Attracting plate of an electrostatic chuck for semiconductor manufacturing
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Description
The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.
Claims
The ornamental design for an attracting plate of an electrostatic chuck for semiconductor manufacturing, as shown and described.
Referenced Cited
U.S. Patent Documents
5671116 | September 23, 1997 | Husain |
6278600 | August 21, 2001 | Shamouilian et al. |
D546784 | July 17, 2007 | Hayashi |
D548200 | August 7, 2007 | Hayashi |
D548705 | August 14, 2007 | Hayashi |
20040212947 | October 28, 2004 | Nguyen et al. |
20050252447 | November 17, 2005 | Zhao et al. |
20060002053 | January 5, 2006 | Brown et al. |
20060221539 | October 5, 2006 | Morita et al. |
Patent History
Patent number: D570310
Type: Grant
Filed: Feb 1, 2007
Date of Patent: Jun 3, 2008
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Yasuharu Sasaki (Nirasaki)
Primary Examiner: Selina Sikder
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/276,679
Type: Grant
Filed: Feb 1, 2007
Date of Patent: Jun 3, 2008
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Yasuharu Sasaki (Nirasaki)
Primary Examiner: Selina Sikder
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/276,679
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)