Patents by Inventor Yao-Hung Yang
Yao-Hung Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240162065Abstract: A method of determining an operational status of a semiconductor manufacturing assembly uses internal vibrations of an in-situ assembly to detect defects. The method may include initiating a first test vibration in an internal structure of the semiconductor manufacturing assembly while the semiconductor manufacturing assembly is in-situ in a semiconductor processing chamber, receiving a first vibration signal caused by the first test vibration, transforming the first vibration signal into a first frequency domain representation of the first vibration signal, determining the operational status of the semiconductor manufacturing assembly based on the first frequency domain representation, and performing a corrective action for the semiconductor manufacturing assembly in response to the operational status.Type: ApplicationFiled: November 15, 2022Publication date: May 16, 2024Inventors: Yao-Hung YANG, Chih-Yang CHANG, Shannon WANG
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Publication number: 20240162030Abstract: A lamp and epitaxial processing apparatus are described herein. In one example, the lamp includes a bulb, a filament, and a plurality of filament supports disposed in spaced-apart relation to the filament, each of the filament supports having a hook support and a hook. The hook includes a connector configured to fasten the hook to the hook support, a first vertical portion extending from the connector toward the filament, and a rounded portion extending from an end of the first vertical portion distal from the connector and configured to wrap around the filament. A second vertical portion extends from an end of the rounded portion distal from the first vertical portion and the second vertical portion has a length between 60% and 100% of the length of the first vertical portion.Type: ApplicationFiled: January 12, 2024Publication date: May 16, 2024Inventors: Yao-Hung YANG, Shantanu Rajiv GADGIL, Kaushik RAO, Vincent Joseph KIRCHHOFF, Sagir KADIWALA, Munirah MAHYUDIN, Daniel CHOU
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Publication number: 20240124980Abstract: A bimetallic faceplate for substrate processing is provided including a plate having a plurality of gas distribution holes and formed of a first metal having a first coefficient of thermal expansion, the plate having at least one groove around a center of the plate and spaced from the center of the plate; and a metallic element disposed in the at least one groove and fixed to the plate in the at least one groove, the metallic element having a second coefficient of thermal expansion different from the first coefficient of thermal expansion, the metallic element being symmetrically arranged on or in the plate. A chamber for substrate processing is provided that includes a bimetallic faceplate. Also, a method of making a bimetallic faceplate is provided.Type: ApplicationFiled: October 12, 2022Publication date: April 18, 2024Inventors: Gaurav SHRIVASTAVA, Pavankumar Ramanand HARAPANHALLI, Sudhir R. GONDHALEKAR, Yao-Hung YANG, Chih-Yang CHANG
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Publication number: 20240026975Abstract: A sealing member includes a monolithic body including a first portion adjoining a second portion. The first portion forms part of a circle. The second portion includes first and second lobes. Each lobe adjoins the first portion with a concave surface. In one example, each lobe includes a rounded tip, and a convex surface extends from one rounded tip to the other rounded tip.Type: ApplicationFiled: June 28, 2023Publication date: January 25, 2024Inventors: Yao-Hung YANG, Chih-Yang CHANG, Sam Hyungsam KIM
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Patent number: 11881392Abstract: A lamp and epitaxial processing apparatus are described herein. In one example, the lamp includes a bulb, a filament, and a plurality of filament supports disposed in spaced-apart relation to the filament, each of the filament supports having a hook support and a hook. The hook includes a connector configured to fasten the hook to the hook support, a first vertical portion extending from the connector toward the filament, and a rounded portion extending from an end of the first vertical portion distal from the connector and configured to wrap around the filament. A second vertical portion extends from an end of the rounded portion distal from the first vertical portion and the second vertical portion has a length between 60% and 100% of the length of the first vertical portion.Type: GrantFiled: May 11, 2023Date of Patent: January 23, 2024Assignee: Applied Materials, Inc.Inventors: Yao-Hung Yang, Shantanu Rajiv Gadgil, Kaushik Rao, Vincent Joseph Kirchhoff, Sagir Kadiwala, Munirah Mahyudin, Daniel Chou
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Patent number: 11856706Abstract: The present disclosure is directed to a system and method to identify and track parts of a semiconductor processing chamber, as well as the status of the parts, and store status information in a centralized location as status changes over time.Type: GrantFiled: December 3, 2019Date of Patent: December 26, 2023Assignee: Applied Materials, Inc.Inventors: Hsui Yang, Yao-Hung Yang, Jeevan Shanbhag, Chien-Min Liao, Earl Hunter, David Ganon, Mariana Luigi, Siamak Salimian, Tom K. Cho, Chun-Chung Chen
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Publication number: 20230402304Abstract: Methods and apparatus for processing a substrate are provided herein. For example, a processing volume for processing a substrate and a pressure system in fluid communication with the processing volume and comprising a throttle valve assembly including a housing, a sensing device disposed in an interior of the housing, and a fan open to the interior of the housing, wherein, during operation of the pressure system to control a pressure within the processing volume, the sensing device is responsive to temperature changes in the interior of the housing such that the fan remains off when a temperature of the interior of the housing is less than a predetermined temperature and automatically turns on when the temperature within interior of the housing is equal to or greater than the predetermined temperature.Type: ApplicationFiled: May 19, 2022Publication date: December 14, 2023Inventors: Gaurav SHRIVASTAVA, Pavankumar Ramanand HARAPANHALLI, Yao-Hung YANG, Sudhir R. GONDHALEKAR, Chih-Yang CHANG
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Publication number: 20230402311Abstract: Embodiments of substrate supports are provided herein. In some embodiments, a substrate support includes: a first plate having a plurality of openings extending into the first plate from an upper surface of the first plate to a bottom surface of each respective opening of the plurality of openings; a plurality of tabs comprising three or more tabs disposed in each respective opening and extending towards the upper surface of the first plate; and a plurality of support elements disposed in each of the plurality of openings, wherein the plurality of tabs are disposed around each of the plurality of support elements and configured to retain the plurality of support elements in the plurality of openings.Type: ApplicationFiled: June 13, 2022Publication date: December 14, 2023Inventors: Fred Eric RUHLAND, Pavankumar Ramanand HARAPANHALLI, Gaurav SHRIVASTAVA, Yao-Hung YANG
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Publication number: 20230377870Abstract: A lamp and epitaxial processing apparatus are described herein. In one example, the lamp includes a bulb, a filament, and a plurality of filament supports disposed in spaced-apart relation to the filament, each of the filament supports having a hook support and a hook. The hook includes a connector configured to fasten the hook to the hook support, a first vertical portion extending from the connector toward the filament, and a rounded portion extending from an end of the first vertical portion distal from the connector and configured to wrap around the filament. A second vertical portion extends from an end of the rounded portion distal from the first vertical portion and the second vertical portion has a length between 60% and 100% of the length of the first vertical portion.Type: ApplicationFiled: May 11, 2023Publication date: November 23, 2023Inventors: Yao-Hung YANG, Shantanu Rajiv Gadgil, Kaushik Rao, Vincent Joseph Kirchhoff, Sagir Kadiwala, Munirah Mahyudin, Daniel Chou
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Publication number: 20230272855Abstract: An apparatus for inserting a seal member into a seal groove includes a tray. The tray includes a holding groove formed in a front surface for containing the seal member. The holding groove is sized and shaped to correspond with the seal groove. A method of installing a seal member into a seal groove includes aligning the holding groove with the seal groove, and applying a pressure to a back surface of the tray, thereby deforming the tray and inserting the seal member into the seal groove.Type: ApplicationFiled: June 28, 2022Publication date: August 31, 2023Inventors: Yao-Hung YANG, Fred Eric RUHLAND, Chih-Yang CHANG, Chiache LIN, Saurabh Murlidhar CHAUDHARI, Sridhar KENCHANAPURA NAGARAJU, Kishan RAO
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Publication number: 20230064637Abstract: Exemplary dual-channel showerheads may include an upper plate that defines a first plurality of apertures. The showerheads may include a base having a lower plate. The lower plate may define a second plurality of apertures and a third plurality of apertures. Each of the first plurality of apertures may be fluidly coupled with a respective one of the second plurality of apertures to define a fluid path extending from a top surface of the showerhead through a bottom surface of the showerhead. The base may define a gas inlet that is fluidly coupled with the third plurality of apertures. The base may be detachably coupled with the upper plate using one or more fastening mechanisms. The showerheads may include a compressible gasket positioned between the upper plate and the lower plate.Type: ApplicationFiled: August 23, 2022Publication date: March 2, 2023Applicant: Applied Materials, Inc.Inventors: Kiran Shyam Honnavar, Srikantha Raju, Gangadhar Sheelavant, Aniruddha Pal, Yao-Hung Yang, Basavaraja Shankarappa Kengunti
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Publication number: 20230051800Abstract: Methods and apparatus for producing bulk silicon carbide and producing silicon carbide coatings are provided herein. The method includes feeding a mixture of silicon carbide and ceramic into a plasma sprayer. The plasma generates a stream towards a substrate forming a bulk material or optionally a coating on the substrate such as an article upon contact therewith. In embodiments, the substrate can be removed, leaving a component part fabricated from bulk silicon carbide.Type: ApplicationFiled: January 27, 2021Publication date: February 16, 2023Inventors: YIKAI CHEN, ANIRUDDHA PAL, SAURABH M. CHAUDHARI, YAO-HUNG YANG, SIAMAK SALIMIAN, TOM K. CHO
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Patent number: 11532466Abstract: Certain embodiments provide a method and non-transitory computer readable medium having instructions that, when executed by a processor of a processing system, cause the processing system to perform a method for improving operation of a semiconductor processing system. The method of part life estimation generally includes obtaining a chamber part having a first surface portion and second surface portion. A data matrix in the first portion of the chamber part is read. The data matrix has raised features. The first portion of the chamber part is cleaned. Wear on the raised features is evaluated. The part is discarded in response to the wear on the raised feature.Type: GrantFiled: July 20, 2020Date of Patent: December 20, 2022Assignee: Applied Materials, Inc.Inventors: Chien-Min Liao, Yao-Hung Yang, Tom K. Cho, Siamak Salimian, Hsiu Yang, Chun-Chung Chen
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Patent number: 11359722Abstract: A sealing member is provided, including a plurality of nodes and a plurality of antinodes. Each sealing member can be rotated to expose nondamaged lobes for sealing, and prevents the sealing member from falling out of the lobed groove. A chamber is provided, including a groove that the sealing member is placed in. A method of rotating and placing the sealing member is provided, including a rotation to expose nondamaged portions of the sealing member.Type: GrantFiled: July 19, 2019Date of Patent: June 14, 2022Assignee: APPLIED MATERIALS, INC.Inventors: Shagun P. Maheshwari, Yao-Hung Yang, King F. Lee, Andrew Yu, Aniruddha Pal, Tom K. Cho, Chien-Min Liao
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Publication number: 20220020565Abstract: Certain embodiments provide a method and non-transitory computer readable medium comprising instructions that, when executed by a processor of a processing system, cause the processing system to perform a method for improving operation of a semiconductor processing system. The method of part life estimation generally includes obtaining a chamber part having a first surface portion and second surface portion. A data matrix in the first portion of the chamber part is read. The data matrix has raised features. The first portion of the chamber part is cleaned. Wear on the raised features is evaluated. The part is discarded in response to the wear on the raised feature.Type: ApplicationFiled: July 20, 2020Publication date: January 20, 2022Inventors: Chien-Min LIAO, Yao-Hung YANG, Tom K. CHO, Siamak SALIMIAN, Hsiu YANG, Chun-Chung CHEN
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Publication number: 20220008946Abstract: Embodiments of showerheads for use in a process chamber and methods of reducing drooping of a showerhead faceplate are provided herein. In some embodiments, a showerhead for use in a process chamber includes: a faceplate having a plurality of gas distribution holes disposed therethrough; and one or more cables that engage with the faceplate and configured to prestress the faceplate.Type: ApplicationFiled: July 1, 2021Publication date: January 13, 2022Inventors: Yao-Hung YANG, Shantanu Rajiv GADGIL, Tanmay Pramod GURJAR, Sudhir R. GONDHALEKAR
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Patent number: 11090893Abstract: A method of reclaiming a used seal includes boiling the used seal in a liquid, and after boiling the used seal in the liquid, baking the used seal. The boiling the used seal may include boiling for a predetermined boiling time in the liquid, and the baking the used seal may include baking the used seal for a predetermined bake time at a predetermined temperature.Type: GrantFiled: September 6, 2018Date of Patent: August 17, 2021Assignee: APPLIED MATERIALS, INC.Inventors: Shagun P. Maheshwari, Yao-Hung Yang, Tom K. Cho, Yu-Chi Yeh, Andrew Yu, Aniruddha Pal, Siamak Salimian
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Patent number: 11074426Abstract: The present disclosure relates to systems and methods for semiconductor tool part tracking and kit verification. Data relating to part identification and performance are encoded to a unique code that is encoded into machine-readable form, such as a data matrix. A multi-dimensional array (MDA) of the data matrices of a group of parts is a ‘golden MDA’. When assembled into a kit, the parts are scanned and compared to the golden MDA. If there's a match, a kit unique code is used to generate a kit data matrix. The part data matrix codes are provided to a database to determine if a part combination will cause a coupling effect, based on part usage history.Type: GrantFiled: May 29, 2020Date of Patent: July 27, 2021Assignee: Applied Materials, Inc.Inventors: Chien-Min Liao, Yao-Hung Yang, Hsiu Yang, Jeevan Shanbhag, Chun-Chung Chen, Tom K. Cho
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Publication number: 20210168979Abstract: The present disclosure is directed to a system and method to identify and track parts of a semiconductor processing chamber, as well as the status of the parts, and store status information in a centralized location as status changes over time.Type: ApplicationFiled: December 3, 2019Publication date: June 3, 2021Inventors: Hsui YANG, Yao-Hung YANG, Jeevan SHANBHAG, Chien-Min LIAO, Earl HUNTER, David GANON, Mariana LUIGI, Siamak SALIMIAN, Tom K. CHO, Chun-Chung CHEN
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Patent number: D1027120Type: GrantFiled: December 17, 2020Date of Patent: May 14, 2024Assignee: APPLIED MATERIALS, INC.Inventors: Yao-Hung Yang, Eric Ruhland, Saurabh M. Chaudhari, Dien-Yeh Wu, Philip Wayne Nagle, Aniruddha Pal, Sudhir R. Gondhalekar, Siamak Salimian, Scott Lin, Boon Sen Chan