Patents by Inventor Zoran Krivokapic

Zoran Krivokapic has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8431466
    Abstract: A method of manufacturing a semiconductor device structure, such as a FinFET device structure, is provided. The method begins by providing a substrate comprising a bulk semiconductor material, a first conductive fin structure formed from the bulk semiconductor material, and a second conductive fin structure formed from the bulk semiconductor material. The first conductive fin structure and the second conductive fin structure are separated by a gap. Next, spacers are formed in the gap and adjacent to the first conductive fin structure and the second conductive fin structure. Thereafter, an etching step etches the bulk semiconductor material, using the spacers as an etch mask, to form an isolation trench in the bulk semiconductor material. A dielectric material is formed in the isolation trench, over the spacers, over the first conductive fin structure, and over the second conductive fin structure.
    Type: Grant
    Filed: July 5, 2011
    Date of Patent: April 30, 2013
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Ming-ren Lin, Zoran Krivokapic, Witek Maszara
  • Patent number: 8368219
    Abstract: A buried local interconnect and method of forming the same counterdopes a region of a doped substrate to form a counterdoped isolation region. A hardmask is formed and patterned on the doped substrate, with a recess being etched through the patterned hardmask into the counterdoped region. Dielectric spacers are formed on the sidewalls of the recess, with a portion of the bottom of the recess being exposed. A metal is then deposited in the recess and reacted to form silicide at the bottom of the recess. The recess is filled with fill material, which is polished. The hardmask is then removed to form a silicide buried local interconnect.
    Type: Grant
    Filed: October 26, 2011
    Date of Patent: February 5, 2013
    Assignees: Advanced Micro Devices, Inc., Spansion LLC
    Inventors: Arvind Halliyal, Zoran Krivokapic, Matthew S. Buynoski, Nicholas H. Tripsas, Minh Van Ngo, Mark T. Ramsbey, Jeffrey A. Shields, Jusuke Ogura
  • Patent number: 8334181
    Abstract: A double gate germanium metal-oxide semiconductor field-effect transistor (MOSFET) includes a germanium fin, a first gate formed adjacent a first side of the germanium fin, and a second gate formed adjacent a second side of the germanium fin opposite the first side. A triple gate MOSFET includes a germanium fin, a first gate formed adjacent a first side of the germanium fin, a second gate formed adjacent a second side of the germanium fin opposite the first side, and a top gate formed on top of the germanium fin. An all-around gate MOSFET includes a germanium fin, a first sidewall gate structure formed adjacent a first side of the germanium fin, a second sidewall gate structure formed adjacent a second side of the germanium fin, and additional gate structures formed on and around the germanium fin.
    Type: Grant
    Filed: July 14, 2010
    Date of Patent: December 18, 2012
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Judy Xilin An, Zoran Krivokapic, Haihong Wang, Bin Yu
  • Patent number: 8331135
    Abstract: A chain of field coupled nanomagnets includes at least one elements having substantially different anisotropy energy from that of the other nanomagnets. A signal can propagate from a first input nanomagnet having a relatively high anisotropy energy through the chain to an output nanomagnet. The output nanomagnet may have a relatively lower anisotropy energy than the other nanomagnets. Signal flow direction thus can be controlled. The higher anisotropy energy nanomagnet may be attained by use of a ferromagnet material having a higher anisotropy constant and/or configured with a larger volume than the other elements. The lower anisotropy energy magnet may be attained by use of a ferromagnet material having a lower anisotropy constant and/or configured with a smaller volume than the other elements. Logic signal flow control can also be attained making use of three dimensional geometries of nanomagnets with two different orientations.
    Type: Grant
    Filed: December 22, 2009
    Date of Patent: December 11, 2012
    Assignee: Globalfoundries Inc.
    Inventors: An Chen, Zoran Krivokapic
  • Patent number: 8304760
    Abstract: A device is provided that includes a structure having a sidewall surface, a layer of material provided on the sidewall surface, and a device structure provided in contact with the layer of material. Fabrication techniques includes a process that includes forming a structure having a sidewall surface, forming a layer of material on the sidewall surface, and forming a device structure in contact with the layer of material, where the device structure and the layer of material are components of a device.
    Type: Grant
    Filed: June 13, 2011
    Date of Patent: November 6, 2012
    Assignee: Advanced Micro Devices, Inc.
    Inventors: An Chen, Zoran Krivokapic
  • Publication number: 20120252193
    Abstract: A double gate metal-oxide semiconductor field-effect transistor (MOSFET) includes a fin, a first gate and a second gate. The first gate is formed on top of the fin. The second gate surrounds the fin and the first gate. In another implementation, a triple gate MOSFET includes a fin, a first gate, a second gate, and a third gate. The first gate is formed on top of the fin. The second gate is formed adjacent the fin. The third gate is formed adjacent the fin and opposite the second gate.
    Type: Application
    Filed: June 14, 2012
    Publication date: October 4, 2012
    Applicant: ADVANCED MICRO DEVICES, INC.
    Inventors: Ming-Ren LIN, Judy Xilin AN, Zoran KRIVOKAPIC, Cyrus E. TABERY, Haihong WANG, Bin YU
  • Patent number: 8222680
    Abstract: A double gate metal-oxide semiconductor field-effect transistor (MOSFET) includes a fin, a first gate and a second gate. The first gate is formed on top of the fin. The second gate surrounds the fin and the first gate. In another implementation, a triple gate MOSFET includes a fin, a first gate, a second gate, and a third gate. The first gate is formed on top of the fin. The second gate is formed adjacent the fin. The third gate is formed adjacent the fin and opposite the second gate.
    Type: Grant
    Filed: October 22, 2002
    Date of Patent: July 17, 2012
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Ming-Ren Lin, Judy Xilin An, Zoran Krivokapic, Cyrus E. Tabery, Haihong Wang, Bin Yu
  • Patent number: 8207757
    Abstract: Apparatus and related fabrication and operating methods are provided for logic circuits that include ferromagnetic elements. An exemplary logic circuit includes a first ferromagnetic element having a first ferromagnetic layer, a second ferromagnetic element having a second ferromagnetic layer, and a transistor coupled to the first ferromagnetic element. The first transistor is configured to allow current to flow through the first ferromagnetic element. The current influences the magnetization direction of the first ferromagnetic layer, which, in turn, influences the magnetization direction of the second ferromagnetic layer.
    Type: Grant
    Filed: February 7, 2011
    Date of Patent: June 26, 2012
    Assignee: Globalfoundries, Inc.
    Inventors: An Chen, Zoran Krivokapic
  • Publication number: 20120081944
    Abstract: Apparatus and related fabrication and read methods are provided for crossbar memory elements. An exemplary crossbar memory element includes a crossbar array structure including a set of access lines, unswitched resistance elements coupled electrically in series between the set of access lines and a reference voltage node, and switched resistance elements coupled electrically in series between the first set of access lines and the reference voltage node. To read from a selected access line, the switched resistance element associated with that access line is enabled while the remaining switched resistance elements are disabled.
    Type: Application
    Filed: September 30, 2010
    Publication date: April 5, 2012
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: An CHEN, Zoran KRIVOKAPIC
  • Publication number: 20120038051
    Abstract: A buried local interconnect and method of forming the same counterdopes a region of a doped substrate to form a counterdoped isolation region. A hardmask is formed and patterned on the doped substrate, with a recess being etched through the patterned hardmask into the counterdoped region. Dielectric spacers are formed on the sidewalls of the recess, with a portion of the bottom of the recess being exposed. A metal is then deposited in the recess and reacted to form silicide at the bottom of the recess. The recess is filled with fill material, which is polished. The hardmask is then removed to form a silicide buried local interconnect.
    Type: Application
    Filed: October 26, 2011
    Publication date: February 16, 2012
    Applicants: SPANSION LLC, ADVANCED MICRO DEVICES, INC.
    Inventors: Arvind Halliyal, Zoran Krivokapic, Matthew S. Buynoski, Nicholas H. Tripsas, Minh Van Ngo, Mark T. Ramsbey, Jeffery A. Shields, Jusuke Ogura
  • Patent number: 8102000
    Abstract: According to one exemplary embodiment, a p-channel germanium on insulator (GOI) one transistor memory cell comprises a buried oxide (BOX) layer formed over a bulk substrate, and a gate formed over a gate dielectric layer situated over a germanium layer formed over the buried oxide (BOX) layer. A source region is formed in the germanium layer adjacent to a channel region underlying the gate and overlaying the BOX layer, and a drain region is formed in the germanium layer adjacent to the channel region. The source region and the drain region are implanted with a p-type dopant. In one embodiment, a p-channel GOI one transistor memory cell is implemented as a capacitorless dynamic random access memory (DRAM) cell. In one embodiment, a plurality of p-channel GOI one transistor memory cells are included in a memory array.
    Type: Grant
    Filed: April 10, 2008
    Date of Patent: January 24, 2012
    Assignee: GLOBALFOUNDRIES Inc.
    Inventor: Zoran Krivokapic
  • Patent number: 8049334
    Abstract: A buried local interconnect and method of forming the same counterdopes a region of a doped substrate to form a counterdoped isolation region. A hardmask is formed and patterned on the doped substrate, with a recess being etched through the patterned hardmask into the counterdoped region. Dielectric spacers are formed on the sidewalls of the recess, with a portion of the bottom of the recess being exposed. A metal is then deposited in the recess and reacted to form silicide at the bottom of the recess. The recess is filled with fill material, which is polished. The hardmask is then removed to form a silicide buried local interconnect.
    Type: Grant
    Filed: July 26, 2010
    Date of Patent: November 1, 2011
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Arvind Halliyal, Zoran Krivokapic, Matthew S. Buynoski, Nicholas H. Tripsas, Minh Van Ngo, Mark T. Ramsbey, Jeffrey A. Shields, Jusuke Ogura
  • Publication number: 20110263094
    Abstract: A method of manufacturing a semiconductor device structure, such as a FinFET device structure, is provided. The method begins by providing a substrate comprising a bulk semiconductor material, a first conductive fin structure formed from the bulk semiconductor material, and a second conductive fin structure formed from the bulk semiconductor material. The first conductive fin structure and the second conductive fin structure are separated by a gap. Next, spacers are formed in the gap and adjacent to the first conductive fin structure and the second conductive fin structure. Thereafter, an etching step etches the bulk semiconductor material, using the spacers as an etch mask, to form an isolation trench in the bulk semiconductor material. A dielectric material is formed in the isolation trench, over the spacers, over the first conductive fin structure, and over the second conductive fin structure.
    Type: Application
    Filed: July 5, 2011
    Publication date: October 27, 2011
    Applicant: Advanced Micro Devices, Inc.
    Inventors: Ming-ren LIN, Zoran KRIVOKAPIC, Witek MASZARA
  • Publication number: 20110253983
    Abstract: A device is provided that includes a structure having a sidewall surface, a layer of material provided on the sidewall surface, and a device structure provided in contact with the layer of material. Fabrication techniques includes a process that includes forming a structure having a sidewall surface, forming a layer of material on the sidewall surface, and forming a device structure in contact with the layer of material, where the device structure and the layer of material are components of a device.
    Type: Application
    Filed: June 13, 2011
    Publication date: October 20, 2011
    Applicant: Advanced Micro Devices, Inc.
    Inventors: An Chen, Zoran Krivokapic
  • Patent number: 7994020
    Abstract: A method of manufacturing a semiconductor device structure, such as a FinFET device structure, is provided. The method begins by providing a substrate comprising a bulk semiconductor material, a first conductive fin structure formed from the bulk semiconductor material, and a second conductive fin structure formed from the bulk semiconductor material. The first conductive fin structure and the second conductive fin structure are separated by a gap. Next, spacers are formed in the gap and adjacent to the first conductive fin structure and the second conductive fin structure. Thereafter, an etching step etches the bulk semiconductor material, using the spacers as an etch mask, to form an isolation trench in the bulk semiconductor material. A dielectric material is formed in the isolation trench, over the spacers, over the first conductive fin structure, and over the second conductive fin structure.
    Type: Grant
    Filed: July 21, 2008
    Date of Patent: August 9, 2011
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Ming-ren Lin, Zoran Krivokapic, Witek Maszara
  • Patent number: 7993986
    Abstract: A device is provided that includes a structure having a sidewall surface, a layer of material provided on the sidewall surface, and a device structure provided in contact with the layer of material. Fabrication techniques includes a process that includes forming a structure having a sidewall surface, forming a layer of material on the sidewall surface, and forming a device structure in contact with the layer of material, where the device structure and the layer of material are components of a device.
    Type: Grant
    Filed: August 29, 2008
    Date of Patent: August 9, 2011
    Assignee: Advanced Micro Devices, Inc.
    Inventors: An Chen, Zoran Krivokapic
  • Patent number: 7973364
    Abstract: According to one exemplary embodiment, a method for fabricating a one-transistor memory cell includes forming an opening by removing a portion of a gate stack of a silicon-on-insulator (SOI) device, where the SOI device is situated over a buried oxide layer. The method further includes forming a bottom gate of the one-transistor memory cell in a bulk substrate underlying the buried oxide layer. The method further includes forming a charge trapping region in the buried oxide layer. The charge trapping region is formed at an interface between a silicon layer underlying the gate stack and the buried oxide layer. The charge trapping region causes the one-transistor memory cell to have an increased sensing margin. The method further includes forming a top gate of the one-transistor memory cell in the opening. Also disclosed is an exemplary one-transistor memory cell fabricated utilizing the exemplary disclosed method.
    Type: Grant
    Filed: February 27, 2008
    Date of Patent: July 5, 2011
    Assignee: GLOBALFOUNDRIES Inc.
    Inventor: Zoran Krivokapic
  • Publication number: 20110147709
    Abstract: A chain of field coupled nanomagnets includes at least one elements having substantially different anisotropy energy from that of the other nanomagnets. A signal can propagate from a first input nanomagnet having a relatively high anisotropy energy through the chain to an output nanomagnet. The output nanomagnet may have a relatively lower anisotropy energy than the other nanomagnets. Signal flow direction thus can be controlled. The higher anisotropy energy nanomagnet may be attained by use of a ferromagnet material having a higher anisotropy constant and/or configured with a larger volume than the other elements. The lower anisotropy energy magnet may be attained by use of a ferromagnet material having a lower anisotropy constant and/or configured with a smaller volume than the other elements. Logic signal flow control can also be attained making use of three dimensional geometries of nanomagnets with two different orientations.
    Type: Application
    Filed: December 22, 2009
    Publication date: June 23, 2011
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: An Chen, Zoran Krivokapic
  • Patent number: 7939247
    Abstract: A process is provided that includes forming a first mask on an underlying layer, where the mask has two adjacent portions with an open gap therebetween, and depositing a second mask material within the open gap and at an inclined angle with respect to an upper surface of the underlying layer to form a second mask. In another implementation, a process is provided that includes forming a first mask on an underlying layer, where the mask has a pattern that includes an open gap, and depositing a second mask material within the open gap to form a second mask, where particles of the second mask material are directed in parallel or substantially in parallel to a line at an inclined angle with respect to an upper surface of the underlying layer.
    Type: Grant
    Filed: August 29, 2008
    Date of Patent: May 10, 2011
    Assignee: Globalfoundries Inc.
    Inventors: An Chen, Zoran Krivokapic
  • Patent number: 7871873
    Abstract: A method of manufacturing semiconductor fins for a semiconductor device may begin by providing a bulk semiconductor substrate. The method continues by growing a layer of first epitaxial semiconductor material on the bulk semiconductor substrate, and by growing a layer of second epitaxial semiconductor material on the layer of first epitaxial semiconductor material. The method then creates a fin pattern mask on the layer of second epitaxial semiconductor material. The fin pattern mask has features corresponding to a plurality of fins. Next, the method anisotropically etches the layer of second epitaxial semiconductor material, using the fin pattern mask as an etch mask, and using the layer of first epitaxial semiconductor material as an etch stop layer. This etching step results in a plurality of fins formed from the layer of second epitaxial semiconductor material.
    Type: Grant
    Filed: March 27, 2009
    Date of Patent: January 18, 2011
    Assignee: GLOBAL FOUNDRIES Inc.
    Inventors: Witold Maszara, Ming-Ren Lin, Jin Cho, Zoran Krivokapic