In Integrated Circuit Structure Patents (Class 257/337)
  • Patent number: 9041101
    Abstract: A power semiconductor device according to an embodiment includes an element portion in which MOSFET elements are provided and a termination portion provided around the element portion, and has pillar layers provided respectively in parallel to each other in a semiconductor substrate. The device includes a first trench and a first insulation film. The first trench is provided between end portions of the pillar layers, in the semiconductor substrate at the termination portion exposed from a source electrode of the MOSFET elements. The first insulation film is provided on a side surface and a bottom surface of the first trench.
    Type: Grant
    Filed: March 10, 2014
    Date of Patent: May 26, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Syotaro Ono, Masaru Izumisawa, Hiroshi Ohta, Hiroaki Yamashita
  • Publication number: 20150137228
    Abstract: A semiconductor structure is provided. The semiconductor structure comprises a substrate, a deep well formed in the substrate, a first well and a second well formed in the deep well, a gate electrode formed on the substrate and disposed between the first well and the second well, a first isolation, and a second isolation. The second well is spaced apart from the first well. The first isolation extends down from the surface of the substrate and is disposed between the gate electrode and the second well. The second isolation extends down from the surface of the substrate and is adjacent to the first well. A ratio of a depth of the first isolation to a depth of the second isolation is smaller than 1.
    Type: Application
    Filed: November 21, 2013
    Publication date: May 21, 2015
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chiu-Te Lee, Ming-Shun Hsu, Ke-Feng Lin, Chih-Chung Wang, Hsuan-Po Liao, Shih-Teng Huang, Shu-Wen Lin, Su-Hwa Tsai, Shih-Yin Hsiao
  • Patent number: 9035380
    Abstract: An integrated circuit includes a high-voltage well having a first doping type, a first doped region and a second doped region embedded in the high-voltage well, the first and second doped regions having a second doping type and spaced apart by a channel in the high-voltage well, source/drain regions formed in the first doped region and in the second doped region, each of the source/drain regions having the second doping type and more heavily doped than the first and second doped regions, first isolation regions spaced apart from each of the source/drain regions, and resistance protection oxide forming a ring surrounding each of the source/drain regions.
    Type: Grant
    Filed: November 27, 2012
    Date of Patent: May 19, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Sheng Chen, Chen-Liang Chu, Shih-Kuang Hsiao, Fei-Yun Chen, Kong-Beng Thei
  • Patent number: 9024380
    Abstract: A device includes a semiconductor substrate, a body region in the semiconductor substrate, having a first conductivity type, and including a channel region through which charge carriers flow, a drain region in the semiconductor substrate, having a second conductivity type, and spaced from the body region along a first lateral dimension, a drift region in the semiconductor substrate, having the second conductivity type, and electrically coupling the drain region to the channel region, and a plurality of floating reduced surface field (RESURF) regions in the semiconductor substrate adjacent the drift region, having the first conductivity type, and around which the charge carriers drift through the drift region under an electric field arising from a voltage applied to the drain region. Adjacent floating RESURF regions of the plurality of floating RESURF regions are spaced from one another along a second lateral dimension of the device by a respective gap.
    Type: Grant
    Filed: June 21, 2012
    Date of Patent: May 5, 2015
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Weize Chen, Richard J. De Souza, Patrice M. Parris
  • Publication number: 20150115315
    Abstract: A three terminal high voltage Darlington bipolar transistor power switching device includes two high voltage bipolar transistors, with collectors connected together serving as the collector terminal. The base of the first high voltage bipolar transistor serves as the base terminal. The emitter of the first high voltage bipolar transistor connects to the base of the second high voltage bipolar transistor (inner base), and the emitter of the second high voltage bipolar transistor serves as the emitter terminal. A diode has its anode connected to the inner base (emitter of the first high voltage bipolar transistor, or base of the second high voltage bipolar transistor), and its cathode connected to the base terminal. Similarly, a three terminal hybrid MOSFET/bipolar high voltage switching device can be formed by replacing the first high voltage bipolar transistor of the previous switching device by a high voltage MOSFET.
    Type: Application
    Filed: October 28, 2013
    Publication date: April 30, 2015
    Applicant: Mosway Semiconductor Limited
    Inventors: Chiu-Sing Celement Tse, On-Bon Peter Chan, Chi-Keung Tang
  • Patent number: 9012988
    Abstract: A semiconductor device and a method for forming the same are disclosed. The semiconductor device includes an isolation structure formed in a substrate to define an active region of the substrate. The active region has a field plate region therein. A step gate dielectric structure is formed on the substrate in the field plate region. The step gate dielectric structure includes a first layer of a first dielectric material and a second layer of the dielectric material, laminated vertically to each other. The first and second layers of the first dielectric material are separated from each other by a second dielectric material layer. An etch rate of the second dielectric material layer to an etchant is different from that of the second layer of the first dielectric material. A method for forming a semiconductor device is also disclosed.
    Type: Grant
    Filed: August 15, 2013
    Date of Patent: April 21, 2015
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Sue-Yi Chen, Chien-Hsien Song, Chih-Jen Huang
  • Patent number: 9007081
    Abstract: A jig for use in a semiconductor test of the present invention includes; a base on which a probe pin and an insulating material are provided such that the probe pin is surrounded by the insulating material in plan view; and a stage arranged to face a surface of the base on which the probe pin and the insulating material are provided. The stage is capable of receiving a test object placed on a surface facing the base. When the test object is placed on the stage and the base and the stage move in a direction in which they get closer to each other, the probe pin comes into contact with an electrode formed on the test object, and the insulating material comes into contact with both the test object and the stage.
    Type: Grant
    Filed: May 21, 2012
    Date of Patent: April 14, 2015
    Assignee: Mitsubishi Electric Corporation
    Inventor: Masaaki Ikegami
  • Patent number: 9006707
    Abstract: In one embodiment, the present invention includes a method for forming a logic device, including forming an n-type semiconductor device over a silicon (Si) substrate that includes an indium gallium arsenide (InGaAs)-based stack including a first buffer layer, a second buffer layer formed over the first buffer layer, a first device layer formed over the second buffer layer. Further, the method may include forming a p-type semiconductor device over the Si substrate from the InGaAs-based stack and forming an isolation between the n-type semiconductor device and the p-type semiconductor device. Other embodiments are described and claimed.
    Type: Grant
    Filed: February 28, 2007
    Date of Patent: April 14, 2015
    Assignee: Intel Corporation
    Inventors: Mantu K. Hudait, Jack T. Kavalieros, Suman Datta, Marko Radosavljevic
  • Publication number: 20150097234
    Abstract: A half-bridge circuit includes a low-side transistor and a high-side transistor each having a load path and a control terminal, and a high-side drive circuit having a level shifter with a level shifter transistor. The low-side transistor and the level shifter transistor are integrated in a common semiconductor body.
    Type: Application
    Filed: December 15, 2014
    Publication date: April 9, 2015
    Inventors: Armin Willmeroth, Franz Hirler, Peter Irsigler
  • Publication number: 20150097235
    Abstract: A semiconductor device is disclosed. The device includes a plurality of gates formed on a surface of a substrate, a plurality of sidewalls formed on side surfaces of the gates, a Sigma-shaped recess formed in the substrate between adjacent gates, a SiGe seed layer formed on an inner surface of the Sigma-shaped recess, boron-doped bulk SiGe formed on a surface of the SiGe seed layer, with the boron-doped bulk SiGe filling the Sigma-shaped recess, and a boron-doped SiGe regeneration layer formed in a first recess beneath the surface of the substrate. The first recess is formed by etching a portion of the SiGe seed layer and the boron-doped bulk SiGe in the Sigma-shaped recess, and the boron-doped SiGe regeneration layer has a higher concentration of boron than the SiGe seed layer or the boron-doped bulk SiGe.
    Type: Application
    Filed: December 16, 2014
    Publication date: April 9, 2015
    Inventor: Lele CHEN
  • Patent number: 9000518
    Abstract: Semiconductor device structures and related fabrication methods are provided. An exemplary semiconductor device structure includes a first vertical drift region of semiconductor material, a second vertical drift region of semiconductor material, and a buried lateral drift region of semiconductor material that abuts the vertical drift regions. In one or more embodiments, the vertical drift regions and buried lateral drift region have the same conductivity type, wherein a body region of the opposite conductivity type overlies the buried lateral drift region between the vertical drift regions.
    Type: Grant
    Filed: April 24, 2014
    Date of Patent: April 7, 2015
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Hongning Yang, Xin Lin, Jiang-Kai Zuo
  • Publication number: 20150091088
    Abstract: An integrated circuit includes a transistor in a semiconductor substrate having a main surface. The transistor includes a source region, a drain region, a channel region, a drift zone, a gate electrode, and a gate dielectric adjacent to the gate electrode. The gate electrode is disposed adjacent to at least two sides of the channel region. The channel region and the drift zone are disposed along a first direction parallel to the main surface between the source region and the drain region. The gate dielectric has a thickness that varies at different positions of the gate electrode.
    Type: Application
    Filed: October 2, 2013
    Publication date: April 2, 2015
    Inventors: Martin Vielemeyer, Andreas Meiser, Till Schloesser, Franz Hirler, Martin Poelzl
  • Publication number: 20150076598
    Abstract: According to one embodiment, a semiconductor device includes a switching element and a diode provided on a substrate. The switching element includes a first semiconductor layer, a drain region, a source region, a channel region, a gate insulating film, and a gate electrode. The diode includes a second semiconductor layer, an anode region, and a cathode region.
    Type: Application
    Filed: March 10, 2014
    Publication date: March 19, 2015
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventor: Keita Takahashi
  • Patent number: 8981476
    Abstract: A semiconductor device includes: first and second n-type wells formed in p-type semiconductor substrate, the second n-type well being deeper than the first n-type well; first and second p-type backgate regions formed in the first and second n-type wells; first and second n-type source regions formed in the first and second p-type backgate regions; first and second n-type drain regions formed in the first and second n-type wells, at positions opposed to the first and second n-type source regions, sandwiching the first and the second p-type backgate regions; and field insulation films formed on the substrate, at positions between the first and second p-type backgate regions and the first and second n-type drain regions; whereby first transistor is formed in the first n-type well, and second transistor is formed in the second n-type well with a higher reverse voltage durability than the first transistor.
    Type: Grant
    Filed: December 11, 2012
    Date of Patent: March 17, 2015
    Assignee: Fujitsu Semiconductor Limited
    Inventor: Kazuhiko Takada
  • Patent number: 8981472
    Abstract: A high-voltage MOS transistor has a semiconductor substrate formed with a first well of a first conductivity type in which a drain region and a drift region are formed and a second well of a second, opposite conductivity type in which a source region and a channel region are formed, a gate electrode extends over the substrate from the second well to the first well via a gate insulation film, wherein there is formed a buried insulation film in the drift region underneath the gate insulation film at a drain edge of the gate electrode, there being formed an offset region in the semiconductor substrate between the channel region and the buried insulation film, wherein the resistance of the offset region is reduced in a surface part thereof by being introduced with an impurity element of the first conductivity type with a concentration exceeding the first well.
    Type: Grant
    Filed: November 10, 2011
    Date of Patent: March 17, 2015
    Assignee: Fujitsu Semiconductor Limited
    Inventors: Takae Sukegawa, Youichi Momiyama
  • Patent number: 8975692
    Abstract: Provided are a semiconductor device and a method of fabricating the same. The method includes: forming a trench in a semiconductor substrate of a first conductive type; forming a trench dopant containing layer including a dopant of a second conductive type on a sidewall and a bottom surface of the trench; forming a doping region by diffusing the dopant in the trench dopant containing layer into the semiconductor substrate; and removing the trench dopant containing layer.
    Type: Grant
    Filed: December 9, 2013
    Date of Patent: March 10, 2015
    Assignee: Electronics and Telecommunications Research Institute
    Inventors: Sang Gi Kim, Jin-Gun Koo, Seong Wook Yoo, Jong-Moon Park, Jin Ho Lee, Kyoung Il Na, Yil Suk Yang, Jongdae Kim
  • Publication number: 20150061007
    Abstract: A high-voltage super junction device is disclosed. The device includes a semiconductor substrate region having a first conductivity type and having neighboring trenches disposed therein. The neighboring trenches each have trench sidewalls and a trench bottom surface. A region having a second conductivity type is disposed in or adjacent to a trench and meets the semiconductor substrate region at a p-n junction. A gate electrode is formed on the semiconductor substrate region and electrically is electrically isolated from the semiconductor substrate region by a gate dielectric. A body region having the second conductivity type is disposed on opposite sides of the gate electrode near a surface of the semiconductor substrate. A source region having the first conductivity type is disposed within in the body region on opposite sides of the gate electrode near the surface of the semiconductor substrate.
    Type: Application
    Filed: August 28, 2013
    Publication date: March 5, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tai-I Yang, Shou-Wei Lee, Shao-Chi Yu, Hong-Seng Shue, Kun-Ming Huang, Po-Tao Chu
  • Publication number: 20150061008
    Abstract: A split gate power transistor includes a laterally configured power MOSFET including a doped silicon substrate, a stepped gate oxide layer formed on a surface of the substrate, and a split polysilicon layer formed over the stepped gate oxide layer. The stepped gate oxide layer includes a first gate oxide layer having a first thickness and a second gate oxide layer having a second thickness that is greater than the first thickness. The polysilicon layer is cut into two electrically isolated portions, a first portion forming a switching gate positioned over the first gate oxide layer and a first portion of a channel region of the substrate, and a second portion forming a static gate formed over the second gate oxide layer and a second portion of the channel region. A switching voltage is applied to the switching gate and a constant voltage is applied to the static gate.
    Type: Application
    Filed: November 6, 2014
    Publication date: March 5, 2015
    Inventors: Joel M. McGregor, Frederick P. Giles
  • Publication number: 20150054072
    Abstract: A HKMG device with PMOS eSiGe source/drain regions is provided. Embodiments include forming first and second HKMG gate stacks on a substrate, forming a nitride liner and oxide spacers on each side of each HKMG gate stack, performing halo/extension implants at each side of each HKMG gate stack, forming an oxide liner and nitride spacers on the oxide spacers of each HKMG gate stack, forming deep source/drain regions at opposite sides of the second HKMG gate stack, forming an oxide hardmask over the second HKMG gate stack, forming embedded silicon germanium (eSiGe) at opposite sides of the first HKMG gate stack, and removing the oxide hardmask.
    Type: Application
    Filed: October 6, 2014
    Publication date: February 26, 2015
    Inventors: Jan HOENTSCHEL, Shiang Yang ONG, Stefan FLACHOWSKY, Thilo SCHEIPER
  • Patent number: 8963245
    Abstract: An integrated circuit and component is disclosed. In one embodiment, the component is a compensation component, configuring the compensation regions in the drift zone in V-shaped fashion in order to achieve a convergence of the space charge zones from the upper to the lower end of the compensation regions is disclosed.
    Type: Grant
    Filed: August 6, 2013
    Date of Patent: February 24, 2015
    Assignee: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Holger Kapels
  • Patent number: 8963237
    Abstract: The present invention discloses a high voltage device and a manufacturing method thereof. The high voltage device includes: a substrate, having an isolation structure for defining a device region; a drift region located in the device region, wherein from top view, the drift region includes multiple sub-regions separated from one another but are electrically connected with one another; a source and a drain in the device region; and a gate on the surface of the substrate and between the source and drain in the device region.
    Type: Grant
    Filed: September 17, 2011
    Date of Patent: February 24, 2015
    Assignee: Richtek Technology Corporation, R.O.C.
    Inventors: Tsung-Yi Huang, Chien-Hao Huang
  • Publication number: 20150048447
    Abstract: A lateral diffusion metal oxide semiconductor (LDMOS) comprises a semiconductor substrate having an STI structure in a top surface of the substrate, a drift region below the STI structure, and a source region and a drain region on opposite sides of the STI structure. A gate conductor is on the substrate over a gap between the STI structure and the source region, and partially overlaps the drift region. Floating gate pieces are over the STI structure. A conformal dielectric layer is on the top surface and on the gate conductor and floating gate pieces and forms a mesa above the gate conductor and floating gate pieces. A conformal etch-stop layer is embedded within the conformal dielectric layer. A drift electrode is formed on the conformal etch-stop layer over, relative to the top surface, the drift region. The drift electrode has a variable thickness relative to the top surface.
    Type: Application
    Filed: August 14, 2013
    Publication date: February 19, 2015
    Applicant: International Business Machines Corporation
    Inventors: Santosh Sharma, Yun Shi, Anthony K. Stamper
  • Publication number: 20150048449
    Abstract: A high voltage semiconductor device includes a semiconductor substrate having a first conductivity type and including a low voltage part and a high voltage part, a semiconductor layer having a second conductivity type on the semiconductor substrate, a body region having the first conductivity type on the semiconductor layer, a first buried layer having the second conductivity type between the high voltage part of the semiconductor substrate and the semiconductor layer, and a second buried layer having the first conductivity type and having sidewalls inside sidewalls of the first buried layer and extending deeper into the substrate than the first buried layer. A surface of the body region adjacent the substrate is spaced apart from a surface of the second buried layer remote from the substrate such that a portion of the semiconductor layer is disposed therebetween.
    Type: Application
    Filed: July 1, 2014
    Publication date: February 19, 2015
    Inventors: Changki Jeon, Minsuk Kim, Jeongho Kim, Yongcheol Choi
  • Publication number: 20150048448
    Abstract: A semiconductor device and a method for forming the same are disclosed. The semiconductor device includes an isolation structure formed in a substrate to define an active region of the substrate. The active region has a field plate region therein. A step gate dielectric structure is formed on the substrate in the field plate region. The step gate dielectric structure includes a first layer of a first dielectric material and a second layer of the dielectric material, laminated vertically to each other. The first and second layers of the first dielectric material are separated from each other by a second dielectric material layer. An etch rate of the second dielectric material layer to an etchant is different from that of the second layer of the first dielectric material. A method for forming a semiconductor device is also disclosed.
    Type: Application
    Filed: August 15, 2013
    Publication date: February 19, 2015
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Sue-Yi CHEN, Chien-Hsien SONG, Chih-Jen HUANG
  • Publication number: 20150048450
    Abstract: A protective diode has a basic structure including an n+ layer, an n? layer, a p+ layer, and an n? layer in this order. A p-type layer forming the protective diode is the p+ layer with high impurity concentration. Therefore, the spreading of a depletion layer is suppressed and it is possible to reduce the area of the protective diode. In addition, phosphorus ions with a large diffusion coefficient are implanted to form the n? layer with low impurity concentration in the polysilicon layer forming the protective diode. A heat treatment is performed at a temperature of 1000° C. or higher to diffuse the phosphorus ions implanted into the polysilicon layer. Therefore, the impurity profile of the n? layer in the depth direction can be uniformized in the depth direction.
    Type: Application
    Filed: November 3, 2014
    Publication date: February 19, 2015
    Inventor: Tatsuya NAITO
  • Patent number: 8957476
    Abstract: Embodiments of the present disclosure provide techniques and configurations associated with conversion of thin transistor elements from silicon (Si) to silicon germanium (SiGe). In one embodiment, a method includes providing a semiconductor substrate having a channel body of a transistor device disposed on the semiconductor substrate, the channel body comprising silicon, forming a cladding layer comprising germanium on the channel body, and annealing the channel body to cause the germanium to diffuse into the channel body. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: February 17, 2015
    Assignee: Intel Corporation
    Inventors: Glenn A. Glass, Daniel B. Aubertine, Anand S. Murthy, Gaurav Thareja, Stephen M. Cea
  • Publication number: 20150035053
    Abstract: Semiconductor devices and methods for manufacturing an LDMOS FinFET integrated circuit. The intermediate semiconductor device includes a substrate, a first well in the substrate, a second well in the substrate, and at least two polysilicon gates. The first well overlaps the second well and the at least one first gate is disposed over the first well and at least one second gate is disposed over the second well. The method includes forming a channel region and a drift region in the substrate, wherein the channel region overlaps the drift region, forming a shallow trench isolation region in the drift region, forming at least one first gate over the channel region, forming at least one second gate over the shallow trench isolation region, and applying at least one metal layer over the at least one first gate and the at least one second gate.
    Type: Application
    Filed: August 5, 2013
    Publication date: February 5, 2015
    Applicant: GLOBALFOUNDRIES Inc.
    Inventor: Jagar SINGH
  • Patent number: 8946782
    Abstract: A method of fabricating a FET device is provided that includes the following steps. A wafer is provided. At least one active area is formed in the wafer. A plurality of dummy gates is formed over the active area. Spaces between the dummy gates are filled with a dielectric gap fill material such that one or more keyholes are formed in the dielectric gap fill material between the dummy gates. The dummy gates are removed to reveal a plurality of gate canyons in the dielectric gap fill material. A mask is formed that divides at least one of the gate canyons, blocks off one or more of the keyholes and leaves one or more of the keyholes un-blocked. At least one gate stack material is deposited onto the wafer filling the gate canyons and the un-blocked keyholes. A FET device is also provided.
    Type: Grant
    Filed: April 19, 2012
    Date of Patent: February 3, 2015
    Assignee: International Business Machines Corporation
    Inventors: Josephine B. Chang, Michael A. Guillorn, Jeffrey W. Sleight
  • Patent number: 8933510
    Abstract: An integrated circuit containing a MOS transistor and a DEMOS transistor of a same polarity may be formed by implanting dopants of a same conductivity type as source/drain regions of the MOS transistor and the DEMOS transistor through a gate of the MOS transistor and through a gate of the DEMOS transistor. The implanted dopants are blocked from a drain-side edge of the DEMOS transistor gate. The implanted dopants form a drain enhancement region under the DEMOS transistor gate in a drift region of an extended drain of the DEMOS transistor.
    Type: Grant
    Filed: December 27, 2013
    Date of Patent: January 13, 2015
    Assignee: Texas Instruments Incorporated
    Inventors: Pinghai Hao, Amitava Chatterjee, Imran Khan
  • Patent number: 8933504
    Abstract: The invention discloses a semiconductor structure comprising: a substrate, a conductor layer, and a dielectric layer surrounding the conductor layer on the substrate; a first insulating layer covering both of the conductor layer and the dielectric layer; a gate conductor layer formed on the first insulating layer, and a dielectric layer surrounding the gate conductor layer; and a second insulating layer covering both of the gate conductor layer and the dielectric layer surrounding the gate conductor layer; wherein a through hole filled with a semiconductor material penetrates through the gate conductor layer perpendicularly, the bottom of the through hole stops on the conductor layer, and a first conductor plug serving as a drain/source electrode is provided on the top of the through hole; and a second conductor plug serving as a source/drain electrode electrically contacts the conductor layer, and a third conductor plug serving as a gate electrode electrically contacts the gate conductor layer.
    Type: Grant
    Filed: November 30, 2011
    Date of Patent: January 13, 2015
    Inventors: Qingqing Liang, Huicai Zhong, Huilong Zhu
  • Patent number: 8928075
    Abstract: A semiconductor device containing a high voltage MOS transistor with a drain drift region over a lower drain layer and channel regions laterally disposed at the top surface of the substrate. RESURF trenches cut through the drain drift region and body region parallel to channel current flow. The RESURF trenches have dielectric liners and electrically conductive RESURF elements on the liners. Source contact metal is disposed over the body region and source regions. A semiconductor device containing a high voltage MOS transistor with a drain drift region over a lower drain layer, and channel regions laterally disposed at the top surface of the substrate. RESURF trenches cut through the drain drift region and body region perpendicular to channel current flow. Source contact metal is disposed in a source contact trench and extended over the drain drift region to provide a field plate.
    Type: Grant
    Filed: August 1, 2012
    Date of Patent: January 6, 2015
    Assignee: Texas Instruments Incorporated
    Inventors: Christopher Boguslaw Kocon, Marie Denison, Taylor Efland
  • Publication number: 20150001618
    Abstract: Provided is a semiconductor package. The semiconductor package includes: a first die that is a monolithic type die, a driver circuit and a low-side output power device formed in the first die; a second die disposed above the first die, the second die comprising a high-side output power device; and a first connection unit disposed between the first die and the second die.
    Type: Application
    Filed: December 12, 2013
    Publication date: January 1, 2015
    Applicant: MagnaChip Semiconductor, Ltd.
    Inventor: Francois HEBERT
  • Patent number: 8916935
    Abstract: A device includes a High-Voltage N-Well (HVNW) region have a first edge, and a High-Voltage P-Well (HVPW) region having a second edge adjoining the first edge. A first Shallow N-well (SHN) region is disposed over a lower portion of the HVNW region, wherein the first SHN region is spaced apart from the first edge by an upper part of the HVNW region. A second SHN region is disposed over a lower portion of the HVPW region, wherein the second SHN region is laterally spaced apart from the second edge. A Shallow P-well (SHP) region is disposed over the lower portion of the HVPW region, and is between the first SHN region and the second SHN region. The SHP region has a p-type impurity concentration higher than a p-type impurity concentration of the HVPW region. An isolation region is disposed over and contacting the SHP region.
    Type: Grant
    Filed: September 21, 2012
    Date of Patent: December 23, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Chien-Fu Huang
  • Patent number: 8916951
    Abstract: A lateral bipolar transistor with deep emitter and deep collector regions is formed using multiple epitaxial layers of the same conductivity type. Deep emitter and deep collector regions are formed without the use of trenches. Vertically aligned diffusion regions are formed in each epitaxial layer so that the diffusion regions merged into a contiguous diffusion region after annealing to function as emitter or collector or isolation structures. In another embodiment, a lateral trench PNP bipolar transistor is formed using trench emitter and trench collector regions. In yet another embodiment, a lateral PNP bipolar transistor with a merged LDMOS transistor is formed to achieve high performance.
    Type: Grant
    Filed: September 23, 2011
    Date of Patent: December 23, 2014
    Assignee: Alpha and Omega Semiconductor Incorporated
    Inventors: Shekar Mallikarjunaswamy, François Hébert
  • Publication number: 20140367777
    Abstract: A method for forming integrated circuit includes providing a first semiconductor substrate having a front surface and a back surface that is opposite to the front surface. One or more first trenches are in the first semiconductor substrate from the front surface side, the first trenches being characterized by a first depth. One or more second trenches are formed in the first semiconductor substrate from the front surface side, the second trenches being characterized by a second depth which greater than the first depth. A horizontal isolation layer is formed parallel to the front surface and at a third depth from the front surface. The method also includes forming a first recessed region extending in the first semiconductor substrate from the back surface side to the horizontal isolation layer that results in a thinned semiconductor region having a thickness substantially equal to the third depth.
    Type: Application
    Filed: November 19, 2013
    Publication date: December 18, 2014
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Herb He HUANG, Cliff DROWLEY
  • Publication number: 20140353749
    Abstract: A semiconductor power device and a method of fabricating the same are provided. The semiconductor power device involving: a first conductivity type semiconductor substrate; an epitaxial layer formed on the semiconductor substrate; a second conductivity type well formed in the semiconductor substrate and the epitaxial layer; a drain region formed in the well; an oxide layer that insulates a gate region from the drain region; a first conductivity type buried layer formed in the well; a second conductivity type drift region surrounding the buried layer; and a second conductivity type TOP region formed between the buried layer and the oxide layer.
    Type: Application
    Filed: December 23, 2013
    Publication date: December 4, 2014
    Applicant: MagnaChip Semiconductor, Ltd.
    Inventors: Francois HEBERT, Young Bae KIM, Jin Woo MOON, Kyung Ho LEE
  • Patent number: 8890243
    Abstract: In the interior of a semiconductor substrate having a main surface, a first p? epitaxial region is formed, a second p? epitaxial region is formed on the main surface side, and an n-type drift region and a p-type body region are formed on the main surface side. An n+ buried region is formed between the first p? epitaxial region and the second p? epitaxial region in order to electrically isolate the regions. A p+ buried region having a p-type impurity concentration higher than that of the second p? epitaxial region is formed between the n+ buried region and the second p? epitaxial region. The p+ buried region is located at least immediately under the junction between the n-type drift region and the p-type body region so as to avoid a site immediately under a drain region which is in contact with the n-type drift region.
    Type: Grant
    Filed: November 27, 2012
    Date of Patent: November 18, 2014
    Assignee: Renesas Electronics Corporation
    Inventor: Shinichiro Yanagi
  • Publication number: 20140327074
    Abstract: A semiconductor integrated circuit includes a substrate, a multi-gate transistor device formed on the substrate, and an n-well resistor formed in the substrate. The substrate includes a plurality of first isolation structures and at least a second isolation structure formed therein. A depth of the first isolation structures is smaller than a depth of the second isolation structure. The multi-gate transistor device includes a plurality of fin structures, and the fin structures are parallel with each other and spaced apart from each other by the first isolation structures. The n-well resistor includes at least one first isolation structure. The n-well resistor and the multi-gate transistor device are electrically isolated from each other by the second isolation structure.
    Type: Application
    Filed: May 2, 2013
    Publication date: November 6, 2014
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventor: Po-Chao Tsao
  • Publication number: 20140319609
    Abstract: A method and circuit in which the drive strength of a FinFET transistor can be selectively modified, and in particular can be selectively reduced, by omitting the LDD extension formation in the source and/or in the drain of the FinFET. One application of this approach is to enable differentiation of the drive strengths of transistors in an integrated circuit by applying the technique to some, but not all, of the transistors in the integrated circuit. In particular in a SRAM cell formed from FinFET transistors the application of the technique to the pass-gate transistors, which leads to a reduction of the drive strength of the pass-gate transistors relative to the drive strength of the pull-up and pull-down transistors, results in improved SRAM cell performance.
    Type: Application
    Filed: July 11, 2014
    Publication date: October 30, 2014
    Inventors: Thomas Merelle, Gerben Doornbos, Robert James Lander
  • Publication number: 20140319608
    Abstract: A high voltage FET device provides drain voltage information with less overall silicon area consumption by forming a spiral resistance poly structure over a drift region of the high voltage FET device. The spiral resistance poly structure has an inner most end coupled to a drain region, and an outer most end coupled to a reference ground.
    Type: Application
    Filed: April 25, 2013
    Publication date: October 30, 2014
    Applicant: MONOLITHIC POWER SYSTEMS, INC.
    Inventor: Joseph Urienza
  • Publication number: 20140320174
    Abstract: Integrated circuits with improved LDMOS structures are provided. An integrated circuit includes a semiconductor substrate, a plurality of shallow trench isolation (STI) regions, each extending at least a first depth below an upper surface of the semiconductor substrate. The STI regions electrically isolate devices fabricated in the semiconductor substrate. The integrated circuit further includes a transistor structure. The transistor structure includes a gate dielectric positioned over a portion of a first one of the plurality of STI regions, a drain region adjacent to the first one of the plurality of STI regions and spaced apart from the gate dielectric, a first gate electrode that extends over a first portion of the gate dielectric, a second gate electrode that extends over a second portion of the gate dielectric and positioned adjacent to the first gate electrode, and a source region positioned adjacent to the first portion of the gate dielectric.
    Type: Application
    Filed: April 25, 2013
    Publication date: October 30, 2014
    Applicant: GLOBALFOUNDRIES Singapore Pte, Ltd.
    Inventors: Yi Lu, Dongli Wang, Deyan Chen, Purakh Raj Verma
  • Publication number: 20140312416
    Abstract: A semiconductor device includes, in a cell region thereof: a low resistance semiconductor layer; a drift layer; a base region; a high-concentration semiconductor region; and a gate electrode layer. The semiconductor device includes, in a peripheral region thereof: the low resistance semiconductor layer; the drift layer; which is formed over the low resistance semiconductor layer; a gate lead line; a gate finger; and a gate pad. The gate electrode layer and the gate lead line are electrically connected with each other by way of a resistor made of polysilicon containing an impurity, and an impurity concentration in polysilicon which forms the resistor is lower than an impurity concentration in polysilicon which forms the gate electrode layer.
    Type: Application
    Filed: April 21, 2014
    Publication date: October 23, 2014
    Applicant: SHINDENGEN ELECTRIC MANUFACTURING CO., LTD.
    Inventors: Nobuki MIYAKOSHI, Masanori FUKUI
  • Patent number: 8866222
    Abstract: A semiconductor device includes a semiconductor body and a source metallization arranged on a first surface of the body. The body includes: a first semiconductor layer including a compensation-structure; a second semiconductor layer adjoining the first layer, comprised of semiconductor material of a first conductivity type and having a doping charge per horizontal area lower than a breakdown charge per area of the semiconductor material; a third semiconductor layer of the first conductivity type adjoining the second layer and comprising at least one of a self-charging charge trap, a floating field plate and a semiconductor region of a second conductivity type forming a pn-junction with the third layer; and a fourth semiconductor layer of the first conductivity type adjoining the third layer and having a maximum doping concentration higher than that of the third layer. The first semiconductor layer is arranged between the first surface and the second semiconductor layer.
    Type: Grant
    Filed: February 28, 2013
    Date of Patent: October 21, 2014
    Assignee: Infineon Technologies Austria AG
    Inventors: Hans Weber, Stefan Gamerith, Franz Hirler
  • Patent number: 8860135
    Abstract: A method for filling a trench with a metal layer is disclosed. A deposition apparatus having a plurality of supporting pins is provided. A substrate and a dielectric layer disposed thereon are provided. The dielectric layer has a trench. A first deposition process is performed immediately after the substrate is placed on the supporting pins to form a metal layer in the trench, wherein during the first deposition process a temperature of the substrate is gradually increased to reach a predetermined temperature. When the temperature of the substrate reaches the predetermined temperature, a second deposition process is performed to completely fill the trench with the metal layer. The present invention further provides a semiconductor device having an aluminum layer with a reflectivity greater than 1, wherein the semiconductor device is formed by using the method.
    Type: Grant
    Filed: February 21, 2012
    Date of Patent: October 14, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Chi-Mao Hsu, Hsin-Fu Huang, Min-Chuan Tsai, Chien-Hao Chen, Wei-Yu Chen, Chin-Fu Lin, Jing-Gang Li, Min-Hsien Chen, Jian-Hong Su
  • Patent number: 8846478
    Abstract: A semiconductor device including a low-concentration impurity region formed on the drain side of an n-type MIS transistor, in a non-self-aligned manner with respect to an end portion of the gate electrode. A high-concentration impurity region is placed with a specific offset from the gate electrode and a sidewall insulating film. The semiconductor device enables the drain breakdown voltage to be sufficient and the on-resistance to decrease. A silicide layer is also formed on the surface of the gate electrode, thereby achieving gate resistance reduction and high frequency characteristics improvement.
    Type: Grant
    Filed: September 4, 2013
    Date of Patent: September 30, 2014
    Assignee: Fujitsu Semiconductor Limited
    Inventor: Masashi Shima
  • Patent number: 8847311
    Abstract: A semiconductor device includes a transistor, formed in a semiconductor substrate having a first main surface. The transistor includes a channel region, doped with dopants of a first conductivity type, a source region, a drain region, the source and the drain region being doped with dopants of a second conductivity type different from the first conductivity type, a drain extension region, and a gate electrode adjacent to the channel region. The channel region is disposed in a first portion of a ridge. The drain extension region is disposed in a second portion of the ridge, and includes a core portion doped with the first conductivity type. The drain extension region further includes a cover portion doped with the second conductivity type, the cover portion being adjacent to at least one or two sidewalls of the second portion of the ridge.
    Type: Grant
    Filed: December 31, 2012
    Date of Patent: September 30, 2014
    Assignee: Infineon Technologies AG
    Inventors: Andreas Meiser, Franz Hirler, Christian Kampen
  • Publication number: 20140284714
    Abstract: Disclosed is a semiconductor device that includes a first MOS transistor having a predetermined size and a second MOS transistor having a lager size than the first MOS transistor. The first MOS transistor is divided into two or more sections, each paired with a corresponding section of the second MOS transistor to form a unit cell. As the unit cell is cyclically formed on a substrate, the current mirror ratio between the total size of the first MOS transistor and the total size of the second MOS transistor remains unaffected by the nonuniformity of position-dependent temperature distribution.
    Type: Application
    Filed: February 27, 2014
    Publication date: September 25, 2014
    Inventors: Kenji Miyakoshi, Youhei Yanagida, Hiroki Kimura, Takayuki Ooshima
  • Publication number: 20140284713
    Abstract: A transfer transistor includes a pair of first diffusion regions and a gate electrode layer. The pair of first diffusion regions are formed in a surface of a semiconductor substrate, and are each connected to a contact. The gate electrode layer is formed on the semiconductor substrate via a gate insulating layer and has a pair of openings each surrounding the contact.
    Type: Application
    Filed: July 22, 2013
    Publication date: September 25, 2014
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Hiroyuki Kutsukake, Masato Endo
  • Patent number: 8841723
    Abstract: The present invention discloses an LDMOS device having an increased punch-through voltage and a method for making same. The LDMOS device includes: a substrate; a well of a first conductive type formed in the substrate; an isolation region formed in the substrate; a body region of a second conductive type in the well; a source in the body region; a drain in the well; a gate structure on the substrate; and a first conductive type dopant region beneath the body region, for increasing a punch-through voltage.
    Type: Grant
    Filed: March 10, 2010
    Date of Patent: September 23, 2014
    Assignee: Richtek Technology Corporation, R.O.C.
    Inventors: Tsung-Yi Huang, Huan-Ping Chu, Ching-Yao Yang, Hung-Der Su
  • Patent number: 8841720
    Abstract: A semiconductor substrate capable of detecting operating current of a MOSFET and diode current in a miniaturized MOSFET such as a trench-gate type MOSFET is provided. A semiconductor substrate includes a main current region and a current sensing region in which current smaller than main current flowing in the main current region flows. The main current region has a source electrode disposed on a main surface, the source electrode being in contact with a p-type semiconductor region (body) and an n+-type semiconductor region (source), and the current sensing region has a MOSFET current detecting electrode and a diode current detecting electrode on a main surface, the MOSFET current detecting electrode being in contact with the p-type semiconductor region (body) and the n+-type semiconductor region (source), the diode current detecting electrode being in contact with the p-type semiconductor region (body).
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: September 23, 2014
    Assignee: Renesas Electronics Corporation
    Inventor: Takayuki Hashimoto