Abstract: A device includes a microwave generation unit that generates a microwave having a bandwidth, an output unit, a directional coupler, and a measurement unit. The microwave generation unit generates a microwave of which power is pulse-modulated to have a high level and a low level. The measurement unit determines a first high measured value and a first low measured value respectively indicating a high level and a low level of power of travelling waves in the output unit on the basis of parts of the travelling waves output from the directional coupler. The microwave generation unit controls high level power of the pulse-modulated microwave on the basis of and averaged first high measured value and high level setting power, and controls low level power of the pulse-modulated microwave on the basis of an averaged first low measured value and low level setting power.

Abstract: An assembly-type vehicle component 1A, 1B used by assembling one of functional members 3A, 3B having predetermined functions to a mounting member 2 to be mounted to a vehicle body side is configured to allow two types of functional members 3B, 3A to be assembled to the fitting portion 20 of the mounting member 2 so as to be in a detachment-prevented state, and the mounting member 2 has a rattling preventing protrusion 25U for pressing the assembled functional member 3A, and a rattling preventing protrusion 25D for pressing the assembled functional member 3B. Each functional member 3A, 3B has a reception portion 36A, 36B (i.e., gap 37A, 37B) for receiving the rattling preventing protrusion 25D, 25U that is irrelevant to the functional member, so as not to cause pressing.

Abstract: A microwave generator of a plasma processing apparatus of an embodiment includes a first module, a second module, and a combiner. The first module includes a distributor which distributes a high-frequency electric signal, and outputs a plurality of high-frequency electric signals. A plurality of amplifier modules of the second module respectively amplify the plurality of high-frequency electric signals from the first module to output a plurality of microwaves. The combiner combines the plurality of microwaves from the plurality of amplifier modules to output a microwave. Each of the plurality of amplifier modules has a DC/DC converter and an amplifier. The DC/DC converter steps down the voltage of a first direct-current power from an external direct-current power supply to output a second direct-current power. The amplifier amplifies a high-frequency electric signal by using the second direct-current power to output a microwave.

Abstract: A method of manufacturing a scintillator, includes growing a scintillator layer constituted by a plurality of column crystals on a base, forming a first protection film so as to cover the scintillator layer, planarizing the first protection film, the planarizing including a polishing process of polishing the first protection film, and forming a second protection film configured to cover the first protection film that has undergone the planarizing. The scintillator layers grown on the base include an abnormally grown portion. In the polishing process, a front end of the abnormally grown portion is polished as well as a surface of the first protection film so as to form a continuation surface by the surface of the first protection film and a surface of the abnormally grown portion.

Abstract: A radiation detection apparatus includes a sensor base, a sensor substrate supported by the sensor base and configured to output signals from a plurality of pixels for radiation detection, a peripheral member arranged on a periphery of a side surface of the sensor substrate separately from the sensor substrate, supported by the sensor base, and configured not to output the signal for the radiation detection, and a scintillator layer configured to continuously cover the sensor substrate and the peripheral member.

Abstract: An assembly-type vehicle component 1A, 1B used by assembling one of functional members 3A, 3B having predetermined functions to a mounting member 2 to be mounted to a vehicle body side is configured to allow two types of functional members 3B, 3A to be assembled to the fitting portion 20 of the mounting member 2 so as to be in a detachment-prevented state, and the mounting member 2 has a rattling preventing protrusion 25U for pressing the assembled functional member 3A, and a rattling preventing protrusion 25D for pressing the assembled functional member 3B. Each functional member 3A, 3B has a reception portion 36A, 36B (i.e., gap 37A, 37B) for receiving the rattling preventing protrusion 25D, 25U that is irrelevant to the functional member, so as not to cause pressing.

Abstract: A radiation detection apparatus comprises a sensor panel including a plurality of sensor units which detect radiation and are arrayed, each of the plurality of sensor units comprising a pixel array including a plurality of pixels which detect light and are two-dimensionally arranged, a scintillator layer which converts radiation into light, and a first scintillator protective layer disposed to cover the scintillator layer, and the radiation detection apparatus further comprising a second scintillator protective layer disposed to cover the plurality of sensor units.

Abstract: A method of manufacturing a scintillator, includes growing a scintillator layer constituted by a plurality of column crystals on a base, forming a first protection film so as to cover the scintillator layer, planarizing the first protection film, the planarizing including a polishing process of polishing the first protection film, and forming a second protection film configured to cover the first protection film that has undergone the planarizing. The scintillator layers grown on the base include an abnormally grown portion. In the polishing process, a front end of the abnormally grown portion is polished as well as a surface of the first protection film so as to form a continuation surface by the surface of the first protection film and a surface of the abnormally grown portion.

Abstract: A radiation detection apparatus includes a sensor base, a sensor substrate supported by the sensor base and configured to output signals from a plurality of pixels for radiation detection, a peripheral member arranged on a periphery of a side surface of the sensor substrate separately from the sensor substrate, supported by the sensor base, and configured not to output the signal for the radiation detection, and a scintillator layer configured to continuously cover the sensor substrate and the peripheral member.

Abstract: A radiation imaging apparatus, comprising a plurality of sensor units each including a plurality of sensors, a support portion having a lattice shape which partitions a region under the plurality of sensor units into a plurality of spaces and configured to support the plurality of sensor units from a side of lower surfaces of the plurality of sensor units, and bonding members respectively arranged in the plurality of spaces and configured to bond the plurality of sensor units and the support portion.

Abstract: Disclosed is a microwave plasma processing apparatus including: a processing container configured to define a processing space a microwave generator configured to generate microwaves for generating plasma of a processing gas introduced into the processing space, a distributor configured to distribute the microwaves to a plurality of waveguides using a variable distribution ratio, an antenna installed in the processing container to seal the processing space and configured to radiate the microwaves distributed to each of the plurality of waveguides by the distributor to the processing space, a monitor unit configured to monitor a power of the microwaves distributed to each of the plurality of waveguides by the distributor, and a distribution ratio control unit configured to correct the distribution ratio used for distribution of the microwaves by the distributor based on a difference between a ratio of the power of the microwaves monitored by the monitor unit and a previously designated distribution ratio.

Abstract: A radiation imaging apparatus, comprising a sensor panel including a plurality of sensors arranged on a substrate and configured to detect light, and a scintillator placed over the sensor panel, wherein the scintillator having a concentric characteristics distribution having a center outside an outer edge of the scintillator.

Abstract: Disclosed is a plasma processing apparatus including a processing container, a plasma generation mechanism, a regulation unit, a detection unit, and a determination unit. The plasma generation mechanism includes a microwave oscillator, and generates plasma within the processing container using microwaves oscillated by the microwave oscillator. The regulation unit regulates an oscillation frequency, which corresponds to a frequency of the microwaves oscillated by the microwave oscillator, to a predetermined frequency. The detection unit detects the oscillation frequency regulated to the predetermined frequency by the regulation unit. The determination unit determines the success/failure of regulation of the oscillation frequency by the regulation unit, using the oscillation frequency detected by the detection unit, or using a parameter which is changed depending on a difference between the oscillation frequency and the predetermined frequency.

Abstract: A method of manufacturing a radiation detection apparatus is provided. On a sensor substrate on which a pixel array is formed, a scintillator layer that covers the pixel array, a sealing layer that covers a side face of the scintillator layer, and a protection layer that covers an upper face of the scintillator layer and an upper face of the sealing layer are formed. The sensor substrate, the sealing layer, and the protection layer along a side of the pixel array are cut such that a cut surface of the sensor substrate, a cut surface of the sealing layer, and a cut surface of the protection layer are arranged on the same plane.

Abstract: Disclosed is a microwave plasma processing apparatus including: a processing container configured to define a processing space a microwave generator configured to generate microwaves for generating plasma of a processing gas introduced into the processing space, a distributor configured to distribute the microwaves to a plurality of waveguides using a variable distribution ratio, an antenna installed in the processing container to seal the processing space and configured to radiate the microwaves distributed to each of the plurality of waveguides by the distributor to the processing space, a monitor unit configured to monitor a power of the microwaves distributed to each of the plurality of waveguides by the distributor, and a distribution ratio control unit configured to correct the distribution ratio used for distribution of the microwaves by the distributor based on a difference between a ratio of the power of the microwaves monitored by the monitor unit and a previously designated distribution ratio.

Abstract: A radiation detection apparatus including a sensor unit having photoelectric conversion units two-dimensionally arranged and a scintillator layer which converts radiation into light, comprising a first member disposed on the sensor unit, and a second member disposed on the first member, wherein the scintillator layer is disposed on the second member, and letting n1 be a refractive index of the first member, n2 be a refractive index of the second member, and n3 be a refractive index of the scintillator layer, a relationship of n1<n2<n3 holds.

Abstract: A scintillator has a two-dimensional array of a plurality of columnar crystals which converts radiation into light, and a covering portion covering the two-dimensional array. The covering portion includes connecting portions configured to partially connect the columnar crystals while partially forming cavities in gaps between the columnar crystals in the two-dimensional array.

Abstract: The present invention provides a radiation detection apparatus including a first substrate member, a second substrate member, and a sealing portion configured to bond an edge portion of the first substrate member to an edge portion of the substrate member, one of the first substrate member and the second substrate member being a sensor panel including photoelectric conversion elements and the other being a scintillator panel including a scintillator layer, and the sealing portion including a first sealing resin having a first elastic modulus, a second sealing resin having a second elastic modulus lower than the first elastic modulus, a stress reduction portion configured to reduce a stress that acts on the first sealing resin and the second sealing resin and having a third elastic modulus lower than the second elastic modulus.

Abstract: A radiation imaging apparatus, comprising a sensor panel including a plurality of sensors arranged on a substrate and configured to detect light, and a scintillator placed over the sensor panel, wherein the scintillator having a concentric characteristics distribution having a center outside an outer edge of the scintillator.

Abstract: A method of manufacturing a radiation detection apparatus is provided. The apparatus comprises a first scintillator layer, a second scintillator layer, and a sensor panel that detects light emitted by the first scintillator layer and the second scintillator layer. The method comprises preparing a sensor unit having the sensor panel and the first scintillator layer which includes a set of columnar crystals formed on the sensor panel, and a scintillator panel having a scintillator substrate and the second scintillator layer which includes a set of columnar crystals formed on the scintillator substrate, and fixing the scintillator panel to the sensor panel such that the first scintillator layer and the second scintillator layer face each other.