Electromagnetic Radiation Delaminating Means (e.g., Microwave, Uv, Ir, Etc.) Patents (Class 156/753)
  • Patent number: 11926432
    Abstract: This fuel tank dam closes a gap between a first structural component fixed to the inside surface of the outer plate of a fuel tank and a second structural component provided with a cutout part into which the first structural component is inserted. This fuel tank dam includes: a first portion that can be fixed to the first structural component; a second portion that has a surface extending in a direction intersecting with the first portion and can be fixed to the second structural component; and a third portion that has a bellows and is disposed between the first portion and the second portion. This fuel tank dam is configured such that the first portion, the second portion, and the third portion are integrated, the bellows has a thickness of 0.381 to 1.524 mm, and the second portion has a thickness of 0.762 to 7.620 mm.
    Type: Grant
    Filed: May 21, 2019
    Date of Patent: March 12, 2024
    Assignee: MITSUBISHI HEAVY INDUSTRIES, LTD.
    Inventors: Eizaburo Yamaguchi, Tadasuke Kurita, Hajime Tada, Akihiko Hirota, Akihisa Okuda, Kana Sakon
  • Patent number: 9011638
    Abstract: A method of chip sorting comprises providing a chip holder having a first surface; providing multiple chips on the first surface; providing a chip receiver having a second surface, wherein the second surface faces the first surface; attaching the multiple chips to the second surface; decreasing an adhesion between the multiple chips and the first surface; and separating the multiple chips from the first surface after the step of decreasing the adhesion between the multiple chips and the first surface.
    Type: Grant
    Filed: March 19, 2014
    Date of Patent: April 21, 2015
    Assignee: Epistar Corporation
    Inventors: Chen-Ke Hsu, Liang Sheng Chi, Chun-Chang Chen, Win-Jim Su, Hsu-Cheng Lin, Mei-Ling Tsai, Yi Lung Liu, Chen Ou
  • Patent number: 9010398
    Abstract: A carrier substrate removing apparatus configured to separate a flexible substrate bonded to a carrier substrate includes a carrier substrate holding unit configured to hold the carrier substrate separated from the flexible substrate; an inclined separation unit configured, with the carrier substrate holding unit, to separate the flexible substrate from the carrier substrate and to transport the flexible substrate at an angle; and a transmittance measuring unit configured to measure a transmittance of the separated carrier substrate.
    Type: Grant
    Filed: March 5, 2013
    Date of Patent: April 21, 2015
    Assignee: Samsung Display Co., Ltd.
    Inventors: Jin-Keon Kweon, Kyung-Hoe Heo, Ki-Taek Kim
  • Patent number: 8999107
    Abstract: A method for laser ashing of polyimide for a semiconductor manufacturing process using a structure, the structure comprising a supporting material attached to a semiconductor chip by a polyimide glue, includes releasing the supporting material from the polyimide glue, such that the polyimide glue remains on the semiconductor chip; and ashing the polyimide glue on the semiconductor chip using an ablating laser.
    Type: Grant
    Filed: October 31, 2011
    Date of Patent: April 7, 2015
    Assignee: International Business Machines Corporation
    Inventors: Maxime Cadotte, Luc Guerin, Van Thanh Truong, Steve Whitehead
  • Patent number: 8992726
    Abstract: A device for peeling off silicon wafers, including: a supporting member that is configured to support a board-shaped member to which plural silicon wafers are bonded via an adhesive; a heating unit for heating the board-shaped member; a shifting mechanism that is configured to shift, in a horizontal direction, the supporting member relatively with respect to the heating unit; a peeling-off mechanism that is configured to peel off the silicon wafers one by one; and a container for allowing the silicon wafers, the board-shaped member and the supporting member to soak in a liquid.
    Type: Grant
    Filed: May 23, 2013
    Date of Patent: March 31, 2015
    Assignee: Panasonic Intellectual Property Management Co., Ltd.
    Inventors: Koso Matsuno, Michirou Yoshino, Masayuki Takahashi, Tooru Furushige, Yuji Yamamoto
  • Publication number: 20150083343
    Abstract: A supporting member separation method of separating a laminate formed by laminating a substrate, an adhesive layer, a release layer which is changed in quality by absorbing light, and a support plate in this order, the method including an irradiation step in which irradiation of laser light which is pulse-oscillated with a pulse having a pulse width of 20 ns or greater is performed to the release layer.
    Type: Application
    Filed: January 17, 2013
    Publication date: March 26, 2015
    Inventors: Yasushi Fujii, Shinji Takase
  • Patent number: 8951387
    Abstract: An apparatus for removing a protective film for a flat display panel includes a laser oscillating member configured to be disposed over the protective film, the protective film attached to a surface of the flat display panel, the laser oscillating member configured to cut the protective film into a plurality of division regions by irradiating a laser beam; a separation member configured to peel at least one of the plurality of division regions from the flat display panel; a spacer member configured for insertion between the protective film and the at least one division region to be peeled from the flat display panel; and an adhesive member configured for attachment to a surface of the division region opposite the spacer member on the division region, the spacer member and the adhesive member being configured to move in a same direction.
    Type: Grant
    Filed: June 7, 2012
    Date of Patent: February 10, 2015
    Assignee: Samsung Display Co., Ltd.
    Inventors: Ji-Hyeon Kang, Hyun-Chul Lee, Won-Kyu Lim
  • Publication number: 20150035554
    Abstract: Structures and methods are provided for temporarily bonding handler wafers to device wafers using bonding structures that include one or more releasable layers which are laser-ablatable using mid-wavelength infrared radiation
    Type: Application
    Filed: March 27, 2014
    Publication date: February 5, 2015
    Applicant: International Business Machines Corporation
    Inventors: Bing Dang, John U. Knickerbocker, Cornelia Kang-I Tsang
  • Publication number: 20150013917
    Abstract: A bonding method including an adhesive layer forming process in which a thermoplastic adhesive is applied to a substrate or a support plate and an adhesive layer is formed; a heating process in which the adhesive layer that is formed on the substrate or the support plate is heated; and a bonding process in which the substrate and the support plate are pressed against each other via the heated adhesive layer, thereby bonding the substrate and the support plate.
    Type: Application
    Filed: January 11, 2013
    Publication date: January 15, 2015
    Inventors: Yoshihiro Inao, Atsuo Kajima, Takuma Hasegawa, Koki Tamura, Shigeru Yokoi
  • Patent number: 8894809
    Abstract: A method for disconnecting a first mechanical part from a second magnetic mechanical part, the first mechanical part being adhered to the second magnetic mechanical part by an adhesive film along a connecting area. In the method, a magnetic field is generated at least within the connecting area so as to generate, by induction, eddy currents in the second magnetic mechanical part, to soften the adhesive film and enable disconnection of the first and second mechanical parts.
    Type: Grant
    Filed: January 6, 2012
    Date of Patent: November 25, 2014
    Assignee: SNECMA
    Inventor: Franck Bernard Leon Varin
  • Publication number: 20140338827
    Abstract: Methods and apparatuses are provided where a parting agent is applied to at least one portion of a substrate. The at least one portion of the substrate is removed from a carrier.
    Type: Application
    Filed: May 15, 2013
    Publication date: November 20, 2014
    Inventors: Adolf Koller, Franco Mariani, Katharina Umminger
  • Patent number: 8845858
    Abstract: Disclosed is a method for separating a bonded body, whereby the bonded body can be separated easily. Specifically disclosed is a method for separating bonded bodies that includes a step that irradiates excimer light with a central wavelength of 1 to 300 nm on to a bonded body that has been formed by using an adhesive composition to bond substrates together, which includes and is formed by one type or two or more types of meth (acrylate) that have one or more (meth)acryloyl groups, and by hardening of said adhesive composition. At least one of the substrates is permeable to the excimer light.
    Type: Grant
    Filed: June 1, 2011
    Date of Patent: September 30, 2014
    Assignee: Denki Kagaku Kogyo Kabushiki Kaisha
    Inventors: Yoshitsugu Goto, Jun Watanabe, Norihiro Shimizu, Hiroyuki Kurimura, Isamu Ichikawa, Kenji Fukao, Yukihiro Morimoto
  • Publication number: 20140251533
    Abstract: A method for fabricating a display device is provided. A laser having a power density is provided to a substrate coupling body. The substrate coupling body includes a first substrate and a second substrate coupled to the first substrate. The second substrate is separated from the first substrate. An optical property of the first substrate separated from the second substrate is measured. The power density of the laser is adjusted based on the optical property of the first substrate.
    Type: Application
    Filed: November 29, 2013
    Publication date: September 11, 2014
    Applicant: SAMSUNG DISPLAY CO., LTD.
    Inventors: Hyung Chul Lim, Young Gu Kim, Hyun Jun Cho
  • Patent number: 8800631
    Abstract: Provided is a laminated body comprising a substrate to be ground and a support, where the substrate is ground to a very small thickness and can then be separated from the support without damaging the substrate. One embodiment of the present invention is a laminated body comprising a substrate to be ground, a joining layer in contact with the substrate to be ground, a photothermal conversion layer comprising a light absorbing agent and a heat decomposable resin, and a light transmitting support. After grinding the substrate surface which is opposite that in contact with the joining layer, the laminated body is irradiated through the light transmitting layer and the photothermal conversion layer decomposes to separate the substrate and the light transmitting support.
    Type: Grant
    Filed: August 19, 2011
    Date of Patent: August 12, 2014
    Assignee: 3M Innovative Properties Company
    Inventors: Kazuki Noda, Masaru Iwasawa
  • Publication number: 20140144593
    Abstract: Structures and methods are provided for temporarily bonding handler wafers to device wafers using bonding structures that include one or more releasable layers that absorb long-wavelength infrared radiation to achieve wafer debonding by infrared radiation ablation.
    Type: Application
    Filed: November 28, 2012
    Publication date: May 29, 2014
    Applicant: International Business Machiness Corporation
    Inventors: Bing Dang, John U. Knickerbocker, Cornelia Kang-I Tsang
  • Publication number: 20140138032
    Abstract: A carrier substrate removing apparatus configured to separate a flexible substrate bonded to a carrier substrate includes a carrier substrate holding unit configured to hold the carrier substrate separated from the flexible substrate; an inclined separation unit configured, with the carrier substrate holding unit, to separate the flexible substrate from the carrier substrate and to transport the flexible substrate at an angle; and a transmittance measuring unit configured to measure a transmittance of the separated carrier substrate.
    Type: Application
    Filed: March 5, 2013
    Publication date: May 22, 2014
    Applicant: SAMSUNG DISPLAY CO., LTD.
    Inventors: Jin-Keon Kweon, Kyung-Hoe Heo, Ki-Taek Kim
  • Patent number: 8714227
    Abstract: A chip sorting apparatus comprising a chip holder comprising a first surface and an second surface opposite to the first surface; a wafer comprising a first chip disposed on a first position of the first surface; a first chip receiver comprising a third surface and an fourth surface opposite to the third surface, wherein the third surface is opposite to the first surface; a pressurization device making the first chip and the third surface of the first chip receiver adhered to each other through pressuring the second surface at where corresponding to the first position; and a separator decreasing the adhesion between the first chip and the first surface.
    Type: Grant
    Filed: July 23, 2010
    Date of Patent: May 6, 2014
    Assignee: Epistar Corporation
    Inventors: Chen-Ke Hsu, Liang-Sheng Chi, Chun-Chang Chen, Win-Jim Su, Hsu-Cheng Lin, Mei-Ling Tsai, Yi Lung Liu, Chen Ou
  • Patent number: 8710458
    Abstract: A method of forming an integrated circuit includes providing a wafer, and a tape adhered to the wafer, wherein the tape has a main surface perpendicular to a first direction. The tape is exposed to a light to cause the tape to lose adhesion. In the step of exposing the tape, the wafer and the tape are rotated, and/or the light is tilt projected onto the tape, wherein a main projecting direction of the light and the first direction form a tilt angle greater than zero degrees and less than 90 degrees.
    Type: Grant
    Filed: October 19, 2010
    Date of Patent: April 29, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Hsiang Hu, Chen-Fa Lu, Chung-Shi Liu
  • Publication number: 20140102643
    Abstract: Laser lift off systems and methods overlap irradiation zones to provide multiple pulses of laser irradiation per location at the interface between layers of material to be separated. To overlap irradiation zones, the laser lift off systems and methods provide stepwise relative movement between a pulsed laser beam and a workpiece. The laser irradiation may be provided by a non-homogeneous laser beam with a smooth spatial distribution of energy across the beam profile. The pulses of laser irradiation from the non-homogenous beam may irradiate the overlapping irradiation zones such that each of the locations at the interface is exposed to different portions of the non-homogeneous beam for each of the multiple pulses of the laser irradiation, thereby resulting in self-homogenization. Thus, the number of the multiple pulses of laser irradiation per location is generally sufficient to provide the self-homogenization and to separate the layers of material.
    Type: Application
    Filed: December 20, 2013
    Publication date: April 17, 2014
    Applicant: IPG Microsystems LLC
    Inventors: Cristian Porneala, Mathew Hannon, Marco Mendes, Jeffrey P. Sercel
  • Patent number: 8679280
    Abstract: A method for releasing a handler from a wafer, the wafer comprising an integrated circuit (IC), includes attaching the handler to the wafer using an adhesive comprising a thermoset polymer, the handler comprising a material that is transparent in a wavelength range of about 193 nanometers (nm) to about 400 nm; ablating the adhesive through the handler using a laser, wherein a wavelength of the laser is selected based on the transparency of the handler material; and separating the handler from the wafer.
    Type: Grant
    Filed: May 27, 2010
    Date of Patent: March 25, 2014
    Assignee: International Business Machines Corporation
    Inventors: Bing Dang, Matthew Farinelli, John Knickerbocker, Aparna Prabhakar, Robert E. Trzcinski, Cornelia K. Tsang
  • Patent number: 8641851
    Abstract: An apparatus and method for manufacturing a flexible display device by a roll-to-roll method, are discussed. According to an embodiment, the apparatus includes a substrate transferring part for transferring a lower substrate attached onto a carrier substrate; a substrate separating part for separating the carrier substrate from the lower substrate transferred by the substrate transferring part; an upper bonding part for bonding an upper substrate to an upper surface of the lower substrate from which the carrier substrate is separated; and a lower bonding part for bonding a rear substrate to a lower surface of the lower substrate from which the carrier substrate is separated.
    Type: Grant
    Filed: July 13, 2012
    Date of Patent: February 4, 2014
    Assignee: LG Display Co., Ltd.
    Inventors: NamSeok Lee, SoonSung Yoo
  • Publication number: 20130327485
    Abstract: A device for releasing an interconnect layer that provides a connection between a carrier and a wafer which forms a carrier-wafer combination. The device includes rotation means for rotation of the carrier-wafer combination in a release position, and a connection release means for providing an immersion bath that receives the carrier-wafer combination.
    Type: Application
    Filed: August 8, 2013
    Publication date: December 12, 2013
    Applicant: EV Group GmbH
    Inventor: Erich Thallner
  • Patent number: 8450554
    Abstract: Provided herein is a system and method for facilitating removal of a drape from a tissue site. One aspect provides a system comprising a drape, and adhesive layer, and a release agent, where the system is adapted to be coupled to a tissue site and released therefrom upon or after exposure to an external stimulus. Another aspect provides a method for application and removal of a drape using less force than required with a conventional drape.
    Type: Grant
    Filed: February 27, 2009
    Date of Patent: May 28, 2013
    Assignee: KCI Licensing, Inc.
    Inventors: Timothy Mark Robinson, Kristine Kiesweller, Amy McNulty
  • Patent number: 8419895
    Abstract: A method for releasing a handler from a wafer, the wafer comprising an integrated circuit (IC) includes attaching the handler to the wafer using an adhesive comprising a polymer; performing edge processing to remove an excess portion of the adhesive from an edge of the handler and wafer; ablating the adhesive through the handler using a laser, wherein a wavelength of the laser is selected based on the transparency of the handler material; and separating the handler from the wafer. A system for releasing a handler from a wafer, the wafer comprising an IC includes a handler attached to a wafer using an adhesive comprising a polymer; an edge processing module, the edge processing module configured to remove an excess portion of the adhesive from the edge of the handler and wafer; and a laser, the laser configured to ablate the adhesive through the handler.
    Type: Grant
    Filed: May 27, 2010
    Date of Patent: April 16, 2013
    Assignee: International Business Machines Corporation
    Inventors: Bing Dang, John Knickerbocker, Aparna Prabhakar, Peter Sorce, Robert E. Trzcinski, Cornelia K. Tsang
  • Patent number: 8388801
    Abstract: There is provided a method for separating an optical film bonded to an adherend with a pressure-sensitive adhesive layer interposed therebetween from the adherend. The pressure-sensitive adhesive layer is formed using an optical pressure-sensitive adhesive. The optical pressure-sensitive adhesive of the invention comprises a base polymer having a functional group (F); and a coupling agent that has a benzyl ester group and is represented by Formula (1): wherein A1 and A2 are different functional groups, one of A1 and A2 shows reactivity or interaction with the functional group (F) of the base polymer, R1 is an optionally substituted alkylene group of 1 to 12 carbon atoms and/or an optionally substituted phenylene group, and R2 and R3 are each a hydrogen atom or an alkyl group of 1 to 12 carbon atoms and may be the same or different.
    Type: Grant
    Filed: June 29, 2012
    Date of Patent: March 5, 2013
    Assignee: Nitto Denko Corporation
    Inventors: Takashi Shimizu, Toshitsugu Hosokawa, Masayuki Satake
  • Publication number: 20130014905
    Abstract: An ultrashort pulsed laser beam, the fluence of which on an interface BF is set to be larger than a substrate processing threshold and smaller than a film processing threshold, is irradiated to the interface BF via a thin film F. Thus, in a laser irradiated portion of the interface BF, the substrate W is selectively processed, bonding between the substrate and the thin film F is reduced and the thin film F is peeled.
    Type: Application
    Filed: July 12, 2012
    Publication date: January 17, 2013
    Inventors: Yoshiyuki NAKAZAWA, Hirofumi MASUHARA, Koji ANDO
  • Publication number: 20120318463
    Abstract: There is disclosed a method of separating laminated sheets comprising first and second sheets which are bonded by an adhesive interlayer, the method comprising heating the interlayer to soften it and causing the first and second sheets to be forced apart when the interlayer is softened.
    Type: Application
    Filed: March 1, 2011
    Publication date: December 20, 2012
    Applicant: DELAM HOLDINGS PARTY LTD
    Inventor: Anthony Anderson
  • Patent number: 8313961
    Abstract: An apparatus and method for manufacturing a light emitting devices by separating a semiconductor layer from a substrate includes a laser beam source for emitting a laser beam, a mesh-typed mask having a plurality of apertures through which the laser beam passes to provide a plurality of unit beams; and an imaging lens for forming a plurality of beam spots by focusing the plurality of unit beams at an interface between a substrate and a semiconductor layer to separate the substrate from the semiconductor layer.
    Type: Grant
    Filed: March 16, 2011
    Date of Patent: November 20, 2012
    Assignee: QMC Co., Ltd.
    Inventor: Beng So Ryu
  • Patent number: 8288680
    Abstract: An apparatus for removing heavy metals from a thin film stack. A glass or plastic substrate has a front surface and a back surface and a heavy metal thin film is deposited on the back surface. A laser is provided for generating high density radiation. A scanning means directs the high density radiation through the substrate so that the high density radiation impinges upon the heavy metal thin film. The substrate is disposed in contacting relation to a flowing liquid and a liquid bath is provided for containing the flowing liquid and collecting heavy metal that is ablated by the high density radiation. The heavy metals are filtered from the liquid bath. The same parts can also remove heavy metals from both sides of a substrate or may be used to remove only peripheral edges of a thin film stack.
    Type: Grant
    Filed: February 24, 2010
    Date of Patent: October 16, 2012
    Assignee: Vinyl Technologies, Inc.
    Inventor: Dirk Burrowes
  • Patent number: 8211259
    Abstract: A separating method of a bonded body, the bonded body including two base members and a bonding film through which the base members are boded together, enabling to easily and efficiently separating the bonded body into the two original base members is provided. Further, the bonding film contains a silicone material composed of silicone compounds. The separating method includes: preparing the bonded body with the bonding film; and applying energy for separation to the bonding film so that cleavage is generated within the bonding film due to breakage of a part of molecular bonds of the silicone compounds, to thereby separate the bonded body into the first and second base members.
    Type: Grant
    Filed: November 26, 2008
    Date of Patent: July 3, 2012
    Assignee: Seiko Epson Corporation
    Inventors: Mitsuru Sato, Takatoshi Yamamoto, Shintaro Asuke, Yoshiaki Mori, Kazuhiro Gomi
  • Patent number: 8181688
    Abstract: An improved apparatus for temporary wafer bonding includes a temporary bonder cluster and a debonder cluster. The temporary bonder cluster includes temporary bonder modules that perform electronic wafer bonding processes including adhesive layer bonding, combination of an adhesive layer with a release layer bonding and a combination of a UV-light curable adhesive layer with a laser absorbing release layer bonding. The debonder cluster includes a thermal slide debonder, a mechanical debonder and a radiation debonder.
    Type: Grant
    Filed: April 15, 2010
    Date of Patent: May 22, 2012
    Assignee: Suss Microtec Lithography, GmbH
    Inventors: Hale Johnson, Patrick Gorun, Emmett Hughlett, James Hermanowski, Matthew Stiles, Michael Kuhnle
  • Publication number: 20120111496
    Abstract: A method for laser ashing of polyimide for a semiconductor manufacturing process using a structure, the structure comprising a supporting material attached to a semiconductor chip by a polyimide glue, includes releasing the supporting material from the polyimide glue, such that the polyimide glue remains on the semiconductor chip; and ashing the polyimide glue on the semiconductor chip using an ablating laser.
    Type: Application
    Filed: October 31, 2011
    Publication date: May 10, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Maxime Cadotte, Luc Guerin, Van Thanh Truong, Steve Whitehead
  • Publication number: 20120064735
    Abstract: A solid-state laser lift-off apparatus comprises: a solid-state laser (1), a light beam shaping lens (3), motors of oscillating mirrors (5,7), oscillating mirrors (4,6), a field lens (9), a movable platform (10), an industrial control computer and control software (8). The light beam shaping lens (3) is behind the solid-state laser (1), shaping the laser beam from the solid-state laser (1) into required shape. The motors of oscillating mirrors (5,7) are in front of the field lens (9), controlling the movement of the oscillating mirrors (4,6) according to the instruction of the control software (8) to implement different light beam scanning paths. A lift-off method for applying the solid-state laser lift-off apparatus uses a small laser spot to perform scanning, and enables damage-free separation of GaN from a sapphire substrate.
    Type: Application
    Filed: May 5, 2010
    Publication date: March 15, 2012
    Inventors: Guoyi Zhang, Xinrong Yang, Mingkun He, Yongiian Sun
  • Publication number: 20120000613
    Abstract: Device for stripping a wafer from a carrier that is connected to the wafer by an interconnect layer with: a receiving means for accommodating the carrier-wafer combination consisting of the carrier and the wafer, a connection release means for breaking the connection provided by the interconnect layer between the carrier and the wafer, and stripping means for stripping the wafer from the carrier, or for stripping the carrier from the wafer, the connection release means being made to work in a temperature range from 0 to 350° C., especially from 10 to 200° C., preferably from 20 to 80° C., and more preferably at ambient temperature.
    Type: Application
    Filed: March 16, 2010
    Publication date: January 5, 2012
    Inventor: Erich Thallner
  • Patent number: 8052836
    Abstract: Laser-based methods of stripping different types of fiber optic cables (100) are disclosed. The method includes directing a focused laser beam (202) onto the cable's protective cover (114). The method also includes moving the fiber optic cable relative to the focused laser beam in a direction substantially along a central axis (AC) to form a substantially axially oriented groove (250) in the protective cover, wherein the groove does not reach one or more optical fibers (110) carried by the cable. The method can further include opening the protective cover at the groove to form a split protective cover portion (114S), and removing the split protective cover portion from the fiber optic cable. Methods of stripping a cable by forming two grooves in the protective cover using two focused laser beams are also disclosed.
    Type: Grant
    Filed: November 26, 2008
    Date of Patent: November 8, 2011
    Assignee: Corning Cable Systems LLC
    Inventors: Andrew Stephen Cale, Jeffrey Dean Danley, David Lee Dean, Jr., Terry Lee Cooke, Clyde Benton Mabry, III, Darrin Max Miller
  • Patent number: 8038839
    Abstract: Provided is a laminated body comprising a substrate to be ground and a support, where the substrate is ground to a very small thickness and can then be separated from the support without damaging the substrate. One embodiment of the present invention is a laminated body comprising a substrate to be ground, a joining layer in contact with the substrate to be ground, a photothermal conversion layer comprising a light absorbing agent and a heat decomposable resin, and a light transmitting support. After grinding the substrate surface which is opposite that in contact with the joining layer, the laminated body is irradiated through the light transmitting layer and the photothermal conversion layer decomposes to separate the substrate and the light transmitting support.
    Type: Grant
    Filed: October 22, 2009
    Date of Patent: October 18, 2011
    Assignee: 3M Innovative Properties Company
    Inventors: Kazuki Noda, Masaru Iwasawa
  • Patent number: 7972473
    Abstract: A method for recycling thin-film solar cell modules which are which are composed of a substrate layer with a superimposed structure of functional layers, a plastic layer that encapsulates the functional layers, and a cover layer. The substrate layer is transparent to a working laser beam, and the first functional layer, an electrode layer, is able to absorb this working laser beam. The free surface of the substrate layer is scanned with the working laser beam so that the first electrode layer, due to having absorbed the working laser beam, is at least partially vaporized and the superimposed structure of the functional layers is thus detached from the substrate layer. The substrate layer, separately from the functional layers that are attached to the plastic layer and the cover layer, is subsequently available for separate further processing.
    Type: Grant
    Filed: June 8, 2009
    Date of Patent: July 5, 2011
    Assignee: Jenoptik Automatisierungstechnik GmbH
    Inventors: Uwe Wagner, Frank Schmieder
  • Publication number: 20110139375
    Abstract: An adhesive tape joined to a wafer is irradiated with ultraviolet rays via diodes. Simultaneously, a heater heats the adhesive tape to a preset temperature. Consequently, an ultraviolet reaction with the diodes and an infrared reaction with the heater may ensure promotion of a polymerization reaction, which results in cure of an adhesive that is not curable with only ultraviolet rays. As a result, an adhesive force of the adhesion tape may sufficiently be reduced. After ultraviolet irradiation via the diodes and heating with the heater, a separation mechanism separates the adhesive tape from the wafer. Therefore, accurate separation may be realized of the adhesive tape joined to the wafer.
    Type: Application
    Filed: December 13, 2010
    Publication date: June 16, 2011
    Inventors: Masayuki Yamamoto, Masaru Irie
  • Publication number: 20110132549
    Abstract: Laser lift off systems and methods may be used to provide monolithic laser lift off with minimal cracking by reducing the size of one or more beam spots in one or more dimensions to reduce plume pressure while maintaining sufficient energy to provide separation. By irradiating irradiation zones with various shapes and in various patterns, the laser lift off systems and methods use laser energy more efficiently, reduce cracking when separating layers, and improve productivity. Some laser lift off systems and methods described herein separate layers of material by irradiating non-contiguous irradiation zones with laser lift off zones (LOZs) that extend beyond the irradiation zones. Other laser lift off systems and methods described herein separate layers of material by shaping the irradiation zones and by controlling the overlap of the irradiation zones in a way that avoids uneven exposure of the workpiece.
    Type: Application
    Filed: December 7, 2010
    Publication date: June 9, 2011
    Applicant: J.P. Sercel Associates, Inc.
    Inventors: Jeffrey P. Sercel, Marco Mendes, Jie Fu