Abstract: A reversible airless spray tip is provided with a housing for mounting to the front of a spray gun, a sealing saddle insertable into the housing, a seal associated with the saddle and a rotatable cylinder having a handle and containing an airless tip. The cylinder is insertable in the housing and has a protrusion on said cylinder for engaging and releasably retaining said seal for insertion into said housing.

Abstract: A spray gluing unit in a machine for wrapping products advancing along a pass line comprises a gluer equipped with a nozzle having an outlet from which adhesive is directed onto a wrapping material enveloping the products, and a cleaning station equipped with a first movable member carrying a scraper blade and a wetting pad to which silicone oil is supplied; the scraper blade and the wetting pad are designed to interact with a flat surface of the gluer and with an end face of the outlet, occupying substantially the same plane, so as to remove any residual adhesive from the gluer and keep the outlet moistened.

Abstract: An injector nozzle for a fuel injected internal combustion engine, said injector nozzle including a port (5) having a valve seat surface (15) and a valve member (3) having a seating surface (17), said valve member (3) being movable relative to the port (5) to respectively provide a nozzle passage (6) between the valve seat surface (15) and the seating surface (15) for the delivery of fuel therethrough or sealed contact therebetween to prevent said delivery of fuel, the valve member (3) including an outer valve surface (18) located adjacent the seating surface and external to the port, wherein a sharp edge (25) is provided on the valve member (3) at the transition between the seating surface (17) and the outer valve surface (18) thereby for controlling the formation of deposits at or adjacent an exit of the nozzle passage (6).

Abstract: A water jet deliver disk in kitchen sprayer, comprising a first element, made of a rigid material such as plastic, and constituted by a peripheral body fixable to the sprayer body, by a hub adapted to convey a central jet, and by cross-members connecting the peripheral body and the hub in a monolithic structure and arranged to provide water passage openings, and a second annular element, made of an elastic material and associated with the first element to embed the cross-members in the region between the peripheral body and the hub, and comprising holes for water passage which are arranged at the passage openings formed by the cross-members to provide jet.

Abstract: An ejector is provided with an interior surface wetting device for introducing a cleaning liquid into a suction chamber of the ejector to form a thin wall of the cleaning liquid covering an interior surface of the ejector. The interior surface wetting device includes a cleaning liquid inlet opening to be fluidly connected to a source of cleaning liquid and a cleaning liquid outlet opening for introducing the cleaning liquid into a suction chamber. The wetting device may be in the form of a pipe which extends from the outside of the ejector into the suction chamber to supply a cleaning liquid to a desired portion in the suction chamber.

Abstract: The invention concerns a reservoir capable of being periodically cleaned and/or filled with a coating product equipped with a piston (10) controlled in its movement by a control rod (11). A module (32) elastically deformable in compression (F) is incorporated in the kinematic linkage (20) between the rod (11) and the piston (10) or between the rod (11) and its actuating means, thereby providing elasticity for positioning the piston against the base of the reservoir, which enables a slight displacement of the piston rearwards when the cleaning product or fresh coating product is being injected.

Abstract: A nozzle device includes a housing (1) having an inlet for a fluid and an orifice for spraying out a firm jet of fluid (38), which orifice is delimited by two or more members, at least one of which is movable relative to the other one between a first position in which the orifice has a minimal cross-section area in order to spray out the fluid in a firm jet in a forward direction from the housing, and a second position in which the orifice is widened in order to be flushed clean by a coarse stream of fluid. A cap (2) is arranged in front of the orifice, the cap having two or more shield walls (16, 17) in which there are holes (20, 21) through which the firm jet of fluid (38), but not the coarse stream of flushing fluid, may pass.

Abstract: A dispenser device for dryable fluids is positioned at a product packaging machine dispenser station, with a first conveyor for feeding pieces of packaging material through the dispenser station, and a second conveyor for feeding the products to be packaged; the dispenser device being between the first and the second conveyors and designed to dispense a dryable fluid, consisting of an adhesive substance, onto the pieces at the dispenser station; the device having a dispenser part, with a plurality of nozzles for dispensing the adhesive substance and being located in a cylindrical shell of a hollow body; the shell having an opening which is opposite the pieces in the dispenser station, and the dispenser part being mobile relative to the hollow body between an operating position, in which the nozzles are at the opening, and a non-operating position in which the nozzles are at least at a cleaning and/or washing station inside a sealed chamber formed by the dispenser part and the shell.

Abstract: A spraying method of a dispense system for preventing residue, wherein a precise amount of stream fluid is supplied from a fluid supply through a main tube to a nozzle, and the precise amount of stream fluid is sprayed onto a surface of a wafer. A sub-tube system, which comprises a bypass valve and a pin hole is utilized to refill the fluid to a void. A metering valve is used as a suck-back system to retrieve the remaining fluid in the main tube and prevent residue from occurring.

Abstract: A unitary over-molded non-clogging system having mechanical breakup capability, a positive shutoff flared wall skirt, having two different overmolded materials forming a laminate combination. The soft flexible face inner portion with a flexible positive shutoff in combination, with mating sealing surface points at two distinct positions, on a conventional actuator body post, forms half of the unitary fitment. A hard portion contour forms the outer half, maintaining registration and retention of the entire overmold fitment within the actuator. This overmold combination fit provides these features without increasing the total amount of parts normally used in conventional spray actuators on pumps and aerosol systems. The actuator can employ a post with or without a mechanical breakup face while the mating surface of the inner soft interfacing portion would compliment it. This type of actuator also can be used as an outlet valve means for pumps, reducing overall cost.

Abstract: The present invention relates to a method of fumigating closed systems susceptible to microbially influenced corrosion (MIC). The method is particularly useful in a method for mitigating MIC in fire protection sprinkler systems.

Abstract: A fuel injector for fuel injection systems of internal combustion engines has an actuator and a valve needle actuatable by the actuator, which valve needle is in turn coupled to, and actuates, a valve closing body. The valve closing body and a valve seat surface of a valve seat body form a sealing seat. At least one injection opening is formed in the valve seat body, and an elastic vibration element penetrates the injection opening. The elastic vibration element is attached on the inlet side of the injection opening and leaves a portion of cross-section of the injection opening free.

Abstract: A device and method for cleaning a glue-application nozzle is provide. An apparatus defines at least one liquid discharge opening for discharging liquid onto the glue-application nozzle. A suctioning device is coupled to the apparatus for suctioning the discharged liquid.

Abstract: A water jet ventilator or aerator is provided for a sanitary fitting such as a faucet. The water jet ventilator has a jacket defining a water inlet and a water outlet, jet splitting obstacles and structure for mixing the jets with air. The ventilator device splits the flowing water into jets, mixes the jets with air and combines the flow into a stream. In the vicinity of the water outlet, the ventilator components in contact with the water are subject to calcification. According to the invention these components are provided with soft and/or water repellent surfaces to reduce or eliminate calcification and to facilitate cleaning. The soft surfaces facilitate cleaning because adhering lime is easily be detached by slight manual deformation of the surfaces to which the lime has adhered.

Abstract: By means of a fluid material discharge device of simple construction, a technique for fluid material discharge is provided which has few or no inadequate discharge, high productivity, and which enables easy modification and adjustment of the amount of fluid material discharge. The fluid material discharge device comprises a nozzle for discharge of fluid material and a filament-shape member inserted into the nozzle for use. The filament-shape member has a tip portion AA, which is exposed outside of the nozzle when no pressure is exerted on the tip of the filament-shape member, a portion BB which can be inserted into the nozzle, and a portion CC, on the side of the filament-shape member opposite the tip portion AA, and being bent from the portion BB. The spring structure of the filament-shape member is utilized to discharge fluid material.

Abstract: A main body (12) of a rotary atomizing head is provided with a hub fitting groove (13) on and around an inner peripheral surface (12F), while a hub member (14) is provided with a lid portion (15) of a circular disc-like shape, a plural number of leg portions (17) to be brought into fitting engagement with he hub fitting groove (13) through resilient deformation, and notched grooves (18) provided between the respective leg portions (17). Upon pushing in the hub member (14) against the main body (12), the leg portions (17) are fitted into the hub fitting groove (13) and the hub member (14) is mounted in position on the main body (12). In this assembled state, channel-like paint passages (19) are formed between the hub fitting groove (13) and the notched grooves (18), and an annular paint passage (20) is formed between the inner peripheral surface (12F) and the lid portion (15).

Abstract: The invention relates to a nozzle device including a housing (1) having an inlet for a fluid and an orifice for spraying out a firm jet of fluid (38), which orifice is delimited by two or more members, at least one of which is movable relative to the other one between a first position in which the orifice has a minimal cross-section area in order to spray out the fluid in a firm jet in a forward direction from the housing, and a second position in which the orifice is widened in order to be flushed clean by means of a coarse stream of fluid. According to the invention, a cap (2) is arranged in front of the orifice, said cap having two or more shield walls (16, 17) in which there are holes (20, 21) through which the firm jet of fluid (38), but not the coarse stream of flushing fluid, may pass.

Abstract: A non-clog actuator assembly having a flexible face member that flexes away from first and second positive shutoff mating surfaces when product under pressure flows into contact with the flexible face member. The flexible face member then resiliently springs back into abutting, sealing contact with these shutoff mating surfaces. Preferably, the device flexes away from the two shutoff mating surfaces at a predetermined minimum pressure, such as 55 psig, and then flexes back into sealing contact when the product pressure drops below this minimum pressure, thereby controlling the dispensing of the product with a positive shut off (i.e., the product is dispensed in a fairly constant pattern and then shut off rather than being very strong at the beginning of the spraying process and then dribbling out at the end or under low pressure operations).

Abstract: A method and apparatus for cleaning the interior of capillary tubes used to dispense 1 to 100 micron diameter liquid droplets by a piezoelectric transducer surrounding each capillary tube. Magnetic particles are aspirated into the capillary tubes and moved by an exterior magnet to cause deposits on the interior walls to be dislodged and subsequently discharged from the capillary tube. In a preferred embodiment, the magnetic particles are coated with a material capable of binding such deposits, e.g., DNA, RNA, and the like.

Abstract: The spray gun includes a primary port for receiving a primary material such as adhesive or similar materials, for dispensing. The spray gun further includes a secondary port to receive an aerosol-based cleaner which is stored in an aerosol container within the handle of the spray gun. The valves associated with the primary and secondary ports are sequenced such that during ordinary depression of the trigger to apply the primary material, the aerosol-based cleaner is momentarily “poofed” through the nozzle to clean the nozzle prior to the application of the primary material. After the primary material has been applied and the trigger is released, the aerosol-based cleaner is again momentarily “poofed” through the nozzle to clean the nozzle.

Abstract: The present invention is a valve cleaning apparatus and method for transporting a cleaning fluid from a supply tank into the air intake valves of a combustion engine. It comprises housing having a pair of legs and a closed end. The housing has a flow path through the housing. A valve is located collinear with the flowpath. The valve cleaning apparatus also includes tubing, a nozzle and a hook to hang the assembly from the hood of a car.

Abstract: A spray tip assembly for airless paint sprayer guns incorporates a tip having multiple nozzles, each of which may be used independently. For one embodiment of the invention, the shaft of the spray tip assembly incorporates a pair of spaced apart nozzles and a handle at each end, one of which is removable for insertion into a bore of a spray tip assembly housing. The bore that extends through the housing so as to permit the shaft to axially slide between first and second positions, each of which is limited by one of the handles. For a second embodiment of the invention the shaft of the spray tip assembly incorporates multiple spaced apart nozzles and a handle at one end thereof. The shaft also incorporates a spring-loaded detent ball which, in combination with a plurality of spaced-apart annular or semi-annular grooves in the housing bore, serves as a shaft locator for each of the nozzles. The nozzles may be unclogged by reversing them.

Abstract: A cleaning attachment for a spray gun for effectively and efficiently cleaning a paint spray gun after use. The cleaning attachment for a spray gun includes a hose having a first end and a second end; and also includes a lid assembly including a lid having a wall for securely closing a top of a paint container mounted to a spray gun with the lid assembly further having a hose fitting disposed through the wall of said lid and being connected to the hose and with the lid assembly also having a ventilation assembly being securely disposed through the wall of said lid; and further includes hose connectors being securely attached to the first and second ends of the hose.

Abstract: A device for the cleaning of a liquor spray nozzle assembly of a soda recovery boiler which includes a liquor supply conduit (3) inserted through an opening (10) in a wall (11) of the soda recovery boiler, which conduit has a mouth (6) from which a plate (8) for distribution of liquor protrudes, more precisely from a lower part of the mouth. The device comprises a scraper element (2) which is movable reciprocally along side edges on the distributing plate (8) by a power generator (12) mounted in a supporting stand (13). The scraper element (2) comprises a U-shaped clamp (25) with a bottom piece (26) located under the distributing plate (8) as well as two side pieces (27), which are mutually spaced-apart with a distance which in the main corresponds with the width of the distributing plate.

Abstract: A self-cleaning pressure compensating drip emitter for controlling fluid flow through a hole in an irrigation line includes an enclosing sidewall having two ends, and formed with a ledge between the ends. A cover extends from the sidewall to establish an antechamber between the ledge and the cover. An entrance allows fluid from the irrigation line to enter the antechamber with little pressure reduction. An outlet extends into a fluid chamber established between the ledge and the second end of the sidewall. An opening allows pressure reduced fluid from the irrigation line to enter the fluid chamber. A membrane is positioned on the ledge for movement between a flushing configuration at low line pressures and an operational configuration at higher line pressures. In the flushing configuration, the membrane allows fluid to flow from the antechamber to the fluid chamber and through the outlet for flushing the emitter.

Abstract: Clogged openings of a developer dispenser nozzle are unclogged utilizing a pressurized gas, such as nitrogen. An embodiment includes passing a solution of alcohol and water under gas pressure through the developer dispenser nozzle to unclog the nozzle openings.

Abstract: A non-clog actuator assembly having a flexible face member that flexes away from first and second positive shutoff mating surfaces when product under pressure flows into contact with the flexible face member. The flexible face member then resiliently springs back into abutting, sealing contact with these shutoff mating surfaces. Preferably, the device flexes away from the two shutoff mating surfaces at a predetermined minimum pressure, such as 55 psig, and then flexes back into sealing contact when the product pressure drops below this minimum pressure, thereby controlling the dispensing of the product with a positive shut off (i.e., the product is dispensed in a fairly constant pattern and then shut off rather than being very strong at the beginning of the spraying process and then dribbling out at the end or under low pressure operations).

Abstract: A spray dispensing head for a squeeze dispenser is disclosed. The dispensing head includes passageways for directing streams of air and liquid to a mixing chamber wherein the liquid is broken up into droplets and emitted as a fine spray through an orifice. The device includes a valve which is operated by a push-pull motion. When the valve is closed, the liquid is sealed off from the atmosphere, thus preventing drying or contamination of the liquid product.

Abstract: A shower head generally comprising a backing plate, a diaphragm and a cover plate. The rear surface of the backing plate includes a receptacle for receiving a conduit through which pressurized water may be directed to an aperture extending through the backing plate. The front surface of the diaphragm has a plurality of nipples extending outwardly therefrom with each nipple having longitudinal bore extending therethrough. The cover plate has a plurality of holes extending therethrough for receiving the nipples on the diaphragm such that the cover holds the diaphragm against the front surface of the backing plate. Pressurized water delivered through the aperture causes an outward deflection of the diaphragm away from the backing plate allowing water to be expelled through the bores in the nipples.

Abstract: A rotary bell cup for atomizing particulate material such as paint includes a generally conical overflow surface having a generally constant flow angle defining a radially inward central axial opening and a radially outward atomizing edge with a bevel. A central flat portion is disposed between the conical overflow surface and the radially inward central axial opening. A deflector having a deflection surface of generally rotational symmetry is disposed in front of the central opening having a rear flat surface generally parallel to the central portion and a rear conical surface generally parallel to the conical overflow surface.

Abstract: A dispensing machine for the metered delivery of fluid products, especially painting products. The dispensing machine includes a dispensing head with a nozzle, and the ends of a plurality of delivery ducts communicate with the dispensing head in order to feed a plurality of fluid products thereinto. A mixing device, in particular a rotating turbine, is mounted between the ends of the delivery ducts and the dispensing nozzle to continuously mix the fluid products coming from the different delivery ducts and simultaneously entering the dispensing head.

Abstract: A device for mixing and ejecting a multi-component reactive mixture, which will not clog after a single and subsequent uses, is disclosed. The device has a cylindrical mixing space defined by upper, lower, and side walls. There are two entry ports into the mixing space defined by and tangent to the side wall. Two fluid component sources are fluidly connected to the entry ports and are pressurized such that two fluids, which react with each other, separately enter the mixing space. The side wall of the mixing space imparts a rotational motion to the fluids, which causes the fluids to thoroughly mix together before being ejected out through the exit orifice in either a spray or stream form. A valve stem may be provided, which is configured and dimensioned to substantially occupy the mixing space and to seal the two entry ports when it is in the closed position.

Abstract: A system for flushing an airless sprayer essentially reverses operation such that the spray gun is immersed in a container of water or other solvent and that fluid is pulled through the pump and flushed through the normal inlet tube. The preferred embodiment attaches a fluid bar to the front of the spray gun to redirect the fluid for flushing. This reverse flushing action allows quicker flushing using less fluid.

Abstract: Disclosed is a method for servicing a lawn sprinkler head removed from a sprinkler system. Included within a servicing kit is a controller that may be used to regulate the flow of water through the sprinkler head remotely from the sprinkler system, a plug to secure the hole in the sprinkler system from where the sprinkler head was removed, a spacer that may be used to retain the nozzle of the sprinkler head in the deployed position, and a cleaning tool that may be used to dislodge debris from the nozzle water exit perforations. Other features are disclosed.

Abstract: A reversible airless spray tip is provided with a housing for mounting to the front of a spray gun, a sealing saddle insertable into the housing, a seal associated with the saddle and a rotatable cylinder having a handle and containing an airless tip. The cylinder is insertable in the housing and has a protrusion on said cylinder for engaging and releasably retaining said seal for insertion into said housing.

Abstract: A flush plug is provided for temporarily sealing an outlet at an upper end of an irrigation sprinkler riser extensible from an outer housing. A cap is configured to substantially cover the outlet of the riser. The cap has an output orifice dimensioned to reduce the flow of water from the riser a sufficient amount so that the riser will move to an elevated position under normal operating pressure. The cap is configured so that it can be temporarily connected to the upper end of the sprinkler riser. A shut-off flap is pivotally connected to the cap for covering and uncovering the output orifice. A lever is connected to the shut-off flap and is configured and located to engage an upper end of the sprinkler housing when the riser moves to a retracted lowered position. This positively moves the shut-off flap so that it covers the output orifice in the cap. When the riser moves to the elevated position the lever is no longer engaged with the upper end of the sprinkler housing.

Abstract: A rotary bell cup for atomizing particulate material such as paint includes a generally conical overflow surface having a generally constant flow angle defining a radially inward central axial opening and a radially outward atomizing edge with a bevel. A central flat portion is disposed between the conical overflow surface and the radially inward central axial opening. A deflector having a deflection surface of generally rotational symmetry is disposed in front of the central opening having a rear flat surface generally parallel to the central portion and a rear conical surface generally parallel to the conical overflow surface.

Abstract: A manually actuated pump sprayer has a cover on the plunger head which is shifted relative thereto, the cover having an opening for exposing the discharge orifice when relatively shifted. In a non-use condition a portion of the cover side wall fluid tightly seals the orifice closed by engaging a circular seal bead provided on the outer face of the orifice cup concentric with the orifice. The outer face of the orifice cup may be textured to increase the hang time of any residual liquid product at that area which is likewise prevented from drying to avoid clogging by the sealed condition presented between the cover and the circular seal bead in the non-use position.

Abstract: Automated apparatus and method to aid in the servicing of fuel injectors is adapted to be selectively operated in a test mode or a cleaning mode. The test mode senses flow rate through the injector and current draw of the injector solenoid, and provides the operator with visual indication and a printed record of the data. The cleaning mode begins with a testing sequence to record baseline flow and current draw data, cycles through predetermined cleaning steps including flowing a cleaning agent through the injector, checks the flow rate and current draw of the injector during and after the cleaning cycle, and repeats the testing sequence. This testing-cleaning cycle may be repeated until either the injector meets predefined performance criteria or until a pre-selected limit has been reached.

Abstract: An automatic coating apparatus. A rotary atomizing head is washed with the fluid supplied from its front side by a washing nozzle. A coating machine is mounted on a coating robot for moving in arbitrary directions, while an atomizing head washer is located in the vicinity of the coating robot. At the time of a washing operation, the coating robot is actuated to put the rotary atomizing head into a waste liquid collecting container of the atomizing head washer. In this state, thinner is discharged from the washing nozzle toward the front side of the hub member of the rotary atomizing head. Thinner is then allowed to flow into the rotary atomizing head through solvent outlet holes in the hub member to wash off deposited paint from the rotary atomizing head.

Abstract: A shower device having a flexible, flat jet or spray disk is created, in which at least one surface zone is curved outwards and on exceeding a specific pressing in force (E) exerted thereon springs round suddenly with the curvature inwards into a space located behind it and automatically springs back to the starting position when the force is relieved. As a result of the springing or springing round, it is possible to detach lime deposits from the jet disk.

Abstract: A method for powder spray-coating objects utilizes pneumatic conveyance of powder from an injector to a spraying system having a spray coating zone through which objects are consecutively conveyed in an automated system. Power conveyance is interrupted between the consecutive objects as object gaps enter the spray coating zone while the conveying air flow is maintained by injection of controlling air into a vacuum zone of the injector which reduces the injector vacuum to a degree causing interruption of powder conveyance. Flushing compressed air may be injected between the injector and the spray device of the spraying system to automatically flush powder to maintain system integrity. Equipment for powder spray coating of objects utilizing the above method is also disclosed.

Abstract: A sprinkler for watering a fixed spray pattern includes a flow conduit having a nozzle coupled thereto. A filter screen is held in place beneath the nozzle. The filter screen engages against a poppet type valve member of a flow shut off valve to space the valve member away from a valve seat to permit water flow through the flow conduit when the filter screen and nozzle are in place. If the nozzle is removed, the filter screen can move far enough upwardly, or can itself also be removed, that the valve member closes to shut off flow through the flow conduit. The flow shut off valve is located at a fixed distance from a reference point in the top of the flow conduit to permit the same sized screen to open the valve regardless of the overall length of the flow conduit. A flush cap used initially on top of the flow conduit in place of the nozzle, i.e.

Abstract: A suck back valve comprises an ON/OFF valve, a suck back mechanism, a first sensor for detecting a displacement amount of a first diaphragm of the ON/OFF valve, and a second sensor for detecting a displacement amount of a second diaphragm corresponding to a suction amount of a coating liquid. The suck back valve further comprises a control unit for feedback-controlling the valve displacement speed of the ON/OFF valve and the suction amount of the coating liquid on the basis of detection signals obtained by the first sensor and the second sensor respectively.

Abstract: A trigger actuated pump sprayer has a discharge valve assembly located in the discharge barrel of the pump body which includes a filler for reducing the volume of the discharge barrel thereby displacing the air therein whereupon the strokes-to-prime ratio of the pump required during initial pumping for discharging pressurized liquid along the barrel and through the orifice at a nozzle end thereof, is improved. Also the discharge valve assembly may be shiftable along the length of the discharge barrel in response to pressure and return strokes during pumping, a downstream end of the assembly engaging a spin mechanics element at the nozzle end to therewith define a variable volume suction chamber in communication with the discharge orifice for withdrawing product therefrom during each pumping suction stroke.

Abstract: Disclosed is an oil burning system that is capable of burning oils of varying viscosities, including high viscosity waste oils and low viscosity heating oils. Suitable as a new installation or a retrofit modification, the present invention incorporates the use of a variable rate, high-pressure oil delivery system, along with an oil pre-heater, in conjunction with a modified high-pressure atomizing nozzle. Installed in a sliding drawer burner arrangement that allows for quick and easy access, the oil burning system also includes a means by which particulate matter and carbonization build-ups are removed from the burner nozzle automatically, thereby eliminating the need for frequent cleaning.

Abstract: In an asphalt distributor having a tank for holding asphalt and a pump for pumping asphalt from the tank to a spraybar, a self draining asphalt strainer is provided. The asphalt strainer includes a body having an inlet and outlet with a filtering chamber disposed between the inlet and the outlet. A filter or straining element is disposed in the filtering chamber for filtering asphalt flowing between the inlet and the outlet. A conduit extends the inlet into the filtering chamber. A pair of valves are disposed on each end of the conduit forming a suckback chamber therebetween. A suckback tube is connected to the conduit intermediate the valves and extends into the filtering chamber. The pump is bidirectional and has a reverse mode which forces asphalt back through the outlet and inlet into the tank. The strainer has a first flow passage from the outlet to the inlet through both of the valves when open.

Abstract: A shower device having a flexible, flat jet or spray disk is created, in which at least one surface zone is curved outwards and on exceeding a specific pressing in force (E) exerted thereon springs round suddenly with the curvature inwards into a space located behind it and automatically springs back to the starting position when the force is relieved. As a result of the springing or springing round, it is possible to detach lime deposits from the jet disk.

Abstract: A slurry dispenser dispensing slurry by a pair of counter-rotating wheels is provided in a chemical mechanical polishing process used in manufacturing integrated circuits. The slurry dispenser is driven by variable speed motors at a predetermined speed empirically determined to dispense a desired amount of slurry. The shape of the rotating wheels controls the vertical distribution of the spray. Openings in the housing of the slurry dispenser and the speed of rotation of the wheels controls the horizontal distribution of the spray. The slurry dispenser can be constructed out of materials chemically inert with respect to the slurry.

Abstract: A photoresist suck-back device is shown for a photoresist supply apparatus in a semiconductor device manufacturing system which prevents the accumulation of photoresist inside a photoresist spray line. The suck-back device is composed of a suck-back valve which is installed on a photoresist spray line connected to a photoresist supply line of a photoresist supply apparatus. The suck-back valve is constructed of a suction chamber for sucking the photoresist remaining within the photoresist spray line. The suction chamber is shrinkable and has a shape such that the sucked photoresist is not accumulated therein. A control part controls the size of the suction chamber of the suck-back valve through an air line. A cut-off valve is disposed between the photoresist supply line and the photoresist spray line which opens and closes the photoresist supply line under control of the control part through the air line.