Abstract: At least one exemplary embodiment is directed to a sensor for measuring the distance between the sensor and a measuring surface, which includes a light-emitting element and a plurality of light-receiving elements. The light-receiving elements are arranged so that the light axes thereof do not cross one another.

Abstract: A typical use of linear or two dimensional spectrometers is to expose the detector area, and then shift the photo-electric charges out of the device in a serial fashion. If the illuminating signal is spatially narrow relative to the size of the array, this will drive down the percent of the detector that is utilized, as only a relatively small number of pixels are used to detect the beam. The present invention proposes a method which capitalizes on this spatial under-utilization, and alters the clocking scheme to maximize the read-out speed of the pixels containing signal information. This type of clocking scheme raises the optical power saturation level of the spectrometer. Such an improvement in optical power handling is beneficial for spectrometer based detection of resonant waveguide grating biochemical binding, since in such systems the performance is frequently limited by spectrometer saturation.

Abstract: A focus control method able to further correctly control a focal point of an optical system or optical apparatus. A reference system of the system as a whole is set by using a reference pattern for focal point control. A focal point of an optical apparatus for inspecting a sample or measuring a physical quantity of the sample and the focal point of an auto-focus mechanism are matched with the reference system. Then, a displaced object of the auto-focus mechanism is set on a sample surface, a displacement amount of the sample surface from a reference point is measured, and the focal point of an object lens of the optical apparatus is controlled by using the displaced point as an operation point of the control of the auto-focus mechanism. When setting the reference system, the focus is judged by utilizing the Becke effect for the reference pattern.

Abstract: A surface inspection of the system applies a first oblique illumination beam and may also apply a second illumination beam to illuminate a surface either sequentially or simultaneously. Radiation reflected or scattered is collected by preferably three collection channels and detected by three corresponding detector arrays, although a different number of channels and detector arrays may be used. One or both illumination beams are focused to a line on the surface to be inspected and each line is imaged onto one or more detector arrays in the up to three or more detection and collection channels. Relative motion is caused between the lines and the surface inspected in a direction perpendicular to the lines, thereby increasing throughput while retaining high resolution and sensitivity. The same detection channels may be employed by detecting scattered or reflected radiation from both illumination beams. Fourier filters may be employed to filter out diffraction at one or more different spatial frequencies.

Abstract: An inspection system for inspecting a sheet of glass comprises an illumination module, a collimating lens system, a telecentric imaging lens system and a Time Delay Integration line-scan camera. The illumination module has a low coherence light source emitting light. The collimating lens system has a focal point on the main axis thereof on which focal point its light source is located. The collimating lens system produces a collimated sheet of light from the emitted light. This collimated sheet of light passes through the sheet of glass. The telecentric imaging lens system concentrates the sheet of light passed through the sheet of glass on an image formation plane. The Time Delay Integration line-scan camera is positioned in a general area of the image formation plane. The camera is equipped with an antiblooming device. In another embodiment, an inspection system for inspecting a sheet of glass comprises a camera and a peripheral RDF illumination module.

Abstract: The present invention provides an equipment for measuring the vertical distance or pitch between a plurality of thin substrates inside a container body, including an optical component to transmit a light beam to a thin substrate in the container body and receive light beam reflected from the thin substrate, a scanning device to drive the optical component to move along vertical direction of the thin substrates for measuring the vertical distance or pitch between the plurality of thin substrates in the container body, and a rotation base to carry and rotate the container body to a plurality of angles for the plurality of thin substrates inside the container body to be measured from different angular positions.

Abstract: In order to calculate a threshold value for a detection signal output from an optical sensor in accordance with a state of a target object in a liquid ejecting apparatus, the optical sensor includes a light emitting element operable to irradiate the detected object and a light receiving element operable to detect a light amount which varies in accordance with the state of the target object. The detection signal is output from the optical sensor, based on the detected light amount. A level of the detection signal is adjusted so as to fall within a prescribed range. The threshold value is calculated based on the adjusted level of the detection signal.

Abstract: An optical sensor includes at least one light emitting unit that emits a light, a first light receiving unit that receives specular reflection light from an illumination object when the light is incident on the illumination object with an incidence angle and specularly reflected with a reflection angle, and a second light receiving unit that receives diffuse reflection light from the illumination object when the incident light is diffusely reflected at the illumination object. The sum of the incident angle and the reflection angle is 25 degrees or less.

Abstract: In the present invention, an image pickup device moving by drive of a drive unit picks up an image of a substrate on a mounting table. The drive unit is controlled by a driving signal from a first controller. The driving signal outputted to the first controller is outputted also to a second controller, so that the second controller controls the image pickup device based on the driving signal. The movement of the image pickup device itself is synchronized with the image pickup by the image pickup device. According to the present invention, at the time when the mounting table mounting the substrate thereon and the image pickup device are relatively moved to capture the image of the substrate, a precise image without image distortion can be captured for accurate inspection.

Abstract: Reflective optical sensors. A reflective optical sensor for sensing the presence of an object can include a reflective sensor package having a first cavity and a second cavity. The first and second cavities can be located side-by-side in the sensor package. A vertical cavity surface emitting laser (VCSEL) can be located within the first cavity for producing an optical emission. An optical receiver can be located within the second cavity and configured to receive at least a portion of the produced optical emission that is reflected from the object such that when the reflected emission is above a threshold strength the object is determined to be present. The optical receiver can be a shunt phototransistor and can include reverse bias protection.

Abstract: The invention relates to a system, method and device for evaluating imperfections in a lens for a display for an electronic device. For the device, it comprises: a substrate; and a pattern imposed on the substrate. For the pattern, when the pattern is viewed through the lens, the pattern is noticeably distorted around an area where a defect is present in the lens. For the system, it comprises: an evaluation table for the lens, the table having a mounting area; and a substrate for mounting on the mounting area, the substrate having a pattern imposed thereon wherein when the pattern is viewed through the lens, the pattern is noticeably distorted around an area where a defect is present in the lens.

Abstract: An apparatus for detecting overlapping flat objects, wherein each object has flat sides and narrow sides, includes a doubles detector configured to derive at least one feature of an object, a first imaging unit configured to produce an electronic image of a first flat side of the object, and a second imaging unit configured to produce an electronic image of a second flat side of the object. A determination facility of the apparatus is coupled to the first imaging unit and the second imaging unit to receive the electronic images, and to derive at least one further feature of the object. Further, a decision facility of the apparatus is coupled to the doubles detector and the determination facility to receive the least one feature and the at least one further feature of the object, and to determine whether the object is a single object or a number of objects.

Abstract: A device for optoelectronic monitoring of an object (26) contains a transmitting unit (12) and a receiving unit (14) that are located in a housing (10) covered by a faceplate (16). The transmitting unit (12) emits light beams (24) in a structured illuminating pattern. The illuminating pattern of the illuminated object (26) is recorded on an image recorder (28) by the receiving unit (14). Soiling (38) on the faceplate (16) is indicated by recording the light beams (24) diffusely scattered at the faceplate (16) on the image recorder (28).

Abstract: A validating machine 30 according to the present invention is provided with a validation sensor 2 having a first-side light emitting device 8 and a first-side light receiving device 10 disposed closely to each other and a validation sensor 2? having a second-side light emitting device 8? and a second-side light receiving device 10? disposed closely to each other so that the validation sensor 2 and the validation sensor 2? are disposed opposite to each other on a first side and on a second side of a bill 4. The first-side light emitting device 8 and the second-side light emitting device 8? are controlled so as to emit light at their respective emission timings different from each other.

Abstract: A document original size detecting device has a plurality of sensors each including a light emitting portion and a light receiving portion and respectively disposed as corresponding to different sizes of document originals to be placed on a transparent document platen and a detecting section which determines a document original size based on outputs of the sensors. The light emitting portion of each of the sensors emits light to illuminate at least two positions on a document placing region of the document platen on which a document original to be subjected to size detection is placed, and the detecting section determines the document original size based on whether or not the light receiving portion of each of the sensors detects the document original blocking the light in at least one of the two positions.

Abstract: A paper sheets feature detector 20, through which a banknote 21 is carried and passed is provided with a carrying-in sensor part 22, a transmissive and reflective line light sensor 23, a magnetic sensor 24, a thickness sensor 27, and a carrying-out sensor part 28. When a watermark part of the banknote 21 is measured by the line light sensor 23, a watermark pattern is detected by a light transmissive sensor, and that pattern is not detected by a light reflective sensor, the banknote 21 is determined to be a true banknote. Watermark braille is similarly processed. When the thread is detected by the light transmissive sensor and the thread is not detected by the light reflective sensor, the banknote 21 is determined to be a true banknote.

Abstract: This application describes, among others, wafer designs, testing systems and techniques for wafer-level optical testing by coupling probe light from top of the wafer.

Abstract: A reflection type optical sensor can include a light emitting and receiving unit. The light emitting and receiving unit can include both a light emitting unit and a light receiving unit having light receiving sensitivity to light emitted from the light emitting unit. The light emitting unit and the light receiving unit can be arranged such that the optical axis of the light emitting unit intersects at a predetermined angle with the optical axis of the light receiving unit. The light emitting and receiving unit can be movably supported.

Abstract: The invention relates to a method for processing a receiver output signal, as well as to an optical sensor. The first method step relates to storing the course of a receiver output signal. In a second method step, the receiver output signal is scanned in a predetermined time interval ?t. The subsequent scanning step relates to correlating the values obtained during the scanning with a filtering matrix, consisting of a sequence of matrix values, for generating a filtered receiver output signal that consists of a discrete sequence of receiver output signal values. In a final method step, the filtered receiver output signal is evaluated with at least one threshold value for generating an object detection signal.

Abstract: A device for the quantified evaluation of surface characteristics including a first radiation structure which is arranged in a first predetermined angle with respect to a surface to be analyzed and which directs radiation onto the surface to be analyzed, wherein the radiation directed onto the surface has at least one component with wavelengths in the infrared area, a detection apparatus arranged in a second predetermined angle with respect to the surface to be analyzed detecting the radiation radiated onto the surface and being thrown back from it.

Abstract: The present disclosure provides an apparatus and method for the measurement of the width and radial spacing of commutator segments with respect to span. The apparatus utilizes a microprocessor and computer to record and calculate data from both a rotary encoder wheel held in contact with the commutator surface as it turns, and a fiber optic sensor that recognizes commutator segment boundaries. The commutator is rotated for one revolution plus one span to improve convenience and accuracy of the measurements. Output is provided in the form of graphs and charts that show the variation in the different spans around the commutator, and information is also provided as to each bar and insulator.

Abstract: A printed matter inspection device includes a light source that irradiates a color printed matter as an inspection object with illuminating light, a detector that detects the quantity of reflected light of each of a plurality of different color light beams from among reflected light reflected by the inspection object, and a controller that controls a timing of acquiring a detection signal of each of the color light beams from the detector. The controller acquires a detection signal of selected one of the different color light beams for one of a plurality of non-print areas on the inspection object. The controller acquires a detection signal of newly selected one of the different color light beams for another one of the non-print areas.

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable scan speed beam scanning subsystem, preferably using an acousto-optic deflector, with beam compensation, so that variable scanning speeds can be achieved. Also included are methods and systems for improving the signal to noise ratio by use of scatter reducing complements, and a system and method for selectively and repeatedly scanning a region of interest on the surface in order to provide additional observations of the region of interest.

Abstract: A lead edge and/or trail edge sheet curl sensing and constraint method and system. First and second light emitters and detector pairs are aligned such that the light beams from the first light emitter and second light emitter cross at the transport media sheet substrate path, which constitutes the path of a media sheet substrate with zero curl. A media sheet substrate with either positive or negative curl on the lead edge of the sheet substrate interrupts light beams from the first and second light emitters, as detected by first and second light detectors. A similar approach can be used to detect the trail edge curl. The time delay between the light beam interruptions is proportional to the sheet substrate curl, and the order of interruptions indicates whether the sheet substrate curl is positive or negative. A first pair and a second pair of substrate constraint rollers can also be provided in the paper path upstream and downstream of the sensing system.

Abstract: Software, methods, and systems for calibrating photometric devices are provided. These involve using a non-uniform test illumination field to approximate a photon transfer curve by calculating stable pixel values and statistical dispersions on a pixel-by-pixel basis.

Abstract: Identifying a test product having a test region includes impinging on the test region a set of test signals at known test wavelengths. An image of the test region is generated from the reflected signals. The image is comprised of a set of reflectance values that are compared against reference reflectance values at the test signal wavelengths to determine the test product type.

Abstract: Plural electronic or optical images are provided in a streak optical system, as for instance by use of plural slits instead of the conventional single slit, to obtain a third, fourth etc. dimension—rather than only the conventional two, namely range or time and azimuth. Such additional dimension or dimensions are thereby incorporated into the optical information that is to be streaked and thereby time resolved. The added dimensions may take any of an extremely broad range of forms, including wavelength, polarization state, or one or more spatial dimensions—or indeed virtually any optical parameter that can be impressed upon a probe beam. Resulting capabilities remarkably include several new forms of lidar spectroscopy, fluorescence analysis, polarimetry, spectropolarimetry, and combinations of these.

Abstract: The invention provides a pulse modulation photodetector, which detects, by projecting pulsed light, presence or absence of a physical object based on whether the pulsed light is received or not according to passage of the physical object. The pulsed light has a pulse width modulated according to a light emission pulse, which is generated based on a clock pulse signal and has a modulation cycle. The modulation cycle includes a light emission period during which the light emission pulse is present, and a non light emission period other than the light emission period. Further, the clock pulse signal has a pulse width being shorter in the light emission period than in the non light emission period.

Abstract: A device for determining the surface topology and associated color of a structure, such as a teeth segment, includes a scanner for providing depth data for points along a two-dimensional array substantially orthogonal to the depth direction, and an image acquisition means for providing color data for each of the points of the array, while the spatial disposition of the device with respect to the structure is maintained substantially unchanged. A processor combines the color data and depth data for each point in the array, thereby providing a three-dimensional color virtual model of the surface of the structure. A corresponding method for determining the surface topology and associated color of a structure is also provided.

Abstract: Scatterometers and methods of using scatterometry to determine several parameters of periodic microstructures, pseudo-periodic structures, and other very small structures having features sizes as small as 100 nm or less. Several specific embodiments of the present invention are particularly useful in the semiconductor industry to determine the width, depth, line edge roughness, wall angle, film thickness, and many other parameters of the features formed in microprocessors, memory devices, and other semiconductor devices. The scatterometers and methods of the invention, however, are not limited to semiconductor applications and can be applied equally well in other applications.

Abstract: A system for identifying a characteristic of a printing media includes a light source module that has a light emitting diode (LED) and an aspheric lens and a light detection module that has a photodetector and an aspheric lens. The light source module and light detection module are oriented with respect to a printing media such that the focusing points of the respective aspheric lenses are located at a common position on the printing media. The system differentiates between printing media types by applying light to the surface of the printing media and measuring the light that is reflected from the surface.

Abstract: The device detects a thread during the detection of the ends of threads (21) in suction pipe (17) crossflown by air, comprising a sensor device (22) having a transmitter (31) and a receiver (32) in a textile machine producing cross-wound bobbins. A measuring field (26) is formed between the transmitter (31) and the receiver (32). The suction pipe has a curvature in the area of the measuring field (26). The measuring field (26) is arranged in proximity of the smaller radius of the suction pipe (17), which has a recess (27) oriented in the running direction of the suction pipe (17) to form the measuring field (26). The suction pipe (17) is curved upstream and downstream of the measuring field (26) such that the detected thread is tensed inside the recess (27) to be spaced at least partly from the bottom of the recess (27) in the measuring field (26), making it possible to easily and reliably detect the thread.

Abstract: A system and method for imaging the characteristics of an object (2) having at least a first (2a) and a second (2b) layer. The object (2) is illuminated by means of incident light (4), and light (5b) reflected from the object (2) is detected by means of an imaging sensor (6) in which the detected light is converted into electrical charges, according to which a representation of the object (2) is created. Information on light scattered (5a) in the first layer (2a) and the second layer (2b) of the object (2) is obtained from the representation and this information is compared to stored information in order to detect defects on the object (2).

Abstract: The invention relates to a method and a device for the contactless detection of flat objects, particularly in sheet form, such as paper, films, foils, plates, labels, splices, break points, tear-off threads and similar flat materials or packs. In the case of said methods and devices there is a need, e.g. in the printing industry, for a reliable, precise detection of single, missing or multiple sheets, especially double sheets of the flat objects, together with a label detection.

Abstract: A radiographic inspection system for inspecting subject objects using charged particle beams having pulses of charged particles with different energy levels from pulse to pulse. A phase shifter thereof enables adjustment of the RF power delivered to first and second accelerating sections thereof from a single RF source without adjustment of the RF power generated by the RF source. The system also enables the generation of images of the contents of a container from multiple directions and in multiple planes, and allows the discrimination of materials present in the container.

Abstract: An apparatus for imaging an array of a plurality of features associated with a sample tile. The apparatus includes a stage that supports the sample tile in an illumination region, and an illumination source having a plurality of LEDs adapted to emit light. At least a portion of the light illuminates the illumination region. Additionally, the apparatus includes an image collecting device adapted to selectively collect images of a signal.

Abstract: A measuring device and measuring method are provided for testing the cut quality of a sheet. The measuring device is provided with a transparent scanning substrate for holding the sheet, a scanning device with a scanning window, and a cover for covering the sheet held by the scanning substrate, wherein the scanning window overlaps the sheet, forming edge regions, and the cover has different reflection properties from the sheet for producing a high-contrast scanned image of the sheet and of the edge regions between the sheet and the scanning window. The measuring method includes positioning the sheet on a transparent scanning substrate, covering the sheet with a cover, and scanning the sheet with a scanning device, wherein the scanning device scans in the region of a scanning window which encompasses both the sheet and edge regions surrounding the sheet, and differences in contrast between the sheet and the edge regions are detected.

Abstract: An invisible scanning safety system for use with laser projection systems that includes sensors monitoring less than the entire laser accessible region such that the region monitored is reduced to almost the absolute minimum, to thereby prevent unwarranted stoppages or disturbances in projection. The system may also monitor a 360 degree region around the lens of the laser projector, a wedge-shaped region, a pyramid-shaped region or a chimney-shaped region.

Abstract: An improved system for visual inspection of substrates coated with paints and polymers is disclosed. Painted substrates can be inspected for environmental and physical damage such as corrosion and cracks without removing the paint. The present invention provides the ability to maximize paint thickness penetration. This is accomplished with a spectral bandpass filter that rejects reflected light from the coating opaque bands, while allowing light in the paint window to pass to an IR detector such as an IR camera focal plane. The narrow bandpass range enhances the ability for IR imaging to see through thicker paint layers and improves the contrast over standard commercial IR mid-wave cameras. The bandpass may be adjusted to coincide with the full spectral window of the paint, consistent with the ability of the imaging focal plane to detect light in the spectral region.

Abstract: Methods and systems for evaluating and controlling a lithography process are provided. For example, a method for reducing within wafer variation of a critical metric of a lithography process may include measuring at least one property of a resist disposed upon a wafer during the lithography process. A critical metric of a lithography process may include, but may not be limited to, a critical dimension of a feature formed during the lithography process. The method may also include altering at least one parameter of a process module configured to perform a step of the lithography process to reduce within wafer variation of the critical metric. The parameter of the process module may be altered in response to at least the one measured property of the resist.

Abstract: A method of measuring pattern dimensions includes evaluating a relationship between cross-sectional shapes of a pattern and measurement errors of a pattern in a specified image processing technique, and conducting an actual measurement in which dimension measurement of an evaluation objective pattern from image signals of a microscope is carried out, and revising errors of the dimension measurement of the evaluation objective pattern based on the relationship between the cross-sectional shapes of a pattern and the measurement errors of a pattern previously evaluated.

Abstract: There is provided a system and method for locating a physical alteration, if such exists, in a structure having a substantially planar surface comprising a plurality of elements capable of scattering electro-magnetic radiation and openings arranged between the elements, according to one embodiment, the system comprises a moving platform for providing relative motion of the system with respect to the structure; at least one source of coherent electro-magnetic radiation configured for illuminating at least a portion of said surface in its relative motion with respect to the structure; at least a first and a second detection unit each operable along a different collection direction and configured for collecting electro-magnetic radiation reflected from said at least a portion of the surface and for generating an intensity pattern of the reflected radiation indicative of an arrangement of the elements and openings; and a computing unit configured for generating a segmented map of the portion based on said intensi

Abstract: A method and apparatus for determining lens distortion in a projection imaging tool are described. The techniques include exposing at least one alignment attribute onto a substrate having a recording media. A complementary alignment attribute is also exposed onto the substrate such that the complementary alignment attribute and alignment attribute form a completed alignment attribute. The exposure of the alignment attributes, or the complementary alignment attribute, or both, may be accomplished by multiple sub nominal dose exposures. Intra field distortion of the projection imaging tool is determined from measurements of the exposed completed alignment attributes. The alignment attributes and complimentary alignment attribute may be part of a reticle. The transmission of the alignment attribute may be different than the transmission of the complementary alignment attribute.

Abstract: A measuring optical system for emitting and receiving light is fixedly installed in a ceiling portion of a measuring device, and a wafer holding part for supporting a semiconductor wafer is provided in a bottom portion of the measuring device. A support table is horizontally laid between support pins of the wafer holding part, and a calibration standard member for calibration is placed on an upper surface of the support table. When a semiconductor wafer is supported by the support pins, light emerging from the measuring optical system impinges upon the semiconductor wafer, and the reflection intensity of the light is measured. When no semiconductor wafer is supported by the support pins, light emerging from the measuring optical system impinges upon the calibration standard member, whereby the calibration can be done at any time.

Abstract: A system and a method for detecting defects in a light-management film are provided. The system includes a first light source configured to emit light onto a first side of the film in a first predetermined region of the film. The system further includes a second light source configured to emit light onto a second side of the film in the first predetermined region of the film. The system further includes a first camera configured to receive a first portion of light reflected from the first predetermined region of film from the first light source and a second portion of the light propagating through the film from the second light source. Finally, the system includes a signal-processing device openably coupled to the first camera configured to detect a defect in the first predetermined region of the film based on at least one of the first and second portions of light.

Abstract: A system is provided for measuring gloss and spatial dependence of gloss. In a first embodiment, the system comprises: a first illuminator configured to emit a first light beam at a point on a target, thereby producing a generally specular reflectance in a first direction; a second illuminator configured to emit a second light beam at the point on the target, thereby producing generally diffuse reflectance in the first direction; a linear array sensor configured to detect the generally specular reflectance and the generally diffuse reflectance in the first direction; and a processor configured to process the generally specular reflectance and the generally diffuse reflectance detected by the linear array sensor.

Abstract: Media type is detected. A light beam is produced. The intensity of a specular reflectance component of the light beam is detected. The specular reflectance component results from the light beam being reflected off media. An indication of detected intensity of the specular reflectance component is compared to a mapping to determine media type of the media. The mapping maps detected intensity of the specular reflectance component to media type. The mapping uses only the detected intensity of the specular reflectance component, and no other components of light, to map detected intensity of the specular reflectance component to media type.

Abstract: The present invention relates to an apparatus, unit and method for testing image sensor packages, which can automatically test whether the image sensor packages are defective before they are assembled into camera modules. An apparatus for testing image sensor packages according to the present invention comprises a seating unit on which image sensor packages are seated for tests; a testing section having a lens and a light source above the image sensor packages to perform an open and short test and an image test for the image sensor packages; and a controlling and processing unit having a tester module for performing the open and short test and the image test for the image sensor packages.

Abstract: An apparatus for identifying the condition of a conveyor belt (6) has a capturing device (12) which can be used to capture two-dimensional images (B) of successive belt sections (15) of the conveyor belt (6) during operation of the conveyor belt (6). The capturing device (12) and the evaluation device (13) have a data-processing connection, so that the captured images (B) can be transmitted to the evaluation device (13). The evaluation device (13) compares the images (B) transmitted to it with two-dimensional reference images (R) which are associated with the belt sections (15), determines at least one statement about the condition of the belt on the basis of the comparison, and outputs the statement about the condition of the belt.

Abstract: The invention concerns a system and method for detecting, at night, the presence of an element such as fog interfering with the visibility of a road scene situated in front of a vehicle, comprising the following operations: acquiring an image of the road scene, extracting, from the image of the road scene, at least one light halo produced by a lighting device of the vehicle, approximating a form of this light halo by an elliptic curve, comparing the form of this light halo with the elliptic curve obtained in order to deduce therefrom the presence or absence of an element interfering with visibility.