With Means To Prevent Sub-surface Currents, Or With Non-uniform Channel Doping Patents (Class 257/345)
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Publication number: 20140346598Abstract: In one embodiment, method of making a high voltage PMOS (HVPMOS) transistor, can include: (i) providing a P-type substrate; (ii) implanting N-type dopants in the P-type substrate; (iii) dispersing the implanted N-type dopants in the P-type substrate to form a deep N-type well; (iv) implanting P-type dopants of different doping concentrations in the deep N-type well along a horizontal direction of the deep N-type well; and (v) dispersing the implanted P-type dopants to form a composite drift region having an increasing doping concentration and an increasing junction depth along the horizontal direction of the deep N-type well.Type: ApplicationFiled: May 14, 2014Publication date: November 27, 2014Applicant: Silergy Semiconductor Technology (Hangzhou) LTDInventor: Chenggong Han
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Patent number: 8884368Abstract: Some embodiments include transistors having a channel region under a gate, having a source/drain region laterally spaced from the channel region by an active region, and having one or more dielectric features extending through the active region in a configuration which precludes any straight-line lateral conductive path from the channel region to the source/drain region. The dielectric features may be spaced-apart islands in some configurations. The dielectric features may be multi-branched interlocking structures in some configurations.Type: GrantFiled: May 17, 2013Date of Patent: November 11, 2014Assignee: Micron Technology, Inc.Inventor: Michael A. Smith
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Patent number: 8860136Abstract: A semiconductor device includes a transistor, formed in a semiconductor substrate having a first main surface. The transistor includes a source region, a drain region, a channel region, a drift zone, and a gate electrode being adjacent to the channel region, the gate electrode configured to control a conductivity of a channel formed in the channel region. The channel region and the drift zone are disposed along a first direction between the source region and the drain region, the first direction being parallel to the first main surface. The channel region has a shape of a ridge extending along the first direction and the drift zone including a superjunction layer stack.Type: GrantFiled: December 3, 2012Date of Patent: October 14, 2014Assignee: Infineon Technologies AGInventors: Andreas Meiser, Till Schloesser
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Patent number: 8809940Abstract: A FinFET is described, the FinFET includes a substrate including a top surface and a first insulation region and a second insulation region over the substrate top surface comprising tapered top surfaces. The FinFET further includes a fin of the substrate extending above the substrate top surface between the first and second insulation regions, wherein the fin includes a recessed portion having a top surface lower than the tapered top surfaces of the first and second insulation regions, wherein the fin includes a non-recessed portion having a top surface higher than the tapered top surfaces. The FinFET further includes a gate stack over the non-recessed portion of the fin.Type: GrantFiled: April 9, 2013Date of Patent: August 19, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Ta Lin, Chu-Yun Fu, Shin-Yeh Huang, Shu-Tine Yang, Hung-Ming Chen
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Patent number: 8803233Abstract: A transistor includes a semiconductor layer, and a gate dielectric is formed on the semiconductor layer. A gate conductor is formed on the gate dielectric and an active area is located in the semiconductor layer underneath the gate dielectric. The active area includes a graded dopant region that has a higher doping concentration near a top surface of the semiconductor layer and a lower doping concentration near a bottom surface of the semiconductor layer. This graded dopant region has a gradual decrease in the doping concentration. The transistor also includes source and drain regions that are adjacent to the active region. The source and drain regions and the active area have the same conductivity type.Type: GrantFiled: September 23, 2011Date of Patent: August 12, 2014Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Bruce B. Doris, Ali Khakifirooz, Pranita Kulkarni, Tak H. Ning
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Patent number: 8796748Abstract: Transistors, methods of manufacturing thereof, and image sensor circuits are disclosed. In one embodiment, a transistor includes a buried channel disposed in a workpiece, a gate dielectric disposed over the buried channel, and a gate layer disposed over the gate dielectric. The gate layer comprises an I shape in a top view of the transistor.Type: GrantFiled: August 8, 2012Date of Patent: August 5, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Fredrik Ramberg, Tse-Hua Lu, Tsun-Lai Hsu, Victor Chiang Liang, Chi-Feng Huang, Yu-Lin Wei, Shu Fang Fu
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Patent number: 8779527Abstract: A method and circuit in which the drive strength of a FinFET transistor can be selectively modified, and in particular can be selectively reduced, by omitting the LDD extension formation in the source and/or in the drain of the FinFET. One application of this approach is to enable differentiation of the drive strengths of transistors in an integrated circuit by applying the technique to some, but not all, of the transistors in the integrated circuit. In particular in a SRAM cell formed from FinFET transistors the application of the technique to the pass-gate transistors, which leads to a reduction of the drive strength of the pass-gate transistors relative to the drive strength of the pull-up and pull-down transistors, results in improved SRAM cell performance.Type: GrantFiled: October 8, 2012Date of Patent: July 15, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Thomas Merelle, Gerben Doornbos, Robert James Pascoe Lander
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Patent number: 8759916Abstract: Disclosed are embodiments of a metal oxide semiconductor field effect transistor (MOSFET) structure and a method of forming the structure. The structure incorporates source/drain regions and a channel region between the source/drain regions. The source/drain regions can comprise silicon, which has high diffusivity to the source/drain dopant. The channel region can comprise a silicon alloy selected for optimal charge carrier mobility and band energy and for its low source/drain dopant diffusivity. During processing, the source/drain dopant can diffuse into the edge portions of the channel region. However, due to the low diffusivity of the silicon alloy to the source/drain dopant, the dopant does not diffuse deep into channel region. Thus, the edge portions of the silicon alloy channel region can have essentially the same dopant profile as the source/drain regions, but a different dopant profile than the center portion of the silicon alloy channel region.Type: GrantFiled: January 27, 2012Date of Patent: June 24, 2014Assignee: International Business Machines CorporationInventors: Andres Bryant, Edward J. Nowak
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Patent number: 8742505Abstract: One or more embodiments relate to an apparatus comprising: a first transistor including a channel in a fin; and a second transistor including a channel in a fin, the channel of the first transistor being doped with a first dopant of a first polarity and counter-doped with a second dopant of a second polarity opposite to the first polarity, a concentration of the first dopant being approximately equal to a concentration of the second dopant, wherein the first transistor and the second transistor are of a same conductivity type.Type: GrantFiled: July 5, 2013Date of Patent: June 3, 2014Assignee: Infineon Technologies AGInventors: Joerg Berthold, Christian Pacha, Klaus von Arnim
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Patent number: 8735980Abstract: A semiconductor structure, which serves as the core of a semiconductor fabrication platform, has a combination of empty-well regions and filled-well regions variously used by electronic elements, particularly insulated-gate field-effect transistors (“IGFETs”), to achieve desired electronic characteristics. A relatively small amount of semiconductor well dopant is near the top of an empty well. A considerable amount of semiconductor well dopant is near the top of a filled well. Some IGFETs (100, 102, 112, 114, 124, and 126) utilize empty wells (180, 182, 192, 194, 204, and 206) in achieving desired transistor characteristics. Other IGFETs (108, 110, 116, 118, 120, and 122) utilize filled wells (188, 190, 196, 198, 200, and 202) in achieving desired transistor characteristics.Type: GrantFiled: November 6, 2012Date of Patent: May 27, 2014Assignee: National Semiconductor CorporationInventors: Constantin Bulucea, Sandeep Bahl, William French, Jeng-Jiun Yang, Donald Archer, David C. Parker, Prasad Chaparala
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Publication number: 20140138769Abstract: A semiconductor device includes a semiconductor substrate including a well having a first conductivity type defined by a device isolation region, a gate insulating film formed on the semiconductor substrate, a gate electrode formed on the gate insulating film and including a first side surface and a second side surface facing the first side surface, and a first side wall insulating film formed on the first side surface and a second side wall insulating film formed on the second side surface.Type: ApplicationFiled: January 28, 2014Publication date: May 22, 2014Applicant: FUJITSU SEMICONDUCTOR LIMITEDInventors: Masaki Haneda, Yuka Kase, Masanori Terahara, Takayuki Aoyama
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Patent number: 8716793Abstract: Disclosed are an LDMOS device and a method for manufacturing the same capable of decreasing the concentration of a drift region between a source finger tip and a drain, thereby increasing a breakdown voltage. An LDMOS device includes a gate which is formed on a substrate, a source and a drain which are separately arranged on both sides of the substrate with the gate interposed therebetween, a field oxide film which is formed to have a step between the gate and the drain, a drift region which is formed of first condition type impurity ions between the gate and the drain on the substrate, and at least one internal field ring which is formed inside the drift region and formed by selectively ion-implanting second conduction type impurity ions in accordance with the step of the field oxide film.Type: GrantFiled: March 2, 2012Date of Patent: May 6, 2014Assignee: Dongbu HiTek Co., Ltd.Inventors: Jae Hyun Yoo, Jong Min Kim
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Patent number: 8686501Abstract: A semiconductor device includes: a p-type active region; a gate electrode traversing the active region; an n-type LDD region having a first impurity concentration and formed from a drain side region to a region under the gate electrode; a p-type channel region having a second impurity concentration and formed from a source side region to a region under the gate electrode to form an overlap region with the LDD region under the gate electrode, the channel region being shallower than the LDD region; an n-type source region formed outside the gate electrode; and an n+-type drain region having a third impurity concentration higher than the first impurity concentration formed outside and spaced from the gate electrode, wherein an n-type effective impurity concentration of an intermediate region between the gate electrode and the n+-type drain region is higher than an n-type effective impurity concentration of the overlap region.Type: GrantFiled: September 29, 2010Date of Patent: April 1, 2014Assignee: Fujitsu Semiconductor LimitedInventor: Masashi Shima
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Patent number: 8680617Abstract: Disclosed is an SOI device on a bulk silicon layer which has an FET region, a body contact region and an STI region. The FET region is made of an SOI layer and an overlying gate. The STI region includes a first STI layer separating the SOI device from an adjacent SOI device. The body contact region includes an extension of the SOI layer, a second STI layer on the extension and a body contact in contact with the extension. The first and second STI layers are contiguous and of different thicknesses so as to form a split level STI.Type: GrantFiled: October 6, 2009Date of Patent: March 25, 2014Assignee: International Business Machines CorporationInventors: Ying Li, Shreesh Narasimha, Werner A. Rausch
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Patent number: 8664719Abstract: A semiconductor device is provided which includes a semiconductor substrate, a gate structure formed on the substrate, sidewall spacers formed on each side of the gate structure, a source and a drain formed in the substrate on either side of the gate structure, the source and drain having a first type of conductivity, a lightly doped region formed in the substrate and aligned with a side of the gate structure, the lightly doped region having the first type of conductivity, and a barrier region formed in the substrate and adjacent the drain. The barrier region is formed by doping a dopant of a second type of conductivity different from the first type of conductivity.Type: GrantFiled: January 7, 2013Date of Patent: March 4, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shu-Wei Vanessa Chung, Kuo-Feng Yu
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Patent number: 8614121Abstract: Back gate triggered silicon controlled rectifiers (SCR) and methods of manufacture are disclosed. The method includes forming a first diffusion type and a second diffusion type in a semiconductor layer of a silicon on insulator (SOI) substrate. The method further includes forming a back gate of a first diffusion type in a substrate under an insulator layer of the SOI substrate. The method further includes forming raised diffusion regions of a first dopant type and a second dopant type, adjacent to the second diffusion type and the first diffusion type, respectively. The back gate is formed to cover the second diffusion type, the first diffusion type and the second dopant type of the raised diffusion regions.Type: GrantFiled: November 29, 2011Date of Patent: December 24, 2013Assignee: International Business Machines CorporationInventors: Robert J. Gauthier, Jr., Junjun Li
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Patent number: 8614486Abstract: A gate dielectric is patterned after formation of a first gate spacer by anisotropic etch of a conformal dielectric layer to minimize overetching into a semiconductor layer. In one embodiment, selective epitaxy is performed to sequentially form raised epitaxial semiconductor portions, a disposable gate spacer, and raised source and drain regions. The disposable gate spacer is removed and ion implantation is performed into exposed portions of the raised epitaxial semiconductor portions to form source and drain extension regions. In another embodiment, ion implantation for source and drain extension formation is performed through the conformal dielectric layer prior to an anisotropic etch that forms the first gate spacer. The presence of the raised epitaxial semiconductor portions or the conformation dielectric layer prevents complete amorphization of the semiconductor material in the source and drain extension regions, thereby enabling regrowth of crystalline source and drain extension regions.Type: GrantFiled: September 6, 2012Date of Patent: December 24, 2013Assignee: International Business Machines CorporationInventors: Balasubramanian S. Haran, Hemanth Jagannathan, Sivananda K. Kanakasabapathy, Sanjay Mehta
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Patent number: 8610220Abstract: A semiconductor device and method for fabricating a semiconductor device is disclosed. An exemplary semiconductor device includes a substrate including a metal oxide device. The metal oxide device includes first and second doped regions disposed within the substrate and interfacing in a channel region. The first and second doped regions are doped with a first type dopant. The first doped region has a different concentration of dopant than the second doped region. The metal oxide device further includes a gate structure traversing the channel region and the interface of the first and second doped regions and separating source and drain regions. The source region is formed within the first doped region and the drain region is formed within the second doped region. The source and drain regions are doped with a second type dopant. The second type dopant is opposite of the first type dopant.Type: GrantFiled: May 16, 2012Date of Patent: December 17, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yue-Der Chih, Jam-Wem Lee, Cheng-Hsiung Kuo, Tsung-Che Tsai, Ming-Hsiang Song, Hung-Cheng Sung, Roger Wang
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Patent number: 8610207Abstract: An insulated-gate field-effect transistor (220U) utilizes an empty-well region for achieving high performance. The concentration of the body dopant reaches a maximum at a subsurface location no more than 10 times deeper below the upper semiconductor surface than the depth of one of a pair of source/drain zones (262 and 264), decreases by at least a factor of 10 in moving from the subsurface location along a selected vertical line (136U) through that source/drain zone to the upper semiconductor surface, and has a logarithm that decreases substantially monotonically and substantially inflectionlessly in moving from the subsurface location along the vertical line to that source/drain zone. Each source/drain zone has a main portion (262M or 264M) and a more lightly doped lateral extension (262E or 264E). Alternatively or additionally, a more heavily doped pocket portion (280) of the body material extends along one of the source/drain zones.Type: GrantFiled: November 16, 2011Date of Patent: December 17, 2013Assignee: Texas Instruments IncorporatedInventor: Constantin Bulucea
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Publication number: 20130299906Abstract: A buried-channel field-effect transistor includes a semiconductor layer formed on a substrate. The semiconductor layer includes doped source and drain regions and an undoped channel region. the transistor further includes a gate dielectric formed over the channel region and partially overlapping the source and drain regions; a gate formed over the gate dielectric; and a doped shielding layer between the gate dielectric and the semiconductor layer.Type: ApplicationFiled: May 18, 2012Publication date: November 14, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: KANGGUO CHENG, Ali Khakifirooz, Pranita Kulkarni, Tak H. Ning
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Patent number: 8554279Abstract: A boosting circuit unit supplies a boosting voltage to one terminal of a backlight. A boosting comparator compares a voltage applied to the other terminal of the backlight with a predetermined reference voltage value, and outputs a comparison result as a feedback signal reflecting the boosting voltage to the boosting circuit unit. An LED driver unit is connected to the other terminal of the backlight and supplies drive current to the backlight. An acquisition unit acquires a PWM signal, which is generated based on the content of a video signal and can be used to change the luminance of the backlight. An LPF unit outputs a time-averaged signal of the acquired PWM signal as a control signal to be supplied to the LED driver unit.Type: GrantFiled: November 12, 2008Date of Patent: October 8, 2013Assignees: Semiconductor Components Industries, LLC., Sanyo Semiconductor Co., Ltd.Inventor: Nobuyuki Otaka
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Patent number: 8530975Abstract: A semiconductor device includes a substrate having an active region and an isolation region, a gate pattern crossing both the active region and the isolation region of the substrate, and a protrusion having a surface higher than that of the substrate over at least an edge of the active region contacting a portion of the isolation region under the gate pattern.Type: GrantFiled: May 29, 2012Date of Patent: September 10, 2013Assignee: SK hynix Inc.Inventor: Ho-Ung Kim
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Patent number: 8525342Abstract: A stacked integrated circuit (IC) may be manufactured with a second tier wafer bonded to a double-sided first tier wafer. The double-sided first tier wafer includes back-end-of-line (BEOL) layers on a front and a back side of the wafer. Extended contacts within the first tier wafer connect the front side and the back side BEOL layers. The extended contact extends through a junction of the first tier wafer. The second tier wafer couples to the front side of the first tier wafer through the extended contacts. Additional contacts couple devices within the first tier wafer to the front side BEOL layers. When double-sided wafers are used in stacked ICs, the height of the stacked ICs may be reduced. The stacked ICs may include wafers of identical functions or wafers of different functions.Type: GrantFiled: April 12, 2010Date of Patent: September 3, 2013Assignee: QUALCOMM IncorporatedInventors: Arvind Chandrasekaran, Brian Henderson
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Patent number: 8513734Abstract: A disclosed power transistor, suitable for use in a switch mode converter that is operable with a switching frequency exceeding, for example, 5 MHz or more, includes a gate dielectric layer overlying an upper surface of a semiconductor substrate and first and second gate electrodes overlying the gate dielectric layer. The first gate electrode is laterally positioned overlying a first region of the substrate. The first substrate region has a first type of doping, which may be either n-type or p-type. A second gate electrode of the power transistor overlies the gate dielectric and is laterally positioned over a second region of the substrate. The second substrate region has a second doping type that is different than the first type. The transistor further includes a drift region located within the substrate in close proximity to an upper surface of the substrate and laterally positioned between the first and second substrate regions.Type: GrantFiled: March 22, 2011Date of Patent: August 20, 2013Assignee: Freescale Semiconductor, Inc.Inventors: Hongning Yang, Jiang-Kai Zuo
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Patent number: 8492835Abstract: A HV MOSFET device includes a substrate, a deep well region, a source/body region, a drain region, a gate structure, and a first doped region. The deep well region includes a boundary site and a middle site. The source/body region is formed in the deep well region and defines a channel region. The first doped region is formed in the deep well region and disposed under the gate structure, and having the first conductivity type. There is a first ratio between a dopant dose of the first doped region and a dopant dose of the boundary site of the deep well region. There is a second ratio between a dopant dose of the first doped region and a dopant dose of the middle site of the deep well region. A percentage difference between the first ratio and the second ratio is smaller than or equal to 5%.Type: GrantFiled: January 20, 2012Date of Patent: July 23, 2013Assignee: United Microelectronics CorporationInventors: Chih-Chung Wang, Ming-Tsung Lee, Chung-I Huang, Shan-Shi Huang, Wen-Fang Lee, Te-Yuan Wu
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Patent number: 8487367Abstract: A semiconductor device is disclosed that includes a semiconductor substrate having a channel region and respective source and drain regions formed on opposite sides of the channel region. The channel region includes at least one pore. A gate is formed on the semiconductor substrate between the source and drain regions and includes at least one pin received by respective ones of the at least one pore. A dielectric layer is disposed between the gate and the semiconductor substrate.Type: GrantFiled: November 24, 2010Date of Patent: July 16, 2013Assignee: Rambus Inc.Inventor: Mark D. Kellam
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Patent number: 8471329Abstract: A tunnel field-effect transistor (TFET) includes a gate electrode, a source region, and a drain region. The source and drain regions are of opposite conductivity types. A channel region is disposed between the source region and the drain region. A source diffusion barrier is disposed between the channel region and the source region. The source diffusion barrier and the source region are under and overlapping the gate electrode. The source diffusion barrier has a first bandgap greater than second bandgaps of the source region, the drain region, and the channel region.Type: GrantFiled: November 16, 2011Date of Patent: June 25, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Krishna Kumar Bhuwalka, Gerben Doornbos, Matthias Passlack
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Patent number: 8431994Abstract: Silicon-on-insulator (SOI) structures with silicon layers less than 20 nm thick are used to form extremely thin silicon-on-insulator (ETSOI) semiconductor devices. ETSOI devices are manufactured using a thin tungsten backgate encapsulated by thin nitride layers to prevent metal oxidation, the tungsten backgate being characterized by its low resistivity. The structure further includes at least one FET having a gate stack formed by a high-K metal gate and a tungsten region superimposed thereon, the footprint of the gate stack utilizing the thin SOI layer as a channel. The SOI structure thus formed controls the Vt variation from the thin SOI thickness and dopants therein. The ETSOI high-K metal backgate fully depleted device in conjunction with the thin BOX provides an excellent short channel control and significantly lowers the drain induced bias and sub-threshold swings.Type: GrantFiled: March 16, 2010Date of Patent: April 30, 2013Assignee: International Business Machines CorporationInventors: Kevin K. Chan, Zhibin Ren, Xinhui Wang
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Patent number: 8415745Abstract: An ESD protection device is described, which includes a P-body region, a P-type doped region, an N-type doped region and an N-sinker region. The P-body region is configured in a substrate. The P-type doped region is configured in the middle of the P-body region. The N-type doped region is configured in the P-body region and surrounds the P-type doped region. The N-sinker region is configured in the substrate and surrounds the P-body region.Type: GrantFiled: April 26, 2011Date of Patent: April 9, 2013Assignee: United Microelectronics Corp.Inventor: Fang-Mei Chao
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Patent number: 8395197Abstract: A semiconductor device includes a gate electrode on a gate insulating film over a semiconductor substrate, a first sidewall insulating film on a side surface of the gate electrode, and source and drain regions, each including a pocket diffusion layer of a first conductivity type, and first and second diffusion layers of a second conductivity type. The pocket diffusion layer is disposed in the semiconductor substrate. The first diffusion layer of a second conductivity type extends over the pocket diffusion layer. The first diffusion layer faces toward the gate electrode through the first sidewall insulating film. The second diffusion layer over the first diffusion layer is higher in impurity concentration than the first diffusion layer. The second diffusion layer is separated by the first diffusion layer from the pocket diffusion layer, and has a side surface which faces toward the first sidewall insulating film through the first diffusion layer.Type: GrantFiled: December 6, 2010Date of Patent: March 12, 2013Assignee: Elpida Memory, Inc.Inventor: Takeshi Nagai
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Patent number: 8390063Abstract: According to one embodiment, a semiconductor device comprises a high-k gate dielectric overlying a well region having a first conductivity type formed in a semiconductor body, and a semiconductor gate formed on the high-k gate dielectric. The semiconductor gate is lightly doped so as to have a second conductivity type opposite the first conductivity type. The disclosed semiconductor device, which may be an NMOS or PMOS device, can further comprise an isolation region formed in the semiconductor body between the semiconductor gate and a drain of the second conductivity type, and a drain extension well of the second conductivity type surrounding the isolation region in the semiconductor body. In one embodiment, the disclosed semiconductor device is fabricated as part of an integrated circuit including one or more CMOS logic devices.Type: GrantFiled: January 29, 2010Date of Patent: March 5, 2013Assignee: Broadcom CorporationInventors: Akira Ito, Xiangdong Chen
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Patent number: 8368142Abstract: A semiconductor device having performance comparable with a MOSFET is provided. An active layer of the semiconductor device is formed by a crystalline silicon film crystallized by using a metal element for promoting crystallization, and further by carrying out a heat treatment in an atmosphere containing a halogen element to carry out gettering of the metal element. The active layer after this process is constituted by an aggregation of a plurality of needle-shaped or column-shaped crystals. A semiconductor device manufactured by using this crystalline structure has extremely high performance.Type: GrantFiled: September 19, 2006Date of Patent: February 5, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Hisashi Ohtani, Jun Koyama, Takeshi Fukunaga
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Patent number: 8362558Abstract: A lateral-double diffused MOS device is provided. The device includes: a first well having a first conductive type and a second well having a second conductive type disposed in a substrate and adjacent to each other; a drain and a source regions having the first conductive type disposed in the first and the second wells, respectively; a field oxide layer (FOX) disposed on the first well between the source and the drain regions; a gate conductive layer disposed over the second well between the source and the drain regions extending to the FOX; a gate dielectric layer between the substrate and the gate conductive layer; a doped region having the first conductive type in the first well below a portion of the gate conductive layer and the FOX connecting to the drain region. A channel region is defined in the second well between the doped region and the source region.Type: GrantFiled: May 4, 2011Date of Patent: January 29, 2013Assignee: MACRONIX International Co., Ltd.Inventors: Hsueh-I Huang, Chien-Wen Chu, Cheng-Chi Lin, Shih-Chin Lien, Chin-Pen Yeh, Shyi-Yuan Wu
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Patent number: 8350327Abstract: A semiconductor device is provided which includes a semiconductor substrate, a gate structure formed on the substrate, sidewall spacers formed on each side of the gate structure, a source and a drain formed in the substrate on either side of the gate structure, the source and drain having a first type of conductivity, a lightly doped region formed in the substrate and aligned with a side of the gate structure, the lightly doped region having the first type of conductivity, and a barrier region formed in the substrate and adjacent the drain. The barrier region is formed by doping a dopant of a second type of conductivity different from the first type of conductivity.Type: GrantFiled: August 28, 2009Date of Patent: January 8, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shu-Wei Vanessa Chung, Kuo-Feng Yu
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Patent number: 8344452Abstract: An MOS transistor formed on a heavily doped substrate is described. Metal gates are used in low temperature processing to prevent doping from the substrate from diffusing into the channel region of the transistor.Type: GrantFiled: January 24, 2008Date of Patent: January 1, 2013Assignee: Intel CorporationInventors: Nick Lindert, Justin K. Brask, Andrew Westmeyer
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Patent number: 8330231Abstract: A transistor structure is formed by providing a semiconductor substrate and providing a gate above the semiconductor substrate. The gate is separated from the semiconductor substrate by a gate insulating layer. A source and a drain are provided adjacent the gate to define a transistor channel underlying the gate and separated from the gate by the gate insulating layer. A barrier layer is formed by applying nitrogen or carbon on opposing outer vertical sides of the transistor channel between the transistor channel and each of the source and the drain. In each of the nitrogen and the carbon embodiments, the vertical channel barrier retards diffusion of the source/drain dopant species into the transistor channel. There are methods for forming the transistor structure.Type: GrantFiled: March 16, 2011Date of Patent: December 11, 2012Assignee: Freescale Semiconductor, Inc.Inventors: Da Zhang, Ning Liu, Mohamed S. Moosa
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Patent number: 8298886Abstract: An electronic device can include a drain region of a transistor, wherein the drain region has a first conductivity type. The electronic device can also include a channel region of the transistor, wherein the channel region has a second conductivity type opposite the first conductivity type. The electronic device can further include a first doped region having the first conductivity type, wherein the first doped region extends from the drain region towards the channel region. The electronic device can still further include a second doped region having the first conductivity type, wherein the second doped region is disposed between the first doped region and the channel region.Type: GrantFiled: February 8, 2010Date of Patent: October 30, 2012Assignee: Semiconductor Components Industries, LLCInventors: Gary H. Loechelt, Gordon M. Grivna
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Patent number: 8278686Abstract: A vertically-conducting planar-gate field effect transistor includes a silicon region of a first conductivity type, a silicon-germanium layer extending over the silicon region, a gate electrode laterally extending over but being insulated from the silicon-germanium layer, a body region of the second conductivity type extending in the silicon-germanium layer and the silicon region, and source region of the first conductivity type extending in the silicon-germanium layer. The gate electrode laterally overlaps both the source and body regions such that a portion of the silicon germanium layer extending directly under the gate electrode between the source region and an outer boundary of the body region forms a channel region.Type: GrantFiled: May 9, 2011Date of Patent: October 2, 2012Assignee: Fairchild Semiconductor CorporationInventors: James Pan, Qi Wang
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Publication number: 20120228706Abstract: A memory includes a semiconductor layer, a gate insulating film on the semiconductor layer, and a gate electrode on the gate insulating film. A first channel region of a first conductivity type is provided on a surface of the semiconductor layer below the gate insulating film. A diffusion layer of a second conductivity type is provided below the first channel region in the semiconductor layer. The diffusion layer contacts a bottom of the first channel region in a direction substantially vertical to a surface of the semiconductor layer. The diffusion layer forms a PN junction with the bottom of the first channel region. A drain of a first conductivity type and a source of a second conductivity type are provided on a side and another side of the first channel region. A sidewall film covers a side surface of the first channel region on a side of the diffusion layer.Type: ApplicationFiled: January 26, 2012Publication date: September 13, 2012Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Emiko Sugizaki, Shigeru Kawanaka, Kanna Adachi
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Patent number: 8264029Abstract: The present invention provides a semiconductor device that has a shorter distance between the bit lines and easily achieves higher storage capacity and density, and a method of manufacturing such a semiconductor device. The semiconductor device includes: first bit lines formed on a substrate; an insulating layer that is provided between the first bit lines on the substrate, and has a higher upper face than the first bit lines; channel layers that are provided on both side faces of the insulating layer, and are coupled to the respective first bit lines; and charge storage layers that are provided on the opposite side faces of the channel layers from the side faces on which the insulating layers are formed.Type: GrantFiled: December 17, 2007Date of Patent: September 11, 2012Assignee: Spansion LLCInventors: Yukio Hayakawa, Hiroyuki Nansei
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Patent number: 8253163Abstract: A high voltage semiconductor device includes a semiconductor substrate, a p type base region in a first main surface, an n+ type emitter region in the p type base region, an n+ type cathode region adjacent to an end surface of the semiconductor substrate and not penetrating the semiconductor substrate, a p+ type collector region in a second main surface, a first main electrode, a second main electrode, a third main electrode, and a connection portion connecting the second main electrode and the third main electrode. A resistance between the p type base region and the n+ type cathode region is greater than a resistance between the p type base region and the p+ type collector region. In the high voltage semiconductor device in which an IGBT and a free wheel diode are formed in a single semiconductor substrate, occurrence of a snap-back phenomenon is suppressed.Type: GrantFiled: October 7, 2010Date of Patent: August 28, 2012Assignee: Mitsubishi Electric CorporationInventors: Shigeru Kusunoki, Junji Yahiro, Yoshihiko Hirota
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Patent number: 8222649Abstract: A semiconductor device and a method of manufacturing the same, to appropriately determine an impurity concentration distribution of a field relieving region and reduce an ON-resistance. The semiconductor device includes a substrate, a first drift layer, a second drift layer, a first well region, a second well region, a current control region, and a field relieving region. The first well region is disposed continuously from an end portion adjacent to the vicinity of outer peripheral portion of the second drift layer to a portion of the first drift layer below the vicinity of outer peripheral portion. The field relieving region is so disposed in the first drift layer as to be adjacent to the first well region.Type: GrantFiled: November 17, 2006Date of Patent: July 17, 2012Assignee: Mitsubishi Electric CorporationInventors: Naruhisa Miura, Keiko Fujihira, Kenichi Otsuka, Masayuki Imaizumi
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Patent number: 8183636Abstract: One or more embodiments relate to a static random access memory cell comprising: a first inverter including a first n-channel pull-down transistor coupled between a first node and a ground voltage; a second inverter including a second n-channel pull-down transistor coupled between a second node and the ground voltage; a first n-channel access transistor coupled between a first bit line and the first node of the first inverter, a fin of the first n-channel access transistor having a lower charge carrier mobility than a fin of the first n-channel pull-down transistor; and a second n-channel access transistor coupled between a second bit line and the second node of the second inverter, a fin of the second n-channel access transistor having a lower charge carrier mobility than a fin of the second n-channel pull-down transistor.Type: GrantFiled: March 28, 2011Date of Patent: May 22, 2012Assignee: Infineon Technologies AGInventors: Joerg Berthold, Christian Pacha, Klaus Arnim Von
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Publication number: 20120112206Abstract: An asymmetric hetero-structure FET and method of manufacture is provided. The structure includes a semiconductor substrate and an epitaxially grown semiconductor layer on the semiconductor substrate. The epitaxially grown semiconductor layer includes an alloy having a band structure and thickness that confines inversion carriers in a channel region, and a thicker portion extending deeper into the semiconductor structure at a doped edge to avoid confinement of the inversion carriers at the doped edge.Type: ApplicationFiled: November 4, 2010Publication date: May 10, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Brent A. ANDERSON, Jeffrey B. JOHNSON, Edward J. NOWAK, Robert R. ROBISON
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Patent number: 8164086Abstract: A phase controllable field effect transistor device is described. The device provides first and second scattering sites disposed at either side of a conducting channel region, the conducting region being gated such that on application of an appropriate signal to the gate, energies of the electrons in the channel region defined between the scattering centers may be modulated.Type: GrantFiled: September 17, 2009Date of Patent: April 24, 2012Assignee: The Provost, Fellows and Scholars of the Colege of the Holy and Undivided Trinity of Queen Elizabeth Near DublinInventors: John Boland, Stefano Sanvito, Borislav Naydenov
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Patent number: 8164142Abstract: According to an aspect of an embodiment, a semiconductor device has a semiconductor substrate, a gate insulating film on the semiconductor substrate, a gate electrode formed on the gate insulating film, an impurity diffusion region formed in an area of the semiconductor substrate adjacent to the gate electrode to a first depth to the semiconductor substrate, the impurity diffusion region containing impurity, an inert substance containing region formed in the area of the semiconductor substrate to a second depth deeper than the first depth, the inert substance containing region containing an inert substance, and a diffusion suppressing region formed in the area of the semiconductor substrate to a third depth deeper than the second depth, the diffusion suppressing region containing a diffusion suppressing substance suppressing diffusion of the impurity.Type: GrantFiled: January 4, 2011Date of Patent: April 24, 2012Assignee: Fujitsu Semiconductor LimitedInventor: Kenichi Okabe
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Patent number: 8164111Abstract: A high voltage semiconductor device includes a semiconductor substrate, a p type base region in a first main surface, an n+ type emitter region in the p type base region, an n+ type cathode region adjacent to an end surface of the semiconductor substrate and not penetrating the semiconductor substrate, a p+ type collector region in a second main surface, a first main electrode, a second main electrode, a third main electrode, and a connection portion connecting the second main electrode and the third main electrode. A resistance between the p type base region and the n+ type cathode region is greater than a resistance between the p type base region and the p+ type collector region. In the high voltage semiconductor device in which an IGBT and a free wheel diode are formed in a single semiconductor substrate, occurrence of a snap-back phenomenon is suppressed.Type: GrantFiled: October 7, 2010Date of Patent: April 24, 2012Assignee: Mitsubishi Electric CorporationInventors: Shigeru Kusunoki, Junji Yahiro, Yoshihiko Hirota
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Patent number: 8159011Abstract: A charge transfer transistor includes: a first diffusion region and a second diffusion region; a gate for controlling a charge transfer from the first diffusion region to the second diffusion region by a control signal; and a potential well incorporated under the gate, wherein the first diffusion region is a pinned photodiode. A pixel of an image sensor includes: a photodiode for generating and collecting a photo generated charge; a floating diffusion region for serving as a photo generated charge sensing node; a transfer gate for controlling a charge transfer from the photodiode to the floating diffusion region by a control signal; and a potential well incorporated under the transfer gate.Type: GrantFiled: February 28, 2007Date of Patent: April 17, 2012Assignee: Intellectual Ventures II LLCInventor: Jaroslav Hynecek
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Patent number: 8148771Abstract: A semiconductor device 100 includes a semiconductor substrate 14, a connection electrode 12 disposed on an upper surface of the semiconductor substrate 14 and connected to an integrated circuit thereon, a through electrode 20 which penetrates the semiconductor substrate 14 and the connection electrode 20, and an insulation portion 30 interposed between the semiconductor substrate 14 and the through electrode 20. The through electrode 20 is integrally formed to protrude outward from upper surfaces of the semiconductor substrate 14 and the connection electrode 12, and connected to the connection electrode 12 in a region where the through electrode 20 penetrates the connection electrode 12.Type: GrantFiled: July 15, 2010Date of Patent: April 3, 2012Assignee: Spansion LLCInventors: Masataka Hoshino, Ryoto Fukuyama, Koji Taya
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Patent number: 8148777Abstract: An insulated-gate field-effect transistor (100, 100V, 140, 150, 150V, 160, 170, 170V, 180, 180V, 190, 210, 210W, 500, 510, or 530; or 220, 220W, or 540) is provided with a hypoabrupt vertical dopant profile below one (104; or 264 or 564) of its source/drain zones for reducing the parasitic capacitance along the pn junction between that source/drain zone and adjoining body material (108; or 268 or 568). In particular, the concentration of semiconductor dopant which defines the conductivity type of the body material increases by at least a factor of 10 in moving from that source/drain zone down to an underlying body-material location no more than 10 times deeper below the upper semiconductor surface than that source/drain zone.Type: GrantFiled: September 15, 2010Date of Patent: April 3, 2012Assignee: National Semiconductor CorporationInventor: Constantin Bulucea