Cover of seal cap for reaction chamber for semiconductor

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Description

FIG. 1 is a rear, top and left side perspective view of a cover of seal cap for reaction chamber for semiconductor showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view thereof taken in the direction of line 8-8 in FIG. 2.

The broken lines are included for the purpose of illustrating portions of the article that form no part of the claimed design.

Claims

We claim the ornamental design for a cover of seal cap for reaction chamber for semiconductor, as shown and described.

Referenced Cited
U.S. Patent Documents
D616390 May 25, 2010 Sato
D654883 February 28, 2012 Honma
D654884 February 28, 2012 Honma
D797067 September 12, 2017 Zhang
D813181 March 20, 2018 Okajima
D855027 July 30, 2019 Okajima
D872037 January 7, 2020 Okajima
Foreign Patent Documents
1579504 June 2017 JP
1598442 February 2018 JP
Patent History
Patent number: D916037
Type: Grant
Filed: Nov 16, 2018
Date of Patent: Apr 13, 2021
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Yusaku Okajima (Toyama), Shuhei Saido (Toyama), Hidenari Yoshida (Toyama), Takafumi Sasaki (Toyama)
Primary Examiner: Gino Colan
Application Number: 29/670,537