Seal for an assembly in a vapor deposition chamber

- APPLIED MATERIALS, INC.
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Description

FIG. 1 is top perspective view of a seal for an assembly in a vapor deposition chamber.

FIG. 2 is a bottom perspective view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.

FIG. 3 is a top plan view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.

FIG. 4 is a bottom plan view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.

FIG. 5 is a front view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.

FIG. 6 is a rear view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.

FIG. 7 is a right side view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.

FIG. 8 is a left side view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1.

FIG. 9 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 showing details of an outer segment of the seal.

FIG. 10 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 showing details of a central segment of the seal.

FIG. 11 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 showing details of an outer segment of the seal.

FIG. 12 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 2 showing details of an outer segment of the seal.

FIG. 13 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 3 showing details of a central segment of the seal.

FIG. 14 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 4 showing details of a central segment of the seal.

FIG. 15 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 6 showing details of an outer segment of the seal.

FIG. 16 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 7 showing details of an outer segment of the seal; and,

FIG. 17 is a top plan view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 3 shown in a portion of an assembly (in phantom).

The broken and phantom lines in the Figures illustrate unclaimed parts of the seal for an assembly in a vapor deposition chamber and form no part of the claimed design.

Claims

The ornamental design for a seal for an assembly in a vapor deposition chamber, as shown and described.

Referenced Cited
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  • The Performance Advantages of a Quad-Ring vs. an O-ring, <https://www.gallagherseals.com/blog/the-performance-advantages-of-a-quad-ring-vs-an-o-ring/>, retrieved Apr. 18, 2019.
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Patent History
Patent number: D1027120
Type: Grant
Filed: Dec 17, 2020
Date of Patent: May 14, 2024
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Yao-Hung Yang (Santa Clara, CA), Eric Ruhland (Pleasanton, CA), Saurabh M. Chaudhari (San Jose, CA), Dien-Yeh Wu (San Jose, CA), Philip Wayne Nagle (Austin, TX), Aniruddha Pal (San Jose, CA), Sudhir R. Gondhalekar (Pleasanton, CA), Siamak Salimian (Los Altos, CA), Scott Lin (Hsinchu), Boon Sen Chan (North Singapore)
Primary Examiner: Keith J Wilson
Application Number: 29/762,536
Classifications
Current U.S. Class: Gasket Or Packing (D23/269)