Gas distributor for semiconductor manufacturing apparatus

- ASM IP Holding B.V.
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Description

FIG. 1 is a top perspective view of a gas distributor for semiconductor manufacturing apparatus, showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top view thereof;

FIG. 4 is a bottom view thereof;

FIG. 5 is a front side view thereof;

FIG. 6 is a back side view thereof;

FIG. 7 is a right side view thereof;

FIG. 8 is a left side view thereof; and,

FIG. 9 is a cross sectional view taken along line 9-9 in FIG. 3.

Claims

The ornamental design for a gas distributor for semiconductor manufacturing apparatus, as shown and described.

Referenced Cited
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Other references
  • Applied Materials 0020-31493 Gas Distribution Plate, 133 Holes AMAT-CSP/ METRON,https://www.ebay.com/itm/272889352592n, 2023. (Year: 2023).
  • 020-31624 / Gas Distribution Plate, Windowed / Applied Materials AMAT,https://www.ebay.com/itm/304451702685?trkparms=amclksrc%3DITM%26aid%3D1110006%26algo%3DHOMESPLICE.SIM%26ao%3D1%26asc%3D251362%26meid%3D463ac8a2ca15489e8d2aecb9e9ba9576%26pid%3D101506%26rk%3D3%26rkt%3D25%26sd%3D272889352592, 2023. (Year: 2023).
  • 0020-03379 / Gas Distribution Plate / Applied Materials Amat,https://www.ebay.com/itm/303638911045?_ trkparms=amclksrc%3DITM%26aid%3D1110006%26algo%3DHOMESPLICE.SIM%26ao%3D1%26asc%3D20200818143230%26meid%3Dd7943e7af78c407ebc21806e177d8c30%26pid%3D101224%26rk%3D5%26rkt%3D5%26sd%3D272889352592,2023. (Year: 2023).
Patent History
Patent number: D1005974
Type: Grant
Filed: May 19, 2022
Date of Patent: Nov 28, 2023
Assignee: ASM IP Holding B.V. (Almere)
Inventors: JinHo Shin (Hwaseong-si), JaeHyun Kim (Hwaseong-si), JeongHo Lee (Seoul)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/839,254