Epitaxy Formation Patents (Class 117/9)
  • Patent number: 8202365
    Abstract: In a process for producing an oriented inorganic crystalline film, a non-monocrystalline film containing inorganic crystalline particles is formed on a substrate by a liquid phase technique using a raw-material solution which contains a raw material and an organic solvent, where the inorganic crystalline particles have a layered crystal structure and are contained in the raw material. Then, the non-monocrystalline film is crystallized by heating the non-monocrystalline film to a temperature equal to or higher than the crystallization temperature of the non-monocrystalline film so that part of the inorganic crystalline particles act as crystal nuclei.
    Type: Grant
    Filed: December 17, 2008
    Date of Patent: June 19, 2012
    Assignee: FUJIFILM Corporation
    Inventors: Kenichi Umeda, Hiroyuki Hirai, Atsushi Tanaka, Katsuhiro Kohda, Kohei Higashi, Hiroshi Sunagawa
  • Patent number: 8157912
    Abstract: Polycrystalline alumina (PCA) that has been doped with magnesium oxide is converted to sapphire by additionally doping the PCA with boron oxide and sintering to induce abnormal grain growth. The boron oxide may be added to an already formed green PCA ceramic shape by applying an aqueous boric acid solution to the green ceramic and heating the green ceramic in air to convert the boric acid to boron oxide.
    Type: Grant
    Filed: September 11, 2007
    Date of Patent: April 17, 2012
    Assignee: OSRAM SYLVANIA Inc.
    Inventor: George C. Wei
  • Patent number: 8118932
    Abstract: By locally heating specific scan positions within a region of interest and automatically obtaining respective measurement data in a time-resolved and spatially-resolved fashion, dynamic processes within a metallization layer of semiconductor devices may be efficiently monitored and/or modified. For instance, OBIRCH and SEI techniques may be used in combination with the automated data recording and manipulation, thereby providing an efficient means for in situ failure analysis, defect identification, for any dynamic degradation processes in interconnects and interlayer dielectrics.
    Type: Grant
    Filed: May 24, 2006
    Date of Patent: February 21, 2012
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Joerg Buschbeck, Eckhard Langer, Marco Grafe
  • Patent number: 8114217
    Abstract: There are provided a crystallization method which can design laser beam having a light intensity and a distribution optimized on an incident surface of a substrate, form a desired crystallized structure while suppressing generation of any other undesirable structure area and satisfy a demand for low-temperature processing, a crystallization apparatus, a thin film transistor and a display apparatus. When crystallizing a non-single-crystal semiconductor thin film by irradiating laser beam thereto, irradiation light beam to the non-single-crystal semiconductor thin film have a light intensity with a light intensity distribution which cyclically repeats a monotonous increase and a monotonous decrease and a light intensity which melts the non-single-crystal semiconductor. Further, at least a silicon oxide film is provided on a laser beam incident surface of the non-single-crystal semiconductor film.
    Type: Grant
    Filed: July 2, 2008
    Date of Patent: February 14, 2012
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Masayuki Jyumonji, Hiroyuki Ogawa, Masakiyo Matsumura, Masato Hiramatsu, Yoshinobu Kimura, Yukio Taniguchi, Tomoya Kato
  • Patent number: 8110848
    Abstract: The substrate is used for opto-electric or electrical devices and comprises a layer of nitride grown by means of vapor phase epitaxy growth wherein both main surfaces of the nitride substrate are substantially consisting of non N-polar face and N-polar face respectively and the dislocation density of the substrate is 5×105/cm2 or less. Therefore, the template type substrate has a good dislocation density and a good value of FWHM of the X-ray rocking curve from (0002) plane less than 80, so that the resulting template type substrate is very useful for the epitaxy substrate from gaseous phase such as MOCVD, MBE and HVPE, resulting in possibility of making good opto-electric devices such as Laser Diode and large-output LED and good electric devices such as MOSFET.
    Type: Grant
    Filed: June 16, 2008
    Date of Patent: February 7, 2012
    Assignees: Ammono Sp. z o.o., Nichia Corporation
    Inventors: Robert Dwilinski, Roman Doradzinski, Jerzy Garczynski, Leszek Sierzputowski, Yasuo Kanbara
  • Publication number: 20120028810
    Abstract: Method of depositing a layer of oxide of at least one metal element on a curved surface of a textured metal substrate, said method comprising the following steps: (1) a layer of a precursor of at least one oxide of a metal is deposited using an organic solution of at least one precursor of said metal, this solution preferably having a viscosity, measured at the temperature of the method, of between 1 mPa s and 20 mPa s, and even more preferentially between 2 mPa s and 10 mPa s. (2) said layer of oxide precursor is left to dry, (3) heat treatment is carried out in order to pyrolyse said oxide precursor and to form the oxide, at least part of said heat treatment being carried out under a flow of reducing gas, said reducing gas preferably having a flow rate greater than 0.005 cm/s, preferentially between 0.012 cm/s and 0.1 cm/s, and even more preferentially between 0.04 cm/s and 0.08 cm/s.
    Type: Application
    Filed: December 18, 2009
    Publication date: February 2, 2012
    Inventors: Philippe Odier, Stéphanie Morlens, Cyril Millon, Sarah Petil, Tristan Caroff, Carmen Jimenez, Jean-Louis Soubeyroux, Arnaud Allais, Mark Rikel
  • Patent number: 8105435
    Abstract: The inhomogeneous energy distribution at the beam spot on the irradiated surface is caused by a structural problem and processing accuracy of the cylindrical lens array forming an optical system. According to the present invention, in the optical system for forming a rectangular beam spot, an optical system for homogenizing the energy distribution of the shorter side direction of a rectangular beam spot of a laser light on an irradiated surface is replaced with a light guide. The light guide is a circuit that can confine emitted beams in a certain region and guide and transmit its energy flow in parallel with the axis of a path thereof.
    Type: Grant
    Filed: August 28, 2009
    Date of Patent: January 31, 2012
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Koichiro Tanaka
  • Patent number: 8088219
    Abstract: Monocrystalline semiconductor wafers have defect-reduced regions, the defect-reduced regions having a density of GOI-relevant defects within the range of 0/cm2 to 0.1/cm2 and occupy overall an areal proportion of 10% to 100% of the planar area of the semiconductor wafer, wherein the remaining regions of the semiconductor wafer have a significantly higher defect density than the defect-reduced regions. The wafers may be produced by a method for annealing GOI relevant defects in the wafer, by irradiating defined regions of a side of the semiconductor wafer by laser wherein each location is irradiated with a power density of 1 GW/m2 to 10 GW/m2 for at least 25 ms, wherein the laser emits radiation of a wavelength above the absorption edge of the wafer semiconductor material and wherein the temperature of the wafer rises by less than 20 K as a result of irradiation.
    Type: Grant
    Filed: July 26, 2007
    Date of Patent: January 3, 2012
    Assignee: Siltronic AG
    Inventors: Dieter Knerer, Andreas Huber, Ulrich Lambert, Friedrich Passek
  • Publication number: 20110312500
    Abstract: Method of depositing a buffer layer of epitaxial metal oxide on a functionalised surface of a textured metal substrate, said method comprising the following steps: (1) a layer is deposited of a precursor of an oxide of the type A2?xB2+xO7 where A represents a metal of valency 3 or a mixture of several of these metals, and B a metal of valency 4, and x is a number between ?0.1 and +0.1, from a solution of carboxylates of said metals A and B, (2) said layer of oxide precursor is left to dry, (3) heat treatment is carried out in order to pyrolyse said oxide precursor and to form the oxide, at least part of said heat treatment being carried out under a flow of reducing gas.
    Type: Application
    Filed: December 18, 2009
    Publication date: December 22, 2011
    Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
    Inventors: Philippe Odier, Stéphanie Morlens, Cyril Millon, Tristan Caroff, Carmen Jimenez, Jean-Louis Soubetroux, Arnaud Allais, Mark Rikel
  • Patent number: 8052791
    Abstract: A phase modulation element according to the present invention has a first area having a first phase value based on a phase modulation unit having a predetermined size and a second area having a second phase value based on the phase modulation unit having the predetermined size, and each phase distribution is defined by a change in area shares of the first area and the second area depending on each position.
    Type: Grant
    Filed: April 16, 2009
    Date of Patent: November 8, 2011
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Masakiyo Matsumura, Yukio Taniguchi
  • Patent number: 8052789
    Abstract: Disclosed are a polycrystalline silicon and a crystallization method thereof according to an exemplary embodiment of the present invention. The polycrystalline silicon comprises: an insulating substrate; and an optical portion formed on the insulating substrate for receiving a CW laser beam and varying the intensity of the beam in order of strength-weakness, strength-weakness, and strength-weakness on one dimension, so that an amorphous silicon thin film is crystallized. Therefore, the present invention can form a good polycrystalline silicon thin film by growing crystal grains with a constant direction and size, when an amorphous silicon thin film disposed on an insulating film such as a glass substrate is crystallized to a polycrystalline silicon thin film.
    Type: Grant
    Filed: November 8, 2006
    Date of Patent: November 8, 2011
    Assignee: Kyunghee University Industrial & Academic Collaboration Foundation
    Inventors: Jin Jang, Jae-Hwan Oh, Eun-Hyun Kim, Ki-Hyoung Kim
  • Patent number: 8048220
    Abstract: The invention relates to a method for producing a strained layer. Said method comprises the following steps: placing the layer on a substrate and straining it, structuring the strained layer, relaxing the layer, producing directional off-sets in the layer to be strained. A layered structure produced in this manner has triaxially strained layers.
    Type: Grant
    Filed: September 22, 2005
    Date of Patent: November 1, 2011
    Assignee: Forschungszentrum Julich GmbH
    Inventors: Siegfried Mantl, Bernhard Holländer, Dan Mihai Buca
  • Patent number: 8038810
    Abstract: A method for manufacturing a oriented substrate for forming an epitaxial thin film thereon, having a more excellent orientation than that of a conventional one and a high strength, and a method for manufacturing the same. The clad textured metal substrate includes a metallic layer and a copper layer bonded to at least one face of the above described metallic layer, wherein the above described copper layer has a {100}<001> cube texture in which a deviating angle ?? of crystal axes satisfies ???6 degree. The substrate has an intermediate layer on the surface of the copper layer, to form the epitaxial thin film thereon.
    Type: Grant
    Filed: February 18, 2011
    Date of Patent: October 18, 2011
    Assignees: Chubu Electric Power Co., Ltd., Tanaka Kikinzoku Kogyo K.K.
    Inventors: Naoji Kashima, Shigeo Nagaya, Kunihiro Shima, Hirofumi Hoshino
  • Patent number: 8016941
    Abstract: A method and apparatus for crystallizing a semiconductor that includes a first layer having a first crystal lattice orientation and a second layer having a second crystal lattice orientation, comprising amorphizing at least a portion of the second layer, applying a stress to the second layer and heating the second layer above a recrystallization temperature.
    Type: Grant
    Filed: February 5, 2007
    Date of Patent: September 13, 2011
    Assignees: Infineon Technologies AG, Samsung Electronics Co., Ltd.
    Inventors: Matthias Hierlemann, Ja-Hum Ku
  • Patent number: 8016940
    Abstract: The short-pulse laser light 9 emitted from the short-pulse laser light source 1 is focused on and caused to irradiate an organic crystal 8 contained in a sample container 6 via a shutter 2, intensity adjusting element 3, irradiation position control mechanism 4, and focusing optical system 5. The sample container 6 is carried on a stage 7, and can be moved in three dimensions along the x axis, y axis and z axis in an x-y-z orthogonal coordinate system with the direction of the optical axis being taken as the z axis; furthermore, the sample container 6 can be rotated about the z axis. Working of the organic crystal 8 is performed by means of short-pulse laser light that is focused on and caused to irradiate the surface of the organic crystal 8. Prior to working, nitrogen is caused to jet onto the sample container 6 by a low-temperature gas jet device C that is a cooling device; consequently, the organic crystal 8 is cooled to ?150° C. or below.
    Type: Grant
    Filed: March 30, 2005
    Date of Patent: September 13, 2011
    Assignees: Nikon Corporation
    Inventors: Hiroaki Adachi, Hiroshi Kitano
  • Patent number: 7985294
    Abstract: An optical device and a method of manufacturing the optical device, with the method including the steps of forming a dopant layer on a stoichiometric lithium niobate single crystal substrate with Li to Nb mole composition ratio of 49.5% to 50.5%, and diffusing a dopant in the dopant layer into at least a portion of the stoichiometric lithium niobate single crystal substrate. The stoichiometric lithium niobate single crystal substrate includes 0.5 to 5 mol % of Mg. In the diffusing step, a heat treatment is performed at a diffusion temperature of 1000° C. to 1200° C. for a diffusion time of 3 hours to 24 hours in a dry atmosphere of at least one of O2, N2, Ar and He gas having a dew-point temperature of ?35° C. or less.
    Type: Grant
    Filed: March 3, 2006
    Date of Patent: July 26, 2011
    Assignees: Sumitomo Osaka Cement Co., Ltd., National Institute for Materials Science
    Inventors: Futoshi Yamamoto, Katsutoshi Kondou, Junichiro Ichikawa, Masaru Nakamura, Sunao Kurimura, Shunji Takekawa, Kenji Kitamura
  • Patent number: 7981212
    Abstract: A flash lamp annealing device comprises a heater plate, a loader, a lamp set and a control circuit. The heater plate heats a wafer to a predetermined temperature. The wafer is loaded on the loader disposed on the heater plate. The lamp set has one or a plurality of lamps to provide the wafer with a power. The control circuit is coupled to the lamp set to control the flash time of the lamp set.
    Type: Grant
    Filed: March 29, 2006
    Date of Patent: July 19, 2011
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Fu-Kang Tien, Jui-Pin Hung
  • Patent number: 7967910
    Abstract: A fine structure body comprises: (i) a base body, and (ii) a plurality of metal nanorods, which have been distributed and located on a surface of the base body, a proportion X being equal to at least 15%, the proportion X being calculated with the formula: X=(A?B)/C×100[%] wherein A represents the sum total of the projected areas of all of the metal nanorods, B represents the sum total of the projected areas of certain metal nanorods, each of which is located as an isolated metal nanorod at a spacing larger than 10 nm from the closest metal nanorod, and C represents the entire projected area of the fine structure body, including regions free from the metal nanorods.
    Type: Grant
    Filed: November 20, 2006
    Date of Patent: June 28, 2011
    Assignee: FUJIFILM Corporation
    Inventor: Yuki Matsunami
  • Patent number: 7955432
    Abstract: A phase shifter which modulates the phase of incident light has a light-transmitting substrate such as a glass substrate, and a phase modulator such as a concavity and convexity pattern which is formed on the laser beam incident surface of the light-transmitting substrate and modules the phase of incident light. A light-shielding portion which shields light in the peripheral portion where the optical intensity distribution decreases of the phase modulator is formed on the laser beam incident surface or exit surface of the phase shifter, thereby shielding the peripheral light in the irradiation surface of the incident laser beam.
    Type: Grant
    Filed: September 20, 2006
    Date of Patent: June 7, 2011
    Assignee: Advanced LCD Technologies Development Center Co., Ltd.
    Inventors: Hiroyuki Ogawa, Masato Hiramatsu
  • Patent number: 7942965
    Abstract: A method of fabricating silicon parts are provided herein. The method includes growing a silicon sample, machining the sample to form a part, and annealing the part by exposing the part sequentially to one or more gases. Process conditions during silicon growth and post-machining anneal are designed to provide silicon parts that are particularly suited for use in corrosive environments.
    Type: Grant
    Filed: March 19, 2007
    Date of Patent: May 17, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Elmira Ryabova, Jie Yuan, Jennifer Sun
  • Publication number: 20110088612
    Abstract: A method for producing a silicon carbide single crystal including a steps of, loading a sublimation-raw material into a reaction vessel of a production apparatus for a silicon carbide single crystal, and placing a seed crystal for a silicon carbide single crystal in such a manner that the seed crystal substantially faces the sublimation-raw material, and re-crystallizing the sublimation-raw material sublimated by heating on a surface of the seed crystal to grow a silicon carbide single crystal, the method further including applying a thermosetting material containing silicon component to a back surface of the seed crystal before the placing the seed crystal in the reaction vessel of the production apparatus for the silicon carbide single crystal.
    Type: Application
    Filed: March 18, 2009
    Publication date: April 21, 2011
    Applicant: BRIDGESTONE CORPORATION
    Inventors: Hidetoshi Ishihara, Tsuyoshi Motoyama, Daisuke Kondo, Sho Kumagai
  • Patent number: 7927421
    Abstract: A light irradiation apparatus irradiates a target plane with light having a predetermined light intensity distribution. The apparatus includes a light modulation element having a light modulation pattern of a periodic structure represented by a primitive translation vector (a1, a2), an illumination system for illuminating the modulation element with the light, and an image forming optical system for forming the predetermined light intensity distribution obtained by the modulation pattern on the target plane. A shape of an exit pupil of the illumination system is similar to the Wigner-Seitz cell of a primitive reciprocal lattice vector (b1, b2) obtained from the primitive translation vector (a1, a2) by the following equations: b1=2?(a2×a3)/(a1·(a2×a3)) and b2=2?(a3×a1)/(a1·(a2×a3)) in which a3 is a vector having an arbitrary size in a normal direction of a flat surface of the modulation pattern of the modulation element, “·” is an inner product of the vector, and “×” is an outer product of the vector.
    Type: Grant
    Filed: March 16, 2007
    Date of Patent: April 19, 2011
    Assignee: Advanced LCD Technologies Development Center Co., Ltd.
    Inventor: Yukio Taniguchi
  • Patent number: 7887632
    Abstract: The present invention provides a method for manufacturing a monocrystalline film and a device formed by the above method, and according to the method mentioned above, lift-off of the monocrystalline silicon film is preferably performed and a high-purity monocrystalline silicon film can be obtained. A monocrystalline silicon substrate (template Si substrate) 201 is prepared, and on this monocrystalline silicon substrate 201, an epitaxial sacrificial layer 202 is formed. Subsequently, on this sacrificial layer 202, a monocrystalline silicon thin film 203 is rapidly epitaxially-grown using a RVD method, followed by etching of the sacrificial layer 202, whereby a monocrystalline silicon thin film 204 used as a photovoltaic layer of solar cells is formed.
    Type: Grant
    Filed: December 22, 2004
    Date of Patent: February 15, 2011
    Assignee: Japan Science and Technology Agency
    Inventor: Suguru Noda
  • Patent number: 7837790
    Abstract: Methods and apparatus for formation and treatment of epitaxial layers containing silicon and carbon are disclosed. Treatment of the epitaxial layer converts interstitial carbon to substitutional carbon. Specific embodiments pertain to the formation and treatment of epitaxial layers in semiconductor devices, for example, Metal Oxide Semiconductor Field Effect Transistor (MOSFET) devices. In specific embodiments, the treatment of the epitaxial layer involves annealing for short periods of time, for example, by laser annealing, millisecond annealing, rapid thermal annealing, and spike annealing in a environment containing nitrogen.
    Type: Grant
    Filed: December 1, 2006
    Date of Patent: November 23, 2010
    Assignee: Applied Materials, Inc.
    Inventors: Yihwan Kim, Arkadii V. Samoilov
  • Patent number: 7828894
    Abstract: A crystallization method, includes: forming an amorphous silicon layer on a substrate; forming a first crystallization region by irradiating the amorphous silicon layer with a laser beam having a ramp shaped cross sectional profile that decreases in a scanning direction; and performing a second crystallization by moving a predetermined length in a scanning direction so as to be partially overlapped with the first crystallization region formed by the first crystallization.
    Type: Grant
    Filed: November 2, 2005
    Date of Patent: November 9, 2010
    Assignee: LG Display Co., Ltd.
    Inventor: JaeSung You
  • Patent number: 7799158
    Abstract: A method for producing a crystallographically-oriented ceramic includes the steps of forming a first sheet with a thickness of 10 ?m or less containing a first inorganic material in which grain growth occurs at a first temperature or higher and a second sheet containing a second inorganic material in which grain growth occurs at a second temperature higher than the first temperature, laminating one or more each of the first and second sheets to form a laminated body, firing the laminated body at a temperature equal to or higher than the first temperature and lower than the second temperature to cause grain growth in the first inorganic material, and then firing the laminated body at a temperature equal to or higher than the second temperature to cause grain growth in the second inorganic material in the direction of a crystal plane of the first inorganic material.
    Type: Grant
    Filed: January 14, 2008
    Date of Patent: September 21, 2010
    Assignee: NGK Insulators, Ltd.
    Inventors: Shohei Yokoyama, Nobuyuki Kobayashi, Tsutomu Nanataki
  • Patent number: 7776151
    Abstract: A crystallization method which generates a crystallized semiconductor film by irradiating at least one of a polycrystal semiconductor film and an amorphous semiconductor film with light beams having a light intensity distribution with an inverse peak pattern that a light intensity is increased toward the periphery from an inverse peak at which the light intensity is minimum, wherein a light intensity value ? (standardized value) in the inverse peak when a maximum value of the light intensity in the light intensity distribution with the inverse peak pattern is standardized as 1 is set to 0.2?value ??0.8.
    Type: Grant
    Filed: October 3, 2007
    Date of Patent: August 17, 2010
    Assignee: Advanced LCD Technologies Development Center Co., Ltd.
    Inventors: Yukio Taniguchi, Masakiyo Matsumura
  • Patent number: 7758695
    Abstract: One embodiment of the present invention provides a method for fabricating a high-quality metal substrate. During operation, the method involves cleaning a polished single-crystal substrate. A metal structure of a predetermined thickness is then formed on a polished surface of the single-crystal substrate. The method further involves removing the single-crystal substrate from the metal structure without damaging the metal structure to obtain the high-quality metal substrate, wherein one surface of the metal substrate is a high-quality metal surface which preserves the smoothness and flatness of the polished surface of the single-crystal substrate.
    Type: Grant
    Filed: March 2, 2007
    Date of Patent: July 20, 2010
    Assignee: Lattice Power (Jiangxi) Corporation
    Inventors: Chuanbing Xiong, Wenqing Fang, Li Wang, Guping Wang, Fengyi Jiang
  • Patent number: 7759228
    Abstract: A method of manufacturing a semiconductor device. In the method, a substrate is prepared, which includes a buried oxide film and a SiGe layer formed on the buried oxide film. Then, heat treatment is performed on the substrate at a temperature equal to or lower than a first temperature, to form a protective oxide film on a surface of the SiGe layer. Next, the substrate having the protective oxide film is heated in a non-oxidizing atmosphere to a second temperature higher than the first temperature. Further, heat treatment is performed on the substrate thus heated, in an oxidizing atmosphere at a temperature equal to or higher than the second temperature, to form oxide the SiGe layer, make the SiGe layer thinner and increasing Ge concentration in the SiGe layer, thus forming a SiGe layer having the increased Ge concentration.
    Type: Grant
    Filed: June 9, 2006
    Date of Patent: July 20, 2010
    Assignees: Kabushiki Kaisha Toshiba, Oki Electric Industry Co., Ltd.
    Inventors: Naoharu Sugiyama, Norio Hirashita, Tsutomu Tezuka
  • Patent number: 7749323
    Abstract: A single crystal for a scintillator that is a specific single crystal of a cerium-activated orthosilicate compound that comprises 0.00005 to 0.1 wt. %, based on the entire weight of the single crystal, of at least one element selected from a group consisting of elements belonging to Group 13 of the periodic table.
    Type: Grant
    Filed: May 30, 2007
    Date of Patent: July 6, 2010
    Assignee: Hitachi Chemical Company, Ltd.
    Inventors: Naoaki Shimura, Yasushi Kurata, Tatsuya Usui, Kazuhisa Kurashige
  • Patent number: 7736433
    Abstract: BaTiO3—PbTiO3 series single crystal is single-crystallized by heating BaTiO3—PbTiO3 compact powder member or sintered member having a smaller Pb-containing mol number than Ba-containing mol number, while keeping the powder or substance in non-molten condition. In this way, this single crystal can be manufactured at a crystal growing speed faster still and stabilized more, significantly contributing to improving the dielectric loss and electromechanical coupling coefficient for the provision of excellent BaTiO3—PbTiO3 series single crystal in various properties, as well as for the provision of piezoelectric material having a small ratio of lead content, which is particularly excellent in piezoelectric property and productivity.
    Type: Grant
    Filed: May 21, 2008
    Date of Patent: June 15, 2010
    Assignee: Canon Kabushiki Kaisha
    Inventors: Hiroshi Aoto, Akira Unno, Tetsuro Fukui, Akio Ikesue
  • Patent number: 7718001
    Abstract: Disclosed is a method for fabricating a GaN semiconductor epitaxial layer. The method includes the steps of: (a) providing a substrate within a reaction furnace; (b) setting a temperature range of the substrate to be 200° C.˜1,300° C.; (C) supplying a Ga metallic source on the substrate; (d) changing the supplied Ga metallic source on the substrate, to Ga metal islands; (e) supplying a nitrogenous source to the Ga metal islands after suspending supply of the Ga metallic source; (f) forming GaN islands by reacting the Ga metal islands with the nitrogenous source; and (g) growing a GaN epitaxial layer by basing the GaN islands as a seed.
    Type: Grant
    Filed: April 20, 2005
    Date of Patent: May 18, 2010
    Assignee: Galaxia Photonics Co., Ltd.
    Inventor: Sung-Hoon Jung
  • Patent number: 7695564
    Abstract: The present invention is directed to a method for fabricating a thermal management substrate having a Silicon (Si) layer on a polycrystalline diamond film, or on a diamond-like-carbon (DLC) film. The method comprises acts of fabricating a separation by implantation of oxygen (SIMOX) wafer; depositing a polycrystalline diamond film onto the SIMOX wafer; and removing various layers of the SIMOX wafer to leave a Si overlay layer that is epitaxially fused with the polycrystalline diamond film. In the case of the DLC film, the method comprises acts of ion-implanting a Si wafer; depositing an amorphous DLC film onto the Si wafer; and removing various layers of the Si wafer to leave a Si overlay structure epitaxially fused with the DLC film.
    Type: Grant
    Filed: February 3, 2005
    Date of Patent: April 13, 2010
    Assignee: HRL Laboratories, LLC
    Inventors: Miroslav Micovic, Peter Deelman, Yakov Royter
  • Patent number: 7696103
    Abstract: Processes for the purification of silicon carbide structures, including silicon carbide coated silicon carbide structures, are disclosed. The processes described can reduce the amount of iron contamination in a silicon carbide structure by 100 to 1000 times. After purification, the silicon carbide structures are suitable for use in high temperature silicon wafer processing.
    Type: Grant
    Filed: May 30, 2007
    Date of Patent: April 13, 2010
    Assignee: MEMC Electronic Materials, Inc.
    Inventors: Larry Wayne Shive, Brian Lawrence Gilmore
  • Patent number: 7648576
    Abstract: After cleaning the front and back sides of a silicon wafer with a liquid SC-1 and liquid SC-2, the front and back sides of the silicon wafer are cleaned with an HF solution to be water-repellent surfaces. Following that, an epitaxial layer of silicon is formed on the front side. Consequently, there can be reduced stacking faults after formation of the epitaxial layer and occurrence of cloud on the back side. Alternatively, the front and back sides of a silicon wafer are cleaned with the liquid SC-1 and liquid SC-2, and then the back side of the silicon wafer is cleaned with an HF solution to be a water-repellent surface while the front side is cleaned with purified water to be a hydrophilic surf ace. Following that, an epitaxial layer of silicon is formed on the front side. Consequently, there can be reduced mounds on the front side and occurrence of cloud on the back side.
    Type: Grant
    Filed: December 10, 2004
    Date of Patent: January 19, 2010
    Assignee: SUMCO Corporation
    Inventors: Yasuo Fukuda, Makoto Takemura, Koichi Okuda
  • Publication number: 20100001619
    Abstract: A method of manufacturing a perovskite-type oxide single crystal having a desired composition and exhibiting excellent properties. The method includes the steps of: (a) forming a precursor of a perovskite-type oxide, at least a part of which is in an amorphous state, on a seed single crystal substrate to prepare a complex of the seed single crystal and the precursor, and (b) heat-treating the complex to induce solid phase epitaxy in the precursor, and thereby, forming a single crystal of the perovskite-type oxide.
    Type: Application
    Filed: June 18, 2009
    Publication date: January 7, 2010
    Applicant: FUJIFILM Corporation
    Inventors: Shigenorii Yuuya, Masayuki Suzuki, Masahiro Takata
  • Publication number: 20090283028
    Abstract: Semiconductor structures and devices based thereon include an aluminum nitride single-crystal substrate and at least one layer epitaxially grown thereover. The epitaxial layer may comprise at least one of AlN, GaN, InN, or any binary or tertiary alloy combination thereof, and have an average dislocation density within the semiconductor heterostructure is less than about 106 cm?2.
    Type: Application
    Filed: August 14, 2006
    Publication date: November 19, 2009
    Applicant: Crystal IS, Inc.
    Inventors: Leo J. Schowalter, Joseph A. Smart, Shiwen Liu, Kenneth E. Morgan, Robert T. Bondokov, Timothy J. Bettles, Glen A. Slack
  • Patent number: 7608144
    Abstract: A process of lateral crystallization is provided for increasing the lateral growth length (LGL). A localized region of the substrate is heated for a short period of time. While the localized region of the substrate is still heated, a silicon film overlying the substrate is irradiated to anneal the silicon film to crystallize a portion of the silicon film in thermal contact with the heated substrate region. A CO2 laser may be used as a heat source to heat the substrate, while a UV laser or a visible spectrum laser is used to irradiate and crystallize the film.
    Type: Grant
    Filed: October 31, 2005
    Date of Patent: October 27, 2009
    Assignee: Sharp Laboratories of America, Inc.
    Inventors: Apostolos T. Voutsas, Robert S. Sposili, Mark A. Crowder
  • Patent number: 7608148
    Abstract: A crystallization apparatus includes an illumination system which illuminates a phase shifter having a phase shift portion, and irradiates a polycrystal semiconductor film or an amorphous semiconductor film with a light beam having a predetermined light intensity distribution in which a light intensity is minimum in a point area corresponding to the phase shift portion of the phase shifter, thereby forming a crystallized semiconductor film, the phase shifter has four or more even-numbered phase shift lines which intersect at a point constituting the phase shift portion. An area on one side and an area on the other side of each phase shift line have a phase difference of approximately 180 degrees.
    Type: Grant
    Filed: September 14, 2006
    Date of Patent: October 27, 2009
    Assignee: Advanced LCD Technologies Development Center Co., Ltd.
    Inventors: Masakiyo Matsumura, Yukio Taniguchi
  • Patent number: 7594965
    Abstract: The inhomogeneous energy distribution at the beam spot on the irradiated surface is caused by a structural problem and processing accuracy of the cylindrical lens array forming an optical system. According to the present invention, in the optical system for forming a rectangular beam spot, an optical system for homogenizing the energy distribution of the shorter side direction of a rectangular beam spot of a laser light on an irradiated surface is replaced with a light guide. The light guide is a circuit that can confine emitted beams in a certain region and guide and transmit its energy flow in parallel with the axis of a path thereof.
    Type: Grant
    Filed: September 22, 2003
    Date of Patent: September 29, 2009
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Koichiro Tanaka
  • Patent number: 7591894
    Abstract: An LuAP scintillation detector and a method for improving the light output and uniformity of an LuAP scintillator crystal is provided, wherein the method includes disposing the scintillator crystal in a predetermined environment at a threshold temperature to generate an initial scintillator crystal, annealing the initial scintillator crystal in the predetermined environment at the threshold temperature to create an annealed scintillator crystal and cooling the annealed scintillator crystal in the predetermined environment to a final temperature.
    Type: Grant
    Filed: November 27, 2006
    Date of Patent: September 22, 2009
    Assignee: Schlumberger Technology Corporation
    Inventors: Arthur J. Becker, Yanqi Wang, Bradley A. Roscoe, John Simonetti
  • Patent number: 7569109
    Abstract: A method of making a rare earth halide single crystal material is provided. The method includes providing a polycrystalline material having a plurality of grains. The method further includes adding a seed crystal to the polycrystalline material to define a plane of growth for the polycrystalline material. Further, the polycrystalline material having the seed crystal may be subjected to heat-treating, where the heat-treating does not include melting the polycrystalline material.
    Type: Grant
    Filed: August 23, 2006
    Date of Patent: August 4, 2009
    Assignee: General Electric Company
    Inventor: Venkat Subramaniam Venkataramani
  • Patent number: 7557018
    Abstract: A substrate used for fabricating devices thereon includes an insulating film, and a monocrystal Ge thin layer formed on the insulating film in contact therewith, the monocrystal Ge thin layer having a thickness not more than 6 nm. The monocrystal Ge thin layer has a thickness not less than 2 nm and a compressive strain.
    Type: Grant
    Filed: August 28, 2006
    Date of Patent: July 7, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Shu Nakaharai, Tsutomu Tezuka, Shinichi Takagi
  • Patent number: 7544244
    Abstract: A method of manufacturing a ceramic film by using an AD method, by which a film having good crystallinity can be fabricated without using a high-temperature process. The method of manufacturing a ceramic film by using an aerosol including the steps of: (a) dispersing ceramic raw material powder containing an amorphous component in a gas to generate an aerosol; and (b) supplying the aerosol generated at step (a) into a chamber in which a substrate is placed and depositing the ceramic raw material powder on the substrate to form a ceramic film.
    Type: Grant
    Filed: December 6, 2005
    Date of Patent: June 9, 2009
    Assignee: FUJIFILM Corporation
    Inventors: Yukio Sakashita, Takamichi Fujii
  • Patent number: 7527690
    Abstract: The present invention relates to a ferroelectric ceramic compound having the composition of the following formula: s[L]?x[P]y[M]z[N]p[T], a ferroelectric ceramic single crystal, and preparation processes thereof. The ferroelectric ceramic compound and the single crystal according to the present invention are relaxor ferroelectrics having high piezoelectricity, a high electromechanical coefficient and a high electrooptical coefficient, and are useful for manufacturing tunable filters for radio communication, optical communication devices, surface acoustic wave devices, and the like. Particularly, the process of preparing the single crystal according to the present invention enables preparation of a single crystal having a diameter of 5 cm or greater and a single crystal wafer with uniform composition.
    Type: Grant
    Filed: July 30, 2003
    Date of Patent: May 5, 2009
    Assignee: Ibule Photonics Co., Ltd.
    Inventors: Sang-Goo Lee, Min-Chan Kim, Byung-Ju Choi, Min-Chul Shin, Su-Han Yu
  • Patent number: 7520931
    Abstract: A method of making a single crystal material is provided. The method includes providing a polycrystalline material having a plurality of grains. The method further includes adding a seed crystal to the polycrystalline material to define a plane of growth for the polycrystalline material. Further, the polycrystalline material having the seed crystal may be subjected to heat-treating, where the heat-treating does not include melting the polycrystalline material.
    Type: Grant
    Filed: August 23, 2006
    Date of Patent: April 21, 2009
    Assignee: General Electric Company
    Inventors: Venkat Subramaniam Venkataramani, Wesley Hackenberger, Seongtae Kwon, Paul William Rehrig
  • Patent number: 7520930
    Abstract: A bulk silicon carbide single crystal of good crystalline quality which includes a minimized number of structural defects and is free from micropipe defects can be produced by crystal growth in a melt of an alloy comprising Si, C, and M (wherein M is either Mn or Ti) and having an atomic ratio between Si and M in which the value of x, when express as Si1-xMx, is 0.1?x?0.7 in the case where M is Mn or 0.1?x?0.25 in the case where M is Ti at a temperature of the melt which is below 2000° C. The C component is preferably supplied into the melt by dissolution of a graphite crucible which contains the melt such that the melt is free from undissolved C. One method of crystal growth is performed by cooling the melt after a seed substrate is immersed in the melt.
    Type: Grant
    Filed: October 15, 2004
    Date of Patent: April 21, 2009
    Assignee: Sumitomo Metal Industries, Ltd.
    Inventors: Kazuhiko Kusunoki, Shinji Munetoh, Kazuhito Kamei
  • Patent number: 7507290
    Abstract: A flux assisted solid phase epitaxy that can make a thin film having a crystalline perfection comparable with that of a bulk crystal and at a reduced cost is provided in which an amorphous film of a mixture of an objective substance to be grown epitaxially and a flux of a substance producing a eutectic with the objective substance but not producing any compound therewith is deposited on a substrate at a temperature less than a eutectic point of the substances, and the substrate is heat-treated at a temperature not less than the eutectic point of the objective and flux substances. A solid phase reaction, namely solid phase diffusion causes the objective and flux substances to be mixed together to form a liquid phase in their eutectic state from which the objective substance precipitates and epitaxially grows on the substrate.
    Type: Grant
    Filed: March 22, 2005
    Date of Patent: March 24, 2009
    Assignee: Japan Science and Technology Agency
    Inventors: Hideomi Koinuma, Yuji Matsumoto, Ryota Takahashi
  • Patent number: 7503975
    Abstract: In a crystalline silicon film fabricated by a related art method, the orientation planes of its crystal randomly exist and the orientation rate relative to a particular crystal orientation is low. A semiconductor material which contains silicon as its main component and 0.1-10 atomic % of germanium is used as a first layer, and an amorphous silicon film is used as a second layer. Laser light is irradiated to crystallize the amorphous semiconductor films, whereby a good semiconductor film is obtained. In addition, TFTs are fabricated by using such a semiconductor film.
    Type: Grant
    Filed: June 25, 2001
    Date of Patent: March 17, 2009
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Toru Mitsuki, Kenji Kasahara, Taketomi Asami, Tamae Takano, Takeshi Shichi, Chiho Kokubo
  • Publication number: 20090007840
    Abstract: An apparatus and method is provided for pulling a crystal seed from melt for growing a single crystal. The method includes the steps of providing a crucible and providing within the crucible an outer container, and providing coaxially within the outer container an inner container. A protruding portion of the inner container protrudes downward relative to the outer container for containing melt, the inner and outer containers defining an annular channel therebetween which has a bottom wall and contains introduced charge feed. The method further includes the steps of providing for allowing fluid communication between the annular channel and the inner container, delivering charge feed into the annular channel, and generating heat from within the annular channel for preventing the formation of a condensate of the charge feed within the annular channel.
    Type: Application
    Filed: July 3, 2007
    Publication date: January 8, 2009
    Applicant: Siemens Medical Solutions USA, Inc.
    Inventors: Olexy V. Radkevich, Mehmed Becirovic, Keith Ritter