Abstract: A programmable apparatus for laser beam shaping including a preprogrammable mircomirror array produces a spatial energy distribution suitable for accurately and rapidly marking, machining and processing materials. The preprogrammed micromirror array redistributes the laser output beam energy to produce a desired two-dimensional machining pattern on a work piece. The energy pattern created by the preprogrammed micromirror array is changeable between successive pulses of the laser to create accurate, complex three-dimensional machined shapes in a work piece not easily achieved by conventional machining systems. A special application of this invention is laser beam shaping to produce a uniform spatial energy distribution, i.e. homogenizing the beam from a laser with non-uniform energy distribution. Continuous adjustment of beam shaping is provided to maintain beam homogenization in accordance with changes in laser beam output energy profile.

Abstract: A laser machining device can be used to direct two independent laser beams onto the same machining field in a single machining process. This can be achieved by using an at least partially reflective optical element, configured such that the first laser beam is essentially transmitted and the second laser beam is essentially reflected. The beam paths of the two laser beams are varied independently of each other by two deflection units before they strike the at least partially reflective optical element. This results in a large number of advantageous possibilities for the precise and continuous machining of materials.

Abstract: The laser irradiation apparatus of the present invention is configured to include a laser and at least two mirrors each having a concave surface for unidirectionally homogenizing an energy density of laser light emitted from the laser. A focal position of a first mirror exists between the first mirror and an irradiation surface. A focal position of a second mirror does not exist between the second mirror and the irradiation surface, but exists behind the irradiation surface. The laser irradiation apparatus thus configured enables laser irradiation of, for example, semiconductor films.

Abstract: A device for inscribing an object, including a laser emitter for emitting at least one laser beam and an arrangement of diverting means for directing the at least one laser beam from the exit point of the laser emitter to a focal point on the object, wherein, in one embodiment, each laser beam is assigned to a diverting means, depending on the exit angle of the laser beam from the laser emitter so that at least two sides of the object my be inscribed and, in another embodiment, the diverting means is movable so that at least two sides of the object may be inscribed by movably arranging the diverting means.

Abstract: The present invention is a system for laser micromachining where a scan mirror and milling algorithm are used to produce high precision, controlled hole shapes in a workpiece. A picosecond laser that produces short pulses is used to reduce thermal effects to improve the quality and repeatability of the milled holes, and a Diffractive Optical Element (DOE) is used to split a single beam into a plurality of beams to allow parallel drilling of the workpiece. A method for operating a laser drilling system where high precision, controlled hole shapes in a workpiece are drilled includes using a scan mirror and milling algorithm, and using a picosecond laser in conjunction with a DOE, thus ensuring that spectral bandwidth issues and thermal issues are addressed to improve the quality and repeatability of the holes.

Abstract: A laser processing method for processing a hidden surface of a workpiece, the hidden surface being disposed within a recess having an opening. The method includes inserting a reflective member into the recess and directing a pulse of coherent energy to reflect off of said reflective member and impact the hidden surface of a workpiece to create a shock wave. Alteratively a surface of the recess may be modified to laser shock process the hidden surface. In one particular embodiment, the reflective member is specifically shaped toprovide diction of a pulse of coherent energy to a hidden surface so that a substantially uniform energy density is applied to the hidden surface. In an additional embodiment, the method is optimized for preventing damage to the reflective member. In one particular embodiment, the reflective member is composed of a fluid.

Abstract: Continuously adjustable focusing optics for use in laser-assisted direct metal deposition (DMD™) processes provide for adaptive deposition width to increase deposition rate while maintaining the dimensional tolerances. The focusing optics and method may be adapted for variable deposition road width under closed-loop feedback, so that complicated features may be fabricated with close tolerance, stress and microstructure control to improve the lead-time and design flexibility. The preferred embodiment uses adaptive mirror arrangements and beam movement for variable deposition width and geometry. Conceptually, an infinite number of mirror arrangements can be made to adapt to a particular deposit shape.

Abstract: The invention relates to a laser-processing unit, in particular a laser-welding unit, having a laser beam source (2) for generating a laser beam (LS) and having a pivotable focusing unit (8) for pivoting the laser beam (LS) about two axes of rotation (x, y) and for focusing the laser beam (LS) in a focus (F). A dichroic mirror (4) is arranged in the beam path of the laser beam (LS) between the laser beam source (2) and the focusing unit (8), which mirror is assigned an observation device (20) in such a manner that the optical axis (22) of this device coincides with the axis (24) of the laser beam (LS) as it propagates downstream of the dichroic mirror, as seen in the direction of propagation of the laser beam (LS).

Abstract: The present invention relates to an apparatus and method for making a lens on the end of an optical waveguide fiber. The apparatus includes a laser, wherein the laser emits a laser beam. The apparatus further includes a beam expander disposed to receive the laser beam, whereby the beam expander increases the diameter of the laser beam, thereby producing an expanded laser beam. The apparatus further includes a first aperture disposed within the expanded laser beam, wherein the first aperture blocks a portion of the expanded laser beam, and a second aperture disposed within the expanded laser beam, wherein the second aperture blocks a portion of the expanded laser beam. The apparatus further includes a first mirror disposed in the path of the expanded laser beam wherein the first mirror redirects the expanded laser beam. The apparatus further includes a focusing mirror disposed to receive the expanded laser beam, wherein the focusing mirror focuses the expanded laser beam thereby forming a heat zone.

Abstract: A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.

Abstract: A processing method for a ceramic green sheet and a laser beam machine used therefor, which can efficiently. form a plurality of penetration holes having a desired shape and dimension at predetermined locations of the ceramic green sheet, are provided. By performing the steps of dividing a shaped laser beam into a plurality of laser beams by passing through a diffraction grating in order that an energy of the individual zero order diffracted beam becomes equivalent to, or less than, the threshold value for processing the ceramic green sheet, reflecting the divided laser beams with a galvanomirror, converging the reflected laser beams with an converging lens and radiating the laser beams to the ceramic green sheet, the ceramic green sheet is prevented from being processed by the zero order diffracted beam and the higher order diffracted beam so as to simultaneously form a plurality of penetration holes having a desired shape and dimension.

Abstract: A cube corner laser beam retroreflector apparatus for a beam path external to a laser reduces the effect of small deviations in flatness of optical carriage mounting elements and/or linear ways that pitch, yaw and roll the carried retroreflector apparatus. Small changes in pitch, yaw and roll are converted to a small translation in position of the beam reflected from the apparatus. Since the reflected beam remains parallel to the incoming beam, the length of the beam path does not magnify such small deviations in position and system pointing stability is greatly improved. The cube corner retroreflector comprises a welded frame and three mirror holders, the welded frame consisting of plasma, laser or abrasive water jet cut tabbed and slotted flat plates welded together. Each mirror holder is adjustably attached to the welded frame and houses a removable mirror.

Abstract: Radiant energy line source(s) (e.g., laser diode array) and anamorphic relay receiving radiant energy therefrom and directing that energy to a substrate in a relatively uniform line image. The line image is scanned with respect to the substrate for treatment thereof. Good uniformity is provided even when the line source is uneven. Optionally, delimiting aperture(s) located in the anamorphic relay focal plane and a subsequent imaging relay are includeable to permit substrate exposure in strips with boundaries between adjacent strips within scribe lines between circuits. An anamorphic relay focal plane mask with a predetermined pattern can be used to define portions of the substrate to be treated with the substrate and mask scanning motions synchronized with each other. Control of source output, and position/speed of the substrate, with respect to the line image, allows uniform dose and required magnitude over the substrate.

Abstract: A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.

Abstract: Successive cigarettes of a series of cigarettes, such as filter cigarettes, are transported sideways in the axially parallel peripheral flutes of a rotary drum-shaped conveyor to the inlet(s) of a straight or V-shaped rolling channel or of two successive straight channels defined by the rolling surface(s) of one or two stationary block-shaped rolling members and the external surface of an endless belt trained over several rollers and being at least partially confined in a recess or groove of the conveyor in such a way that the surface(s) of the rolling member(s) cooperate with the surface of the belt to roll successive cigarettes in the channel or channels about their longitudinal axes while one or more beams issuing from one or more lasers or other radiation source(s) impinge upon the wrappers of the cigarettes rolling in the channel or channels.

Abstract: A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.

Abstract: A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.

Abstract: A new method and apparatus for moving an excimer laser beam relative to a workpiece to control the wall profile of laser machined features, such as holes and grooves. An excimer laser beam is displaced relative to a workpiece in a substantially circular motion and the substantially circular motion is further displaced relative to the workpiece to correspond to a desired shape.

Abstract: A method and apparatus for splitting non-metallic substrates includes a laser for generating a laser beam. An integrated cracking devices receives the laser beam and directs the laser beam onto a non-metallic substrate to define the heat affected zone and quench the substrate at a quenching region contained within the heat affected zone. This integrated cracking device includes a housing and optics fitted within the housing for receiving and directing the laser beam onto the substrate. A quenching nozzle is mounted on the housing for quenching the substrate at a quenching region defined within the heat affected zone.

Abstract: A laser processing method for removing glass by melting, evaporation or ablation from sheet-like glass substrate for forming microscopic concavities and convexities. Diffraction grating and planar microlens array obtained thereby.

Abstract: A cube corner laser beam retroreflector apparatus for a beam path external to a laser reduces the effect of small deviations in flatness of optical carriage mounting elements and/or linear ways that pitch, yaw and roll the carried retroreflector apparatus. Small changes in pitch, yaw and roll are converted to a small translation in position of the beam reflected from the apparatus. Since the reflected beam remains parallel to the incoming beam, the length of the beam path does not magnify such small deviations in position and system pointing stability is greatly improved. The cube corner retroreflector comprises a welded frame and three mirror holders, the welded frame consisting of plasma, laser or abrasive water jet cut tabbed and slotted flat plates welded together. Each mirror holder is adjustably attached to the welded frame and houses a removable mirror.

Abstract: The invention relates to a device for influencing a laser beam by means of an adaptive mirror (12) in the beam path, having a piezoelectric adjusting member (17) arranged on the back of the mirror (12), it being the case that, in order to achieve low-aberration deformation of the mirror (12) for the purpose of influencing the divergence of the beam, there is provided between the adjusting member (17) and the back (24) of the mirror (12) a pressure-transmitting device (19) which acts on a large area of the deformable surface of the mirror (12).

Abstract: A method of producing microbore holes in a multi-layer substrate (5), preferably a printed circuit board substrate, that is displaced below writing optics (4) by an XY stage (6), using the optics to generate a spot from a light source (1), preferably a laser. The method reduces the treatment time and preferably compensates for distortions in the substrate material. To this end, the position of the spot within a working field is changed simultaneously with the treatment positions by electronically controlled, movable mirrors. The position of the substrate is determined by an interferometer (9, 11), and the signals corresponding to the substrate position are processed by a suitable computer system (16) to obtain an actual position of the table system. The computer system (16) is preferably provided with all bore hole coordinates and additional information such as bore hole diameter, especially in tabular form.

Abstract: A laser beam position control apparatus for a CNC laser equipped machine tool, that will automatically maintain precise alignment of the beam path, though the machine may be operating in a non-uniform temperature environment. The apparatus compensates for small deviations in flatness of machine mounting surfaces by steering the laser beam. The laser beam control apparatus includes a laser beam position sensor for mounting in the beam path of the machine tool and that communicates with a signal processor that in turn communicates with at least one drive apparatus that controls at least one actuator capable of moving an object to steer the laser beam.

Abstract: A method and apparatus for forming an array of microcavities in the surface of a metal film uses an excimer laser or an ultrashort laser which to produce a beam of laser light pulses. An optical mask divides the beam into multiple beams and a lens system focuses the multiple beams onto the metal film. The device operates by generating multiple beams of laser pulses of a first diameter and then magnifying the pulses by a magnification factor less than 1 to produce multiple beams of pulses having a second diameter, less than the first diameter, which are applied to the metal film. The magnification factor and the intensity of the laser is such that the fluence of the laser on the optical mask is not sufficient to cause ablation while the fluence on the metal film is sufficient to cause ablation. A diffractive optical element may be used in the device in place of the optical mask. The apparatus includes a quarter wave plate that converts the beam of laser light pulses into a beam of circularly polarized pulses.

Abstract: Remote laser welding system comprising a laser beam generator and an optical head (1) including a mirror orienting unit (3, 4) and a focusing device (6), to orient and focus the laser beam (P) respectively inside a spatial sector (T). The mirror orienting unit (3, 4) is also arranged to orient the spatial sector (T) on a vertical plane and the optical head (1) can be translated vertically.

Abstract: A laser welding method is provided, by which the suppression of porosity is obtained even when a laser beam is not spun. Laser beam 1 is irradiated onto object W to be welded, to weld it while the focus position of the beam is vibrated in the optical axis direction. The beam focus position can be vibrated in the optical axis direction by using curvature variable mirror 7 in which the curvature of the reflecting surface can be controlled. The curvature variable mirror 7 having a structure in which a reflecting plate is transformed by a piezoactuator, and which can be driven at a high speed, is preferable as it allows the increase of the frequency of the vibration in the optical axis direction.

Abstract: A cleaning device and a cleaning method for cleaning a resin sealing metal mold effective for removing complex stains on the metal mold in a short time, the stains containing organic and inorganic substances. The cleaning device decomposes stains on the inner part of the metal mold by irradiating the stains with a laser beam. The cleaning device comprises a laser beam generating means, a first reflection means for reflecting the laser beam generated by the laser beam generating means, and a second reflection means for receiving the reflected laser beam from the first reflection means in order to irradiate the inner part of the metal mold.

Abstract: The invention relates to a laser-processing unit, in particular a laser-welding unit, having a laser beam source (2) for generating a laser beam (LS) and having a pivotable focusing unit (8) for pivoting the laser beam (LS) about two axes of rotation (x, y) and for focusing the laser beam (LS) in a focus (F). A dichroic mirror (4) is arranged in the beam path of the laser beam (LS) between the laser beam source (2) and the focusing unit (8), which mirror is assigned an observation device (20) in such a manner that the optical axis (22) of this device coincides with the axis (24) of the laser beam (LS) as it propagates downstream of the dichroic mirror, as seen in the direction of propagation of the laser beam (LS).

Abstract: An reel type mower and method for severing vegetation includes at least one laser beam rotating about an axle within a housing so as to be repetitively introduced to vegetation to be severed. At least one laser beam is directed and redirected along multiple, substantially parallel paths, with each path rotating about the axle within the housing of the mower for engagement of the several segments of the laser beam with the vegetation to be severed. The laser beams or individual segments thereof are incorporated into a reel type mower comprising a produced by a laser generator rotating about an axle within the housing for containment of the laser beams. The housing includes a downwardly oriented opening suitable for the receipt therethrough of vegetation to be severed.

Abstract: A laser system for directing an output laser beam onto a work piece is provided. The laser system includes a main housing. A laser source is provided for generating an input laser beam. A cylindrical housing is supported for angular rotation within the main housing. The cylindrical housing includes an input aperture at a first end for receiving the input laser beam and a reflecting mirror at a second end for directing the input laser beam through an exit aperture. An annular mirror is supported within the main housing. The annular mirror receives the input laser beam directed through the exit aperture for generating the output laser beam. The output laser beam has an annular cross section.

Abstract: A laser cutting system has a specially designed frame that allows the laser cutting head to be mounted to the underside of a cross beam for a more efficient movement. The frame is further designed so as to allow the accessing of the work area of the laser cutting system along three different directions. The movement of the laser cutting head for fabricating a sheet placed in the work area of the laser cutting system is effected by a process that takes into consideration a number of parameters and determined data all of which are interpolated for generating optimal movements to further enhance the operating efficiency of the laser cutting system. The laser resonator of the laser cutting system of the instant invention is configured to have a telescopic system that maintains the density and power of the laser beam by auto focusing the same so that optimum cuts can be effected irrespective of whichever area of the worksheet is to be fabricated.

Abstract: A laser beam generating assembly for materials processing includes a resonator to generate a linearly polarized laser beam, and a beam forming assembly which includes mirrors to orient the polarization plane of the laser beam in a prescribed orientation relative to the vertical and a delay plate which has its reflective surface oriented so that the polarization plane of the beam impinges thereon is at an angle of 45° . The delay plate serves to produce a polarized laser beam with a rotating polarization vector, and in particular an elliptical or circular polarization of the laser beam.

Abstract: A method for laser scribing a semiconductor substrate with coatings on top. The method comprises the steps of focusing a laser beam on a top surface of the substrate coating; absorbing energy from the laser into the coating layer; forming a first set of scribe lines in a first direction on the substrate by scanning the laser beam across the surface of the substrate to evaporate portions of the coating layer; and forming a second set of scribe lines in a second direction on the surface of the substrate substantially orthogonal to the first set of scribe lines to evaporate portions of the layer.

Abstract: A laser machining device is capable of simultaneously machining two- or three dimentional patterns on the surface of a workpiece. A micromirror array positioned within a laser cavity generates a patterned plurality of laser beamlets which can be homogenized and deflected by a second micromirror array onto the surface of a workpiece to create a two-dimensional pattern. Alternatively, the second micromirror array can deflect laser beamlets of unequal energy density to produce a three-dimensional pattern.

Abstract: A maskless patterning apparatus allows for laser beam ablation of one or more layers of material while not etching an underlying different material layer. A micromirror array produces the desired complex pattern on the workpiece and a continuous feature and end point detection system provides location and material parameter changes to accurately control the pattern position and depth of etching. End point detection includes monitoring energy reflected from a specially prepared replica of the material to be ablated, whose thickness and consistency match the active workpiece area. The process terminates when the proper amount of material is removed.

Abstract: A method of forming bumps onto a chip having electrodes. The method includes the use of a template having through-holes arranged in correspondence to the electrodes of the chip. The template holds conductive balls to be formed into bumps to the template at the through-holes by vacuum suction. The through-holes of the template are formed by a laser, by supporting a glass plate on a support table having cavities and irradiating the plate with laser beams at the position of the cavities.

Abstract: A method and apparatus for positioning a surface of a workpiece for laser machining. A laser beam is focused to a focal point to form a plasma generating a plasma emission. An imaging system is oriented to receive the plasma emission and generate a plasma image. The imaging system is adjusted to focus the plasma image and is then fixed. The laser is then diverted away from the focal point and an illumination source is activated to illuminate the surface of the workpiece. The imaging system generates an image of the surface of the workpiece. The workpiece is adjusted in position toward the focal point until the image of the surface of the workpiece is in focus.

Abstract: Apparatus (20) and a method for laser scribing a coated substrate (22) utilizes a rotating polygonal mirror (36) to split a pulsed laser beam (30) in order to provide spaced ablations (34) in a coating (26) on the substrate. The laser pulses are directed through at least one lens (56, 60) and may be passed through fiber optics (62). A laser detector (68) may be used to detect the rotational position of the rotating polygonal mirror (36). A controller (76″, 76′″) allows a second set of scribes to be generated with reference to the first set of scribes.

Abstract: The invention relates to a method and an apparatus for the laser machining of workpieces, a laser beam being two-dimensionally positionable with the aid of a laser machining head with respect to a surface of a workpiece and it being intended for the machining of the workpiece to take place with predeterminable contours. According to the object, it is to be possible for the forming of the contours to be realized with high positional accuracy at low cost and with little effort. To achieve this object, the laser beam is correspondingly guided by means of a laser machining head, in which at least one two-dimensionally pivotable scanner mirror is accommodated. The scanner mirror or two scanner mirrors is/are connected to an electronic evaluation and control unit. Before the actual machining, a set-actual value comparison is carried out with respect to the position of the workpiece with at least one predetermined contour with respect to the laser machining head.

Abstract: In a laser beam machine head, when a filler wire and an optical axis of a laser beam are arranged coaxially, a convex roof mirror and a concave roof mirror are combined to divide the laser beam into two separate laser beams to that no laser beam is projected onto a filler wire feed pipe. Furthermore, the filler wire is fed from outside the laser beams to a condensing position via a filler wire guide in the spacing between the separate laser beams, or an electrode supported by a water flow pipe or an electrode holding pipe is brought close to the condensing position.

Abstract: A multiple laser peening cell apparatus for receiving pulses of energy from a laser shock peening device is comprised of a first cell for receiving a first pulse of energy, a second cell for receiving a second pulse of energy, and a beam distribution means, for directing the first pulse of energy and the second pulse of energy. Also, a method of directing pulses of energy originating from a single source to multiple workpieces comprises the steps of creating a first pulse of energy, directing the first pulse of energy to a first workpiece located in a first laser peening cell, creating a second pulse of energy, and directing the second pulse of energy to a second workpiece located in a second laser peening cell.

Abstract: A cutting apparatus including a plurality of rotating laser beams for cutting vegetation. The apparatus comprises a housing including side walls being extended generally perpendicular to form a downwardly oriented opening. An electrically powered laser cutting device is rotatably positioned centrally within the housing. A transport device is connectable to the housing to provide movement of the housing and laser cutting device along a surface covered by vegetation. The laser cutting device generates at least one laserbeam that is continuously rotatable in a 360° arc underneath the housing, with the at least one laser beam being adjustable in angular direction to direct laser beams in a plurality of angles arcing downwardly across the vegetation being cut. The speed of rotation of the one or more laser beams increases proportionally as ground speed increases for the cutting apparatus to provide adequate cutting of surface area in proportion to the ground speed across the vegetation.

Abstract: A periphery or a section close to a periphery of a collimation mirror is supported by a supporting section of a pressing board from a rear side of a mirror holder without fixing it, and also the collimation mirror is supported by a supporting section of the mirror holder from the front side at a position closer to the center than to a supporting position of the pressing board, so that a pressure is applied to the pressing board from the rear side by a pressurizing means such as an actuator or the like. A peripheral section of the collimation mirror is indirectly cooled by a cooling plate.

Abstract: An imaging system for ablating an array matrix of high-density vias in a flexible and rigid desired object. The apparatus contains a mirror based x, y scanning repeat positioning and/or a single axis scanner positioning system that directs a single point of a coherent light radiation beam at desired individual mask segments. These mask segments are formed into a planar mask array. A flat field collimating lens system is positioned between the mirror scanning system and the mask arrays to correct the angular beam output of the repeat positioning mirror and redirects the beam so that it strikes a specific rear surface segment(s) of in the mask array. The flat field collimating lens provides a beam that either illuminates the mask perpendicular to its surface or at preselected optimized illumination angles. Once illuminated, the specific segment of the mask array images and processes a single or a plurality of desired holes or features in a top surface of a flexible or rigid desired object to be processed.

Abstract: A device for connecting two components by welding with a laser beam, in which the components are overlapping in a partial region of their mutually facing surfaces. The device includes an optical beam divider that has an inlet for the laser beam and a device for alternately distributing the laser beam to a plurality of outlets. Each of the outlets is optically coupled via a beam-guiding device to a laser welding head which contains a focusing and deflection lens system for guiding the focused laser beam over a surface of a component facing the laser welding head.

Abstract: Techniques are provided for formatting laser pulse spatial shape and for effectively and efficiently delivering the laser energy to a work surface in the laser shock process. An appropriately formatted pulse helps to eliminate breakdown and generate uniform shocks. The invention uses a high power laser technology capable of meeting the laser requirements for a high throughput process, that is, a laser which can treat many square centimeters of surface area per second. The shock process has a broad range of applications, especially in the aerospace industry, where treating parts to reduce or eliminate corrosion failure is very important. The invention may be used for treating metal components to improve strength and corrosion resistance. The invention has a broad range of applications for parts that are currently shot peened and/or require peening by means other than shot peening.

Abstract: A material irradiation apparatus with a beam source produces a processing beam. The apparatus has a beam splitting device following the beam source, by which the processing beam is divided into several partial beams. Each partial beam can be deflected by a deflecting device discretely associated with it to different places on at least one workpiece to be processed, independently of the other partial beams. The workpiece to be processed is situated on a workpiece movement device that is movable in at least one axis. The machining beam is successively incident on a plurality of beam splitter devices that are movably arranged in the axis of the machining beam that is incident on them. The partial beams emerging from the beam splitter devices are simultaneously incident on the workpiece movement device. The workpiece movement device is arranged to be movable in at least one coordinate direction that deviates from the movement axis of the beam splitter devices.