Abstract: A nozzle and nozzle head arranged to subject a surface of a substrate to gaseous precursors. The nozzle includes an output face via which the precursor is supplied, a longitudinal precursor supply element for supplying precursor and a longitudinal discharge channel open to and along the output face for discharging at least a fraction of the precursor supplied from the precursor channel. The precursor supply element is arranged to extend inside the discharge channel such that the precursor supply element divides the discharge channel in the longitudinal direction to a first discharge sub-channel and a second discharge sub-channel on opposite sides of the precursor supply element for supplying precursor through the discharge channel.
Type:
Application
Filed:
February 12, 2013
Publication date:
January 1, 2015
Inventors:
Tapani Alasaarela, Pekka Soininen, Mika Jauhiainen
Abstract: A docking system includes basket and wall conduit systems. The basket conduit system includes a conduit and first and second nozzles mounted to opposite ends of the conduit. The second nozzle has a first funnel shape with a first circumference that decreases from an open end of the second nozzle towards the conduit. The wall conduit system includes front and back housings, a sliding plate, and a third nozzle. A sliding aperture is formed through a front plate of the front housing. A nozzle aperture is formed through a back plate of the back housing. The sliding plate slides within a space formed by the front housing and the back housing. The third nozzle is sized and shaped to slide within the sliding aperture and includes a generally cylindrical shape and a second funnel shape with a second circumference that decreases from the sliding plate towards the generally cylindrical shape.
Type:
Application
Filed:
June 24, 2013
Publication date:
December 25, 2014
Inventors:
Thomas Haft, Janusz Sendor, Colin R. Clerkin, Gerry Lippincott, Brian Wylie, Randall Koplin, Stephen Latham, Kent Kallsen
Abstract: The present invention provides a spray nozzle, configured with left and right halves, at least one of the left and right halves being defined with a mating surface in which a recess defining width of a linear opening of the nozzle is defined, each end of the nozzle being mounted with fenders jointly define the linear opening of the nozzle along with the recess, wherein the mating surface in which the recess is defined further includes with a N number of partitions dividing the recess into a N+1 number of individual ejectors, wherein N is a positive integer. The present invention is to divide a single mouth of a spray nozzle of larger dimension into a plurality of individual ejectors with smaller dimension. During the acceleration or reduction of the spray nozzle, each individual ejector will deliver a homogeneous and even quantity of working liquid at central and end portions.
Type:
Application
Filed:
June 27, 2013
Publication date:
December 4, 2014
Inventors:
Hui Chen, Chih-hao Chang, Wen-hua Wang, Chi-che Lin
Abstract: Systems and methods in which the flow of fluid is electrically driven, including electrospinning and electrospraying systems and methods, are generally described.
Type:
Application
Filed:
June 14, 2013
Publication date:
December 4, 2014
Applicant:
Massachusetts Institute of Technology
Inventors:
Luis Fernando Velásquez-García, Philip James Ponce De Leon, Frances Ann Hill
Abstract: In some embodiments, a gas diffuser for use in a mass spectrometer is disclosed that can provide a controlled expansion of an ion-containing gas so as to reduce gas velocity for entry into subsequent stages of the mass spectrometer, e.g., a mass analyzer. In some embodiments, the controlled expansion of the gas is provided by flowing the gas through a channel whose cross-sectional area change, e.g. progressively increases, in the direction of the gas flow so as to provide controlled expansion of the gas.
Abstract: There is provided systems and methods for effective cleaning and drying of vehicles of different shapes and sizes. In an example, a conveyor system may move a vehicle along a path, and a bridge assembly supported above a vehicle is moveable along the length thereof. At least one trolley assembly is moveable in a direction transverse to the movement of the bridge assembly. At least one cleaning arm assembly delivers cleaning fluid to or for brushing the surface of a vehicle. The cleaning arm assembly is moveable in association with movement of the vehicle to position the cleaning arm assembly adjacent at least a portion of the front, sides and rear of the vehicle as it moves along the path. A variable impact or patterning spray arm or drying system is also provided.
Abstract: A nozzle bar (10) comprising a carrier element (12) provided with several slit-shaped fluid channels (20), each associated with a foil (13) having a plurality of nozzle openings (15). In the position of use, the foil (13) is arranged over an input orifice (23) of the associate fluid channel (20) so that its nozzle openings (15) are located inside the contour of its associated fluid entry opening (19). In this position of use, each foil (13) is fastened to a plane attachment surface of the carrier element (12). The attachment surface may be the bottom (26) of a groove-like recess (25) in the carrier element (12). A separate recess (25) is provided for each foil (13). The carrier element (12) can be used for numerous different types of foils. The distance of the nozzle openings (15) of the foil (13), or the size or the form of the nozzle openings (15) may vary among various foil types, without requiring modifications on the carrier element (12).
Type:
Grant
Filed:
September 16, 2010
Date of Patent:
November 11, 2014
Assignee:
Groz-Beckert KG
Inventors:
Reinhold Eydner, Thomas Schmid, Jürgen Spill, Achim Locher
Abstract: A showerhead operable to reduce water consumption configured to detect the presence of an individual within the spray pattern of water exiting the showerhead. The showerhead further includes a housing having an internal volume that is configured to receive and discharge water. A sensor is integrally mounted to the discharge surface of the housing and is operable to detect either the presence or absence of an individual within the spray pattern of water. A valve is disposed within the housing and is operable to control the water volume exiting the housing. The showerhead being operable to discharge substantially all of the water volume available thereto upon the detection of an individual within the spray pattern and further being operable to discharge a water volume that is less than the water volume available thereto to upon detection of an absence of an individual within the spray pattern.
Abstract: A device is provided for performing chemical transformation in a fluid, with a flow distributor having at least one fluid medium inlet, at least one fluid medium outlet, and at least one confinement wherein the chemical transformation is performed; and a means for rotating, rocking, wagging, or oscillating the device. At least one confinement may be equipped with a provision for providing heat, cooling, sound, light or other types of radiation, such provision being contacted to an external source through an actuator shaft. The flow distributor may be provided with sectors connected with the centrally located fluid medium inlet and a designated peripheral fluid medium outlet. The means for rotating, rocking, wagging, or oscillating the device may be an element producing magnetic fields or a shaft mechanically connected to an external actuating device.
Type:
Application
Filed:
July 9, 2014
Publication date:
October 30, 2014
Applicant:
NORDIC CHEMQUEST AB
Inventors:
Jonas PERSSON, Kjell OBERG, Fredrik ALMQVIST, Knut IRGUM
Abstract: A nozzle plate and an atomizing module using the nozzle plate are disclosed. The atomizing module is installed at a cavity and includes a piezoelectric circular plate, a braking circular plate and a nozzle plate. The braking circular plate is installed on a side of the piezoelectric circular plate. The nozzle plate is a circular disc clamped between the piezoelectric circular plate and the braking circular plate, and the nozzle plate includes firing holes and first protrusions. Each first protrusion is non-circular and protruded in a direction towards the piezoelectric circular plate or the braking circular plate to form a multi-curved surface structure radially or circularly arranged into a specific geometric pattern. The nozzle plate can increase the atomizing area, atomizing quantity and liquid-gas exchange rate to prevent excessive stresses from concentrating at the center of the nozzle plate or vibrations from cracking or breaking the nozzle plate.
Abstract: A water delivery device that may be used in a water display is described. The device includes an orifice or outlet through which water is shot out. The shape and configuration of the water device may be varied to dynamically adjust the configuration of the water shot out from the device. For example, the water delivery device may shoot out water in the shape of a fan, and the width of the fan may be varied.
Type:
Application
Filed:
March 14, 2014
Publication date:
October 23, 2014
Inventors:
Mark Fuller, Jim Doyle, Keith Kalis, Amnon Talmor
Abstract: The invention relates to a dispensing module (1) for an applicator head for dispensing a fluid, in particular hot-melt adhesive, comprising a module housing (5), a valve body accommodated in the module housing (5), an adapter (7) through which the valve body extends, comprising a proximal end (49) and a distal end (41), the distal end (41) being connected by means of a screw connection (51) to the module housing (5), a nozzle holder (9) which is adapted to be inserted into a matching recess in a base member of the applicator head, and one or a plurality of sealing elements (57, 59, 61) for sealing the nozzle holder (9) and the base member against each other in a fluid-tight manner.
Abstract: A shower head includes a gas injection plate and a gas supply unit. The gas supply unit has a first gas supply path provided in a region along the axis and a second gas supply path provided in a region surrounding the region where the first gas supply path is provided. The first gas supply path has a first gas diffusion space connected to a first gas line of the gas supply unit, second gas lines, a second gas diffusion space, third gas lines and a third gas diffusion space which are connected in that order. The second gas supply path has a fourth gas diffusion space connected to a fourth gas line of the gas supply unit, fifth gas lines, a fifth gas diffusion space, sixth gas lines, and a sixth gas diffusion space which are connected in that order.
Abstract: A spray device and system for delivering a cosmetic composition to a user. The system includes an enclosure booth with an open front, a spray bar with a plurality of spray nozzles configured to deliver a constant volume of cosmetic composition to a user, and a set of heaters designed to deliver warm air to a user during the spray cycle.
Abstract: [Object] To provide a gas nozzle which meets a requirement to suppress the fall of particles. [Solution] A gas nozzle 4 according to an aspect of the present invention includes a columnar main body 13 formed of a ceramic sintered body provided with a through-hole 12 formed therein through which a gas flows, an exhaust port 15 of the through-hole 12 for the gas is formed in one end surface S1 of the main body 13, and the mean width of the profile elements (Rsm) of the one end surface S1 is 5 times or more the average crystalline grain diameter of the ceramic sintered body.
Abstract: A shower head with an auto-locking cover includes a body unit, a rotation support seat, a seal seat and a cover unit. The seal seat is fixedly connected to an underside of the body unit. The rotation support seat is secured through the body unit and the seal seat. The rotation support seat is formed with an insertion hole and an engaging step. The cover unit is formed with a hook corresponding to the insertion hole and the engaging step. The cover unit is mounted to an underside of the rotation support seat. The rotation support seat is further formed with an elastic piece. The cover unit is formed with an engaging recess corresponding to the elastic piece. By turning the rotation support seat, the elastic piece is engaged in the engaging recess so that the cover unit is connected to the underside of the rotation support seat.
Abstract: A multi-chambered processing platform includes one or more multi-mode plasma processing systems. In embodiments, a multi-mode plasma processing system includes a multi-mode source assembly having a primary source to drive an RF signal on a showerhead electrode within the process chamber and a secondary source to generate a plasma with by driving an RF signal on an electrode downstream of the process chamber. In embodiments, the primary 7 source utilizes RF energy of a first frequency, while the secondary source utilizes RF energy of second, different frequency. The showerhead electrode is coupled to ground through a frequency dependent filter that adequately discriminates between the first and second frequencies for the showerhead electrode to be RF powered during operation of the primary source, yet adequately grounded during operation of the secondary plasma source without electrical contact switching or reliance on physically moving parts.
Type:
Application
Filed:
May 13, 2013
Publication date:
September 18, 2014
Inventors:
Sergey G. BELOSTOTSKIY, Alexander MARCACCI, Kartik RAMASWAMY, Srinivas D. NEMANI, Andrew NGUYEN, Yogananda SARODE
Abstract: Embodiments of the invention generally relate to a quartz showerhead having an aerosol-deposited yttria coating thereon. The yttria coating is sprayed on the quartz surface of the showerhead through a high pressure nozzle in a vacuum chamber. The yttria coating is transparent in the UV wavelength range, and allows the passage of UV light therethrough. The yttria coating erodes significantly slower than quartz in the presence of a cleaning gas, and thus extends the life of the quartz showerhead while facilitating the transmittance of UV light through the showerhead.
Type:
Application
Filed:
February 6, 2014
Publication date:
September 18, 2014
Inventors:
Ren-Guan DUAN, Juan Carlos ROCHA- ALVAREZ
Abstract: An injection nozzle for the direct injection of a liquid fuel into a cylinder chamber of a piston engine includes multiple spray holes for generating injection jets. The multiple spray holes are distributed on a nozzle body of the injection nozzle in the peripheral direction. At least one pair of spray holes adjoining in the peripheral direction is provided, the longitudinal center axes of which enclose a pair angle in the peripheral direction that is smaller than an adjacent angle which is enclosed between the longitudinal center axis of the respective spray hole of the spray hole pair in the peripheral direction and a longitudinal center axis of a spray hole adjoining the spray hole pair in the peripheral direction.
Type:
Application
Filed:
November 9, 2012
Publication date:
September 11, 2014
Applicant:
Daimler AG
Inventors:
Tobias Boecking, Harald Echtle, Thorsten Hergemoeller, Lothar Herrmann, Klaus Roessler
Abstract: An exemplary faceplate may include a conductive plate defining a plurality of apertures. The faceplate may additionally include a plurality of inserts, and each one of the plurality of inserts may be disposed within one of the plurality of apertures. Each insert may define at least one channel through the insert to provide a flow path through the faceplate.
Abstract: The present invention is generally directed to a system for controlling placement of nanoparticles, and methods of using same. In one illustrative embodiment, the device includes a substrate and a plurality of funnels in the substrate, wherein each of the funnels comprises an inlet opening and an elongated, rectangular shaped outlet opening. In one illustrative embodiment, the method includes creating a dusty plasma comprising a plurality of carbon nanotubes, positioning a mask between the dusty plasma and a desired target for the carbon nanotubes, the mask having a plurality of openings extending therethrough, and extinguishing the dusty plasma to thereby allow at least some of the carbon nanotubes in the dusty plasma to pass through at least some of the plurality of openings in the mask and land on the target.
Type:
Application
Filed:
May 23, 2014
Publication date:
September 11, 2014
Applicant:
Micron Technology, Inc.
Inventors:
Krupakar M. Subramanian, Neal R. Rueger, Gurtej S. Sandhu
Abstract: In accordance with the present invention, there is provided a multi-spindle spray nozzle assembly for a steam desuperheating or attemperator device. The nozzle assembly features a nozzle holder which accommodates two small, spring-loaded nozzles, each of which is adapted to produce a spray pattern of reduced cone angle (e.g., approximately 60°) in comparison to currently know nozzle designs. The two nozzles are positioned within the nozzle holder such that they diverge from the axis thereof as allows the spray pattern generated thereby to be effectively tilted into the flow of steam within a desuperheating device having the nozzle assembly interfaced thereto.
Abstract: Embodiments of the present invention generally provide apparatus and methods for supporting a gas distribution showerhead in a processing chamber. In one embodiment, a gas distribution showerhead for a vacuum chamber is provided. The gas distribution showerhead comprises a body having a first side and a second side opposite the first side, and a plurality of gas passages formed through the body, the gas passages comprising a first bore formed in the first side that is fluidly coupled to a second bore formed in the second side by a restricting orifice, and a suspension feature formed in the first bore of at least one of the gas passages.
Type:
Application
Filed:
May 12, 2014
Publication date:
September 4, 2014
Applicant:
APPLIED MATERIALS, INC.
Inventors:
Robin L. TINER, Soo Young CHOI, Qunhua WANG, Jrjyan Jerry CHEN
Abstract: A device for distributing a fluid in a controlled manner, in particular for distributing a gas loaded with particles, the device comprising a pipe (1) provided with at least one inlet orifice (2) and with a series of outlet orifices (3) spread along the pipe (1) and cut in a side wall of this pipe, wherein at least one section (4) of the side wall, located downstream of at least one outlet orifice and limited by a section (5) of the edge of the outlet orifice (3), has a concave shape such that this section (5) of the edge of such outlet orifice (3) is positioned inside the pipe so that, when the device is in service, the flow direction of a fluid exiting such outlet orifice (3) and travelling along such deformed concave wall section (4) of the edge of this outlet orifice (3) is controlled by the shape of such section (5) of the edge.
Type:
Application
Filed:
May 15, 2014
Publication date:
September 4, 2014
Applicant:
SOLVAY SA
Inventors:
Thierry CARTAGE, Olivier Jacques F.J.G. BODSON, Marc THIJSSEN
Abstract: A multiple nozzle differential fluid delivery head is disclosed. The fluid delivery head includes a body that defines a fluid chamber having a longitudinal axis. The body includes an inlet for connection to a fluid source, and the inlet is in fluid communication with the fluid chamber. The fluid delivery head includes a plurality of outlet ports connected to and extending away from the body. Each outlet port has an interior space in fluid communication with the fluid chamber. The fluid delivery head includes a nozzle insert removably secured in an outer end of each outlet port. At least one nozzle insert has a fluid delivery aperture in fluid communication with the interior space of its associated outlet port for delivering fluid out of the interior space of its associated outlet port. One or more of the outlet ports is angled away from a plane normal to the axis of the fluid delivery head.
Type:
Grant
Filed:
June 26, 2013
Date of Patent:
September 2, 2014
Assignee:
S.C. Johnson & Son, Inc.
Inventors:
Michael M. Sawalski, Michael J. Skalitzky, Nitin Sharma, Padma Prabodh Varanasi, Yong Chen, Allen D. Miller
Abstract: Provided is a substrate treatment apparatus. The apparatus includes a chuck supporting a substrate and being rotatable, a container surrounding the chuck and collecting chemicals scattered due to rotations of the substrate, and a first spray nozzle spraying the chemicals to the substrate.
Abstract: A showerhead assembly for a substrate processing system includes a back plate connected to a gas channel. A face plate is connected adjacent to a first surface of the back plate and includes a gas diffusion surface. An electrode is arranged in one of the back plate and the face plate and is connected to one or more conductors. A gas plenum is defined between the back plate and the face plate and is in fluid communication with the gas channel. The back plate and the face plate are made of a non-metallic material.
Type:
Application
Filed:
April 8, 2013
Publication date:
August 28, 2014
Applicant:
Novellus Systems, Inc.
Inventors:
Mohamed Sabri, Edward Augustyniak, Douglas L. Keil, Ramkishan Rao Lingampalli, Karl Leeser, Cody Barnett
Abstract: An apparatus that uses an optimized body design incorporating one or more interchangeable nozzle inserts with a wide array of discharge orifice sizes, configurations and spacings to efficiently and effectively deliver a pressurized, high velocity, laminar flow air stream to dry, cool, or clean objects that are either stationary or moving transversely through the optimized air stream developed by the apparatus, all while minimizing the operational downtime required to implement the interchangeable nozzle insert modifications to the apparatus.
Type:
Grant
Filed:
April 28, 2011
Date of Patent:
August 26, 2014
Assignee:
Maxum LLC
Inventors:
James Lawrence Freers, James Michael Pankey
Abstract: There is provided systems and methods for effective cleaning and drying of vehicles of different shapes and sizes. In an example, a conveyor system may move a vehicle along a path, and a bridge assembly supported above a vehicle is moveable along the length thereof. At least one trolley assembly is moveable in a direction transverse to the movement of the bridge assembly. At least one cleaning arm assembly delivers cleaning fluid to or for brushing the surface of a vehicle. The cleaning arm assembly is moveable in association with movement of the vehicle to position the cleaning arm assembly adjacent at least a portion of the front, sides and rear of the vehicle as it moves along the path. A variable impact or patterning spray arm or drying system is also provided.
Abstract: A purge ring for providing a gas to a wafer processing chamber includes an inlet ring wall defining a ring hole space. An outer perimeter of the inlet ring wall is elliptical. An outer perimeter of the ring hole space is circular. The inlet ring wall is a continuous structure surrounding the ring hole space. An inlet baffle formed within the inlet ring wall surrounds at least 180 degrees of the outer perimeter of the ring hole space. An inlet plenum arranged in a first end of the inlet ring wall provides the gas to the ring hole space through the inlet baffle. An exhaust channel is formed within the inlet ring wall in a second end of the inlet ring wall. An exhaust outlet hole arranged in the second end of the inlet ring wall exhausts the gas out of the ring hole space via the exhaust channel.
Type:
Application
Filed:
April 24, 2014
Publication date:
August 21, 2014
Applicant:
Novellus Systems, Inc.
Inventors:
Eugene SMARGIASSI, Stephen Yu-Hong LAU, George D. KAMIAN, Ming XI
Abstract: Embodiments of a gas distribution plate for distributing gas in a processing chamber are provided. In one embodiment, a gas distribution plate includes a diffuser plate having an upstream side and a downstream side, and a plurality of gas passages passing between the upstream and downstream sides of the diffuser plate. At least one of the gas passages has a cylindrical shape for a portion of its length extending from the upstream side and a coaxial conical shape for the remainder length of the diffuser plate, the upstream end of the conical portion having substantially the same diameter as the cylindrical portion and the downstream end of the conical portion having a larger diameter.
Type:
Application
Filed:
April 24, 2014
Publication date:
August 21, 2014
Inventors:
Soo Young CHOI, John M. WHITE, Robert I. GREENE
Abstract: Embodiments disclosed herein provide devices having a nozzle die with one or more nozzles, each of which has one or more integrated skimmers. The use of an integrated nozzle/skimmer structure allows for higher-resolution printing in OVJP-type deposition techniques without requiring the use of a shadow mask by allowing for a relatively narrow organic material beam that can be placed at relatively high distances away from the substrate.
Type:
Application
Filed:
May 17, 2013
Publication date:
August 21, 2014
Inventors:
Gregory McGraw, Paul E. Burrows, Siddharth Harikrishna Mohan
Abstract: An apparatus for use with radical sources for supplying radicals during semiconductor processing operations is provided. The apparatus may include a stack of plates or components that form a faceplate assembly. The faceplate assembly may include a radical diffuser plate, a precursor delivery plate, and a thermal isolator interposed between the radical diffuser plate and the precursor delivery plate. The faceplate assembly may have a pattern of radical through-holes with centerlines substantially perpendicular to the radical diffuser plate. The thermal isolator may be configured to regulate heat flow between the radical diffuser plate and the precursor delivery plate.
Type:
Application
Filed:
July 3, 2013
Publication date:
August 21, 2014
Inventors:
Patrick G. Breiling, Bhadri N. Varadarajan, Jennifer L. Petraglia, Bart J. van Schravendijk, Karl F. Leeser, Mandyam Ammanjee Sriram, Rachel E. Batzer
Abstract: A gasification inlet (2) comprising: an annular manifold having a frame (4) supporting a radially inner wall formed by a first annulus of fire bricks (6) and supporting an upper wall formed by a second annulus of fire bricks (8), the upper wall and/or the inner wall being provided with fluid flow openings (16a, 16b).
Type:
Application
Filed:
July 9, 2012
Publication date:
August 21, 2014
Applicant:
NEW EARTH ADVANCED THERMAL TECHNOLOGIES LIMITED
Abstract: The invention relates to a gas distributor for a CVD reactor having at least two separate gas distribution chambers (10, 20), into each of which a process gas can be fed through an infeed opening (2, 3), a gas distribution device disposed in a top plane being in each case flow-connected to connecting channels (13, 23) disposed in a bottom plane, the connecting channels (13, 23) associated with different gas distribution chambers (10, 20) lying alternately adjacent to one another and having gas outlet openings (14, 24) for the process gases to escape.
Type:
Application
Filed:
February 14, 2014
Publication date:
August 21, 2014
Inventors:
Thomas Krücken, Baskar Pagadala Gopi, Martin Dauelsberg
Abstract: A fluid delivery device is provided for applying fluid to an object, including a spray head, a fluid conduit connected to the spray head, and a driver for moving the spray head into a spray position relative to the object, wherein the spray head includes a support arm, the support arm including at least a flexible section, an actuator to cause fluid to be sprayed via the spray head, and a control mechanism that ensures that a) the spray head is moved by the driver substantially to an area of the object to be sprayed, b) the fluid is supplied to the spray head once the spray head is in position, and the fluid device actuated, and c) the spray head is withdrawn from position after spray has been supplied to the object.
Abstract: A pesticide delivery system integrated into an overflow drain system of a bathtub, a sink, or any other water-retaining basin. The pesticide delivery system includes a pesticide intake segment passing through a transition passage, wherein the transition passage is formed through a wall of a section of the overflow drain system. A fluid retentive seal is located between an exterior of the pesticide intake segment and the overflow conduit wall. A pesticide distribution conduit extends from a distribution end of the pesticide intake segment to a termination end. Pesticide can be discharged through a pesticide delivery port located at an end of the pesticide distribution conduit or through a plurality of pesticide distribution ports spatially located along the pesticide distribution conduit. A plurality of pesticide distribution continuation conduits can be in fluid communication with the pesticide distribution conduit to distribute the pesticide along various directions and locations.
Abstract: A showerhead contains a chamber in connection with a connecting nozzle, said chamber from which the water is discharged from plurality of nipples formed on a membrane formed out of elastomeric material. The nipples feature a duct for the shower water. The nipples penetrate through openings of a perforated disc through the openings slightly larger than the outside diameter of the nipple. By shifting the perforated disc in a plane parallel to the membrane featuring the nipples, the direction of the nipple and thus the direction of the water jets discharged from the nipples will be changed. This adjustment can occur in two directions that are perpendicular to one another. The membrane is preferably approximately plane in shape, so that a front surface of the showerhead is likewise plane in shape.
Abstract: A combustor nozzle includes a downstream surface having an axial centerline. A plurality of passages extend through the downstream surface and provide fluid communication through the downstream surface. A plurality of slits are included in the downstream surface, and each slit connects to at least two passages. A method for modifying a combustor nozzle includes machining a plurality of slits in a downstream side of a body. The method further includes connecting each slit to at least two passages that pass through the body.
Type:
Grant
Filed:
June 6, 2011
Date of Patent:
August 5, 2014
Assignee:
General Electric Company
Inventors:
Patrick Benedict Melton, Scott Robert Simmons, Russell DeForest, Donald Mark Bailey
Abstract: An adjustable nozzle assembly for a sieve box and a sieve box including same, including a support assembly and nozzles. A pair of elongated support members may be received through openings in support collars. Nozzles may be operatively connected to the collars. The support assembly, which may include collars and rods, are configured to provide at least one of lateral movement and rotational movement of the nozzles. At least one of the first elongated support member and the second elongated support member may be configured to move when coupled to the sieve box to adjust a spray angle of the nozzles. Pivoting of the one rod about the other rod adjusts the angle at which the nozzles are disposed. The rods may be externally threaded, and the collars may be internally threaded, such that when the rods are rotated, the collars translate laterally along the rods to move the nozzles.
Type:
Application
Filed:
January 29, 2014
Publication date:
July 31, 2014
Applicant:
Bilfinger Water Technologies, Inc.
Inventors:
Charles H. Flansburg, Michael Richard Ekholm, Steven Douglas Dehn, Dean Brabec, Michael Hans Pierotti
Abstract: Embodiments of showerheads having a detachable gas distribution plate are provided herein. In some embodiments, a showerhead for use in a semiconductor processing chamber may include a base having a first side and a second side; a gas distribution plate disposed proximate the second side of the base; a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the base; and a thermal gasket disposed between the base and gas distribution plate.
Type:
Application
Filed:
March 15, 2013
Publication date:
July 31, 2014
Inventors:
DMITRY LUBOMIRSKY, VLADIMIR KNYAZIK, HAMID NOORBAKHSH, JASON DELLA ROSA, ZHENG JOHN YE, JENNIFER Y. SUN, SUMANTH BANDA
Abstract: Methods of determining a first position at which a dispersed phase droplet wets a surface of a channel are provided herein. The methods include immersing the dispersed phase droplet in a continuous phase fluid, wherein the continuous phase fluid is immiscible with the dispersed phase droplet, subsequently flowing the dispersed phase droplet in the continuous phase through the channel at a dispersed phase droplet velocity, wherein the dispersed phase droplet is separated from the surface by a film of the continuous phase fluid having a film thickness, and reducing the film thickness to rupture the film at the first position, wherein the droplet wets the surface at the first position.
Type:
Application
Filed:
September 28, 2012
Publication date:
July 31, 2014
Applicant:
The University of British Columbia
Inventors:
Carl Lars Genghis Hansen, Kaston K. Leung, Timothy Leaver, Hans Zahn
Abstract: Device for distributing a fluid in a controlled manner, in particular for distributing a gas loaded with particles, the device comprising a pipe (1) provided with at least one inlet orifice (2) and with a series of outlet orifices (3) spread along the pipe (1) and cut in the side wall of this pipe, characterized in that at least one section (4) of the wall, located downstream of at least one outlet orifice and limited by a section (5) of the edge of this orifice, has a shape such that this section of the edge of this orifice is positioned inside the pipe so that, when the device is in service, the flow direction of the fluid exiting this orifice and travelling along said wall section is controlled by the shape of the latter section.
Type:
Grant
Filed:
October 30, 2009
Date of Patent:
July 8, 2014
Assignee:
Solvay (Societe Anonyme)
Inventors:
Thierry Cartage, Olivier Jacques F. J. G. Bodson, Marc Thijssen
Abstract: A shower head includes a shell, a positioning base, a plurality of water spraying heads, a plastic piece, a metal cover and a handle set. The positioning base has a flat board and a hanging base having an elongated hole at center thereof, and a plurality of hanging slots are circularly disposed at the periphery of the flat board. The water spraying head engages with several hanging slots so as to evenly circularly dispose at the flat board. The plastic piece is formed by injection molding and a through hole is formed at center thereof. The metal cover is made by copper, surface of which has a plurality of cover through holes. The handle set has a control unit, and a connecting rod eccentrically protrudes out from one end of the control unit, and the other end is provided for a nut to lock and engage with a movable handle.
Abstract: A showerhead electrode assembly for a plasma processing apparatus is provided. The showerhead electrode assembly includes a first member attached to a second member. The first and second members have first and second gas passages in fluid communication. When a process gas is flowed through the gas passages, a total pressure drop is generated across the first and second gas passages. A fraction of the total pressure drop across the second gas passages is greater than a fraction of the total pressure drop across the first gas passages.
Type:
Application
Filed:
March 5, 2014
Publication date:
July 3, 2014
Applicant:
Lam Research Corporation
Inventors:
Jason Augustino, Anthony de la Llera, Allan K. Ronne, Jaehyun Kim, Rajinder Dhindsa, Yen-Kun Wang, Saurabh J. Ullal, Anthony J. Norell, Keith Comendant, William M. Denty, JR.
Abstract: A silicon nozzle plate has excellent liquid resistance on an inner surface of a nozzle opening and a discharge surface. A plurality of the nozzle openings are disposed in a silicon substrate of the nozzle plate. A tantalum oxide film formed by atomic layer deposition is disposed on both surfaces of the silicon substrate and the inner surface of the nozzle opening.
Abstract: An injector for forming films respectively on a stack of wafers is provided. The injector includes a plurality of hole structures. Every adjacent two of the wafers have therebetween a wafer spacing, and each of the wafers has a working surface. The hole structures respectively correspond to the respective wafer spacings. The working surface and a respective hole structure have therebetween a parallel distance. The parallel distance is larger than a half of the wafer spacing. A wafer processing apparatus and a method for forming films respectively on a stack of wafers are also provided.
Abstract: A nozzle for dispensing water from an appliance is provided. The nozzle decreases the velocity of water flow so as to reduce or eliminate water splashing out of a consumer's container during dispensing while still providing a rate of flow sufficient to timely fill the container. The nozzle also retains sufficient capillary action so as to reduce or eliminate water draining from the dispenser after the consumer has removed the container. Additional aesthetic features may also be provided in certain exemplary embodiments.
Abstract: An apparatus includes a gas dispersal plate and an adapter structure. The gas dispersal plate has a plurality of gas dispersion orifices, wherein one or more of the gas dispersion orifices have a first portion with a first cross-section configured to allow entry of gas and a second portion having a second cross-section configured to allow exit of gas, the first cross-section being smaller than the second cross-section.
Abstract: A showerhead including a fluid connector configured to be threadedly coupled to a shower arm, and an outer shell receiving the fluid connector. A rotational stop or drive member is operably coupled between the fluid connector and the outer shell and is configured to limit relative rotation between the fluid connector and the outer shell.
Type:
Application
Filed:
November 22, 2013
Publication date:
June 5, 2014
Applicant:
Masco Corporation of Indiana
Inventors:
Todd Andrew Huffington, Anthony G. Spangler