Glow Discharge Sputter Deposition (e.g., Cathode Sputtering, Etc.) Patents (Class 204/192.12)
- Wear or abrasion resistant (Class 204/192.16)
- Electrical contact material (Class 204/192.17)
- Piezoelectric (Class 204/192.18)
- Ferromagnetic (Class 204/192.2)
- Resistor (Class 204/192.21)
- Insulator or dielectric (Class 204/192.22)
- Superconductor (Class 204/192.24)
- Semiconductor (Class 204/192.25)
- Optical or photoactive (Class 204/192.26)
- With sputter etching (Class 204/192.3)