: Danfeng MAO, King Yuen WONG, Jinhan ZHANG, Xiaoyan ZHANG, Wei WANG, Jianjian SHENG
  • Patent number: 11498100
    Abstract: An apparatus for cleaning semiconductor substrates including a chamber, a chuck, a liquid collector, an enclosing wall, at least one driving mechanism, at least one internal dispenser, and at least one external dispenser. The chamber has a top wall, a side wall and a bottom wall. The chuck is disposed in the chamber. The liquid collector surrounds the chuck. The enclosing wall surrounds the liquid collector. The driving mechanism drives the enclosing wall to move up and down, wherein when the enclosing wall is driven to move up, a seal room is formed by the liquid collector, the enclosing wall, the top wall and bottom wall of the chamber. The internal dispenser is disposed inside the seal room. The external dispenser is disposed outside the seal room and capable of getting in and out of the seal room after the enclosing wall is driven to move down.
    Type: Grant
    Filed: March 6, 2017
    Date of Patent: November 15, 2022
    Assignee: ACM RESEARCH (SHANGHAI) INC.
    Inventors: Hui Wang, Xiaofeng Tao, Fuping Chen, Shena Jia, Xi Wang, Xiaoyan Zhang, Xuejun Li
  • Publication number: 20220351962
    Abstract: A method for cleaning a substrate with pattern structures comprises the following steps: using gas-liquid atomization to clean a substrate surface (601); using TEBO megasonic to clean the substrate surface (602); and drying the substrate (603). The TEBO megasonic cleaning is used to remove small size particles on the substrate and the gas-liquid atomization cleaning is used to remove large size particles on the substrate. The method enables achieving an effect of cleaning the substrate without or with less device damage. A substrate cleaning apparatus is also provided.
    Type: Application
    Filed: November 1, 2019
    Publication date: November 3, 2022
    Applicant: ACM Research (Shanghai) Inc.
    Inventors: Wenjun Wang, Ting Yao, Xiaoyan Zhang, Fuping Chen, Hui Wang
  • Patent number: 11462423
    Abstract: A method and apparatus for cleaning semiconductor wafer, combining batch cleaning and single wafer cleaning together. The method includes: taking at least two wafers from a cassette in a load port and putting said wafers into a first tank filled with chemical solution; after processing said wafers in the first tank, taking said wafers out of the first tank and keeping said wafers wet; putting said wafers into a second tank filled with liquid; after processing said wafers in the second tank, taking said wafers out of the second tank and keeping said wafers wet; putting one of said wafers on a chuck inside a single wafer cleaning module; rotating the chuck while applying chemical solution on said wafer; applying deionized water on said wafer; drying said wafer; taking said wafer out of the single wafer cleaning module and putting said wafer back to the cassette in the load port.
    Type: Grant
    Filed: April 8, 2019
    Date of Patent: October 4, 2022
    Assignee: ACM Research (Shanghai) Inc.
    Inventors: Hui Wang, Fuping Chen, Liangzhi Xie, Shena Jia, Xi Wang, Xiaoyan Zhang
  • Patent number: 11447746
    Abstract: The present invention relates to a method for inducing amplification of human type I NKT cells in vitro using a “specific stimulant+staged cytokine” mode, which consists of two culture stages, wherein the first culture stage focuses on specific amplification of the number of the type I NKT cells, in which a specific stimulant ?-GalCer is used to advantageously amplify the type I NKT cells and ?-GalCer-loaded CD1d-expressing cells are used to stimulate continuous proliferation of the type I NKT cells while adding cytokines IL-2 and IL-7 to assist growth of the type I NKT cells; and the second culture stage is to synchronously perform amplification of the number of the type I NKT cells and guide directed function differentiation, in which CD1d-expressing cells incubated with ?-GalCer continue to stimulate proliferation of the type I NKT cells while adding IL-2, IL-7 and IL-15 to assist amplification of the type I NKT cells and guide differentiation, and IL-12 is added to the culture system 1-2 days before the e
    Type: Grant
    Filed: November 1, 2017
    Date of Patent: September 20, 2022
    Assignee: Shanghai Innovative Chang'An Biological Technology Co., Ltd.
    Inventors: Jianqing Xu, Xiaoyan Zhang, Jing Wang, Lingyan Zhu
  • Publication number: 20220204478
    Abstract: The present description relates to compounds, forms, and pharmaceutical compositions thereof and methods of using such compounds, forms, or compositions thereof for treating or ameliorating Huntington's disease. In particular, the present description relates to substituted monocyclic heteroaryl compounds of Formula (I), Formula (II), or Formula (III), forms and pharmaceutical compositions thereof and methods of using such compounds, forms, or compositions thereof for treating or ameliorating Huntington's disease.
    Type: Application
    Filed: May 12, 2020
    Publication date: June 30, 2022
    Inventors: Nadiya Sydorenko, Md Rauful Alam, Lukiana Amedzo, Michael A. Arnold, Suresh Babu, Anuradha Bhattacharyya, Gary Mitchell Karp, Nathaniel T. Kenton, Tom Tuan Luong, Anthony R. Mazzotti, Young-Choon Moon, Christie Morrill, Nicholas Walter Mszar, Jana Narasimhan, Jigar S. Patel, Hongyu Ren, Anthony Turpoff, Gang Wang, Matthew G. Woll, Nanjing Zhang, Xiaoyan Zhang
  • Publication number: 20220177839
    Abstract: A composition for inducing and/or amplifying TSCM in vitro, a culture medium including the composition, and a method for inducing and/or amplifying TSCM in vitro are provided, wherein the composition comprises inducing agents including IL-7 and IL-21. The chimeric antigen receptor T-memory stem cells induced differentiated and amplified by adding the composition can be used directly for reinfusion therapy of patients.
    Type: Application
    Filed: March 5, 2019
    Publication date: June 9, 2022
    Inventors: Jianqing Xu, Xiaoyan Zhang, Qibin Liao
  • Patent number: D966390
    Type: Grant
    Filed: May 11, 2022
    Date of Patent: October 11, 2022
    Assignee: Ruichang Zhang Xiaoyan Trading Co., Ltd.
    Inventor: Xiaoyan Zhang
  • Patent number: D983247
    Type: Grant
    Filed: September 23, 2022
    Date of Patent: April 11, 2023
    Assignee: Ruichang Zhang Xiaoyan Trading Co., Ltd.
    Inventor: Xiaoyan Zhang
  • Patent number: D988598
    Type: Grant
    Filed: June 22, 2022
    Date of Patent: June 6, 2023
    Inventor: Xiaoyan Zhang