With Means To Prevent Sub-surface Currents, Or With Non-uniform Channel Doping Patents (Class 257/345)
  • Publication number: 20140346598
    Abstract: In one embodiment, method of making a high voltage PMOS (HVPMOS) transistor, can include: (i) providing a P-type substrate; (ii) implanting N-type dopants in the P-type substrate; (iii) dispersing the implanted N-type dopants in the P-type substrate to form a deep N-type well; (iv) implanting P-type dopants of different doping concentrations in the deep N-type well along a horizontal direction of the deep N-type well; and (v) dispersing the implanted P-type dopants to form a composite drift region having an increasing doping concentration and an increasing junction depth along the horizontal direction of the deep N-type well.
    Type: Application
    Filed: May 14, 2014
    Publication date: November 27, 2014
    Applicant: Silergy Semiconductor Technology (Hangzhou) LTD
    Inventor: Chenggong Han
  • Patent number: 8884368
    Abstract: Some embodiments include transistors having a channel region under a gate, having a source/drain region laterally spaced from the channel region by an active region, and having one or more dielectric features extending through the active region in a configuration which precludes any straight-line lateral conductive path from the channel region to the source/drain region. The dielectric features may be spaced-apart islands in some configurations. The dielectric features may be multi-branched interlocking structures in some configurations.
    Type: Grant
    Filed: May 17, 2013
    Date of Patent: November 11, 2014
    Assignee: Micron Technology, Inc.
    Inventor: Michael A. Smith
  • Patent number: 8860136
    Abstract: A semiconductor device includes a transistor, formed in a semiconductor substrate having a first main surface. The transistor includes a source region, a drain region, a channel region, a drift zone, and a gate electrode being adjacent to the channel region, the gate electrode configured to control a conductivity of a channel formed in the channel region. The channel region and the drift zone are disposed along a first direction between the source region and the drain region, the first direction being parallel to the first main surface. The channel region has a shape of a ridge extending along the first direction and the drift zone including a superjunction layer stack.
    Type: Grant
    Filed: December 3, 2012
    Date of Patent: October 14, 2014
    Assignee: Infineon Technologies AG
    Inventors: Andreas Meiser, Till Schloesser
  • Patent number: 8809940
    Abstract: A FinFET is described, the FinFET includes a substrate including a top surface and a first insulation region and a second insulation region over the substrate top surface comprising tapered top surfaces. The FinFET further includes a fin of the substrate extending above the substrate top surface between the first and second insulation regions, wherein the fin includes a recessed portion having a top surface lower than the tapered top surfaces of the first and second insulation regions, wherein the fin includes a non-recessed portion having a top surface higher than the tapered top surfaces. The FinFET further includes a gate stack over the non-recessed portion of the fin.
    Type: Grant
    Filed: April 9, 2013
    Date of Patent: August 19, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Ta Lin, Chu-Yun Fu, Shin-Yeh Huang, Shu-Tine Yang, Hung-Ming Chen
  • Patent number: 8803233
    Abstract: A transistor includes a semiconductor layer, and a gate dielectric is formed on the semiconductor layer. A gate conductor is formed on the gate dielectric and an active area is located in the semiconductor layer underneath the gate dielectric. The active area includes a graded dopant region that has a higher doping concentration near a top surface of the semiconductor layer and a lower doping concentration near a bottom surface of the semiconductor layer. This graded dopant region has a gradual decrease in the doping concentration. The transistor also includes source and drain regions that are adjacent to the active region. The source and drain regions and the active area have the same conductivity type.
    Type: Grant
    Filed: September 23, 2011
    Date of Patent: August 12, 2014
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Bruce B. Doris, Ali Khakifirooz, Pranita Kulkarni, Tak H. Ning
  • Patent number: 8796748
    Abstract: Transistors, methods of manufacturing thereof, and image sensor circuits are disclosed. In one embodiment, a transistor includes a buried channel disposed in a workpiece, a gate dielectric disposed over the buried channel, and a gate layer disposed over the gate dielectric. The gate layer comprises an I shape in a top view of the transistor.
    Type: Grant
    Filed: August 8, 2012
    Date of Patent: August 5, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Fredrik Ramberg, Tse-Hua Lu, Tsun-Lai Hsu, Victor Chiang Liang, Chi-Feng Huang, Yu-Lin Wei, Shu Fang Fu
  • Patent number: 8779527
    Abstract: A method and circuit in which the drive strength of a FinFET transistor can be selectively modified, and in particular can be selectively reduced, by omitting the LDD extension formation in the source and/or in the drain of the FinFET. One application of this approach is to enable differentiation of the drive strengths of transistors in an integrated circuit by applying the technique to some, but not all, of the transistors in the integrated circuit. In particular in a SRAM cell formed from FinFET transistors the application of the technique to the pass-gate transistors, which leads to a reduction of the drive strength of the pass-gate transistors relative to the drive strength of the pull-up and pull-down transistors, results in improved SRAM cell performance.
    Type: Grant
    Filed: October 8, 2012
    Date of Patent: July 15, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Thomas Merelle, Gerben Doornbos, Robert James Pascoe Lander
  • Patent number: 8759916
    Abstract: Disclosed are embodiments of a metal oxide semiconductor field effect transistor (MOSFET) structure and a method of forming the structure. The structure incorporates source/drain regions and a channel region between the source/drain regions. The source/drain regions can comprise silicon, which has high diffusivity to the source/drain dopant. The channel region can comprise a silicon alloy selected for optimal charge carrier mobility and band energy and for its low source/drain dopant diffusivity. During processing, the source/drain dopant can diffuse into the edge portions of the channel region. However, due to the low diffusivity of the silicon alloy to the source/drain dopant, the dopant does not diffuse deep into channel region. Thus, the edge portions of the silicon alloy channel region can have essentially the same dopant profile as the source/drain regions, but a different dopant profile than the center portion of the silicon alloy channel region.
    Type: Grant
    Filed: January 27, 2012
    Date of Patent: June 24, 2014
    Assignee: International Business Machines Corporation
    Inventors: Andres Bryant, Edward J. Nowak
  • Patent number: 8742505
    Abstract: One or more embodiments relate to an apparatus comprising: a first transistor including a channel in a fin; and a second transistor including a channel in a fin, the channel of the first transistor being doped with a first dopant of a first polarity and counter-doped with a second dopant of a second polarity opposite to the first polarity, a concentration of the first dopant being approximately equal to a concentration of the second dopant, wherein the first transistor and the second transistor are of a same conductivity type.
    Type: Grant
    Filed: July 5, 2013
    Date of Patent: June 3, 2014
    Assignee: Infineon Technologies AG
    Inventors: Joerg Berthold, Christian Pacha, Klaus von Arnim
  • Patent number: 8735980
    Abstract: A semiconductor structure, which serves as the core of a semiconductor fabrication platform, has a combination of empty-well regions and filled-well regions variously used by electronic elements, particularly insulated-gate field-effect transistors (“IGFETs”), to achieve desired electronic characteristics. A relatively small amount of semiconductor well dopant is near the top of an empty well. A considerable amount of semiconductor well dopant is near the top of a filled well. Some IGFETs (100, 102, 112, 114, 124, and 126) utilize empty wells (180, 182, 192, 194, 204, and 206) in achieving desired transistor characteristics. Other IGFETs (108, 110, 116, 118, 120, and 122) utilize filled wells (188, 190, 196, 198, 200, and 202) in achieving desired transistor characteristics.
    Type: Grant
    Filed: November 6, 2012
    Date of Patent: May 27, 2014
    Assignee: National Semiconductor Corporation
    Inventors: Constantin Bulucea, Sandeep Bahl, William French, Jeng-Jiun Yang, Donald Archer, David C. Parker, Prasad Chaparala
  • Publication number: 20140138769
    Abstract: A semiconductor device includes a semiconductor substrate including a well having a first conductivity type defined by a device isolation region, a gate insulating film formed on the semiconductor substrate, a gate electrode formed on the gate insulating film and including a first side surface and a second side surface facing the first side surface, and a first side wall insulating film formed on the first side surface and a second side wall insulating film formed on the second side surface.
    Type: Application
    Filed: January 28, 2014
    Publication date: May 22, 2014
    Applicant: FUJITSU SEMICONDUCTOR LIMITED
    Inventors: Masaki Haneda, Yuka Kase, Masanori Terahara, Takayuki Aoyama
  • Patent number: 8716793
    Abstract: Disclosed are an LDMOS device and a method for manufacturing the same capable of decreasing the concentration of a drift region between a source finger tip and a drain, thereby increasing a breakdown voltage. An LDMOS device includes a gate which is formed on a substrate, a source and a drain which are separately arranged on both sides of the substrate with the gate interposed therebetween, a field oxide film which is formed to have a step between the gate and the drain, a drift region which is formed of first condition type impurity ions between the gate and the drain on the substrate, and at least one internal field ring which is formed inside the drift region and formed by selectively ion-implanting second conduction type impurity ions in accordance with the step of the field oxide film.
    Type: Grant
    Filed: March 2, 2012
    Date of Patent: May 6, 2014
    Assignee: Dongbu HiTek Co., Ltd.
    Inventors: Jae Hyun Yoo, Jong Min Kim
  • Patent number: 8686501
    Abstract: A semiconductor device includes: a p-type active region; a gate electrode traversing the active region; an n-type LDD region having a first impurity concentration and formed from a drain side region to a region under the gate electrode; a p-type channel region having a second impurity concentration and formed from a source side region to a region under the gate electrode to form an overlap region with the LDD region under the gate electrode, the channel region being shallower than the LDD region; an n-type source region formed outside the gate electrode; and an n+-type drain region having a third impurity concentration higher than the first impurity concentration formed outside and spaced from the gate electrode, wherein an n-type effective impurity concentration of an intermediate region between the gate electrode and the n+-type drain region is higher than an n-type effective impurity concentration of the overlap region.
    Type: Grant
    Filed: September 29, 2010
    Date of Patent: April 1, 2014
    Assignee: Fujitsu Semiconductor Limited
    Inventor: Masashi Shima
  • Patent number: 8680617
    Abstract: Disclosed is an SOI device on a bulk silicon layer which has an FET region, a body contact region and an STI region. The FET region is made of an SOI layer and an overlying gate. The STI region includes a first STI layer separating the SOI device from an adjacent SOI device. The body contact region includes an extension of the SOI layer, a second STI layer on the extension and a body contact in contact with the extension. The first and second STI layers are contiguous and of different thicknesses so as to form a split level STI.
    Type: Grant
    Filed: October 6, 2009
    Date of Patent: March 25, 2014
    Assignee: International Business Machines Corporation
    Inventors: Ying Li, Shreesh Narasimha, Werner A. Rausch
  • Patent number: 8664719
    Abstract: A semiconductor device is provided which includes a semiconductor substrate, a gate structure formed on the substrate, sidewall spacers formed on each side of the gate structure, a source and a drain formed in the substrate on either side of the gate structure, the source and drain having a first type of conductivity, a lightly doped region formed in the substrate and aligned with a side of the gate structure, the lightly doped region having the first type of conductivity, and a barrier region formed in the substrate and adjacent the drain. The barrier region is formed by doping a dopant of a second type of conductivity different from the first type of conductivity.
    Type: Grant
    Filed: January 7, 2013
    Date of Patent: March 4, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shu-Wei Vanessa Chung, Kuo-Feng Yu
  • Patent number: 8614121
    Abstract: Back gate triggered silicon controlled rectifiers (SCR) and methods of manufacture are disclosed. The method includes forming a first diffusion type and a second diffusion type in a semiconductor layer of a silicon on insulator (SOI) substrate. The method further includes forming a back gate of a first diffusion type in a substrate under an insulator layer of the SOI substrate. The method further includes forming raised diffusion regions of a first dopant type and a second dopant type, adjacent to the second diffusion type and the first diffusion type, respectively. The back gate is formed to cover the second diffusion type, the first diffusion type and the second dopant type of the raised diffusion regions.
    Type: Grant
    Filed: November 29, 2011
    Date of Patent: December 24, 2013
    Assignee: International Business Machines Corporation
    Inventors: Robert J. Gauthier, Jr., Junjun Li
  • Patent number: 8614486
    Abstract: A gate dielectric is patterned after formation of a first gate spacer by anisotropic etch of a conformal dielectric layer to minimize overetching into a semiconductor layer. In one embodiment, selective epitaxy is performed to sequentially form raised epitaxial semiconductor portions, a disposable gate spacer, and raised source and drain regions. The disposable gate spacer is removed and ion implantation is performed into exposed portions of the raised epitaxial semiconductor portions to form source and drain extension regions. In another embodiment, ion implantation for source and drain extension formation is performed through the conformal dielectric layer prior to an anisotropic etch that forms the first gate spacer. The presence of the raised epitaxial semiconductor portions or the conformation dielectric layer prevents complete amorphization of the semiconductor material in the source and drain extension regions, thereby enabling regrowth of crystalline source and drain extension regions.
    Type: Grant
    Filed: September 6, 2012
    Date of Patent: December 24, 2013
    Assignee: International Business Machines Corporation
    Inventors: Balasubramanian S. Haran, Hemanth Jagannathan, Sivananda K. Kanakasabapathy, Sanjay Mehta
  • Patent number: 8610220
    Abstract: A semiconductor device and method for fabricating a semiconductor device is disclosed. An exemplary semiconductor device includes a substrate including a metal oxide device. The metal oxide device includes first and second doped regions disposed within the substrate and interfacing in a channel region. The first and second doped regions are doped with a first type dopant. The first doped region has a different concentration of dopant than the second doped region. The metal oxide device further includes a gate structure traversing the channel region and the interface of the first and second doped regions and separating source and drain regions. The source region is formed within the first doped region and the drain region is formed within the second doped region. The source and drain regions are doped with a second type dopant. The second type dopant is opposite of the first type dopant.
    Type: Grant
    Filed: May 16, 2012
    Date of Patent: December 17, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yue-Der Chih, Jam-Wem Lee, Cheng-Hsiung Kuo, Tsung-Che Tsai, Ming-Hsiang Song, Hung-Cheng Sung, Roger Wang
  • Patent number: 8610207
    Abstract: An insulated-gate field-effect transistor (220U) utilizes an empty-well region for achieving high performance. The concentration of the body dopant reaches a maximum at a subsurface location no more than 10 times deeper below the upper semiconductor surface than the depth of one of a pair of source/drain zones (262 and 264), decreases by at least a factor of 10 in moving from the subsurface location along a selected vertical line (136U) through that source/drain zone to the upper semiconductor surface, and has a logarithm that decreases substantially monotonically and substantially inflectionlessly in moving from the subsurface location along the vertical line to that source/drain zone. Each source/drain zone has a main portion (262M or 264M) and a more lightly doped lateral extension (262E or 264E). Alternatively or additionally, a more heavily doped pocket portion (280) of the body material extends along one of the source/drain zones.
    Type: Grant
    Filed: November 16, 2011
    Date of Patent: December 17, 2013
    Assignee: Texas Instruments Incorporated
    Inventor: Constantin Bulucea
  • Publication number: 20130299906
    Abstract: A buried-channel field-effect transistor includes a semiconductor layer formed on a substrate. The semiconductor layer includes doped source and drain regions and an undoped channel region. the transistor further includes a gate dielectric formed over the channel region and partially overlapping the source and drain regions; a gate formed over the gate dielectric; and a doped shielding layer between the gate dielectric and the semiconductor layer.
    Type: Application
    Filed: May 18, 2012
    Publication date: November 14, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: KANGGUO CHENG, Ali Khakifirooz, Pranita Kulkarni, Tak H. Ning
  • Patent number: 8554279
    Abstract: A boosting circuit unit supplies a boosting voltage to one terminal of a backlight. A boosting comparator compares a voltage applied to the other terminal of the backlight with a predetermined reference voltage value, and outputs a comparison result as a feedback signal reflecting the boosting voltage to the boosting circuit unit. An LED driver unit is connected to the other terminal of the backlight and supplies drive current to the backlight. An acquisition unit acquires a PWM signal, which is generated based on the content of a video signal and can be used to change the luminance of the backlight. An LPF unit outputs a time-averaged signal of the acquired PWM signal as a control signal to be supplied to the LED driver unit.
    Type: Grant
    Filed: November 12, 2008
    Date of Patent: October 8, 2013
    Assignees: Semiconductor Components Industries, LLC., Sanyo Semiconductor Co., Ltd.
    Inventor: Nobuyuki Otaka
  • Patent number: 8530975
    Abstract: A semiconductor device includes a substrate having an active region and an isolation region, a gate pattern crossing both the active region and the isolation region of the substrate, and a protrusion having a surface higher than that of the substrate over at least an edge of the active region contacting a portion of the isolation region under the gate pattern.
    Type: Grant
    Filed: May 29, 2012
    Date of Patent: September 10, 2013
    Assignee: SK hynix Inc.
    Inventor: Ho-Ung Kim
  • Patent number: 8525342
    Abstract: A stacked integrated circuit (IC) may be manufactured with a second tier wafer bonded to a double-sided first tier wafer. The double-sided first tier wafer includes back-end-of-line (BEOL) layers on a front and a back side of the wafer. Extended contacts within the first tier wafer connect the front side and the back side BEOL layers. The extended contact extends through a junction of the first tier wafer. The second tier wafer couples to the front side of the first tier wafer through the extended contacts. Additional contacts couple devices within the first tier wafer to the front side BEOL layers. When double-sided wafers are used in stacked ICs, the height of the stacked ICs may be reduced. The stacked ICs may include wafers of identical functions or wafers of different functions.
    Type: Grant
    Filed: April 12, 2010
    Date of Patent: September 3, 2013
    Assignee: QUALCOMM Incorporated
    Inventors: Arvind Chandrasekaran, Brian Henderson
  • Patent number: 8513734
    Abstract: A disclosed power transistor, suitable for use in a switch mode converter that is operable with a switching frequency exceeding, for example, 5 MHz or more, includes a gate dielectric layer overlying an upper surface of a semiconductor substrate and first and second gate electrodes overlying the gate dielectric layer. The first gate electrode is laterally positioned overlying a first region of the substrate. The first substrate region has a first type of doping, which may be either n-type or p-type. A second gate electrode of the power transistor overlies the gate dielectric and is laterally positioned over a second region of the substrate. The second substrate region has a second doping type that is different than the first type. The transistor further includes a drift region located within the substrate in close proximity to an upper surface of the substrate and laterally positioned between the first and second substrate regions.
    Type: Grant
    Filed: March 22, 2011
    Date of Patent: August 20, 2013
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Hongning Yang, Jiang-Kai Zuo
  • Patent number: 8492835
    Abstract: A HV MOSFET device includes a substrate, a deep well region, a source/body region, a drain region, a gate structure, and a first doped region. The deep well region includes a boundary site and a middle site. The source/body region is formed in the deep well region and defines a channel region. The first doped region is formed in the deep well region and disposed under the gate structure, and having the first conductivity type. There is a first ratio between a dopant dose of the first doped region and a dopant dose of the boundary site of the deep well region. There is a second ratio between a dopant dose of the first doped region and a dopant dose of the middle site of the deep well region. A percentage difference between the first ratio and the second ratio is smaller than or equal to 5%.
    Type: Grant
    Filed: January 20, 2012
    Date of Patent: July 23, 2013
    Assignee: United Microelectronics Corporation
    Inventors: Chih-Chung Wang, Ming-Tsung Lee, Chung-I Huang, Shan-Shi Huang, Wen-Fang Lee, Te-Yuan Wu
  • Patent number: 8487367
    Abstract: A semiconductor device is disclosed that includes a semiconductor substrate having a channel region and respective source and drain regions formed on opposite sides of the channel region. The channel region includes at least one pore. A gate is formed on the semiconductor substrate between the source and drain regions and includes at least one pin received by respective ones of the at least one pore. A dielectric layer is disposed between the gate and the semiconductor substrate.
    Type: Grant
    Filed: November 24, 2010
    Date of Patent: July 16, 2013
    Assignee: Rambus Inc.
    Inventor: Mark D. Kellam
  • Patent number: 8471329
    Abstract: A tunnel field-effect transistor (TFET) includes a gate electrode, a source region, and a drain region. The source and drain regions are of opposite conductivity types. A channel region is disposed between the source region and the drain region. A source diffusion barrier is disposed between the channel region and the source region. The source diffusion barrier and the source region are under and overlapping the gate electrode. The source diffusion barrier has a first bandgap greater than second bandgaps of the source region, the drain region, and the channel region.
    Type: Grant
    Filed: November 16, 2011
    Date of Patent: June 25, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Krishna Kumar Bhuwalka, Gerben Doornbos, Matthias Passlack
  • Patent number: 8431994
    Abstract: Silicon-on-insulator (SOI) structures with silicon layers less than 20 nm thick are used to form extremely thin silicon-on-insulator (ETSOI) semiconductor devices. ETSOI devices are manufactured using a thin tungsten backgate encapsulated by thin nitride layers to prevent metal oxidation, the tungsten backgate being characterized by its low resistivity. The structure further includes at least one FET having a gate stack formed by a high-K metal gate and a tungsten region superimposed thereon, the footprint of the gate stack utilizing the thin SOI layer as a channel. The SOI structure thus formed controls the Vt variation from the thin SOI thickness and dopants therein. The ETSOI high-K metal backgate fully depleted device in conjunction with the thin BOX provides an excellent short channel control and significantly lowers the drain induced bias and sub-threshold swings.
    Type: Grant
    Filed: March 16, 2010
    Date of Patent: April 30, 2013
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Zhibin Ren, Xinhui Wang
  • Patent number: 8415745
    Abstract: An ESD protection device is described, which includes a P-body region, a P-type doped region, an N-type doped region and an N-sinker region. The P-body region is configured in a substrate. The P-type doped region is configured in the middle of the P-body region. The N-type doped region is configured in the P-body region and surrounds the P-type doped region. The N-sinker region is configured in the substrate and surrounds the P-body region.
    Type: Grant
    Filed: April 26, 2011
    Date of Patent: April 9, 2013
    Assignee: United Microelectronics Corp.
    Inventor: Fang-Mei Chao
  • Patent number: 8395197
    Abstract: A semiconductor device includes a gate electrode on a gate insulating film over a semiconductor substrate, a first sidewall insulating film on a side surface of the gate electrode, and source and drain regions, each including a pocket diffusion layer of a first conductivity type, and first and second diffusion layers of a second conductivity type. The pocket diffusion layer is disposed in the semiconductor substrate. The first diffusion layer of a second conductivity type extends over the pocket diffusion layer. The first diffusion layer faces toward the gate electrode through the first sidewall insulating film. The second diffusion layer over the first diffusion layer is higher in impurity concentration than the first diffusion layer. The second diffusion layer is separated by the first diffusion layer from the pocket diffusion layer, and has a side surface which faces toward the first sidewall insulating film through the first diffusion layer.
    Type: Grant
    Filed: December 6, 2010
    Date of Patent: March 12, 2013
    Assignee: Elpida Memory, Inc.
    Inventor: Takeshi Nagai
  • Patent number: 8390063
    Abstract: According to one embodiment, a semiconductor device comprises a high-k gate dielectric overlying a well region having a first conductivity type formed in a semiconductor body, and a semiconductor gate formed on the high-k gate dielectric. The semiconductor gate is lightly doped so as to have a second conductivity type opposite the first conductivity type. The disclosed semiconductor device, which may be an NMOS or PMOS device, can further comprise an isolation region formed in the semiconductor body between the semiconductor gate and a drain of the second conductivity type, and a drain extension well of the second conductivity type surrounding the isolation region in the semiconductor body. In one embodiment, the disclosed semiconductor device is fabricated as part of an integrated circuit including one or more CMOS logic devices.
    Type: Grant
    Filed: January 29, 2010
    Date of Patent: March 5, 2013
    Assignee: Broadcom Corporation
    Inventors: Akira Ito, Xiangdong Chen
  • Patent number: 8368142
    Abstract: A semiconductor device having performance comparable with a MOSFET is provided. An active layer of the semiconductor device is formed by a crystalline silicon film crystallized by using a metal element for promoting crystallization, and further by carrying out a heat treatment in an atmosphere containing a halogen element to carry out gettering of the metal element. The active layer after this process is constituted by an aggregation of a plurality of needle-shaped or column-shaped crystals. A semiconductor device manufactured by using this crystalline structure has extremely high performance.
    Type: Grant
    Filed: September 19, 2006
    Date of Patent: February 5, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Hisashi Ohtani, Jun Koyama, Takeshi Fukunaga
  • Patent number: 8362558
    Abstract: A lateral-double diffused MOS device is provided. The device includes: a first well having a first conductive type and a second well having a second conductive type disposed in a substrate and adjacent to each other; a drain and a source regions having the first conductive type disposed in the first and the second wells, respectively; a field oxide layer (FOX) disposed on the first well between the source and the drain regions; a gate conductive layer disposed over the second well between the source and the drain regions extending to the FOX; a gate dielectric layer between the substrate and the gate conductive layer; a doped region having the first conductive type in the first well below a portion of the gate conductive layer and the FOX connecting to the drain region. A channel region is defined in the second well between the doped region and the source region.
    Type: Grant
    Filed: May 4, 2011
    Date of Patent: January 29, 2013
    Assignee: MACRONIX International Co., Ltd.
    Inventors: Hsueh-I Huang, Chien-Wen Chu, Cheng-Chi Lin, Shih-Chin Lien, Chin-Pen Yeh, Shyi-Yuan Wu
  • Patent number: 8350327
    Abstract: A semiconductor device is provided which includes a semiconductor substrate, a gate structure formed on the substrate, sidewall spacers formed on each side of the gate structure, a source and a drain formed in the substrate on either side of the gate structure, the source and drain having a first type of conductivity, a lightly doped region formed in the substrate and aligned with a side of the gate structure, the lightly doped region having the first type of conductivity, and a barrier region formed in the substrate and adjacent the drain. The barrier region is formed by doping a dopant of a second type of conductivity different from the first type of conductivity.
    Type: Grant
    Filed: August 28, 2009
    Date of Patent: January 8, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shu-Wei Vanessa Chung, Kuo-Feng Yu
  • Patent number: 8344452
    Abstract: An MOS transistor formed on a heavily doped substrate is described. Metal gates are used in low temperature processing to prevent doping from the substrate from diffusing into the channel region of the transistor.
    Type: Grant
    Filed: January 24, 2008
    Date of Patent: January 1, 2013
    Assignee: Intel Corporation
    Inventors: Nick Lindert, Justin K. Brask, Andrew Westmeyer
  • Patent number: 8330231
    Abstract: A transistor structure is formed by providing a semiconductor substrate and providing a gate above the semiconductor substrate. The gate is separated from the semiconductor substrate by a gate insulating layer. A source and a drain are provided adjacent the gate to define a transistor channel underlying the gate and separated from the gate by the gate insulating layer. A barrier layer is formed by applying nitrogen or carbon on opposing outer vertical sides of the transistor channel between the transistor channel and each of the source and the drain. In each of the nitrogen and the carbon embodiments, the vertical channel barrier retards diffusion of the source/drain dopant species into the transistor channel. There are methods for forming the transistor structure.
    Type: Grant
    Filed: March 16, 2011
    Date of Patent: December 11, 2012
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Da Zhang, Ning Liu, Mohamed S. Moosa
  • Patent number: 8298886
    Abstract: An electronic device can include a drain region of a transistor, wherein the drain region has a first conductivity type. The electronic device can also include a channel region of the transistor, wherein the channel region has a second conductivity type opposite the first conductivity type. The electronic device can further include a first doped region having the first conductivity type, wherein the first doped region extends from the drain region towards the channel region. The electronic device can still further include a second doped region having the first conductivity type, wherein the second doped region is disposed between the first doped region and the channel region.
    Type: Grant
    Filed: February 8, 2010
    Date of Patent: October 30, 2012
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Gary H. Loechelt, Gordon M. Grivna
  • Patent number: 8278686
    Abstract: A vertically-conducting planar-gate field effect transistor includes a silicon region of a first conductivity type, a silicon-germanium layer extending over the silicon region, a gate electrode laterally extending over but being insulated from the silicon-germanium layer, a body region of the second conductivity type extending in the silicon-germanium layer and the silicon region, and source region of the first conductivity type extending in the silicon-germanium layer. The gate electrode laterally overlaps both the source and body regions such that a portion of the silicon germanium layer extending directly under the gate electrode between the source region and an outer boundary of the body region forms a channel region.
    Type: Grant
    Filed: May 9, 2011
    Date of Patent: October 2, 2012
    Assignee: Fairchild Semiconductor Corporation
    Inventors: James Pan, Qi Wang
  • Publication number: 20120228706
    Abstract: A memory includes a semiconductor layer, a gate insulating film on the semiconductor layer, and a gate electrode on the gate insulating film. A first channel region of a first conductivity type is provided on a surface of the semiconductor layer below the gate insulating film. A diffusion layer of a second conductivity type is provided below the first channel region in the semiconductor layer. The diffusion layer contacts a bottom of the first channel region in a direction substantially vertical to a surface of the semiconductor layer. The diffusion layer forms a PN junction with the bottom of the first channel region. A drain of a first conductivity type and a source of a second conductivity type are provided on a side and another side of the first channel region. A sidewall film covers a side surface of the first channel region on a side of the diffusion layer.
    Type: Application
    Filed: January 26, 2012
    Publication date: September 13, 2012
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Emiko Sugizaki, Shigeru Kawanaka, Kanna Adachi
  • Patent number: 8264029
    Abstract: The present invention provides a semiconductor device that has a shorter distance between the bit lines and easily achieves higher storage capacity and density, and a method of manufacturing such a semiconductor device. The semiconductor device includes: first bit lines formed on a substrate; an insulating layer that is provided between the first bit lines on the substrate, and has a higher upper face than the first bit lines; channel layers that are provided on both side faces of the insulating layer, and are coupled to the respective first bit lines; and charge storage layers that are provided on the opposite side faces of the channel layers from the side faces on which the insulating layers are formed.
    Type: Grant
    Filed: December 17, 2007
    Date of Patent: September 11, 2012
    Assignee: Spansion LLC
    Inventors: Yukio Hayakawa, Hiroyuki Nansei
  • Patent number: 8253163
    Abstract: A high voltage semiconductor device includes a semiconductor substrate, a p type base region in a first main surface, an n+ type emitter region in the p type base region, an n+ type cathode region adjacent to an end surface of the semiconductor substrate and not penetrating the semiconductor substrate, a p+ type collector region in a second main surface, a first main electrode, a second main electrode, a third main electrode, and a connection portion connecting the second main electrode and the third main electrode. A resistance between the p type base region and the n+ type cathode region is greater than a resistance between the p type base region and the p+ type collector region. In the high voltage semiconductor device in which an IGBT and a free wheel diode are formed in a single semiconductor substrate, occurrence of a snap-back phenomenon is suppressed.
    Type: Grant
    Filed: October 7, 2010
    Date of Patent: August 28, 2012
    Assignee: Mitsubishi Electric Corporation
    Inventors: Shigeru Kusunoki, Junji Yahiro, Yoshihiko Hirota
  • Patent number: 8222649
    Abstract: A semiconductor device and a method of manufacturing the same, to appropriately determine an impurity concentration distribution of a field relieving region and reduce an ON-resistance. The semiconductor device includes a substrate, a first drift layer, a second drift layer, a first well region, a second well region, a current control region, and a field relieving region. The first well region is disposed continuously from an end portion adjacent to the vicinity of outer peripheral portion of the second drift layer to a portion of the first drift layer below the vicinity of outer peripheral portion. The field relieving region is so disposed in the first drift layer as to be adjacent to the first well region.
    Type: Grant
    Filed: November 17, 2006
    Date of Patent: July 17, 2012
    Assignee: Mitsubishi Electric Corporation
    Inventors: Naruhisa Miura, Keiko Fujihira, Kenichi Otsuka, Masayuki Imaizumi
  • Patent number: 8183636
    Abstract: One or more embodiments relate to a static random access memory cell comprising: a first inverter including a first n-channel pull-down transistor coupled between a first node and a ground voltage; a second inverter including a second n-channel pull-down transistor coupled between a second node and the ground voltage; a first n-channel access transistor coupled between a first bit line and the first node of the first inverter, a fin of the first n-channel access transistor having a lower charge carrier mobility than a fin of the first n-channel pull-down transistor; and a second n-channel access transistor coupled between a second bit line and the second node of the second inverter, a fin of the second n-channel access transistor having a lower charge carrier mobility than a fin of the second n-channel pull-down transistor.
    Type: Grant
    Filed: March 28, 2011
    Date of Patent: May 22, 2012
    Assignee: Infineon Technologies AG
    Inventors: Joerg Berthold, Christian Pacha, Klaus Arnim Von
  • Publication number: 20120112206
    Abstract: An asymmetric hetero-structure FET and method of manufacture is provided. The structure includes a semiconductor substrate and an epitaxially grown semiconductor layer on the semiconductor substrate. The epitaxially grown semiconductor layer includes an alloy having a band structure and thickness that confines inversion carriers in a channel region, and a thicker portion extending deeper into the semiconductor structure at a doped edge to avoid confinement of the inversion carriers at the doped edge.
    Type: Application
    Filed: November 4, 2010
    Publication date: May 10, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Brent A. ANDERSON, Jeffrey B. JOHNSON, Edward J. NOWAK, Robert R. ROBISON
  • Patent number: 8164086
    Abstract: A phase controllable field effect transistor device is described. The device provides first and second scattering sites disposed at either side of a conducting channel region, the conducting region being gated such that on application of an appropriate signal to the gate, energies of the electrons in the channel region defined between the scattering centers may be modulated.
    Type: Grant
    Filed: September 17, 2009
    Date of Patent: April 24, 2012
    Assignee: The Provost, Fellows and Scholars of the Colege of the Holy and Undivided Trinity of Queen Elizabeth Near Dublin
    Inventors: John Boland, Stefano Sanvito, Borislav Naydenov
  • Patent number: 8164142
    Abstract: According to an aspect of an embodiment, a semiconductor device has a semiconductor substrate, a gate insulating film on the semiconductor substrate, a gate electrode formed on the gate insulating film, an impurity diffusion region formed in an area of the semiconductor substrate adjacent to the gate electrode to a first depth to the semiconductor substrate, the impurity diffusion region containing impurity, an inert substance containing region formed in the area of the semiconductor substrate to a second depth deeper than the first depth, the inert substance containing region containing an inert substance, and a diffusion suppressing region formed in the area of the semiconductor substrate to a third depth deeper than the second depth, the diffusion suppressing region containing a diffusion suppressing substance suppressing diffusion of the impurity.
    Type: Grant
    Filed: January 4, 2011
    Date of Patent: April 24, 2012
    Assignee: Fujitsu Semiconductor Limited
    Inventor: Kenichi Okabe
  • Patent number: 8164111
    Abstract: A high voltage semiconductor device includes a semiconductor substrate, a p type base region in a first main surface, an n+ type emitter region in the p type base region, an n+ type cathode region adjacent to an end surface of the semiconductor substrate and not penetrating the semiconductor substrate, a p+ type collector region in a second main surface, a first main electrode, a second main electrode, a third main electrode, and a connection portion connecting the second main electrode and the third main electrode. A resistance between the p type base region and the n+ type cathode region is greater than a resistance between the p type base region and the p+ type collector region. In the high voltage semiconductor device in which an IGBT and a free wheel diode are formed in a single semiconductor substrate, occurrence of a snap-back phenomenon is suppressed.
    Type: Grant
    Filed: October 7, 2010
    Date of Patent: April 24, 2012
    Assignee: Mitsubishi Electric Corporation
    Inventors: Shigeru Kusunoki, Junji Yahiro, Yoshihiko Hirota
  • Patent number: 8159011
    Abstract: A charge transfer transistor includes: a first diffusion region and a second diffusion region; a gate for controlling a charge transfer from the first diffusion region to the second diffusion region by a control signal; and a potential well incorporated under the gate, wherein the first diffusion region is a pinned photodiode. A pixel of an image sensor includes: a photodiode for generating and collecting a photo generated charge; a floating diffusion region for serving as a photo generated charge sensing node; a transfer gate for controlling a charge transfer from the photodiode to the floating diffusion region by a control signal; and a potential well incorporated under the transfer gate.
    Type: Grant
    Filed: February 28, 2007
    Date of Patent: April 17, 2012
    Assignee: Intellectual Ventures II LLC
    Inventor: Jaroslav Hynecek
  • Patent number: 8148771
    Abstract: A semiconductor device 100 includes a semiconductor substrate 14, a connection electrode 12 disposed on an upper surface of the semiconductor substrate 14 and connected to an integrated circuit thereon, a through electrode 20 which penetrates the semiconductor substrate 14 and the connection electrode 20, and an insulation portion 30 interposed between the semiconductor substrate 14 and the through electrode 20. The through electrode 20 is integrally formed to protrude outward from upper surfaces of the semiconductor substrate 14 and the connection electrode 12, and connected to the connection electrode 12 in a region where the through electrode 20 penetrates the connection electrode 12.
    Type: Grant
    Filed: July 15, 2010
    Date of Patent: April 3, 2012
    Assignee: Spansion LLC
    Inventors: Masataka Hoshino, Ryoto Fukuyama, Koji Taya
  • Patent number: 8148777
    Abstract: An insulated-gate field-effect transistor (100, 100V, 140, 150, 150V, 160, 170, 170V, 180, 180V, 190, 210, 210W, 500, 510, or 530; or 220, 220W, or 540) is provided with a hypoabrupt vertical dopant profile below one (104; or 264 or 564) of its source/drain zones for reducing the parasitic capacitance along the pn junction between that source/drain zone and adjoining body material (108; or 268 or 568). In particular, the concentration of semiconductor dopant which defines the conductivity type of the body material increases by at least a factor of 10 in moving from that source/drain zone down to an underlying body-material location no more than 10 times deeper below the upper semiconductor surface than that source/drain zone.
    Type: Grant
    Filed: September 15, 2010
    Date of Patent: April 3, 2012
    Assignee: National Semiconductor Corporation
    Inventor: Constantin Bulucea