Abstract: A fluid power rotary drive device, which possesses two oppositely moving drive pistons and an output drive part in mesh with the same. With the aid of a position presetting means it is possible to preset an intermediate position of the output drive part. For this purpose an abutment unit is provided, which has two abutment parts arranged as an axial extension of the two drive pistons. The abutment unit is able to be moved relatively to the drive piston into a positioning setting, in which the two abutment parts are both in engagement with the respectively associated drive piston, something which corresponds to the desired intermediate position.

Abstract: A brake booster (10) comprising a housing (12); a diaphragm (16,18) mounted within the housing to define front and rear chambers (30-36) within the housing; and a cylindrical component (38) mounted within the housing and having an end (42) which passes through a sealing aperture (40) during installation within the housing to make a seal with the cylindrical component; wherein the cylindrical component has a plurality of fingers (46) extending away the said end, the fingers being circumferentially spaced apart around the end, and the outer surface (48) of each finger being chamfered such that the free ends (50) of each finger lie on a circle having an outer diameter (D1) which is less than the inner diameter (D2) of the sealing aperture prior to installation. Easier installation of the cylindrical component during booster assembly, especially where blind installation is required.

Abstract: A food preparation device can be used for making up formula milk for a baby. The device includes a water tank in which water may be boiled by operating a boil button. Once the boiled water has cooled down to a temperature below a predetermined temperature, the previously boiled water may be reheated to the predetermined temperature by operating a button. Operating the button causes water in the tank to be reheated to the predetermined temperature and to be discharged to a bottle received in a bottle receiving station. If dehydrated formula milk powder has previously been added to the bottle, once discharge is complete the bottle may be capped with a teat, shaken to mix the powder with the water, and used to feed a baby or toddler.

Abstract: This invention relates to an apparatus for the production of heated beverage being, in particular, coffee. The apparatus provides a brewing chamber in which the outlet from the brewing chamber is closed for a period during operation to ensure retention of the liquid in contact with the coffee. Upon opening of the outlet, the coffee progresses to a beverage container substantially sealed against the escape of steam and aroma from the brewed coffee.

Abstract: A cooking device for evenly cooking the food without having to turn the food over in the cooking vessel. The cooking device includes a bottom heating member which includes a housing having a top side with one or two heating elements securely disposed in the top side; and also includes a top heating member which includes a housing having a top side and a bottom side and having one or two heating elements securely disposed in the bottom side; and further includes a plurality of support members for supporting the top heating member above the bottom heating member.

Abstract: A cooking appliance having an upper cooking unit pivotally mounted on a lower cooking unit for rotation substantially about a horizontal axis into three different positions, a first position in which the upper cooking unit is on top of the lower cooking unit to form a contact grill, a second position in which the upper cooking unit is substantially horizontally oriented with and parallel to the lower cooking unit to form therewith a double grooved griddle, and a third, generally upright, position intermediate the first and second positions to provide access to the lower cooking plate when the appliance is being used as a contact grill. The cooking plates have elongate grooves which are generally parallel to an axis of the hinge that connects the upper and lower cooking units together and which grooves increase in depth from one side of the cooking appliance to the other for carrying liquid cooking byproducts away from the food being cooked.

Abstract: Enclosed rotisserie with added convenience, including a countertop resting box enclosure housing a safety rear mounted heating element and a power rotated dual rod spit assembly. The gear driven spit assembly may be easily inserted and removed straight into and out of the enclosure without need for angling or coupling the assembly to a power drive socket. The spit assembly may also be mounted at various distances from the heating element to decrease cooking times. The open front of the enclosure is from time to time covered by an inclined glass panel door which may be opened in various ways to facilitate food insertion into and removal from the enclosure, and which may be easily removed for cleaning or other purposes. The embodiment's design makes efficient use of valuable counter space by recessing back and raising off the countertop its controls.

Abstract: An apparatus for preparing a folded food product includes a filling machine (128) operable to deposit a filling (30) on a food wrap (20). The apparatus further includes a first folding element (134 and 136) that is configured to fold a first section (22) of the food wrap (20) over the filling (30). Additionally, the apparatus has a creasing device (222) and a folding belt (214) that is operable to fold the food wrap (20) along first and second creases formed by the creasing device (222). Furthermore, the apparatus includes a first crease plate (328) that is operable to place a third crease (26) in the food wrap (20) after the food wrap (20) exits the folding belt (214), and a second folding element (334 and 336) configured to fold the food wrap (20) along the third crease (26). The apparatus also has a second crease plate (340) that is operable to place a fourth crease (28) in the food wrap (20), and a third folding element (338, 344 and 346) configured to fold the food wrap (20) along the fourth crease (28).

Abstract: A drive rod composed of segments joined together to form a single length for use in a mechanical press. The individual drive rod segments may be separated for ease of assembly into the mechanical press or for servicing the mechanical press. In addition, a split locating collar is used for removably attaching the drive rod to the upper slide of a mechanical press. Drive rod length and slide shutheight may be changed by utilizing spacer elements.

Abstract: An apparatus for embossing a pattern into absorbent articles such as sanitary napkins, panty liners, diapers, and adult incontinence pads is disclosed. The apparatus for forming a pattern of embossments in an absorbent article comprises an embosser assembly having a patterned die roll and an anvil roll. In one embodiment, the anvil roll comprises a multi-layered structure, that comprises a metal hub, encircled by a compressible layer and enclosed by a sleeve which reduces machine dynamics, such as vibration, associated with the embossing apparatus and significantly improves the embossing line process and quality. The embosser assembly also has a mechanism for applying compressive pressure on the components of an absorbent article when the components are placed between the die roll and the anvil roll.

Abstract: A method of preparing a plastic mask for paste printing with a plastic sheet being provided with an area containing a predetermined pattern including one or more through-holes is carried out by the steps of bringing the plastic mask provided with electroconductive material on at least one surface into close contact with a printing material while applying an electrical ground potential to the electroconductive material and then using the mask for paste printing by spreading and pressing a past to cause it to pass through any of the through-holes forming the predetermined pattern for deposit on the printing material and then removing the mask from the printing material to leave the paste printing pattern.

Abstract: An improved label stamper which is capable of stamping prices on labels attached on a tape so as to attach the stamped labels on commodities is disclosed. A tape loading mechanism of the label stamper is constituted such that a loading case goes in and out of the machine by functions of a pair of folding and extending legs, so that the label tape can be loaded in a convenient manner. A guide is constituted such that a front plate and a rear plate are fastened across a narrow gap, and this gap forms a guide channel. In a holding mechanism, a push plate is disposed facing toward a base plate, and the push plate interlocks a movable lever to the loading case. Thus, if the tape is inserted into the guide channel, the tape is automatically press-held to the base plate. In a stamping mechanism, a selecting hole of a selecting wheel for driving a stamping belt is provided with a recess and a triangular protuberance.

Abstract: A printing method for performing a lithographic printing in multiple colors by use of a flexible plate material. In particular, a series of engaging holes, while being aligned in the transporting direction of the plate material, are formed for every color in the plate material, and a series of protruded pieces to be inserted into the engaging holes of the plate material, while being aligned in the circumferential direction of each plate cylinder, are formed on the outer peripheral surface of each of the plate cylinders provided for the respective colors, so as to satisfy the following relation: 2D≦P≦4.06×103×D/W where Pmm: pitch of the series of engaging holes (protruded pieces) Dmm: diameter of each protruded piece Wmm: width of the printing plate. The plate material is attached to the plate cylinder by applying the engaging holes of the plate material to the protruded pieces of each plate cylinder, and printing is carried out.

Abstract: A control mechanism is provided for coupling/interrupting two transmission leads. A first cam configured for spring-loaded rotation in a direction of rotation is positioned between the two leads. A lead coupler attached to the first cam couples the two leads to one another when the first cam achieves a prescribed position.

Abstract: A signal transmission fuse is made of a tube (36) which encases a support tape (14) having a reactive coating (18′) which is adhered to one side of the tape by a binder. A method of making the signal transmission fuse includes depositing on the support tape (14) a reactive paint (18) including a binder, which paint dries to form a reactive coating (18′). The coated support tape (14′) is then folded, i.e., formed into a channel configuration, to provide an inner concave side of the tape on which the reactive coating (18′) has been disposed. The coated support tape is then enclosed, e.g., within an extruded plastic tube (36). One side of the support tape may be made of a first material (14a) to which the reactive coating adheres, and a second side may be made of a second material (14b) which bonds or adheres to the inner surface (36a) of the plastic tube (36) enclosing the coated support tape (14′).

Abstract: The present invention relates to flares and other solid propellant devices, rockets or the like, equipped with an igniter or igniter system which is based in whole in part on an extruded igniter stick.

Abstract: A pyrotechnic cutting device (14) is designed for directly cutting one or two parts (10) made from a nonmetallic material, such as a composite material. The device (14) comprises a pyrotechnic expansion tube, which acts directly on the part or parts (10) to be cut, as well as an abutment (40) placed on the other side of the part and facing the spacer (20) installed alongside the tube. The abutment acts in the manner of an anvil during the use or operation of the pyrotechnic expansion tube (16). Thus, there is a clearly defined, well localized cutting of the part (10) along the edge (42) of the abutment aligned with the face (21) of the spacer (20) turned towards the tube (16).

Abstract: A railway maintenance vehicle exchanges worn crossties for new ones. Worn ties are collected and placed on an increased capacity storage car which permits ties to be placed atop the storage cars in a lateral orientation. New ties are simultaneously unloaded from the storage cars for distribution along the track. Tie transport and loading vehicles such as a gantry crane travel on rails atop the storage cars to move worn and new ties between a tie pick up car and a tie distribution car which has a tie ejector for laterally propelling ties fed to it on a queuing conveyor. The tie ejector has an endless drive chain with two striker plates attached at opposite ends and opposite sides such that they cannot interfere. The outward and downward trajectory of ejected ties is adjustable by a movable deflector shield.

Abstract: A dueling or racing roller coaster ride has tracks which approach or cross over each other at near miss locations. A controller system controls the timing of launch of a roller coaster vehicle on each track to better achieve consistent simultaneous arrival of the roller coaster vehicles at the near miss locations, to provide increased thrills and excitement to the riders. The control system determines the loaded vehicle weight via current draw on the track side vehicle motors. The control system generates a vehicle performance parameter, based on past vehicle speed over the track, to compensate for roller resistance and aerodynamic factors. The vehicle weight information and performance parameters are used to determine which vehicle to launch first, and the amount of delay between launching the vehicle on the first track and launching the vehicle on the second track, to better achieve simultaneous arrival at one or more locations.

Abstract: A boat for spillwater raft rides or similar rides having running gear includes running wheels and lateral guide wheels to accept a force exerted by a portion of the track. A safety device is provided that consists of safety wheels or runners. The latter are located above lateral guide wheels and designed to engage safety rails placed along the line to accept lifting forces.

Abstract: This invention has the ability to provide the initial acceleration necessary for spacecraft to attain earth orbit without use of traditional rocket propellants. The invention also has the ability to provide an alternative means of ground transportation without the direct use of fossil fuel. The invention utilizes a pressurized, nonmagnetic tube to accelerate and translate a piston. The piston is magnetically coupled to a conveyance, which travels along the outside of the tube. The conveyance, in turn, can be either a spacecraft or a vehicle suitable for ground transportation.

Abstract: A collapsible table which is constructed of a main section which has a substantially planer work surface. The main section is composed of two equally sized parts which are hingedly connected together which permits folding of the main section from a position with the parts in alignment to a position with the parts in juxtaposition. Hingedly connected to each edge of the main section is a leg assembly. Each leg assembly is to be movable, upon actuation of a squeezable handle, from a retracted position alongside of the main section to an extended position substantially transverse to the main section. When in the transverse position, each leg assembly is to be locatable in any one of a plurality of different positions each of which will locate the work surface at a different height from the surface on which the collapsible table is mounted.

Abstract: An improved recessed computer monitor table that is capable of quickly and easily providing for height and angle adjustment of a computer monitor. The table comprises a top that has an opening adapted to receive the computer monitor and a support base attached to the top. Also, one or more recess side panels are adapted to mount to the top lower portion. Further, a rod adjuster assembly and one or more adjuster panels are provided. The one or more adjuster panels are adapted to adjustably mount to the one or more recess side panels and have one or more slots disposed on the one or more adjuster panels. The one or more slots are also adapted to receive the rod adjuster assembly. At least one recess top pan is provided that is pivotably mounted to the one or more adjuster panels at a first end and movably mounted to the one or more adjuster panels at a second end having the at least one slot.

Abstract: A folding table leg mechanism for mounting to a tabletop, having a leg support with an extension portion and a base portion fixedly mounted to the extension portion, and a mounting mechanism for pivotally connecting the leg support to the tabletop. The mounting mechanism has a hinge joint for pivoting the leg support in a pivot plane substantially perpendicular to the tabletop plane from a collapsed position in which the leg support is substantially parallel to the tabletop to an erect position in which the leg support is substantially perpendicular to the tabletop, and also has a rotation joint for rotating the leg support about a rotation axis substantially perpendicular to the tabletop when the leg support is in the erect position, from a first rotational position to a second rotational position. The leg support may be locked in place when it is in the second rotational position.

Abstract: A video monitor mounted support shelf or platform has adaptive support legs vertically adjustable for fitting a range of monitors and further provides a clamping device for attachment to the monitor's case without modification of the monitor's case. The adjustable legs are defined in two embodiments as the scissor adjustable type or as laterally displaced V-shaped legs having an adjustable divergent angle.

Abstract: A table is disclosed for use in connection with a machine unit such as a multi-head embroidery machine. The table surface is slidably mounted to a slide unit mounted on a sub frame that is vertically movable between an upper position where the table can support a flat work piece to be sewn at the head of the machine, and a lower position where tubular pieces can be freely hand sewn freely from the machine head. The table is moved between the upper and lower positions by hydraulic cylinders that raise and lower the sub frame unit. The table can also be retracted into the main frame of the machine unit by means of a slide unit attached between the table and the sub frame.

Abstract: A furniture system including at least one worktop which mounts thereon a plurality of legs adjustable in height. The legs are connected to respective support plates recessed in the underside of the worktop. At least one linear guide is recessed into the underside of the worktop for the mounting of accessories on the worktop. A plurality of worktops can be mounted in spaced relation from a support surface by a common leg via support arms. The worktops can be joined together in either a flush arrangement or separated from one another. In the separated configuration, a tray can be fitted in the space between two adjacent worktops for the housing of cables, electrical sockets and the like.

Abstract: A waste tire incinerating and post-treatment system in which waste tires are continuously and efficiently burned. The system includes a waste tire reservoir tank, a hoist, a conveyor system, a tire-size sensing system, an incinerating part, a waste oil purifying part, a waste gas purifying part, and an incineration residual material treating part. Waste tires are accumulated in a waste tire reservoir tank before their incineration. A hoist transfers the waste tires from the waste tank reservoir to a conveyor system. The conveyor system conveys waste tires to an incinerating part. A sensing system senses the size of individual tires on the conveyor system to create tire size data. This size data is used to control and optimize the rate of feeding the waste tires into the incinerating furnace. The incinerating part further includes a material removal mechanism for removing incineration residual materials.

Abstract: A hydraulic system for an aircart having a fan cooperable with an air seeder system to distribute material to the ground utilizes two or more fluid power sources combined in parallel. Total fluid capacity is increased so that one source may have reserve capacity for serving other loads. Flow controls for the system are set so that one source maintains at least a minimum flow to a load when the flow provided by the other source diminishes. Specifically, an aircart fan is operated by fluid power combined from a tractor source and a ground driven pump source with controls being provided to control the fin speed and proportions of flow from each source. The ground driven source (boost pump) boosts available fluid power volume to meet demands of the aircart fan. The boost pump is located near the aircart fan and connected with short lines to minimize power loss in the lines.

Abstract: A correction apparatus is designed to correct sewing data used on a sewing machine that forms an embroidery pattern on a cap by moving a needle bar upward and downward and a frame holding the cap in the X- and Y-axis directions. In the correction apparatus for correcting sewing data, the correction apparatus first reads sewing data as an original data, then finds the coordinates of a stitch point for each stitch from the read original data. The correction apparatus corrects the X coordinate of the stitch point based on a correction value that varies according to the Y coordinate, to create an execution data different from that in the original data. The correction value is calculated using the coordinate data of the Y-axis direction as a variable and a correction parameter that can be changed as a constant.

Abstract: A quilting apparatus is provided with a computer controlled presser plate adjusting mechanism. A presser plate rocker shaft is separate from and mechanically connected to a needle rocker shaft and imparts a reciprocating motion to the presser plate. The presser plate rocker shaft is adjustable to vary the range of its output link to the presser plate, thereby changing the endpoints of its reciprocating path of travel. Certain embodiments have an output end of the presser plate rocker shaft adjustable relative to the input end through a coupling to different angular positions relative to an input end in order to change the upper and lower ends of the range of reciprocation of the pressure plate relative to the needle plate. Alternatively, the length of a link between the needle and pressure plate rocker shafts is variable to make the presser plate adjustment.

Abstract: A sewing machine with multiple needles employs, for each needle, a needle bar guide in the shape of the letter “c” and cooperates with a projection. The needle bar guide holds a needle bar by passing the needle bar through holes formed at upper and lower positions of the needle bar guide. Therefore, when the projection is rotated in a boss, the needle bar guide is also rotated, and the end of the needle is oscillated. When the projection is moved back and forth in the boss, the end of the needle is also moved in the same manner. Consequently, a deviation in the relative position between a needle and a rotary hook caused by a slight difference in machining and assembly accuracy can be adjusted for every needle.

Abstract: The invention is a removable attachment to the bobbin winder of a conventional sewing machine. It installs on a bobbin winder in lieu of a bobbin at one end and connects to a conventional spool at the opposite end. It provides for continuous winding of thread or yarn onto the spool by preventing disengagement of the bobbin winder. The invention consists of a flanged post which installs onto the bobbin winder's spindle. The post is long and narrow enough to avoid the bobbin winder's disengagement mechanism. This function eliminates the need for hand winding of spools. Once full, said spool may be used normally with any conventional sewing machine, serger, or knitting machine.

Abstract: In a remote control bobbin case exchanger device (1), a rotary bobbin (K) is to be placed in a position that is not easily accessed, and an exchangeable position (&agr;) is provided in a position that is readily accessed in a bobbin case providing member (3). A chuck driving member (6) moves a chuck member (5) toward the rotary bobbin (K) to clutch a bobbin case (2) along a line connecting the rotary bobbin (K) to the exchangeable position (&agr;).

Abstract: Method for transmitting thread-specific data in re-reeling operations for the manufacture of two-thread lock stitch seams which have to be documented comprising the following steps: the bobbin taking over the thread, in particular the under-thread bobbin (10) is provided with a definite bobbin identification, in a reeling station (28), in which thread material for the under-thread is reeled from a thread stock (30) onto the under-thread bobbin (10), the bobbin identification is detected and is stored in a data storage medium (24) together with a first data record characterizing the thread material and the reeling operation, after inserting the under-thread bobbin (10) into a sewing machine (18) the bobbin identification is detected, from the bobbin identification the first data record stored therewith is determined and is assigned to a second data record concerning the sewing operation and/or the sewn product, whereupon the data set so formed is stored.

Abstract: A presser foot for a sewing machine having a base section, a support projecting upwardly from the base section for attachment to a sewing machine, and a fulling rod secured to the base section. The base section has a needle hole and a front face, a rear face, and opposed first and second sides. The lower surface of the base section has first and second surfaces each extending between the front face and rear face of the base section. The first surface is a planar surface extending substantially horizontally from the first side of the base section to a junction with the second surface. The second surface extends generally diagonally upwardly from the junction to the second side of the base section. The fulling rod extends below and spaced apart from the second surface over substantially the full length of the base section.

Abstract: An existing single hull vessel is rebuilt to provide a double hull vessel by cutting and removing the topside decking and internal vessel structure of the single hull vessel and inserting an inner hull structure within a volume defined by the original hull. The original hull defines an exterior (outer hull) of the rebuilt double hull vessel and the inner hull defines an interior cargo carrying volume and forms a boundary in the event that the outer hull is penetrated. In addition, a trunk structure, raised deck, and lower bulkhead portions may be used to prevent the loss of cargo carrying capacity due to the new double hull. The double hull covers at least the length of the cargo carrying section of the vessel along the bottom and sides of the cargo section.

Abstract: A sail envelope has an internal mast or spar and one or more profiles (1) that is or are free to rotate relative to the longitudinal axis of the mast. Each profile has an outer edge in the form of a symmetrical aerofoil upon which the inner sides of the external sail surfaces bear.

Abstract: Equipment is removably connected by a load transfer element and a removable fastener bolt to a core sandwich type of bulkhead through a plug-in insert, adhesively bonded to the bulkhead at interface surfaces within a pocket formed in the bulkhead for reception of such insert.

Abstract: Several embodiments of bilge devices for small watercraft that permit the use of small capacity bilge pumps and which ensure that the bilge pumps will not run dry during abrupt maneuvers are disclosed.

Abstract: A mooring system provides a bridle having a star-like shape that is useful for mooring a single vessel or for mooring two or more vessels relative to one another. In general, the mooring system provides a mooring bridle formed of a plurality of anchor connections spaced about a central mooring position. Each anchor connection includes an anchor having a passageway therethrough and an anchor line threaded through the passageway. An anchor buoy is connected to each end of the anchor line; and a bridle line connects the anchor buoys. Adjacent anchor connections share a common anchor buoy and are, thus, interconnected. The length of the bridle lines are less than the distance between the anchors so that the diameter of the circle formed by the bridle lines is less than that formed by the anchors. Vessel lines attached to the anchor buoys extend to the central mooring position for attachment of a tender vessel thereto.

Abstract: A composite hull construction includes a metallic skeletal frame of truss-like configuration including a longitudinally extending keel plate, first and second side wall structures extending upwardly from opposing side edges of the keel plate assembly, and a top wall structure extending between upper portions of the first and second side wall structures. A synthetic foam shell entirely encapsulates the side and top wall frame structures and covers the interior surfaces of the keel plate assembly. The foam shell rigidly fixes the frame members in position and increases the compressive strength of the skeletal frame to prevent buckling of the side wall and top wall structures. An exterior fiberglass skin covers the side walls and the top wall to provide a water resistant covering over the foam shell and skeletal frame.

Abstract: Apparatus and methods for producing dry, wet or partially wet and partially dry segments of tissues. The tissue dispenser generally comprises a housing having a tissue egress passage, a tissue source of a predetermined quantity of dry tissue located in the housing, a fluid source of a predetermined volume of fluid located in the housing, and an actuatable application mechanism in fluid communication with the fluid source and operationally positioned proximate to the tissue egress passage. The application mechanism can be actuated to dispense fluid onto the tissue as the tissue passes through the tissue egress passage. A partially wet and partially dry tissue can be used to clean and dry an article. The tissue may generally comprise a cleansing pad having an impermeable membrane positioned between two tissue segments to form a wet tissue area and a dry tissue area. The impermeable membrane prevents fluid from bleeding into the dry tissue area. The tissue may also comprise a pad attached to a bubble of fluid.

Abstract: An apparatus and method for rapidly drying and curing a waterborne coating as applied by a spray gun, or other means, to a product traveling on a moving continuous conveyor track. The conveyor track passes through a drying section which uses recycled filtered air to dry the coating and then into a curing section which uses an irradiator and airflow to rapidly cure the coating. The irradiator is cooled using an air flow and a damper assembly system.

Abstract: The present invention provides an HDP-CVD tool using simultaneous deposition and sputtering of doped and undoped silicon dioxide capable of excellent gap fill and blanket film deposition on wafers having sub 0.5 micron feature sizes having aspect ratios higher than 1.2:1.

Abstract: A chamber liner for use in a semiconductor process chamber and a semiconductor process chamber containing the chamber liner are disclosed. The process chamber includes a housing having an inner surface defining a chamber in which a vacuum is drawn during processing of a semiconductor wafer. The chamber liner has a plasma confinement shield with a plurality of apertures. An outer sidewall extends upwardly from the plasma confinement shield. An outer flange extends outwardly from the outer sidewall such that the outer flange extends beyond the chamber and into a space at atmospheric pressure. The chamber liner preferably further includes an inner sidewall that extends upwardly from the plasma confinement shield. The plasma confinement shield, the inner and outer sidewalls, and the outer flange are preferably integral with one another.

Abstract: A gas feedthrough in a semiconductor processing apparatus comprises a static-dissipative composite material. This material is characterized by good resistance to electromigration and is preferably made of a homogeneous material. This apparatus for preventing the transfer of energy to a gas flown through a gas line and comprises a gas feedthrough comprising a static-dissipative material, the feedthrough having a first end for abuttingly contacting an electrically energized member and a second end for contacting a grounded member, the feedthrough defining a void therein along its length to house a gas line.

Abstract: A reactor 20 includes a shield 50 which prevents the deposition of materials along a line-of-sight path from a wafer 26 toward and onto an electrode 32, or a window 38 which couples an electrode 32 to a reaction chamber of the reactor 20. The shield can be comprised of a conductor and/or an insulator. The shield can affect the character of a plasma generated in the reactor.

Abstract: A showerhead electrode assembly for a plasma reactor for processing semiconductor wafers includes a gas plate having a plurality of through holes for passage of gas. The top face or side of the gas plate is of smaller diameter than the bottom side or face of the gas plate. An acutely angled peripheral groove is formed between the top face of the gas plate, and the lower portion thereof, with the groove terminating at a band-like ledge with the top face and lower portion. A locking ring is provided by two identical semicircular sections, each of which include in a lower portion of an inside sidewall, respectively, an acutely angled peripheral groove for mating with the groove of the gas plate. A unitary circular support collar is formed with a circular channel in a bottom portion thereof.

Abstract: A semiconductor processing system includes a processing chamber, a rotatable shaft extending into the chamber, and a wafer holder in the chamber. The rotatable shaft has a gas flow passage therethrough. The wafer holder is capable of supporting a wafer in position in the chamber so that the processing gas flow passage directs flow onto a face of the wafer.