Abstract: A film-forming apparatus and method comprising a film-forming chamber for supplying a reaction gas, a cylindrical shaped liner provided in the film-forming chamber, a straightening vane provided above the liner for the reaction gas to pass through, wherein the outside of the film-forming chamber connects the inside of the liner via a substrate transfer portion provided at the wall of the film-forming chamber by moving the straightening vane from the position that the straightening vane closes the upper opening of the liner. A substrate supporting portion provided in the liner, for supporting the substrate before the film-forming to move the substrate in a vertical direction, a substrate transfer unit capable of moving inside the film-forming chamber through the substrate transfer portion, wherein the substrate is transferred between the substrate supporting portion and the substrate transfer unit.

Abstract: A vapor growth apparatus according to an aspect of the present invention includes a reaction chamber into which a wafer is loaded, a first valve which is connected to the reaction chamber and controls a flow rate of a first exhaust gas discharged from the reaction chamber, a first pump which is provided on a downstream side of the first valve and discharges the first exhaust gas, a first pressure gauge which detects a first pressure that is a pressure of the reaction chamber, a first pressure control unit which controls the first valve based on the first pressure, a second pressure gauge which detects a second pressure that is a pressure between the first valve and the first pump, and a second pressure control unit which controls an operation volume of the first pump based on the first pressure and the second pressure.

Abstract: According to one embodiment, a vapor-phase growing apparatus, includes: a reactor containing a plurality of gas introduction portions and a gas reaction portion located below the gas introduction portions; a susceptor, of which a surface is exposed in an interior space of the gas reaction portion of the reactor, for disposing and fixing a substrate on the surface thereof; a gas distributor provided between the gas introduction portions and the gas reaction portion of the reactor; a plurality of gas inlet conduits which are connected with the gas introduction portions, respectively; and a switching device, which is provided in an outside of the reactor, for switching gases to be supplied to the gas inlet conduits, respectively.

Abstract: According to one embodiment, a vapor-phase growing apparatus, includes: a reactor containing a gas introduction portion and a gas reaction portion continued from the gas introduction portion; a susceptor, of which a surface is exposed in an interior space of the gas reaction portion of the reactor, for disposing and fixing a substrate on the surface thereof; a plurality of gas inlet conduits which are arranged subsequently along a direction of height of the reactor in the gas introduction portion of the reactor; and a switching device, which is provided in an outside of the reactor, for switching gases to be supplied to the gas inlet conduits, respectively.

Abstract: In a power generation unit incorporated in a fuel cell system, a mixture fuel with a certain concentration is supplied to an anode, power is generated by electrochemical reaction between the anode and a cathode exposed to air, and a discharge liquid containing an unreacted mixture fuel is discharged from the anode. The power generation unit is connected to a fuel circulation path for circulating the discharge liquid to the anode. If a mixture fuel is low in pressure, a fuel supply unit supplies fuel to the fuel circulation path. The temperature of the power generation unit is controlled in accordance with the concentration or volume of the mixture fuel supplied to the anode.

Abstract: In a fuel cell system, mixture fuel having a certain fuel concentration is supplied to an anode, electric power is output from between the anode and the cathode due to electrochemical reaction when the cathode makes contact with air, and unreacted fuel containing unreacted fuel is discharged from the anode. A fuel circulating path for circulating the unreacted fuel to the anode is connected to the power generating unit and fuel is supplied from the fuel supplying unit to the fuel circulating path depending on a reduction in pressure of the mixture fuel. The temperature of the power generating unit is controlled according to the concentration of the mixture fuel supplied to the anode. Consequently, a fuel cell system, which can achieve reduction of the size thereof without dropping fuel usage efficiency, can be provided.

Abstract: There are provided a power generation unit, a fuel tank, a line, a mixing tank, a fuel circulation unit which circulates a mixture fuel from the mixing tank to the mixing tank via the power generation unit and the line, a fuel supplier which supplies the fuel from the fuel tank to the mixing tank, an air supplier which supplies air to a cathode, a power adjustment unit which adjusts the current applied to the load in accordance with a generated power output, a fan which adjusts the temperature of the power generator, and a control unit which detects the concentration and volume of the mixture fuel and manipulates, on the basis of a detection result, the fuel circulation unit, the fuel supplier, the load of the power adjustment unit, the air supplier and the fan to control the concentration and volume of the mixture fuel.

Abstract: A method of cleaning a film-forming apparatus to remove a silicon-based material deposited on a constituent member of the film-forming apparatus after being used to form thin films includes introducing a first gas including fluorine gas and a second gas including carbon monoxide gas into the film-forming apparatus, and heating the constituent member. The constituent member includes quartz or silicon carbide and the silicon-based material includes silicon nitride, or the constituent member includes silicon carbide and the silicon-based material includes silicon oxide.

Abstract: A direct methanol fuel cell unit is provided with a fuel cell including an anode, a cathode with a hydrophobic microporous layer, an electrolyte membrane put in-between, and a fuel supply path supplying fuel to the anode. The fuel supply path is provided with an upwind water barrier preventing back-diffusion of water and a gas flow path channeling gas generated at the anode and disposed between the barrier and the anode. A water-rich zone is formed between the water barrier and the cathode microporous layer. Water loss from either side of this zone is eliminated or minimized, thereby permitting direct use of highly concentrated methanol in the fuel flow path with good fuel efficiency and power performance. The cell unit can be applied equally well to both an active circulating air cathode and an air-breathing cathode.

Abstract: There are provided a power generation unit, a fuel tank, a line, a mixing tank, a fuel circulation unit which circulates a mixture fuel from the mixing tank to the mixing tank via the power generation unit and the line, a fuel supplier which supplies the fuel from the fuel tank to the mixing tank, an air supplier which supplies air to a cathode, a power adjustment unit which adjusts the current applied to the load in accordance with a generated power output, a fan which adjusts the temperature of the power generator, and a control unit which detects the concentration and volume of the mixture fuel and manipulates, on the basis of a detection result, the fuel circulation unit, the fuel supplier, the load of the power adjustment unit, the air supplier and the fan to control the concentration and volume of the mixture fuel.

Abstract: A fuel cell includes a cell stack in which a plurality of unit cells each including a membrane electrode assembly with an anode electrode and a cathode electrode, and an anode flow plate connected to the anode electrode, and a gap portion which supplies oxygen amount greater than or equal to a consuming oxygen amount of the cathode electrode by diffusion onto the cathode electrode surface, are provided on the cathode electrode surface; a container unit containing the cell stack, having one face and another face in a direction parallel to a stacking direction of the unit cells; a duct unit arranged on at least one of the one face and the another face, and connected to the gap portion, and a fan which supplies the oxygen to the duct unit.

Abstract: A fuel cell include a membrane electrode assembly including an anode, a cathode opposed to the anode, and an electrolyte membrane interposed between the anode and the cathode; a lyophobic porous body in contact with the anode; and an anode passage plate in contact with the lyophobic porous body, the anode passage plate including a gas collection passage and a fuel supplying passage, the gas collection passage collects a gas generated in the anode via the lyophobic porous body, the fuel supplying passage supplies a fuel to the anode via the lyophobic porous body.

Abstract: A liquid cartridge for supplying liquid to an external device connected therewith is provided with a casing, a partition member movably fitted in the casing, which partitions the casing into a first chamber and a second chamber, an outlet port communicating between the first chamber and the external device and a pressure unit housed in the second chamber, which presses the partition member so as to discharge the liquid out of the outlet port.

Abstract: A fuel cell system includes a fuel tank configured to store a fuel at a pressure higher than atmospheric pressure; a vaporizer configured to vaporize the fuel; a reformer configured to reform the vaporized fuel into a hydrogen rich gas; a CO gas removal apparatus configured to remove CO gas in the hydrogen rich gas; and a cell unit configured to generate electricity by allowing the hydrogen rich gas to react to oxygen.

Abstract: A flow path structure is provided with: a first flow path member having a plurality of through grooves, the through grooves being disposed adjacent to each other; a second flow path member having a fitting portion, in the fitting portion the first flow path member being fitted; a third flow path member covering the fitting portion so as to be sealed, the third flow path member being provided on the second flow path member; an inflow port to receive a fluid; an outflow port to exhaust an exhaust fluid; and a flow path formed in the fitting portion along the first flow path member, the flow path linking the inflow port and the outflow port and running through the through grooves.

Abstract: A fuel cell system is provided with: a fuel supplier supplying a fuel including dimethyl ether; a reforming catalyst causing a reforming reaction of the fuel into a reformed gas including hydrogen; a shift catalyst causing a shift reaction of the reformed gas; a methanation catalyst causing a methanation catalyst of the reformed gas; a hydrogenation catalyst causing a hydrogenation catalyst of the reformed gas; and a fuel cell using hydrogen formed the reforming reaction and the shift reaction from the fuel and oxygen included in an atmospheric air to generate electricity.

Abstract: A fuel cell system is provided with a fuel cell having an anode, a cathode and an electrolyte film put therebetween, a fuel supply unit supplying fuel to the anode and a gas supply unit having a pump, the pump giving negative pressure to the cathode so as to introduce gas containing oxidant to the cathode.

Abstract: Provided is a fuel cell including a container having at least two openings, a power generating unit contained in the container, the power generating unit having a membrane electrode assembly, an anode and a cathode channel plates, and a fan to supply oxygen into the membrane electrode assembly from one of the openings of the container. The cathode channel plate has a clearance against the container, and the cathode channel plate has the openings communicating with a space formed between the fan and the membrane electrode assembly on the face different from the opposite face, and the clearance.

Abstract: In a method of cooling a fuel cell, a fuel cell is provided with a housing in which first and second flow paths are defined to flow first and second airflows on first and second surfaces of the fuel cell, and the first flow path is communicated with the second flow path through air flow paths formed in a cathode electrode of the cell. An adjustable pressure difference is produced between the first and second airflows in the first and second flow paths to produce airflows in the air flow paths. Thus, the airflows in the air flow paths are adjusted in accordance with the pressure difference.

Abstract: A fuel cell system is provided with a direct methanol fuel cell having an anode, a cathode and an electrolyte membrane put therebetween, a fuel supply unit supplying fuel to the anode, an air supply unit supplying air to the cathode and a heat exchanger exchanging heat between the fuel supplied by the fuel supply unit to the anode and an exhaust exhausted from the fuel cell.