Boat for substrate processing apparatus

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Description

FIG. 1 is a perspective view of a boat for substrate processing apparatus showing our new design;

FIG. 2 is a front elevation view thereof;

FIG. 3 is a rear elevation view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a left side view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a cross-sectional view thereof taken along line 8-8 in FIG. 3;

FIG. 9 is a cross-sectional view thereof taken along line 9-9 in FIG. 8;

FIG. 10 is a cross-sectional view thereof taken along line 10-10 in FIG. 8;

FIG. 11 is an enlarged perspective view thereof taken along line 11-11 in FIG. 1;

FIG. 12 is an enlarged front elevation view thereof taken along line 12-12 in FIG. 2;

FIG. 13 is an enlarged rear elevation view thereof taken along line 13-13 in FIG. 3;

FIG. 14 is an enlarged top plan view thereof taken along line 14-14 in FIG. 1;

FIG. 15 is an enlarged bottom plan view thereof taken along line 15-15 in FIG. 1;

FIG. 16 is an enlarged right side view thereof taken along line 16-16 in FIG. 4; and,

FIG. 17 is an enlarged left side view thereof taken along line 17-17 in FIG. 5.

The broken lines in the drawing views are included for the purpose of illustrating the unclaimed portions of the boat for substrate processing apparatus and form no part of the claimed design.

Claims

The ornamental design for a boat for substrate processing apparatus, as shown and described.

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Patent History
Patent number: D740769
Type: Grant
Filed: Sep 20, 2013
Date of Patent: Oct 13, 2015
Assignee: HITACHI KOKUSAI ELECTRIC INC.
Inventors: Kosuke Takagi (Toyama), Kiyohiko Maeda (Toyama), Yuji Urano (Toyama), Naoki Matsumoto (Toyama), Yasuaki Komae (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/467,526