Target profile for a physical vapor deposition chamber target
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Description
The dashed lines in the drawings represent unclaimed environment and form no part of the claimed design.
Claims
We claim the ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.
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Patent History
Patent number: D946638
Type: Grant
Filed: Nov 25, 2019
Date of Patent: Mar 22, 2022
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Lee Riker (Milpitas, CA), Fuhong Zhang (San Jose, CA), Zheng Wang (Mountain View, CA)
Primary Examiner: Sheryl Lane
Assistant Examiner: Mark T. Philipps
Application Number: 29/714,564
Type: Grant
Filed: Nov 25, 2019
Date of Patent: Mar 22, 2022
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Martin Lee Riker (Milpitas, CA), Fuhong Zhang (San Jose, CA), Zheng Wang (Mountain View, CA)
Primary Examiner: Sheryl Lane
Assistant Examiner: Mark T. Philipps
Application Number: 29/714,564
Classifications