With Mirror Patents (Class 219/121.74)
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Patent number: 8698040Abstract: A laser energy delivery system includes a relay imaging system. Input optics arranged to receive the laser energy, a transmitting mirror having adjustable angle of incidence relative to the input optics, and a robot mounted optical assembly are configured to direct laser energy toward the movable target image plane. The laser energy follows an optical path including an essentially straight segment from the transmitting mirror to the receiving mirror, having a variable length and a variable angle relative to the input optics through air. Diagnostics on the processing head facilitate operation.Type: GrantFiled: May 14, 2010Date of Patent: April 15, 2014Assignee: Metal Improvement Company LLCInventors: C. Brent Dane, Fritz B. Harris, Joseph T. Taranowski, Steven L Honett, Stewart B. Brown
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Publication number: 20140097162Abstract: A laser processing apparatus using a laser. The laser processing apparatus includes a light source for generating a hollow laser beam in a first direction; a reflection member for changing a path of the hollow laser beam toward the first direction into a second direction toward the substrate; a lens for collecting the hollow laser beam reflected by the reflection member; and an air supply unit for supplying air toward particles generated while the substrate is processed by the hollow laser beam, wherein the lens has a first hole passing through the lens, the reflection member has a second hole passing through the reflection member, and the first and second holes form a discharge path of the particles.Type: ApplicationFiled: March 4, 2013Publication date: April 10, 2014Applicant: SAMSUNG DISPLAY CO., LTD.Inventors: Il-Young Jeong, Gyoo-Wan Han, Jun-Hyung Kim
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Patent number: 8692151Abstract: A method and apparatus for targeting a beam of radiation is provided. A beam steering mirror and a beam capture mirror are movably disposed along an optical pathway. A controller moves the beam steering mirror and the beam capture mirror in an x-y plane, and rotates the mirrors, to target the beam to a target location on a surface, while keeping the optical path length substantially constant for all target locations on the surface. The surface is rotated by a rotational actuator to bring all target locations to positions accessible by the beam targeting optics. Imprecision in targeting and optical path length may be compensated by providing an actuated aperture at the beam entry point and/or a variable focus lens with an optical range finding detector, all in communication with the controller.Type: GrantFiled: March 30, 2011Date of Patent: April 8, 2014Assignee: Applied Materials, Inc.Inventors: Leonid M. Tertitski, Krishna Kumar Kuttannair, Aaron Muir Hunter, Stephen Moffatt
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Patent number: 8652974Abstract: A fiber laser system enables a method for treating a semiconductor material by preheating a wafer for laser annealing and gas immersion laser doping by a laser source. A long wave length fiber laser having a Gaussian or similar profile is applied in a full-width ribbon beam across an incident wafer. Preferably the wavelength is greater than 1 ?m (micron) and preferably a Yb doped fiber laser is used. The process is performed in a suitable environment which may include doping species. The process ensures the temperature gradient arising during processing does not exceed a value that results in fracture of the wafer while also reducing the amount of laser radiation required to achieve controlled surface melting, recrystallization and cooling.Type: GrantFiled: June 22, 2011Date of Patent: February 18, 2014Assignee: IPG Photonics CorporationInventor: Bernhard Piwczyk
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Patent number: 8598489Abstract: A system, method, and device for etching an indicia onto a piece of glass or other inorganic oxide includes a compact laser etching device having a delivery head, an emitter housing, a RF cable, and a communication cable. The delivery head has a beam steering mechanism and a hood assembly positioned between the beam steering mechanism and the piece of glass. The emitter housing has a laser for generating a laser beam, and a fold mirror positioned in an optical path of the laser beam for redirecting the laser beam into the beam steering mechanism. A remote RF electronics package drives the laser. Control electronics cause the beam steering mechanism to steer the laser beam into a pattern of the indicia. The delivery head may further include a plurality of suction cups for holding the compact laser etching device in engagement with the piece of glass.Type: GrantFiled: August 23, 2010Date of Patent: December 3, 2013Inventors: Timothy J. Miller, Thomas A. DeRossett, Jr.
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Patent number: 8569649Abstract: An optical device includes: a beam splitter by which a laser beam emitted from an oscillator is branched into a first branch beam going ahead through transmission and a second branch beam going ahead through reflection; a first mirror by which the first branch beam going out of the beam splitter is reflected to go again toward the beam splitter; a second mirror by which the second branch beam going out of the beam splitter is reflected to go again toward the beam splitter; and a circular disk-like rotating unit for integrally rotating the first mirror and a second mirror, with a laser beam branch point in the beam splitter as a center of rotation.Type: GrantFiled: July 8, 2011Date of Patent: October 29, 2013Assignee: Disco CorporationInventor: Yusaku Ito
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Patent number: 8525076Abstract: The invention relates to a method for machining a workpiece by means of a laser beam, wherein a laser beam is guided by a beam guiding device over the surface of the workpiece within a working window. The beam guiding device and the workpiece are arranged in such a way that they are movable relative to one another in a direction of displacement along a displacement section and that they can occupy a first and a second relative working position to one another. According to the invention, a point on the workpiece can be machined from the second relative working position, said point being located behind the point which is machined from the first relative working position when viewed in the direction of displacement.Type: GrantFiled: March 17, 2008Date of Patent: September 3, 2013Assignee: Sauer GmbH LasertecInventors: Peter Hildebrand, Michael Kuhl
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Patent number: 8487218Abstract: In a number of practical situations it is desirable to provide consistency with regard to a metering material presentation. For example, with regard to welding and shape metal deposition it is desirable to provide a homogenous vortex free cloud of gas shielding about a work piece prior to and subsequent to processing. Unfortunately, metering meshes are subject to distortion through thermal gradients. By providing a support matrix arrangement comprising a first planar member and a second planar member incorporating ribbon elements and deflector portions bilateral deflection in the plane of the metering mesh can be accommodated whilst outward buckling is avoided. In such circumstances there is consistency with regard to metering mesh presentation and therefore gas flow through shielding.Type: GrantFiled: October 1, 2007Date of Patent: July 16, 2013Assignee: Rolls-Royce PLCInventor: Jeffrey C. Bishop
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Patent number: 8481886Abstract: A laser scanner system for removing a coating from a surface.Type: GrantFiled: December 20, 2010Date of Patent: July 9, 2013Assignee: Edison Welding InstituteInventors: Stanley L. Ream, Craig T. Walters
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Patent number: 8450639Abstract: The invention relates to a laser machining head (1) with an integrated sensor device for monitoring the focus position, wherein laser machining head (1) has a focusing lens (4) and a downstream protective glass (5) in order to focus a machining beam (9) that strikes focusing lens (4) as a parallel beam into a resultant focal point (11) of focusing lens (4) with downstream protective glass (5), in which focal point a workpiece (12) is arranged. A beam splitter (3), arranged upstream of focusing lens (4) in the beam path, is transmissive for a first portion of a laser beam (8) coupled into laser machining head (1), the machining beam (9), and is reflective for a second portion, a measurement beam (10).Type: GrantFiled: February 1, 2010Date of Patent: May 28, 2013Assignee: Jenoptik Automatisierungstechnik GmbHInventors: Daniel Reitemeyer, Knut Partes, Thomas Seefeld
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Patent number: 8426768Abstract: A method of directing a laser beam along a desired path on a workpiece and at spaced intervals delivering a pulse of laser energy comprising the steps of: using a position command stream and position feedback to control the positioning of galvanometer scanned mirror or mirrors to define the path a laser beam will travel to intersect the desired path on the workpiece; and using position feedback alone to determine when a pulse of laser energy is delivered to strike the workpiece at locations such that are uniformly overlapped along the path notwithstanding variations in galvanometer mirror velocity.Type: GrantFiled: February 20, 2008Date of Patent: April 23, 2013Assignee: Aerotech, Inc.Inventor: Ronald Rekowski
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Patent number: 8420979Abstract: A method and an apparatus for laser beam processing of an element (12) that has a total transmittance for light of at least 10?5, comprising a laser unit (1) for generating a laser beam on one side of the to-be-processed element (12), an illumination unit (7), an imaging system (10) comprising a sensor unit on the one side of the to-be-processed element (12), the sensor unit recording residual light that results from light of the illumination unit (7), a scanning unit (2) for adjusting the laser beam processing position, and a control unit. The control unit is operatively connected to the laser unit (1), the imaging system (10) and the scanning unit (2), and the illumination unit (7) is positioned on the other side of the to-be-processed element (12) in relation to the laser unit (1). Since the to-be-processed element (12) allows light to pass through an otherwise opaque or almost opaque layer, a good contrast is obtained that is used to determine the position of the laser beam with high precision.Type: GrantFiled: July 24, 2007Date of Patent: April 16, 2013Assignee: Flisom AGInventors: Felix Budde, Thomas Studer, Marc Kaelin, Dominik Rudmann
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Publication number: 20130056450Abstract: A device for applying laser radiation to an at least partially reflective or transparent region or a workpiece disposed in a working area, with a laser light source for generating the laser radiation and optics for influencing the laser radiation, such that the radiation is transferred into the working area, wherein the optics comprise at least one mirror that can reflect a part of the laser radiation reflected in the working area or a part of the laser radiation having passed through the working area, such that said part of the laser radiation is at least partially fed hack into the working area.Type: ApplicationFiled: March 23, 2011Publication date: March 7, 2013Applicant: LIMO PATENTVERWALTUNG GMBH & CO. KGInventors: Vitalij Lissotschenko, Aleksei Mikhailov, Nikolai Jeremin, Yury Kolotushkin
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Patent number: 8389896Abstract: It is desirable for the production of workpieces, which are sometimes produced by a rapid prototyping method, to be further automatable. To this end a device is provided having a laser for generating a laser beam in order to set a material, and a workpiece support which can be exposed directly to the laser. There is also provided an optical instrument for redirecting and deviating the laser beam so that the workpiece support can also be exposed indirectly to the laser. Material can therefore also be cured more easily in undercuts of workpiece blanks.Type: GrantFiled: February 18, 2010Date of Patent: March 5, 2013Assignee: Siemens Medical Instruments Pte. Ltd.Inventors: Tze Peng Chua, Matthias Jorgas, Harald Klemenz, Eng Cheong Lim, Pei Chyi Kristy Lim, Nisha Shakila Ma
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Patent number: 8350187Abstract: A method and apparatus is presented for laser machining complex features in workpieces using programmable laser focal spot shapes. A deformable mirror is inserted into the laser beam path of a laser machining system and programmed to alter the shape of the laser beam focal spot in real time as the workpiece is being laser machined in order to achieve improved control over the shape and size of laser machined features.Type: GrantFiled: March 28, 2009Date of Patent: January 8, 2013Assignee: Electro Scientific Industries, Inc.Inventor: Leo Baldwin
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Patent number: 8334479Abstract: The system comprises a buckling arm robot with a robot frame (1) and an articulated arm (2) and a fiber optic cable (5) which is connected to one end of the articulated arm (2) and through which a laser beam (11) with a beam axis (10) is coupled into the articulated arm (2) in the direction of a first axis of the articulated arm (2). The fiber optic cable (5) is indirectly connected to the stationary end of the articulated arm (2) via an alignment unit (6) which comprises a collimating lens system (13) and at least two alignment mirrors (12.1, 12.2), each of which mirrors can swivel about at least one axis of rotation and move along at least one axis of translation, with the axes of rotation and the axes of translation being disposed at right angles to each other so that the beam axis (10) of the laser beam (11) can be made to coincide with the optical axis (4).Type: GrantFiled: November 10, 2009Date of Patent: December 18, 2012Assignee: Jenoptik Automatisierungstechnik GmbHInventors: Alex Jancso, Thomas Doering, Jean Pierre Bergmann, Andreas Patschger, Michael Nittner
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Patent number: 8319151Abstract: To further automate the manufacture of hearing aid component parts that are in part produced with a rapid prototyping method, a laser beam for curing material is generated by a laser, and a workpiece support that can be directly exposed by the laser is provided. The laser beam is deflected by an optic device so that the workpiece support can be indirectly exposed with the laser. Material can thereby be more easily applied in undercuts of workpiece blanks that form the basis of the hearing aid component parts.Type: GrantFiled: February 17, 2010Date of Patent: November 27, 2012Assignee: Siemens Medical Instruments Pte. Ltd.Inventors: Tze Peng Chua, Matthias Jorgas, Harald Klemenz, Eng Cheong Lim, Pei Chyi Kristy Lim, Nisha Shakila Ma
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Patent number: 8294062Abstract: Laser beam positioning systems for material processing and methods for using such systems are disclosed herein. One embodiment of a laser-based material processing system, for example, can include (a) a radiation source configured to produce a laser beam and direct the beam along a beam path, and (b) a laser beam positioning assembly in the beam path. The laser beam positioning assembly can include a first focusing element, first and second reflective optical elements, and a second focusing element. The first focusing element can focus the laser beam to a first focal point between the first and second reflective optical elements. The first and second reflective optical elements can direct the laser beam toward a material processing area while the laser beam has a decreasing or increasing cross-sectional dimension. The second focusing element can focus the laser beam and direct the beam toward the material processing area.Type: GrantFiled: August 20, 2007Date of Patent: October 23, 2012Assignee: Universal Laser Systems, Inc.Inventors: Yefim P. Sukhman, Stefano J. Noto, Cheryl Kaufman
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Publication number: 20120261395Abstract: A thermal processing apparatus and method in which a first laser source, for example, a CO2 emitting at 10.6 ?m is focused onto a silicon wafer as a line beam and a second laser source, for example, a GaAs laser bar emitting at 808 nm is focused onto the wafer as a larger beam surrounding the line beam. The two beams are scanned in synchronism in the direction of the narrow dimension of the line beam to create a narrow heating pulse from the line beam when activated by the larger beam. The energy of GaAs radiation is greater than the silicon bandgap energy and creates free carriers. The energy of the CO2 radiation is less than the silicon bandgap energy so silicon is otherwise transparent to it, but the long wavelength radiation is absorbed by the free carriers.Type: ApplicationFiled: May 31, 2012Publication date: October 18, 2012Inventors: Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur, Aaron Hunter, Bruce Adams, Joseph Michael Ranish
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Patent number: 8278594Abstract: A method and an apparatus for perforating a printed circuit board are provided so that the processing efficiency and the board densification can be improved. In test processing, a conductor layer 50i is irradiated with a pulsed laser beam 4a whose energy density is set at a value high enough to process the conductor layer 50i while emission 23a from a processed portion is monitored. Thus, the number of pulses of irradiation required for processing a window in the conductor layer 50i is obtained. An insulating layer 51i is irradiated with a pulsed laser beam 5a whose energy density is set at a value high enough to process the insulating layer 51i but low enough not to process a conductor layer 50i+1 under the insulating layer 51i. Thus, the number of pulses of irradiation required for processing a window in the insulating layer 51i is obtained.Type: GrantFiled: March 3, 2009Date of Patent: October 2, 2012Assignee: Hitachi Via Mechanics, Ltd.Inventors: Kunio Arai, Hiroyuki Sugawara, Hiroaki Ashizawa, Hiromi Nishiyawa
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Patent number: 8237085Abstract: An effect of interference is eliminated and intensity of a laser beam is homogenized. The beam homogenizer 100 includes reflecting mirrors 103 and 104 which are provided so that reflecting surfaces thereof face each other. The laser beam LB propagates through a space between the reflecting mirrors 103 and 104 while being reflected therebetween, so that intensity distribution of the laser beam LB is homogenized, but the laser beam LB also interferes. The first reflecting mirror 103 and the second reflecting mirror 104 are oscillated in a direction perpendicular to a direction in which the laser beam LB is scanned, intensity distribution of the laser beam LB in an oscillation direction is temporally averaged.Type: GrantFiled: November 14, 2007Date of Patent: August 7, 2012Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Koichiro Tanaka
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Patent number: 8229589Abstract: A method and apparatus for fabricating a foam container by using a laser cutting apparatus to precisely cut and remove portions of foam in order to form custom and predetermined text, indentations and protective compartments in the foam, and more particularly a method of controlling the laser relative to high density foam to create precise cuts completely through the foam without subsequently adjusting the focal point of the laser, the cuts being made according to exterior dimensions of an object to be supported and protected in the high density foam.Type: GrantFiled: June 5, 2009Date of Patent: July 24, 2012Assignee: Battle Foam, LLCInventor: Romeo Filip
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Patent number: 8134099Abstract: An object to be processed 1 is irradiated with a laser light L modulated by a reflection type spatial light modulator 203 such that aberration of the laser light L converged inside the object 1 becomes a predetermined aberration or less. Therefore, aberration of the laser light L generated at a position on which a converging point P of the laser light L is located is made as small as possible, to enhance the energy density of the laser light L at that position, which makes it possible to form a modified region 7 with a high function as a starting point for cutting. In addition, because the reflection type spatial light modulator 203 is used, it is possible to improve the utilization efficiency of the laser light L as compared with a transmissive type spatial light modulator. Such improvement of the utilization efficiency of the laser light L is particularly important in the case in which the modified region 7 serving as a starting point for cutting is formed in the plate-shaped object 1.Type: GrantFiled: July 28, 2008Date of Patent: March 13, 2012Assignee: Hamamatsu Photonics K.K.Inventors: Makoto Nakano, Koji Kuno, Tetsuya Osajima, Takashi Inoue, Masayoshi Kumagai
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Patent number: 8049133Abstract: A laser beam machining apparatus including a laser beam irradiation unit, the laser beam irradiation unit including: a laser beam oscillator for oscillating a laser beam; a beam splitter by which the laser beam oscillated by the laser beam oscillator is split into a first laser beam and a second laser beam; a rotary half-wave plate disposed between the laser beam oscillator and the beam splitter; a condenser lens disposed in a first optical path for guiding the first laser beam split by the beam splitter; a first reflecting mirror disposed in a second optical path for guiding the second laser beam split by the beam splitter; a first quarter-wave plate disposed between the beam splitter and the first reflecting mirror; a second reflecting mirror disposed in a third optical path for splitting thereinto the second laser beam returned to the beam splitter through the second optical path; a second quarter-wave plate disposed between the beam splitter and the second reflecting mirror; and a cylindrical lens disposeType: GrantFiled: April 28, 2008Date of Patent: November 1, 2011Assignee: Disco CorporationInventors: Ryugo Oba, Hiroshi Morikazu
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Publication number: 20110253690Abstract: A beam delivery technology for high power laser systems, like laser peening systems, for work pieces which may have compound curvatures, includes placing an optical assembly having a receiving optic, beam formatting optics and a scanner mounted thereon, in a position to receive laser pulses from a laser source and within an operating range of the process area. Polarized laser pulses are delivered to the receiving optic while the position of the optical assembly remains unchanged. The pulses proceed through the beam formatting optics to the scanner, and are direct to respective impact areas having nominal shapes and locations on the work piece. The scanning process includes for each laser pulse, setting direction, divergence, polarization, rotation and aspect ratio of the laser pulses output from the scanner, to control the polarization, shape and location on respective impact areas.Type: ApplicationFiled: November 12, 2010Publication date: October 20, 2011Applicant: METAL IMPROVEMENT COMPANY LLCInventors: C. BRENT DANE, Edward W.H. Lao, Fritz B. Harris, JR., Randall L. Hurd, Jon Rankin, Scott N. Fochs
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Patent number: 8030595Abstract: A method for displaying laser irradiation state and a system of displaying laser irradiation state, enabling to monitor laser irradiation state correctly and rapidly even when a laser irradiation direction varies, and a scanner head and a work are relatively apart, characterized that laser light is irradiated at the surface of a work, in a specified pattern shape different from a process pattern from a scanner head, in advance of process by irradiation of laser light at a work by a scanner head mounted at a robot hand.Type: GrantFiled: September 26, 2006Date of Patent: October 4, 2011Assignee: Nissan Motor Co., Ltd.Inventor: Takamasa Nakamura
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Publication number: 20110204045Abstract: The present invention generally relates to a thermal processing apparatus and method that permits a user to index one or more preselected light sources capable of emitting one or more wavelengths to a collimator. Multiple light sources may permit a single apparatus to have the capability of emitting multiple, preselected wavelengths. The multiple light sources permit the user to utilize multiple wavelengths simultaneously to approximate “white light”. One or more of a frequency, intensity, and time of exposure may be selected for the wavelength to be emitted. Thus, the capabilities of the apparatus and method are flexible to meet the needs of the user.Type: ApplicationFiled: April 28, 2011Publication date: August 25, 2011Inventor: STEPHEN MOFFATT
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Patent number: 7985945Abstract: Embodiments of the present invention provide apparatus and method for reducing noises in temperature measurement during thermal processing. One embodiment of the present invention provides a chamber for processing a substrate comprising a chamber enclosure defining a processing volume, an energy source configured to direct radiant energy toward the processing volume, a spectral device configured to treat the radiant energy directed from the energy source towards the processing volume, a substrate support disposed in the processing volume and configured to support the substrate during processing, and a sensor assembly configured to measure temperature of the substrate being processed by sensing radiation from the substrate within a selected spectrum.Type: GrantFiled: May 9, 2008Date of Patent: July 26, 2011Assignee: Applied Materials, Inc.Inventors: Blake Koelmel, Joseph Michael Ranish, Aaron Hunter
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Patent number: 7977601Abstract: An X & Y orthogonal cut apparatus for scribing a pair of parallel cuts on a planar workpiece, the workpiece plane having an X-axis and a Y-axis, where the apparatus includes a laser device generating at least two beams including a first beam and a second beam, the first beam and the second beam each having an impact point on the workpiece, the first and second impact points being positioned diagonally with respect to the X and Y axes of the workpiece, and at least one actuator to move at least one of the impact points relative to the workpiece and the workpiece relative to the impact points.Type: GrantFiled: November 28, 2005Date of Patent: July 12, 2011Assignee: Electro Scientific Industries, Inc.Inventor: Leonard Kandt
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Patent number: 7947923Abstract: A device for a laser processing head includes an optical element configured for attachment to the laser processing head, a housing for the laser processing head configured to receive the optical element, and a mechanical encoding disposed on at least one of the optical element and the housing to permit installation of a predetermined optical element at a predetermined orientation into the housing.Type: GrantFiled: October 20, 2005Date of Patent: May 24, 2011Assignee: TRUMPF Werkzeugmaschinen GmbH + Co. KGInventors: Martin Lambert, Philipp Herwerth
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Patent number: 7939779Abstract: With many coated sheets, in particular zinc-coated sheets as used in the automobile industry, the coating material has a much lower boiling point than the material of the sheet. On welding said sheets together the above leads to explosive evaporation of coating material which seriously affects the quality of the connection. In order to improve the quality of the connection it has already been disclosed that narrow gaps between the sheets can be produced by means of spacers, through which the coating material can escape. The spacers can be produced for example, by means of laser bombardment of the sheets. A disadvantage is the relatively long time necessary for machining, which causes large costs in particular for serial production. The aim of the invention is to reduce the time necessary for machining the sheets whilst at least maintaining, preferably improving the quality of the machining.Type: GrantFiled: September 3, 2003Date of Patent: May 10, 2011Assignee: Daimler AGInventors: Daniel Zauner, Claus-Dieter Reiniger, Wolfgang Becker, Klaus Goth, Mike Paelmer
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Patent number: 7923659Abstract: A laser machining method and a laser machining apparatus by which holes excelling in form accuracy can be machined efficiently are to be provided. A first cylindrical lens and/or a second cylindrical lens to correct any deformation of reflective face of a first mirror and/or a second mirror is arranged on an optical axis of a laser beam, and converging positions of the laser beam for an X-component and for a Y-component are coincident with a point on the optical axis.Type: GrantFiled: August 22, 2007Date of Patent: April 12, 2011Assignee: Hitachi Via Mechanics, Ltd.Inventors: Kunio Arai, Yasuhiko Kita, Yasushi Ito
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Patent number: 7851725Abstract: An active laser energy delivery system includes a relay imaging system. Input optics arranged to receive the laser energy, a transmitting mirror having adjustable angle of incidence relative to the input optics, and a robot mounted processing head including an optical assembly are configured to direct laser energy toward the movable target image plane. The laser energy follows an optical path including an essentially straight segment from the transmitting mirror to the receiving mirror, having a variable length and a variable angle relative to the input optics. Diagnostics on the processing head facilitate operation.Type: GrantFiled: November 17, 2004Date of Patent: December 14, 2010Assignee: Metal Improvement Company LLCInventors: C. Brent Dane, Fritz B. Harris, Joseph T. Taranowski, Stewart B. Brown
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Patent number: 7767930Abstract: The invention provides a method of rapidly machining multiple, often similar or nearly identical, features using a LASER machining system. During LASER machining, light of a wavelength and intensity that will modify the workpiece to be machined is directed at the workpiece and interacts to produce the desired change. If several features are to be machined, the processing speed can be increased by operating on a multiplicity of features at once. In one embodiment of the invention, this is achieved by separating the LASER beam into multiple beams and machining the desired features simultaneously.Type: GrantFiled: October 2, 2006Date of Patent: August 3, 2010Assignee: Aradigm CorporationInventors: Thor Miller Wilbanks, Jeffrey A. Schuster
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Patent number: 7718921Abstract: A laser energy delivery system includes a relay imaging system. Input optics arranged to receive the laser energy, a transmitting mirror having adjustable angle of incidence relative to the input optics, and a robot mounted optical assembly are configured to direct laser energy toward the movable target image plane. The laser energy follows an optical path including an essentially straight segment from the transmitting mirror to the receiving mirror, having a variable length and a variable angle relative to the input optics through air. Diagnostics on the processing head facilitate operation.Type: GrantFiled: November 17, 2004Date of Patent: May 18, 2010Assignee: Metal Improvement Company LLCInventors: C. Brent Dane, Fritz B. Harris, Joseph T. Taranowski, Steven L Honett, Stewart B. Brown
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Publication number: 20100059491Abstract: An aim is to provide a tubular-body residual-stress improving apparatus capable of reducing irradiation on unnecessary areas by controlling the optical paths of laser beams. In the tubular-body residual-stress improving apparatus, an optical control unit (5C) includes one pair of mirrors (21, 22) being disposed at a final stage of an optical system for a plurality of laser beams (P1-Pn) to be sharable and disposed in such a way that the mirrors are placed respectively at both sides, in the circumferential direction of the tubular body (2), of a final optical path of the laser beams to the tubular body (2), and another pair of mirrors (23, 24) being disposed at final stage of the optical system for the laser beams at both ends and disposed in such a way that the mirrors are placed respectively at both sides, in an axial direction of the tubular body (2), of final optical paths of the laser beams at both ends to the tubular body (2).Type: ApplicationFiled: March 26, 2008Publication date: March 11, 2010Applicant: MITSUBISHI HEAVY INDUSTRIES, LTD.Inventors: Shuho Tsubota, Takashi Ishide, Takashi Akaba, Hironori Onitsuka
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Patent number: 7649156Abstract: A laser annealing apparatus is provided, which can simultaneously process a plurality of moving semiconductor devices in an inline manner using one annealing laser. The apparatus may include a laser beam emitting unit, which emits laser beams to target regions of a to-be-processed object. Also included may be a plurality of first nozzles and a plurality of second nozzles, through which gas used for controlling an atmosphere of the target regions of the to-be-processed object is introduced or exhausted. The first and second nozzles may face each other so that the laser beams emitted from the laser beam emitting unit fall therebetween. The apparatus may further include a moving unit, which horizontally moves the to-be-processed object, to which the laser beams are emitted, at approximately the same transport speed.Type: GrantFiled: November 24, 2004Date of Patent: January 19, 2010Assignee: Samsung Mobile Display Co., Ltd.Inventor: Hong-Ro Lee
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Patent number: 7633036Abstract: A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.Type: GrantFiled: October 7, 2002Date of Patent: December 15, 2009Assignee: Orbotech LtdInventors: Abraham Gross, Zvi Kotler, Eliezer Lipman
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Patent number: 7629555Abstract: A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.Type: GrantFiled: September 2, 2003Date of Patent: December 8, 2009Assignee: Orbotech LtdInventors: Abraham Gross, Zvi Kotler, Eliezer Lipman
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Patent number: 7618415Abstract: A device and method for steering a laser beam to a focal point in target tissue requires generating a laser beam. Diversions of the laser beam from a central beam path are minimized by a sequential arrangement of optical steering components. In order, the beam is first directed to the center of a z-scanning apparatus which will move the focal point in the medium in a z-direction. The beam is then passed to the center of a first galvanometric mirror which introduces focal point movements in the x-direction. A second galvanometric mirror then compensates for the x-direction movement by redirecting the beam to the center of a third galvanometric mirror where focal point movements in the y-direction are introduced.Type: GrantFiled: April 9, 2004Date of Patent: November 17, 2009Assignee: Technolas Perfect Vision GmbHInventors: Ralf Kessler, Frieder Loesel, Thomas Sauter
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Publication number: 20090233397Abstract: For forming the separating lines, (5, 6, 7) which are produced in the functional layers (2, 3, 4) deposited on a transparent substrate (1) during manufacture of a photovoltaic module with series-connected cells (C1, C2, . . . ), there are used laser scanners (8) whose laser beam (14) produces in the field (17) scanned thereby a plurality of adjacent separating line sections (18) in the functional layer (2, 3, 4). The laser scanners (8) are then moved relative to the coated substrate (1) in the direction (Y) of the separating lines (5, 6, 7) by a distance corresponding at the most to the length (L) of the scanned field (17) to thereby form continuous separating lines (5, 6, 7) through mutually flush separating line sections (18).Type: ApplicationFiled: March 12, 2009Publication date: September 17, 2009Inventor: Walter Psyk
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Publication number: 20090188900Abstract: A method of cutting material for use in an implantable medical device employs a plotted laser cutting system. The laser cutting system is computer controlled and includes a laser combined with a motion system. The laser precisely cuts segments out of source material according to predetermined pattern as designated by the computer. The segments are used in constructing implantable medical devices. The cutting energy of the laser is selected so that the cut edges of the segments are melted to discourage delamination or fraying, but communication of thermal energy into the segment beyond the edge is minimized to avoid damaging the segment adjacent the edge.Type: ApplicationFiled: February 13, 2009Publication date: July 30, 2009Applicant: 3F Therapeutics, Inc.Inventors: Douglas S. Cali, Keith E. Myers
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Patent number: 7564006Abstract: An apparatus (1) for generating a rotating laser beam (5) which may used for various applications including welding, cutting, drilling or ablation of materials. More particularly, the apparatus is able to produce a fast rotating and accurate laser beam, because the main optical device (100) that is rotated consists of a reflecting surface (102) rotating about an axis (X1) that it intersects.Type: GrantFiled: May 13, 2004Date of Patent: July 21, 2009Assignee: LASAG AGInventors: Hans Peter Schwob, Joachim Hertzberg, Walter Zürcher, Friedrich Durand, Bruno Knobel
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Patent number: 7560661Abstract: A laser beam machine for processing an article to be processed with a laser beam from a processing scanner 1 comprised of an optical system employing a laser oscillator 10. Article position controllers 2a and 2b are controlled in a coordinated manner in accordance with the direction of the laser beam from said processing scanner 1 such that the position of a surface to be processed of the article is controlled to be nearly perpendicular to the direction of the laser beam from the processing scanner 1. While an article to be processed mounted on one article position controller 2a is being processed and unloaded, another article to be processed can be loaded onto the other article position controller 2b. Thus, the wait time for the laser beam machine can be reduced and production efficiency can be improved.Type: GrantFiled: October 8, 2004Date of Patent: July 14, 2009Assignee: Toyota Jidosha Kabushiki KaishaInventors: Toshiyoshi Ichikawa, Wataru Iida, Kazuhisa Mikame, Akio Satou, Hironari Mikata
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Patent number: 7557325Abstract: The present invention concerns a method for manufacturing a needle, of the type used in the medical field. This needle is formed by a pulsed laser weld for joining a first portion having a pointed end and a second end having the shape of a tube and for receiving, in a subsequent step, the end of a suture thread. During the welding step, the needle and the incident laser beam are driven in a relative rotational movement whose speed is adjusted such that during the duration of a laser beam pulse, at least one complete revolution is carried out.Type: GrantFiled: August 5, 2004Date of Patent: July 7, 2009Assignee: LASAG AGInventor: Adrian Fiechter
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Publication number: 20090166812Abstract: The present invention relates generally to semiconductors, material layers within semiconductors, a production method of semiconductors, and a manufacturing arrangement for producing semiconductors. A semiconductor according to the invention includes at least one layer with a surface, produced by laser ablation, wherein the uniform surface area to be produced includes at least an area 0.2 dm2 and the layer has been produced by employing ultra short pulsed laser deposition wherein pulsed laser beam is scanned with a rotating optical scanner including at least one mirror for reflecting the laser beam.Type: ApplicationFiled: February 23, 2007Publication date: July 2, 2009Applicant: PICODEON LTD OYInventors: Jari Ruuttu, Reijo Lappalainen, Vesa Myllymaki, Lasse Pulli, Juha Makitalo
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Patent number: 7525707Abstract: A system and method for parallel-beam scanning a surface. An energetic beam source emits an energetic collimated beam which is received by an optical device, comprising: one or more optical media, operable to receive the emitted beam, such as two pairs of coordinated mirrors or a right prism, and at least one actuator coupled to the one or more optical media, and operable to rotate each of the one or more optical media around a respective axis to perform a parallel displacement of the beam in a respective direction, wherein the respective direction, the beam, and the respective axis are mutually orthogonal. The optical device is operable to direct the beam to illuminate a sequence of specified regions of a surface.Type: GrantFiled: April 8, 2008Date of Patent: April 28, 2009Assignee: Semicube, Inc.Inventors: Raymond M. Warner, Jr., Lynn Millar, legal representative, John E. MacCrisken, Earl E. Masterson
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Patent number: 7525708Abstract: A scanner head is provided for processing a workpiece by means of a focused laser beam. The scanner head includes a first module, rotatably supported in a first direction in order to deflect the laser beam from the first direction into a second direction, preferably perpendicular to the first direction, and a second module, which is fixed to the first module and is rotatably supported in the second direction, and which has a scanner mirror capable of tilting about a first axis. An adaptive beam deflection unit, which may include an adaptive mirror, is provided in the first module. The scanner mirror is arranged in the second module so that it can rotate or tilt about a second axis, and an optical arrangement with a beam expansion element and a focusing element is arranged in the scanner head.Type: GrantFiled: June 18, 2008Date of Patent: April 28, 2009Assignee: TRUMPF Werkzeugmaschinen GmbH + Co. KGInventor: Christian Boettcher
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Patent number: 7501602Abstract: A device for improving the efficiency of operation for aligning the optical axis of mirrors disposed in an optical path for laser transmission in a laser beam machine. The laser beam output from a laser oscillator of a laser beam machine is transmitted via multiple mirrors disposed in the optical path thereof to a torch. A mirror for receiving the laser beam from the mirror is removed and a laser beam detecting device is attached in replacement thereof. The laser beam is passed through a cross-shape target, a portion of which is branched and taken as image by a laser beam detecting picture element. The operator operates adjusting screws and to change the tilt angle of the mirror while watching image data, so as to align the optical axis of the laser beam.Type: GrantFiled: December 15, 2006Date of Patent: March 10, 2009Assignee: Yamazaki Mazak CorporationInventors: Tsunehiko Yamazaki, Naoomi Miyakawa
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Patent number: 7485828Abstract: A residual stress improving apparatus for piping, which can heat an outer peripheral surface of piping to reduce (including eliminate) the residual stress of the piping is provided. The apparatus has a laser head portion, and circumferential direction moving mechanism composed of a ring rail and a rotational travel bogie. Further, the apparatus may adjust the reflection direction of laser light so that the laser light reflected by the outer peripheral surface of the piping does not return to the laser head, and adjust the delivery direction of the laser light so that the outer peripheral surface of the bending pipe portion located forwardly, in the pipe axis direction, of the laser head is irradiated with the laser light.Type: GrantFiled: July 28, 2005Date of Patent: February 3, 2009Assignee: Mitsubishi Heavy Industries, Ltd.Inventors: Takashi Akaba, Shuho Tsubota, Kenji Nishikawa, Noriaki Sugimoto, Shoji Kushimoto, Takashi Ishide, Takahiro Ohta