Abstract: A method of cleaning a turbo pump is described. The turbo pump is coupled with a CVD chamber of depositing a material and thus accumulates the material therein. The method includes switching off the turbo pump and using another pump to pump a reactive gas, which can react with the material to form gaseous products, through the turbo pump. Thereby, the turbo pump is cleaned up and is prevented from being a particle source in subsequent CVD operations.

Abstract: A cleaning method for a turbo molecular pump, which enables the exhausting ability of the turbo molecular pump to be restored without bringing about a decrease in the productivity of a substrate processing apparatus. A vaporizing gas that vaporizes foreign matter attached to an internal surface of the turbo molecular pump is supplied toward the foreign matter.

Abstract: A method of cleaning a substrate processing chamber that enables formation of an oxide film on a surface of a processing chamber inside component to be prevented. A substrate processing chamber 11 has therein a processing space S into which a wafer W is transferred and carries out reactive ion etching on the wafer W in the processing space S. The substrate processing chamber 11 has an upper electrode plate 38 that comprises silicon and a lower surface of which is exposed to the processing space S. A dry cleaning is carried out on the upper electrode plate 38 using oxygen radicals produced from oxygen gas introduced into the processing space S. An oxide removal processing is carried out on the upper electrode plate 38 using fluorine ions and fluorine radicals produced from carbon tetrafluoride gas introduced into the processing space S.

Abstract: A particle removal apparatus for removing particles from a chamber of a plasma processing apparatus, wherein the chamber is connected to a gas exhaust port and a plasma of a processing gas is generated in the chamber to plasma process a substrate to be processed, includes a particle charging control member for positively charging particles generated within the chamber by positive ions of an ion sheath region formed in a region other than the vicinity of the substrate to be processed, wherein positively charged particles are discharged from the chamber via the gas exhaust port. Therefore, there is no plasma disturbance or metal contamination, and thus can be applied to a practical use.

Abstract: A gate valve cleaning method that can clean a gate valve that brings an atmospheric transfer chamber and an internal pressure variable transfer chamber that transfer a substrate into communication with each other or shuts them off from each other without bringing about a decrease in the throughput of a substrate processing system. Before the gate valve brings the atmospheric transfer chamber and the internal pressure variable transfer chamber into communication with each other, the pressure in the internal pressure variable transfer chamber is increased so that the pressure in the internal pressure variable transfer chamber can become higher than the pressure in the atmospheric transfer chamber.

Abstract: The invention relates to a method and a device for cleaning the door of a coke oven, said door comprising a sealing edge and a membrane that is attached to the door panel of the coke oven. According to said method, cleaning tools comprising jet nozzles, which are supplied with a flow medium at high pressure, are situated and displaced back and forth in the region between the sealing edge and the door panel of the coke oven, in such a way that the interior surface of the membrane and the sealing edge are cleaned. The coke oven door is cleaned directly after the coke oven chamber is opened, by at least one jet nozzle element, which is supplied with compressed air and is displaced along the sealing edges. The jet nozzles are oriented in such a way that the air hits the surface to be cleaned at an acute angle.

Abstract: The invention relates to a method for cleaning plant components of a power station, wherein a medium is continuously passed through one or more plant components for cleaning a closed circuit and a check of the medium for degree of purity is carried out in at least one operating plant component.

Abstract: The present invention is a drain adapter for adapting a flushing device to a drainpipe. The adapter has a main body including an indent portion for retaining the flushing device during operation. The main body also includes an enlarged portion. The enlarged portion corresponds to a sink recess and expands under pressure to retain the adapter within the drainpipe.

Abstract: In a RLSA microwave plasma processing apparatus that radiates microwave from a microwave generator into a chamber by using a planer antenna (Radial Line Slot Antenna) having many slots formed according to a certain pattern, the chamber contaminated with Na or the like is cleaned by using a cleaning gas containing H2 and O2.

Abstract: Described and claimed are apparatuses and systems for surface cleaning comprising a pump and an applicator connected to the pump through which one or more cleaning agents can be applied to the surface at an operating pressure that is about 600 PSI or less and an operating flow rate that is about 1 gal/min or less.

Abstract: A fluid handling device with an anisotropic wetting surface including a substrate with a multiplicity of asymmetric substantially uniformly shaped asperities thereon. Each asperity has a first asperity rise angle and a second asperity rise angle relative to the substrate. The asperities are structured to present a desired retentive force ratio (f1/f2) greater or less than unity caused by asymmetry between the first asperity rise angle and the second asperity rise angle according to the formula: f3/f2=sin(?3+½??0)/sin(?2+½??0).

Abstract: Embodiments of the present invention generally relate to a method of treating a tubular string using a pigtrain. In one embodiment, a method of treating a tubular string includes injecting working fluid between a lead pig and a trail pig of a pigtrain. A bypass pig of the pigtrain is in a first position between the lead pig and trail pig and closer to the lead pig. The method further includes injecting propellant behind the trail pig, thereby driving the pigtrain through the tubular string. The bypass pig gradually moves from the first position to a second position closer to the trail pig, thereby agitating the working fluid.

Abstract: A process for conducting cleaning operations at predetermined time intervals in a chamber or container of a fluid-receiving device of a foodstuff-processing apparatus first comprises receiving a first fluid in the chamber or container. Then, first and second degrees of cleaning are determined at first and second moments in time, respectively. Then, a first difference between the first and second degrees of cleaning is determined. In a first case, in which the second degree of cleaning lies below a first limit value, the action duration of the at least one cleaning agent during at least one subsequent cleaning operation is set depending on the first degree of cleaning. In a second case, in which the second degree of cleaning lies above the first limit value, a greater amount of cleaning agent is supplied and/or the time interval between two subsequent, successive cleaning operations is shortened.

Abstract: A method of cleaning a turbo pump is described. The turbo pump is coupled with a CVD chamber of depositing a material and thus accumulates the material therein. The method includes using another pump to pump a reactive gas, which can react with the material to form gaseous products, through the turbo pump. Thereby, the turbo pump is cleaned up and is prevented from being a particle source in subsequent CVD operations.

Abstract: A method and apparatus 30 are provided for cleaning of bottle filling equipment 10 that has a plurality of elevated valves 18, each valve being in flow communication with filling liquid supply means 14. The method includes storing a manifold 32 that has a plurality of cleaning openings 42 in a configuration resembling that of the valves, in a position that allows clear visibility and access to the operation of the valves. The manifold 32 is lowered relative to the valves 18, so that it is below the valves and is positioned underneath the valves, with each cleaning opening 42 in flow communication with a valve. The valves 18 are rinsed with liquid flowing through the filling liquid supply 14, the valves and the manifold 32. Afterwards, the manifold 32 is removed from the valves 18 and returned to its stored position.

Abstract: A compressor wash system for compressor washing includes stages of fluid delivery lines coupled at one end to a pump output and at the other end to a corresponding nozzle set. A control valve is connected to the fluid delivery line between the pump and the nozzle set, selectively supplying fluid between the pump and the nozzle set. Each nozzle of a nozzle set is positioned on an inlet of the compressor to allow the stages to wash a portion of the compressor. Nozzle sets are positioned around a bellmouth assembly and/or around an inlet cone of the compressor inlet, with a nozzle spray tip of each nozzle extending into an inlet air flow path of the compressor. Fluid may be directed to one or more of the stages in a sequencing pattern determined and configured to wash the compressor. Templates and installation guides are utilized to position the nozzles.

Abstract: A method of fabricating a substrate processing chamber component involves forming a component having a textured surface and sweeping a jet of pressurized fluid across the textured surface of the component. The jet of fluid is pressurized sufficiently high to dislodge substantially all the particles from the textured surface. The method can be applied to dislodge grit particles from textured exposed surfaces formed by electromagnetic energy beam scanning and grit blasting. The method can also be applied to remove loosely adhered coating particles from the textured surfaces of coated components.

Abstract: A method for altering an initiation time of an apparatus sanitation cycle based upon a base line flow rate. The method may include determining an actual flow rate through the apparatus, comparing the actual flow rate to the base line flow rate, and delaying the initiation time of the apparatus sanitation cycle if the actual flow rate exceeds the base line flow rate.

Abstract: A method for using a film formation apparatus includes performing film formation of a product film selected from the group consisting of a silicon nitride film and a silicon oxynitride film on a target substrate within a reaction chamber of the film formation apparatus; and unloading the target substrate from the reaction chamber. Thereafter, the method includes first heating an inner surface of the reaction chamber at a post process temperature while supplying a post process gas for nitridation into the reaction chamber, thereby performing nitridation of a by-product film deposited on the inner surface of the reaction chamber; then rapidly cooling the inner surface of the reaction chamber, thereby cracking the by-product film by a thermal stress; and then forcibly exhausting gas from inside the reaction chamber to carry the by-product film, thus peeled off from the inner surface.

Abstract: A system, apparatus, and method for home brewing equipment including a basin for holding a cleaning solution and a support assembly mountable in the basin, the support assembly sized and configured to support a container in an upside down position and above the cleaning solution. A plumbing assembly may be coupled to the basin to receive cleaning solution from the basin and the plumbing assembly may be coupled to at least one channel configured to extend into the body of the container. The plumbing assembly may include a pump so that when the pump is activated pressurized cleaning solution is released from the channel inside the container against the inner walls of the container so that the inside of the container is sanitized. The basin may have support elements defining footprints for supporting at least two different sizes of containers.

Abstract: A method of cleaning a pharmaceutical cell that can be carried out onsite in a pharmacy. In particular, the method can be used to clean a pharmaceutical super cell. The method includes placing the cell in a resealable container; adding a wash solution to the resealable container; sealing the resealable container; shaking the sealed container; pouring the wash solution out of the resealable container; and rinsing the cell by repeating the preceding steps using a rinse solution in place of the wash solution. The wash solution may include soap, alcohol, and/or a surfactant. The rinse solution may include deionized water and/or isopropyl alcohol, for example.

Abstract: A tank cleaning device is provided, comprising a base member; a conduit attached to the base member having an inlet, an upper outlet, and a lower outlet; and a plurality of adjustable legs connected to and extending below the base member. The inlet of the conduit accepts a cleaning fluid, and a cleaning nozzle is attached to either the upper outlet or the lower outlet. A method of cleaning the tank is also provided, comprising placing the mounting device at a first location, spraying the tank with the cleaning fluid until a selected portion of the tank is cleaned, discontinuing the supply of cleaning fluid, and then repositioning the mounting device to a second location within the tank and resuming the supply of cleaning fluid. Multiple mounting devices may be employed and periodically repositioned within the tank to achieve quick and effective cleaning.

Abstract: A method for cleaning a bell cup after its removal from a rotary paint atomizer. A device is provided that preferably includes an enclosure within which the bell cup is retained during the cleaning operation. Pressurized cleaning fluid is introduced into the enclosure where it flows over the bell cup and removes paint therefrom. The enclosure may be connected to the nozzle end of a paint spray gun that can be used to deliver the pressurized cleaning fluid thereto.

Abstract: A method for etching a bevel edge of a substrate in a processing chamber is provided. The method includes flowing an inert gas into a center region of the processing chamber defined above a center region of the substrate and flowing a mixture of an inert gas and a processing gas over an edge region of the substrate. The method further includes striking a plasma in the edge region, wherein the flow of the inert gas and the flow of the mixture maintain a mass fraction of the processing gas substantially constant. A processing chamber configured to clean a bevel edge of a substrate is also provided.

Abstract: A method for the on-line cleaning of a heat exchanger used with petroleum process fluids which create coke deposits of asphaltenic origin on the exchanger tubes. The asphaltenes are removed by re-dissolution in a solvent oil of high solubility power for the asphaltenes. Certain asphaltenic crudes are useful as solvents in view of their chemical similarity to the asphaltene coke precursors; also useful are refined petroleum fractions such as gas oils which are also characterized by their solvency for asphaltenes. The solvent oil may be admitted to the heat exchanger following withdrawal of the process fluid and then allowed to soak and dissolve the asphaltene coke precursors after which the resulting solution may be withdrawn and the exchanger returned to use without being at any time disconnected from its associated process unit.

Abstract: The present invention provides a method of cleaning a storage case to be used for storing or transporting mask substrates such as photomasks and photomask blanks, semiconductor substrates such as semiconductor wafers, pellicles, or the like. The present invention: facilitates a regular cleaning operation, can be used also for a storage case of a complicated shape, does not require a large scale equipment or an expensive equipment to facilitate an environmental countermeasure, and provides high cleaning effect. The method of cleaning a storage case polluted by adhesion of a foreign substance of an organic material, an ionic foreign substances or an ionic crystal foreign substance physically absorbed, comprises a step of placing the storage case still in air flow of cleaned air or an inert gas in a temperature range from room temperature to 80° C. for desorbing and removing the foreign substance adhered to the storage case.

Abstract: A device for cleaning a selective catalyst reduction unit by directing air or a cleansing solution directly into or out of honeycomb cells of the selective catalyst reduction unit. The device utilizes a plurality of orifices which are sufficient in diameter and number to cleanse honeycomb cells thereby directing air or cleansing solution into or out of each individual honeycomb cell. The device also utilizes a plurality of probes which are sufficient in number and diameter to cleanse the honeycomb cells. The invention also involves a method for cleaning the honeycomb cells and a method for producing the catalyst cleaning tool.

Abstract: An improved reaction chamber cleaning process is provided for removing water residues that makes use of noble-gas plasma reactions. The method is easy applicable and may be combined with standard cleaning procedure. A noble-gas plasma (e.g. He) that emits high energy EUV photons (E>20 eV) which is able to destruct water molecules to form electronically excited oxygen atoms is used to remove the adsorbed water.

Abstract: A method for cleaning the interior surfaces of a fuel storage tank. The first step of the method is to extract a material sample from the bottom of the fuel tank to determine how thoroughly the tank must be cleaned. The clean fuel is then removed from the tank and is stored in a holding tank. Loose and liquid contaminants are then vacuumed out of the tank. Next, a self-propelled spray nozzle, a sprayer tube, and a rotating spray nozzle, each of which is connected to a pressurized water supply line, are successively lowered into the fuel tank and are used to scour the various interior surfaces of the tank with pressurized water while wash water and loosened contaminants are simultaneously vacuumed out of the tank. The interior of the tank is then dried, and the clean fuel stored in the holding tank is pumped back into the fuel tank.

Abstract: Method for treating bottom sludge in a storage tank, comprising the step of breaking up the bottom sludge of the tank by the use of one or more jets under pressure. The method is characterized in that it comprises the steps of: monitoring the state of the bottom sludge inside the tank by SONAR means; and adjusting the action of the jets during the breaking-up step according to the effects on the state of the bottom sludge detected by the monitoring by SONAR means.

Abstract: A method for cleaning a gas turbine unit. The invention further relates to a nozzle for use in washing the gas turbine unit. The nozzle is arranged to atomize a wash liquid in the air stream in an air intake of the gas turbine unit and comprises a nozzle body comprising an intake end for intake of said wash liquid and outlet end for exit of said wash liquid. The nozzle further comprises a number of orifices that are connected to the outlet end and respective orifice is arranged at a suitable distance from a center axis of said nozzle body, whereby the local density of the injected wash liquid in a desired area can be increased with preserved droplet size and thereby the efficiency of the cleaning process can be significantly improved at the same time as the risk for damaging the components in the gas turbine unit is significantly reduced.

Abstract: A method to remove deposits containing magnetite and copper from a container, particularly from a steam generator of a nuclear power plant. In a first step, the container is treated using an alkaline cleaning solution containing a complexing agent forming a soluble complex with iron ions, a reducing agent, and an alkalizing agent. In a second step a further complexing agent forming a more stable complex with iron III ions than the complexing agent used in the first step and an oxidant are added to the cleaning solution of the first step present in the container.

Abstract: What is contemplated is a printing cylinder washer having a removable or portable drive assembly, or a series of portable drive assemblies of different lengths to accommodate different sizes of print rollers. The drive assemblies have a drive mechanism enabled by a dynamic flow of cleaning solution within the washer reservoir. What is also contemplated is the use of an elevation system, an agitation platform, under-immersion spray bars, an ultrasonic wave cleaning system, and a hatch or door equipped with a thermal breaker in conjunction with the hydro-driven portable drive assembly. What is also contemplated is a method of washing printing rollers within the above-described printing cylinder washer by aligning a nozzle with the drive assembly.

Abstract: A cleaning system and method remove localized caked or dewatered solids from flat-plate membranes in a sewage treatment plant. The caked sludge on the membranes is removed by intense coherent water sprays directed into the spaces between cartridges of a cassette, without removing the cartridges from the cassette. The sprays can be delivered from the top and/or bottom of the cassette, or the side panels of a cassette can be removed for spraying from at least one side, preferably both sides, using a mechanical device with movable spray bars and motor-driven advancing of the spray bars. In one preferred form of the system the apparatus includes horizontal cutting jets followed by angled cutting jets that further break up and wash away the loosened sludge. Jet diameter, velocity and pressure are controlled so as not to damage the membranes or cartridges but to achieve efficient cleaning.

Abstract: The present invention is directed to a method of cleaning an interior surface of a fluid delivery system. The method comprises introducing a first liquid into the fluid delivery system and contacting the interior surface with the first liquid; forming a slurry by introducing a particulate into the first liquid and contacting the interior surface with the slurry; introducing a second liquid into the fluid delivery system and contacting the interior surface with the second liquid; and introducing a third liquid into the fluid delivery system and contacting the interior surface with the third liquid. The first liquid is substantially soluble or substantially insoluble in the second liquid, the second liquid is substantially insoluble in the third liquid, and the particulate is substantially insoluble in the first and second liquids and substantially soluble in the third liquid.

Abstract: A spraying device for a container cleaning system having a container conveyor by means of which containers are transported with their opening facing downwards is described, with the spraying device having spray nozzles acting from the bottom onto the container. To clean the outer side of the containers, the spraying device contains an external spray nozzle directed to the outer surface of the container.

Abstract: A method for treating a subterranean wellbore. More specifically, a method for removing wellbore solids. A first, polymer containing fluid is placed in the solids bed. A second, viscosifying fluid is then placed into the solids bed thereby agitating the solids in the bed and causing the formation of a gel capsules when mixed with the biopolymer fluid. These gel capsules are capable of trapping or entraining the agitated solids. The gel capsules typically have a relatively high volume and a relatively low density, thereby making their removal from the wellbore easier.

Abstract: An apparatus for cleaning and decontaminating an air distribution system includes a sources separately containing a first fluid and a second fluid, a pressurizing system for separately pressurizing the first and second fluids, a distribution subsystem for separately conveying the first and second fluids to a plurality of injectors that convert the first and second fluids into a foam-like substance before injecting the foam-like substance into the air distribution system. The apparatus includes a control system for controlling the pressure and flow rate of the first and second fluids, and a system for removing the foam-like substance from the air distribution system after the foam-like substance has cleaned and decontaminated the air distribution system. A method for cleaning and decontaminating an air distribution system is also disclosed.

Abstract: The invention features in-situ cleaning process for an ion source and associated extraction electrodes and similar components of the ion-beam producing system, which chemically removes carbon deposits, increasing service lifetime and performance, without the need to disassemble the system. In particular, an aspect of the invention is directed to an activating, catalytic, or reaction promoting species added to the reactive species to effectively convert the non-volatile molecular residue into a volatile species which can be removed by conventional means.

Abstract: A cup wash disk jig employed to clean photoresist from a spin-on chamber, receives cleaning solvent from both the bottom and the top, enhancing cleaning effectiveness. The cup wash disk includes a first set of channels allowing fluid communication between a hole positioned in a top surface of the cup wash disk jig, and a plurality of orifices distributed about the edge of the jig. Solvent is applied to the top surface of the jig, for example from an existing reduce resist control (RRC) nozzle normally utilized to dispense resist material. The solvent is flowed through these channels and ejected from the disk sides through the orifice, thereby facilitating removal of resist residue from coater cup portions of the chamber. Solvent may also be applied to an opening in a bottom surface of the jig, for example from a back rinse nozzle, to flow through a second set of channels and be ejected through different jig edge orifices.

Abstract: A cleaning compound for cleaning surfaces in a food processing environment includes at least one container, with each container including a peroxide and/or an alkaline reactant therein. The alkaline reactant is selected to raise the pH of the cleaning compound into the alkaline range when the peroxide and the alkaline reactant are mixed together. The cleaning compound may be a liquid or dry compound, which is applied to the surface to be cleaned.

Abstract: The invention relates to a food product dispenser that includes a food delivery mechanism and a cleansing mechanism. The food delivery mechanism includes a food source, a food conduit associated with the food source for receiving a food component therefrom, and a dispensing mechanism configured to dispense servings of the food component from the conduit. The cleansing mechanism includes a cleansing conduit associated with the food delivery mechanism to direct a cleansing fluid along a fluid path in cleansing association with the food delivery mechanism under conditions for performing a cleansing operation on the food delivery mechanism. A controller can be provided for automatically conducting cleansing operations based on predetermined conditions. The controller, delivery mechanism and cleansing mechanism can be configured to switch between the dispensing of the servings and the cleansing operation at a plurality of intervals during a day without substantial intervention from an operator.

Abstract: The present invention relates to a method and to an apparatus for cleaning particle filters in exhaust gas systems of combustion engines, in particular diesel engines in vehicles. In order to clean a particle filter in a simple and economical manner without the need to remove the particle filter, a noncombustible, ash-free cleaning fluid is sprayed into the particle filter (25) at high pressure by means of a spray nozzle (14), across an area of said filter through which the exhaust gas flows during the operation of the combustion engine, in a quantity such that the interior of the particle filter is substantially completely soaked.

Abstract: An object of the present invention is to continuously feed an object to be treated to a high-pressure reactor which treats the object to be treated containing 10 mass % or more of water under high pressure, while preventing backflow of a high-pressure atmosphere from the high-pressure reactor. This is embodied by making a configuration such that the object to be treated is fed to the high-pressure reactor connected to a discharge port of a screw feeder which is provided with a feed unit for the object to be treated and the discharge port on one end side and the other end side respectively and forms a high-pressure atmosphere pressurized to, for example, 2 MPa or higher, while air-tightness between the high-pressure atmosphere and the one end side of the screw feeder is maintained by a sealing action of an accumulation compressed on the other end side of the screw feeder.

Abstract: A vehicle mountable system for cleaning trash receptacles with wash-water. The system includes an enclosure with an access opening, supported on the vehicle, and a carriage disposed within the enclosure. A spray head is aligned to impinge wash-water against the trash receptacle while it is engaged with the carriage. A basin is aligned to accumulate wash-water drainage from the spraying operation. A spray shield is operated to a closed position that reduces wash-water effluence from the enclosure. The system may include a filter and means for sanitizing wash-water that is accumulated by the basin and recirculated through a holding tank. An automated arm engages a trash receptacle to engage and disengage the trash receptacle with the carriage through the access opening in the enclosure. Plural trash receptacles can be engaged with the carriage and advanced through plural positions within the enclosure.

Abstract: The substrate processing apparatus includes a plurality of processing chambers. A given processing chamber is cleaned by first executing first processing during which voltage application control is executed to control a voltage applied to an electrostatic chuck based upon first processing voltage application information provided for the particular processing chamber while drawing an inert gas into the processing chamber and evacuating the processing chamber sustaining therein low pressure conditions therein and then executing second processing during which voltage application control is executed to control the voltage application to the electrostatic chuck based upon second processing voltage application information for the processing chamber while drawing in the inert gas and evacuating the processing chamber, the internal pressure of which is set to a high level.

Abstract: A separation device for removing solids from an input stream is provided, comprising a vessel, such as a production vessel or storage tank, having an inlet for receiving an input stream containing fluids, such as oil and water, and solids, such as sand and silt. The vessel also includes a fluid outlet and a drain outlet. An optional fluid recirculation and injection device is mounted inside the vessel and delivers fluid to facilitate removal of the solids through the drain outlet. The vessel also includes an agitation or flighted device mounted adjacent to the drain outlet for contacting and dislodging solids which have settled within the vessel. The agitation device includes a rotatable shaft driven by a motor, and an agitation element, such as an auger, to break up the solids and move them toward the drain outlet. A method of removing solids is also provided using the auger device.

Abstract: An apparatus and method for cleaning each bucket of a bucket conveyor in which each successive bucket is brought into a cleaning station on an elevator section of the conveyor where it is tipped sideways and enclosed within an open ended box enclosure and fixed plate engaged by the open end of the box enclosure, the inside of the bucket then cleaned with steam sprays from a steam head carried within the box enclosure, moving side by side during the cleaning. A vacuum collector draws out steam, condensed water and dislodged residue. Additional steam sprays directed from fixed nozzles on the backing plate may optionally be used to clean the bucket exterior bottom and the conveyor chains.

Abstract: A method and apparatus for cleaning, drying, coating, baking etching and deposition of surfaces on glass substrate as it transitions thru and between small gaps between hydro-static porous media bearings. Due to the non-contact nature of the device extremely high pressures can be induced upon the work piece through various fluids without damage to the substrate, allowing the system to utilize the viscous nature of fluids to accomplish the desired cleaning, drying, coating, etching or baking. The process also allows for simultaneous and immediately sequential ordering of processes.

Abstract: Depending on the actual operating situation and the composition of the fuels used for driving the internal combustion engine, contamination of the moving blades, of the guide device and of the turbine casing parts occurs sooner or later in the exhaust gas turbine. According to the invention, a small quantity of cleaning fluid is fed continuously or cyclically into the exhaust gas flow of an exhaust gas turbine and is directed onto the components to be cleaned. The small quantity of cleaning fluid can be fed in with unchanged operation of the internal combustion engine, such that the exhaust gas turbine can be cleaned or kept clean within the entire operating range of the internal combustion engine. Fluctuations in the power output of the internal combustion engine on account of requisite cleaning of the exhaust gas turbine therefore do not occur. Furthermore, the formation of thermostress cracks in the critical turbine casing parts is largely avoided.