Upper shield with showerhead for a process chamber
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The dashed lines in
Claims
The ornamental design for an upper shield with showerhead for a process chamber, as shown and described.
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Type: Grant
Filed: Apr 22, 2020
Date of Patent: Dec 27, 2022
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Sarath Babu (Singapore), Ananthkrishna Jupudi (Singapore), Yueh Sheng Ow (Singapore), Junqi Wei (Singapore), Kelvin Tai Ming Boh (Singapore), Kang Zhang (Singapore), Yuichi Wada (Chiba)
Primary Examiner: Patricia A Palasik
Application Number: 29/732,229