Gas dispersing plate for semiconductor manufacturing apparatus

- ASM IP Holding B.V.
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Description

FIG. 1 is a perspective view of a gas dispersing plate for a semiconductor manufacturing apparatus.

FIG. 2 is a front elevational view of the gas dispersing plate.

FIG. 3 is a rear elevational view of the gas dispersing plate.

FIG. 4 is a left side elevational view of the gas dispersing plate.

FIG. 5 is a right side elevational view of the gas dispersing plate.

FIG. 6 is a top plan view of the gas dispersing plate.

FIG. 7 is a bottom plan view of the gas dispersing plate.

FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 6; and,

FIG. 9 is an enlarged detail view of FIG. 7.

Claims

The ornamental design for a gas dispersing plate for a semiconductor manufacturing apparatus, as shown and described.

Referenced Cited
U.S. Patent Documents
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D497977 November 2, 2004 Engelbrektsson
D609652 February 9, 2010 Nagasaka
D614593 April 27, 2010 Lee
D716742 November 4, 2014 Jang
D724553 March 17, 2015 Choi
D725168 March 24, 2015 Yamagishi
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20170009347 January 12, 2017 Jang
Patent History
Patent number: D790041
Type: Grant
Filed: Mar 22, 2016
Date of Patent: Jun 20, 2017
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Hyun Soo Jang (Daejeon), Jeong Ho Lee (Seoul), Young Hoon Kim (Cheonan-si), Young Hyo Jeon (Pyeongtaek-si)
Primary Examiner: Eric Goodman
Assistant Examiner: Amy Wierenga
Application Number: 29/558,824
Classifications
Current U.S. Class: Fitting (10) (D23/259)