Patents by Inventor Yohei Ishida
Yohei Ishida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240101491Abstract: The present invention adopts a microbial preparation production method comprising: a step for mixing crushed waste gypsum with a culture medium containing microorganisms to obtain a mixed liquid; and a step for culturing the mixed liquid. The particle diameter of the crushed waste gypsum is at most 30 mm.Type: ApplicationFiled: November 30, 2023Publication date: March 28, 2024Inventors: Yohei ISHIDA, Tamaki GOTO, Katsuhiko FUJII, Toshinori OKURA
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Patent number: 11921392Abstract: According to one embodiment, a semiconductor device includes an insulating substrate, a first metal layer on the insulating substrate, a first insulating layer on the insulating substrate and the first metal layer, a semiconductor layer on the first insulating layer, a second insulating layer on the semiconductor layer and the first insulating layer, a second metal layer on the second insulating layer, and a first electrode and a second electrode which are electrically connected to the semiconductor layer. The first metal layer overlaps the second metal layer. A third metal layer contacts a top surface of the second metal layer and a top surface of the first metal layer.Type: GrantFiled: September 15, 2022Date of Patent: March 5, 2024Assignee: Japan Display Inc.Inventors: Yohei Yamaguchi, Arichika Ishida, Hidekazu Miyake, Hiroto Miyake, Isao Suzumura
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Patent number: 11887816Abstract: There is provided a plasma processing apparatus. The apparatus comprises: a chamber body; and a power supply unit configured to output power for exciting a gas supplied to an inside of the chamber body. The power supply unit supplies, as power having a center frequency, a bandwidth, and a carrier pitch respectively corresponding to a set frequency, a set bandwidth, and a set carrier pitch that are indicated by a controller, power which is pulse-modulated so as to be a pulse frequency, a duty ratio, a high level, and a low level respectively corresponding to a set pulse frequency, a set duty ratio, a high-level set power, and a low-level set power indicated by the controller, and in which a pulse on time determined by the set pulse frequency and the set duty ratio is longer than a power fluctuation cycle of the power having the bandwidth.Type: GrantFiled: October 28, 2021Date of Patent: January 30, 2024Assignee: TOKYO ELECTRON LIMITEDInventors: Kazushi Kaneko, Yohei Ishida
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Publication number: 20230273327Abstract: A radiation detection apparatus includes a sensor array in which a plurality of pixels having photoelectric conversion elements is arranged on a substrate, a phosphor layer made of a plurality of columnar crystals provided on the sensor array, a phosphor protective layer provided on the phosphor layer to protect the phosphor layer, and a reflection layer provided on the phosphor protective layer to reflect light from the phosphor layer. The phosphor protective layer is a cross-linked body made of a metallic alkoxide and oxygen cross-linking at least some of metallic atoms included in the metallic alkoxide, and the reflection layer is made of a resin and a metallic compound dispersed in the resin.Type: ApplicationFiled: February 22, 2023Publication date: August 31, 2023Inventors: YOHEI ISHIDA, SHOSHIRO SARUTA
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Patent number: 11587769Abstract: A device includes a microwave generator configured to generate a microwave having a bandwidth, an output unit, a directional coupler and a measurer. The microwave generator generates a microwave a power of which is pulse-modulated to be a High level and a Low level. A set carrier pitch is set to satisfy a preset condition. The preset condition includes a condition that a value obtained by dividing a set pulse frequency by the set carrier pitch or a value obtained by dividing the set carrier pitch by the set pulse frequency is not an integer and a condition that an ON-time of the High level is equal to or larger than 50%. The microwave generator averages a first High measurement value and a first Low measurement value in a preset moving average time longer than a sum of the ON-time of the High level at a preset sampling interval.Type: GrantFiled: July 21, 2021Date of Patent: February 21, 2023Assignees: TOKYO ELECTRON LIMITED, TOKYO KEIKI INC.Inventors: Yohei Ishida, Kazushi Kaneko, Hajime Tamura, Koichi Murai
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Patent number: 11527386Abstract: A microwave output device includes a microwave generator configured to generate a pulse-modulated microwave; an output unit; a first directional coupler configured to output a part of a progressive wave; and a measurement device configured to determine measurement values of High and Low levels of a power of the progressive wave. The microwave generator alternately generates a first microwave having a bandwidth and a second microwave having a single frequency peak in synchronization with switching of the High level and the Low level; averages the measurement value corresponding to the first microwave with a moving average time equal to or larger than a reciprocal of a carrier pitch; averages the measurement value corresponding to the second microwave with a moving average time less than the reciprocal of the carrier pitch; and controls the powers of High and Low levels based on the averaged measurement values and set powers.Type: GrantFiled: March 5, 2021Date of Patent: December 13, 2022Assignee: TOKYO ELECTRON LIMITEDInventors: Kazushi Kaneko, Yohei Ishida
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Publication number: 20220130643Abstract: There is provided a plasma processing apparatus. The apparatus comprises: a chamber body; and a power supply unit configured to output power for exciting a gas supplied to an inside of the chamber body. The power supply unit supplies, as power having a center frequency, a bandwidth, and a carrier pitch respectively corresponding to a set frequency, a set bandwidth, and a set carrier pitch that are indicated by a controller, power which is pulse-modulated so as to be a pulse frequency, a duty ratio, a high level, and a low level respectively corresponding to a set pulse frequency, a set duty ratio, a high-level set power, and a low-level set power indicated by the controller, and in which a pulse on time determined by the set pulse frequency and the set duty ratio is longer than a power fluctuation cycle of the power having the bandwidth.Type: ApplicationFiled: October 28, 2021Publication date: April 28, 2022Applicant: TOKYO ELECTRON LIMITEDInventors: Kazushi KANEKO, Yohei ISHIDA
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Patent number: 11280919Abstract: A radiation imaging apparatus is provided. The apparatus includes a substrate in which conversion elements are arranged and which transmits light beams, a first scintillator arranged on a first surface side of the substrate, and a second scintillator arranged on a second surface side opposite to the first surface. The conversion elements include first conversion elements and second conversion elements. The first conversion elements are arranged so as to receive light beams from the first scintillator and the second scintillator. A light-shielding layer is arranged between the first scintillator and each of the second conversion elements so as to set light amounts of the second conversion elements from the first scintillator smaller than those of the first conversion elements from the first scintillator, and the second conversion elements are arranged to receive a light beam from the second scintillator.Type: GrantFiled: December 19, 2019Date of Patent: March 22, 2022Assignee: CANON KABUSHIKI KAISHAInventors: Katsuro Takenaka, Shoshiro Saruta, Atsushi Iwashita, Kentaro Fujiyoshi, Keiichi Nomura, Kazumi Nagano, Yohei Ishida, Tomoki Komatsu
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Patent number: 11249126Abstract: A method includes measuring first travelling wave power of a microwave having a single frequency peak and second travelling wave power having a single frequency peak, acquiring duty ratios of the first travelling wave power and the second travelling wave power based on measured values and a first determination threshold value, measuring third travelling wave power of a microwave having a bandwidth and fourth travelling wave power having a bandwidth, acquiring duty ratios of the third travelling wave power and the fourth travelling wave power based on measured values and a second determination threshold value, approximating a pulse width error between the first travelling wave power and the third travelling wave power and a pulse width error between the second travelling wave power and the fourth travelling wave power with linear functions, and determining the correction function based on the linear functions.Type: GrantFiled: April 14, 2020Date of Patent: February 15, 2022Assignee: Tokyo Electron LimitedInventors: Kazushi Kaneko, Yohei Ishida
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Publication number: 20220028661Abstract: A device includes a microwave generator configured to generate a microwave having a bandwidth, an output unit, a directional coupler and a measurer. The microwave generator generates a microwave a power of which is pulse-modulated to be a High level and a Low level. A set carrier pitch is set to satisfy a preset condition. The preset condition includes a condition that a value obtained by dividing a set pulse frequency by the set carrier pitch or a value obtained by dividing the set carrier pitch by the set pulse frequency is not an integer and a condition that an ON-time of the High level is equal to or larger than 50%. The microwave generator averages a first High measurement value and a first Low measurement value in a preset moving average time longer than a sum of the ON-time of the High level at a preset sampling interval.Type: ApplicationFiled: July 21, 2021Publication date: January 27, 2022Inventors: Yohei Ishida, Kazushi Kaneko, Hajime Tamura, Koichi Murai
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Patent number: 11209515Abstract: A method includes setting a setting duty ratio of a pulse to a predefined first setting duty ratio, detecting a measured value of power of a microwave, and calculating an error of the measured value of the power with respect to the setting power level for each setting power level, calculating a correction value for the power for each setting power level on the basis of the error, and determining a first function indicating a relationship between the setting power level and the correction value by logarithmically approximating the relationship between the setting power level and the correction value, and determining the correction function indicating a relationship among the setting duty ratio, the setting power level, and the correction value by approximating the correction value defined by the first function, and the predefined correction value at a setting duty ratio of 100%, with a linear function.Type: GrantFiled: April 14, 2020Date of Patent: December 28, 2021Assignee: TOKYO ELECTRON LIMITEDInventors: Kazushi Kaneko, Yohei Ishida
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Publication number: 20210280390Abstract: A microwave output device includes a microwave generator configured to generate a pulse-modulated microwave; an output unit; a first directional coupler configured to output a part of a progressive wave; and a measurement device configured to determine measurement values of High and Low levels of a power of the progressive wave. The microwave generator alternately generates a first microwave having a bandwidth and a second microwave having a single frequency peak in synchronization with switching of the High level and the Low level; averages the measurement value corresponding to the first microwave with a moving average time equal to or larger than a reciprocal of a carrier pitch; averages the measurement value corresponding to the second microwave with a moving average time less than the reciprocal of the carrier pitch; and controls the powers of High and Low levels based on the averaged measurement values and set powers.Type: ApplicationFiled: March 5, 2021Publication date: September 9, 2021Inventors: Kazushi Kaneko, Yohei Ishida
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Patent number: 10971337Abstract: A device includes a microwave generation unit that generates a microwave having a bandwidth, an output unit, a directional coupler, and a measurement unit. The microwave generation unit generates a microwave of which power is pulse-modulated to have a high level and a low level. The measurement unit determines a first high measured value and a first low measured value respectively indicating a high level and a low level of power of travelling waves in the output unit on the basis of parts of the travelling waves output from the directional coupler. The microwave generation unit controls high level power of the pulse-modulated microwave on the basis of and averaged first high measured value and high level setting power, and controls low level power of the pulse-modulated microwave on the basis of an averaged first low measured value and low level setting power.Type: GrantFiled: August 20, 2018Date of Patent: April 6, 2021Assignee: TOKYO ELECTRON LIMITEDInventors: Kazushi Kaneko, Yohei Ishida
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Publication number: 20200341106Abstract: A method includes setting a setting duty ratio of a pulse to a predefined first setting duty ratio, detecting a measured value of power of a microwave, and calculating an error of the measured value of the power with respect to the setting power level for each setting power level, calculating a correction value for the power for each setting power level on the basis of the error, and determining a first function indicating a relationship between the setting power level and the correction value by logarithmically approximating the relationship between the setting power level and the correction value, and determining the correction function indicating a relationship among the setting duty ratio, the setting power level, and the correction value by approximating the correction value defined by the first function, and the predefined correction value at a setting duty ratio of 100%, with a linear function.Type: ApplicationFiled: April 14, 2020Publication date: October 29, 2020Applicant: Tokyo Electron LimitedInventors: Kazushi KANEKO, Yohei ISHIDA
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Publication number: 20200341043Abstract: A method includes measuring first travelling wave power of a microwave having a single frequency peak and second travelling wave power having a single frequency peak, acquiring duty ratios of the first travelling wave power and the second travelling wave power based on measured values and a first determination threshold value, measuring third travelling wave power of a microwave having a bandwidth and fourth travelling wave power having a bandwidth, acquiring duty ratios of the third travelling wave power and the fourth travelling wave power based on measured values and a second determination threshold value, approximating a pulse width error between the first travelling wave power and the third travelling wave power and a pulse width error between the second travelling wave power and the fourth travelling wave power with linear functions, and determining the correction function based on the linear functions.Type: ApplicationFiled: April 14, 2020Publication date: October 29, 2020Applicant: Tokyo Electron LimitedInventors: Kazushi KANEKO, Yohei ISHIDA
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Patent number: 10796886Abstract: A detection device includes a substrate on which a connector connected to a transmission line for microwaves, a detection circuit configured to convert the microwaves inputted from the transmission line via the connector to a detection value indicating power of the microwaves, and an output port configured to output the detection value obtained by the detection circuit are disposed. The detection device further includes a housing that has a first opening and a second opening and accommodates the substrate in a state where the connector is inserted into the first opening and the output port is inserted into the second opening. The detection device further includes a first sealing member provided at the first opening of the housing to seal a periphery of the connector; and a second sealing member provided at the second opening of the housing to seal a periphery of the output port.Type: GrantFiled: July 26, 2019Date of Patent: October 6, 2020Assignee: TOKYO ELECTRON LIMITEDInventors: Kazushi Kaneko, Yohei Ishida
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Patent number: 10662531Abstract: Disclosed is a plasma processing apparatus including a processing container, a plasma generation mechanism, a regulation unit, a detection unit, and a determination unit. The plasma generation mechanism includes a microwave oscillator, and generates plasma within the processing container using microwaves oscillated by the microwave oscillator. The regulation unit regulates an oscillation frequency, which corresponds to a frequency of the microwaves oscillated by the microwave oscillator, to a predetermined frequency. The detection unit detects the oscillation frequency regulated to the predetermined frequency by the regulation unit. The determination unit determines the success/failure of regulation of the oscillation frequency by the regulation unit, using the oscillation frequency detected by the detection unit, or using a parameter which is changed depending on a difference between the oscillation frequency and the predetermined frequency.Type: GrantFiled: December 31, 2014Date of Patent: May 26, 2020Assignee: TOKYO ELECTRON LIMITEDInventors: Kazushi Kaneko, Yunosuke Hashimoto, Yohei Ishida
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Publication number: 20200124749Abstract: A radiation imaging apparatus is provided. The apparatus includes a substrate in which conversion elements are arranged and which transmits light beams, a first scintillator arranged on a first surface side of the substrate, and a second scintillator arranged on a second surface side opposite to the first surface. The conversion elements include first conversion elements and second conversion elements. The first conversion elements are arranged so as to receive light beams from the first scintillator and the second scintillator. A light-shielding layer is arranged between the first scintillator and each of the second conversion elements so as to set light amounts of the second conversion elements from the first scintillator smaller than those of the first conversion elements from the first scintillator, and the second conversion elements are arranged to receive a light beam from the second scintillator.Type: ApplicationFiled: December 19, 2019Publication date: April 23, 2020Inventors: Katsuro Takenaka, Shoshiro Saruta, Atsushi Iwashita, Kentaro Fujiyoshi, Keiichi Nomura, Kazumi Nagano, Yohei Ishida, Tomoki Komatsu
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Publication number: 20200035462Abstract: A detection device includes a substrate on which a connector connected to a transmission line for microwaves, a detection circuit configured to convert the microwaves inputted from the transmission line via the connector to a detection value indicating power of the microwaves, and an output port configured to output the detection value obtained by the detection circuit are disposed. The detection device further includes a housing that has a first opening and a second opening and accommodates the substrate in a state where the connector is inserted into the first opening and the output port is inserted into the second opening. The detection device further includes a first sealing member provided at the first opening of the housing to seal a periphery of the connector; and a second sealing member provided at the second opening of the housing to seal a periphery of the output port.Type: ApplicationFiled: July 26, 2019Publication date: January 30, 2020Applicant: TOKYO ELECTRON LIMITEDInventors: Kazushi KANEKO, Yohei ISHIDA
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Publication number: 20190057844Abstract: A device includes a microwave generation unit that generates a microwave having a bandwidth, an output unit, a directional coupler, and a measurement unit. The microwave generation unit generates a microwave of which power is pulse-modulated to have a high level and a low level. The measurement unit determines a first high measured value and a first low measured value respectively indicating a high level and a low level of power of travelling waves in the output unit on the basis of parts of the travelling waves output from the directional coupler. The microwave generation unit controls high level power of the pulse-modulated microwave on the basis of and averaged first high measured value and high level setting power, and controls low level power of the pulse-modulated microwave on the basis of an averaged first low measured value and low level setting power.Type: ApplicationFiled: August 20, 2018Publication date: February 21, 2019Applicant: TOKYO ELECTRON LIMITEDInventors: Kazushi KANEKO, Yohei ISHIDA