Abstract: A semiconductor integrated circuit device has an SOI substrate comprising an insulating film laminated on a semiconductor support substrate and a semiconductor thin film laminated on the insulating film. A first N-channel MOS transistor, a first P-channel MOS transistor, and a resistor are each disposed on the semiconductor thin film. A second N-channel MOS transistor serving as an electrostatic discharge (ESD) protection element is disposed on a surface of the semiconductor support substrate that is exposed by removing a part of the semiconductor thin film and a part of the insulating film. The second N-channel MOS transistor has a gate electrode, a source region and a drain region surrounding the source region through the gate electrode to maintain a constant distance between the drain region and the source region.

Abstract: An electro-static discharge protection device includes a first conductive type well and a second conductive type well which are formed in a surface of the first conductive type layer or a first conductive type substrate. A first high concentration second conductive type region, a first high concentration first conductive type region, and a second high concentration second conductive type region are formed in a surface of the second conductive type well. A third high concentration second conductive type region is formed in a surface of the first conductive type well. The first high concentration second conductive type region and the first high concentration first conductive type region are connected with a first power supply of a potential. The third high concentration second conductive type region is connected with a second power supply having a potential different from the potential of the first power supply.

Abstract: A semiconductor apparatus includes an internal circuit, a CMOS composed of a P-channel MOS transistor with a source connected to a high-potential power supply line and a gate connected to the internal circuit, and an N-channel MOS transistor with a source connected to a low-potential power supply line and a gate connected to the internal circuit, an output terminal connected to a drain of the P-channel MOS transistor and a drain of the N-channel MOS transistor and a protection transistor with a source and a gate connected to one power supply line of the high-potential power supply line and the low-potential power supply line and a drain connected to the output terminal, a conductivity type of the protection transistor being the same as a conductivity type of one MOS transistor of the P-channel MOS transistor and the N-channel MOS transistor, the source of the one MOS transistor being connected to the one power supply line.

Abstract: A static electricity countermeasure component comprising; a ceramic substrate; at least two extractor electrodes opposingly disposed and mutually separated on the ceramic substrate; an over-voltage protective material layer disposed to cover a portion of each extractor electrode and a gap between the extractor electrodes, containing a metal powder and a silicone-based resin; an intermediate layer disposed over the over-voltage protective material layer, containing an insulating powder and a silicone-based resin; and a protective resin layer disposed over the intermediate layer.

Abstract: Disclosed is an electrostatic discharge protection device that has a low trigger voltage and protects an internal circuit from electrostatic discharge. The ESD protection device includes an NMOS transistor in which a first pad and a drain are connected to each other and a second pad and a source are connected to each other. A capacitor in which an end is connected to the first pad and the other end is connected to a gate of the NMOS transistor and a substrate contact of the NMOS transistor. The ESD protection devices also includes a resistor in which an end is connected to the second pad and the other end is connected to the capacitor. The first pad may be a power pad and the second pad may be a ground pad. Alternately, the first pad may be an input/output pad and the second pad may be a ground pad.

Abstract: The present invention relates to an electrostatic discharge (ESD) protection scheme and particularly to a string contact structure for an improved ESD performance. In an embodiment, the invention provides a method for forming an ESD protection circuit for protecting an internal circuit from damage due to an ESD voltage appearing on a pad coupled to a clamp device including a first terminal and a second terminal. The method includes forming a string contact along the first terminal and the second terminal of the clamp device. The method further includes forming one or more conductive layers on the string contact to couple the first terminal and the second terminal of the clamp device to the pad and a ground pad.

Abstract: An input/output (I/O) mixed-voltage drive circuit and electrostatic discharge protection device for coupling to an I/O pad. The device includes an NFET device having a gate, a drain, a source and body, the gate adapted for coupling to a pre-drive circuit, the source and the body being coupled to one another and to ground. The device also includes a bipolar junction transistor having a collector, an emitter and a base, the emitter being coupled to the drain of the NFET and the collector being coupled to the I/O pad.

Abstract: A semiconductor device includes: n transistor elements; n resistive elements; and n capacitive elements, each kind of elements coupled in series between the first and second terminals. The gate of each transistor element has a gate pad, and each transistor element includes transistor pads disposed on both sides. Each resistive element includes resistive pads disposed on both sides. Each capacitive element includes capacitive pads disposed on both sides. The gate pad other than the first stage transistor element, a corresponding resistive pad, and a corresponding capacitive pad are electrically coupled. One transistor pad, one resistive pad, and one capacitive pad in the first stage are electrically coupled. One transistor pad, one resistive pad, and one capacitive pad in the n-th stage are electrically coupled.

Abstract: A buried thin film resistor having end caps defined by a dielectric mask is disclosed. A thin film resistor is formed on an integrated circuit substrate. A resistor protect layer is formed over the thin film resistor. A layer of dielectric material is formed over the resistor protect layer. The dielectric material is masked and dry etched to leave a first portion of dielectric material over a first end of the thin film resistor and a second portion of dielectric material over a second end of the thin film resistor. The resistor protect layer is then wet etched using the first and second portions of the dielectric material as a hard mask. Then a second dielectric layer is deposited and vias are etched down to the underlying portions of the resistor protect layer.

Abstract: A first insulation film is provided on a semiconductor substrate. A high resistance element formed from polysilicon is provided on the first insulation film. A second insulation film is provided on the high resistance element. A hydrogen diffusion preventing film having a hydrogen diffusion coefficient smaller than that of the second insulation film is provided on the second insulation film. The hydrogen diffusion preventing film covers a part of the high resistance element.

Abstract: There is provided a semiconductor device including: a field effect transistor that is provided with a gate region, a drain region and a source region and that is formed on a substrate; a circuit region that is formed on the substrate so as to be electrically isolated from the field effect transistor; a first guard ring that is formed in a ring shape encircling the field effect transistor and that includes an internal resistance; and a second guard ring that is formed in a ring shape encircling the circuit region, that forms a capacitance between the second guard ring and the gate region by capacitive coupling with the gate region, and that includes an internal resistance.

Abstract: A layout structure of an electrostatic discharge protection circuit and a fabrication process thereof are provided. The electrostatic discharge protection circuit includes a substrate, a protection element and a resistor, wherein a part of or all of the area of the resistor is disposed in the region of the protection element, which saves the footprint of the resistor and reduces a junction parasitic capacitance formed in the protection element. Thus, the production cost of the electrostatic discharge protection circuit is reduced, and the influence of the electrostatic discharge protection circuit on the property of the entire internal circuit is minimized.

Abstract: A semiconductor device includes a substrate and a memory cell formed on the substrate. The memory cell includes a word line. The semiconductor device also includes a protection area formed in the substrate, a conductive structure configured to extend the word line to the protection area, and a contact configured to short the word line and the protection area.

Abstract: An ESD protection circuit (710) is guarded by a parallel first precharge elimination circuit (720) relative to an I/O pad (721) and a parallel second precharge elimination circuit (730) relative to a VDD pad (731). The precharge elimination circuits are synchronized with the ESD protection circuit to eliminate any precharge voltage to ground before an ESD pulse affects the I/O pad or VDD pad. A diode (722) is connected between I/O pad and VDD. Circuit (720) is between I/O pad and ground (740) and is powered by the same VDD. Circuit (720) includes a first resistor (723), a first nMOS transistor (724), and a first RC timer including a second resistor (725) and a first capacitor (726). Circuit (730) includes a third resistor (733), a second nMOS transistor (734), and a second RC timer including a fourth resistor (735) and a second capacitor (736).

Abstract: An integrated circuit includes a substrate and a resistor. The resistor is formed from at least two access wells of a first conductivity type and a deep buried layer electrically connecting the wells. The deep buried layer is at least partly covered by a region of opposite conductivity.

Abstract: A semiconductor apparatus is disclosed. The semiconductor apparatus comprises a substrate with a pad, an internal circuitry region, and a protection resistance formed on the substrate. The pad is connected to a first electrode of the protection resistance by wiring, the internal circuitry region is connected to a second electrode of the protection resistance by wiring, and the protection resistance protects the internal circuitry region from electrostatic discharging. The semiconductor apparatus is characterized in that the pad is placed between the protection resistance and the internal circuitry region.

Abstract: An electrostatic discharge (ESD) protection device and a layout thereof are provided. A bias conducting wire is mainly used to couple each base of a plurality of parasitic transistors inside ESD elements together, in order to simultaneously trigger all the parasitic transistors to bypass the ESD current, avoid the elements of a core circuit being damaged, and solve the non-uniform problem of bypassing the ESD current when ESD occurs. Furthermore, in the ESD protection layout, it only needs to add another doped region on a substrate neighboring to, but not contacting, doped regions of the ESD protection elements and use contacts to connect the added doped region, so as to couple each base of the parasitic transistors together without requiring for additional layout area.

Abstract: A fuse box of a semiconductor device includes a plurality of metal fuses formed on a first interlayer dielectric of a semiconductor substrate and previously removed in blowing regions thereof; a conductive oxidation layer formed to cover removed blowing regions of the metal fuses; a second interlayer dielectric formed on the first interlayer dielectric including the conductive oxide layer; and a plurality of plugs formed in the second interlayer dielectric to be brought into contact with the metal fuses which are removed in the blowing regions thereof.

Abstract: Semiconductor devices and methods of manufacture thereof are disclosed. In one embodiment, a semiconductor device includes a first transistor having a first active area, and a second transistor having a second active area. A top surface of the first active area is elevated or recessed with respect to a top surface of the second active area, or a top surface of the first active area is elevated or recessed with respect to a top surface of at least portions of an isolation region proximate the first transistor.

Abstract: An electric discharge device includes a bipolar transistor configuration comprising a base, an emitter, and a collector. At least one pinched resistor is formed in a region comprising both the base and emitter so as to produce a pinched resistive area that develops a voltage once the bipolar transistor experiences junction breakdown.

Abstract: A CMOS transistor and a method of manufacturing the CMOS transistor are disclosed. An NMOS transistor is formed on a first region of a semiconductor substrate. A PMOS transistor is formed on a second region of a semiconductor substrate. The NMOS transistor includes a first gate conductive layer. The PMOS transistor includes a second gate conductive layer. The first gate conductive layer includes a metal having a nitrogen concentration increasing in a direction from a lower portion toward an upper portion. In addition, the metal has a work function of about 4.0 eV to about 4.3 eV. The third gate conductive layer includes a metal having a nitrogen concentration increasing in a direction from a lower portion toward an upper portion. In addition, the metal has a work function of about 4.7 eV to about 5.0 eV.

Abstract: An ESD protection structure includes, in part, a NMOS transistor having a source and drain in a well in a substrate and a gate on the substrate with the source and drain being connected between ground and a series diode, and the gate being connected to ground. The structure further includes a diode having a cathode connected to the input pad and an anode connected to the well so that the diode is reverse-biased in the event of a positive voltage ESD event on the input pad. As a result, in a positive voltage ESD event, the avalanche effect rapidly injects current into the substrate and therefore into the base of the parasitic bipolar transistor so as to trigger the transistor into conduction and discharge the ESD pulse. Alternatively, the diode is a Zener diode and the current is generated by the Zener effect. A complementary structure provides protection against a negative ESD pulse.

Abstract: A voltage mitigating element mitigating a voltage applied across a gate insulating film in an off state of an insulated gate bipolar transistor (IGBT) is arranged to a gate electrode node of a P-channel MOS transistor provided for suppressing flow-in of holes at the time of turn-off of the IGBT. Withstanding voltage characteristics are improved and an occupation area thereof is reduced while maintaining switching characteristics and a low on-resistance of an insulated gate bipolar transistor.

Abstract: A nonvolatile memory device including a lower electrode, a resistor structure disposed on the lower electrode, a diode structure disposed on the resistor structure, and an upper electrode disposed on the diode structure. A nonvolatile memory device wherein the resistor structure includes one resistor and the diode structure includes one diode. An array of nonvolatile memory devices as described above.

Abstract: A technique to enhancing substrate bias of grounded-gate NMOS fingers (ggNMOSFET's) has been developed. By using this technique, lower triggering voltage of NMOS fingers can be achieved without degrading ESD protection in negative zapping. By introducing a simple gate-coupled effect and a PMOSFET triggering source with this technique, low-voltage triggered NMOS fingers have also been developed in power and I/O ESD protection, respectively. A semiconductor device which includes a P-well which is underneath NMOS fingers. The device includes an N-well ring which is configured so that the inner P-well underneath the NMOS fingers is separated from an outer P-well. The inner P-well and outer P-well are connected by a P-substrate resistance which is much higher than the resistance of the P-wells. A P+-diffusion ring surrounding the N-well ring is configured to connect to VSS, i.e., P-taps.

Abstract: A semiconductor device includes a Zener diode connected between an outside terminal and ground, and a resistor connected to the Zener diode in series. The Zener diode and the resistor divide a noise voltage, so that the semiconductor device can have the high noise tolerance even if it uses the small Zener diode.

Abstract: A sense resistor and integrated circuit package combination is disclosed. A package lead frame is provided having a plurality of landing zones associated therewith and a die mounting area for mounting of a die thereon. The die has a plurality of bond pads associated therewith, with a first bond wire connected between a first one of the landing zones and a second one of the landing zones. The first bond wire forms a sense resistor with a resistance of a known value. A second bond wire is connected between the first one of the landing zones and a first one of the bond pads.

Abstract: A layout structure for a CMOS circuit comprises a transistor layer forming P-type transistors 11 and 21 and N-type transistors 12 and 22, and a resistor layer which includes a resistor 13 formed to have a predetermined length and to make plural appropriate portions or the entire of the resistor along a direction of the length satisfy a mask rule necessary for providing VIAs, the resistor being connected to appropriate connecting portions of the P-type transistors and the N-type transistors through the VIAs by metal wires 31 formed of a metal layer, and the resistor having a predetermined circuit resistance which can be set based on the positions of the appropriate connecting portions.

Abstract: The present invention provides a MOS transistor device for providing ESD protection including at least one interleaved finger having a source, drain and gate region formed over a channel region disposed between the source and the drain regions. The transistor device further includes at least one isolation gate formed in at least one of the interleaved fingers. The device can further include a bulk connection coupled to at least one of the source, drain and gate regions via through at least one of diode, MOS, resistor, capacitor inductor, short, etc. The bulk connection is preferably isolated through the isolation gate.

Abstract: A light emitting device is provided which has a structure for preventing degradation of a light emitting element due to water and oxygen contained in an interlayer insulating film formed between a TFT and the light emitting element. A TFT is formed on a substrate, an inorganic insulating film is formed on the TFT from an inorganic material and serves as a first insulating film, an organic insulating film is formed on the first insulating film from an organic material and serves as a second insulating film, and an inorganic insulating film is formed on the second insulating film from an inorganic material and serves as a third insulating film. Thus obtained is a structure for preventing the second insulating film from releasing moisture and oxygen. In order to avoid defect in forming the film, a portion of the third insulating film where a contact hole is formed is removed alone.

Abstract: To present a semiconductor device mounting ESD protective device appropriately applicable to transistors mutually different in dielectric strength, and its manufacturing method. The semiconductor device comprises a first ESD protective circuit 1A including a first transistor 3 and a first ballast resistance 4, and a second ESD protective circuit 1B including a second transistor 5 and a second ballast resistance 6. The impurity concentration of the second diffusion region forming the first ballast resistance 4 is set lower than the impurity concentration of the fourth diffusion region for forming the second ballast resistance 6.

Abstract: An electrostatic discharge device includes a first protection element including a MOS transistor type first diode, which provides a first capacitor including a first insulation layer, and provides a first path between an input/output pad and a power supply voltage line using the first diode, for discharging static electricity, a second protection element providing a second path between the input/output pad and a ground voltage line for discharging the static electricity, a trigger circuit including a resistor that is connected in series to the first capacitor, and a power clamp element providing a third path for discharging the static electricity between the power supply voltage line and the ground voltage line by a voltage applied to the resistor.

Abstract: An electrostatic discharge (“ESD”) protection device, which includes a thyristor circuit, in the ESD case increases a resistance of the ESD protection device in comparison with a non-ESD case, by means of a switch. An ESD protection arrangement may include a ESD protection device to protects circuits with multiple voltage potentials. An ESD protection system may also include an ESD protection arrangement, to which an ESD signal is fed via a bus of the ESD protection system. The ESD protection device and ESD protection arrangement, and thus the ESD protection system, can be provided in a compact semiconductor arrangement.

Abstract: Provided is a semiconductor device in which a resistor and a capacitor are inserted in an input/output signal line that connects an input/output pad and an internal circuit at an input/output terminal in order to prevent damage of the internal circuit due to static electricity. The semiconductor device includes the input/output signal line that connects the input/output pad and the internal circuit. A first electrostatic discharge (ESD) protection circuit is branched from the input/output pad and connected to a power supply line, and a second ESD protection circuit is branched from the input/output pad and connected to a ground line. The resistor is located in the input/output signal line, and the capacitor is branched from the power supply line between the power supply line and the resistor.

Abstract: A reduction of a current capability of a MOS transistor (P1) is compensated by dynamically changing a substrate bias of the MOS transistor (P1) in response to a fluctuation of the power supply, and thus an operating speed is stabilized automatically. An NMOS transistor (N2) generates a current (I2) that changes in response to an extent of fluctuation of the power supply voltage, and then the current (I2) is converted into a voltage via a resistor (R3) to apply a forward bias to a substrate (back gate) of the MOS transistor (P1). When the current capability of the MOS transistor (P1) is reduced owing to a reduction of the power supply voltage, an adjustment is carried out automatically to lower a threshold voltage of the MOS transistor and thus the operating speed can be compensated.

Abstract: A thin film resistor structure includes a plurality of thin film resistor sections. Conductive vias (5) are disposed on a first end of each of the thin film resistor sections, respectively. The first conductor (2) is connected to the vias of the first end, and a second conductor (3) is connected to vias on a second end of each of the thin film resistor sections. A distribution of a parameter of a batch of circuits including the thin film resistor structure indicates a systematic error in resistance values. Based on analysis of the distribution and the circuit, or more of the vias are individually moved at the layout grid level by a layout grid address unit to reduce the systematic error by making corresponding adjustments on a via reticle of a mask set used for making the circuits. Expensive laser trimming of thin film resistors of the circuit is thereby avoided.

Abstract: An integrated circuit (IC) with negative potential protection includes a switch, a gate drive circuit and a comparator. The switch includes a double-diffused metal-oxide semiconductor (DMOS) cell formed in a first-type epitaxial pocket, which is formed in a second-type substrate. The switch also includes a second-type+ isolation ring formed in the substrate to isolate the first-type epitaxial pocket. An output of the gate drive circuit is coupled across a gate and a source of the switch. An output of the comparator is coupled to a second input of the gate drive circuit and a first input of the comparator receives a reference signal. A second input of the comparator is coupled to the epitaxial pocket. The comparator provides a turn-on signal that causes the switch to conduct current, when a signal at the second input of the comparator is below the reference signal.

Abstract: An exemplary ESD protection circuit includes first and second sets of transistors and an ESD discharge transistor. Each of the transistors includes a source electrode, a drain electrode, and a gate electrode. The drain electrodes and gate electrodes of each of the transistors are connected to each other, and the source electrodes of the transistors are respectively connected to the drain electrodes of the next adjacent transistors in both sets of the transistors. The gate electrode of the ESD transistor, the source electrodes of last transistors of the first and second sets of the transistors are connected to each other, the source electrode of the ESD transistor is connected to the drain electrode of a first transistor of the first set of the transistors, and the drain electrode of the ESD transistor is connected to the drain electrode of a first transistor of the second set of the transistors.

Abstract: Disclosed is an electrostatic discharge protection device that has a low trigger voltage and protects an internal circuit from electrostatic discharge. The ESD protection device includes an NMOS transistor in which a first pad and a drain are connected to each other and a second pad and a source are connected to each other. A capacitor in which an end is connected to the first pad and the other end is connected to a gate of the NMOS transistor and a substrate contact of the NMOS transistor. The ESD protection devices also includes a resistor in which an end is connected to the second pad and the other end is connected to the capacitor. The first pad may be a power pad and the second pad may be a ground pad. Alternately, the first pad may be an input/output pad and the second pad may be a ground pad.

Abstract: An electrostatic discharge (ESD) protection structure is disclosed. The ESD protection structure includes an active device. The active device includes a plurality of drains. Each of the drains has a contact row and at least one body contact row. The at least one body contact row is located on the active device in a manner to reduce the amount of voltage required for triggering the ESD protection structure.

Abstract: In a semiconductor device having a resistor and a method of fabricating the same, the device includes a semiconductor substrate having a cell region and a peripheral region. A lower interlayer insulating layer is disposed on the semiconductor substrate. A buffer pad is disposed on the lower interlayer insulating layer in the cell region. A capacitor is provided to have a storage node electrode disposed on the buffer pad, a plate electrode covering the storage node electrode, and a capacitor dielectric is interposed between the storage node electrode and the plate electrode. A lower resistor is disposed on the lower interlayer insulating layer in the peripheral region. An upper resistor is disposed on the lower resistor to expose both ends of the lower resistor. An inter-resistor insulating layer is interposed at least between the lower resistor and the upper resistor.

Abstract: A nonvolatile memory device having two or more resistors and methods of forming and using the same. A nonvolatile memory device having two resistance layers, and more particularly, to a nonvolatile memory device formed and operated using a resistance layer having memory switching characteristics and a resistance layer having threshold switching characteristics. The nonvolatile semiconductor memory device may include a lower electrode; a first resistance layer having at least two resistance characteristics formed on the lower electrode, a second resistance layer having threshold switching characteristics formed on the first resistance layer, and an upper electrode formed on the second resistance layer.

Abstract: A FEOL/MEOL metal resistor that has tight sheet resistance tolerance (on the order of about 5% or less), high current density (on the order of about 0.5 mA/micron or greater), lower parasitics than diffused resistors and lower TCR than standard BEOL metal resistors as well as various methods of integrating such a metal resistor structure into a CMOS technology are provided.

Abstract: Embodiments relate to a device for protecting a semiconductor IC device from an electrostatic discharge (ESD). According to embodiments, the device may have a rapid response speed and a stable operation against an ESD and may efficiently protect an internal circuit of a semiconductor IC from an ESD voltage lower than a junction breakdown voltage. According to embodiments, the device for protecting the semiconductor IC may include a pad, an internal circuit electrically connected to the pad, and a protection circuit which forms a discharge path between the pad and the internal circuit and disconnects the pad and the internal circuit, when an overvoltage due to an electrostatic discharge is applied to the pad.

Abstract: A semiconductor integrated circuit device has a plurality of CMOS-type base cells arranged on a semiconductor substrate and m wiring layers, and gate array type logic cells are composed of the base cells and the wiring layers. Wiring within and between the logic cells is constituted by using only upper n (n<m) wiring layers. It becomes possible to shorten a development period and reduce a development cost when a gate array type semiconductor integrated circuit device becomes large in scale.

Abstract: Resistors that avoid the problems of miniaturization of semiconductor devices and a related method are disclosed. In one embodiment, a resistor includes a planar resistor material that extends vertically within at least one metal layer of a semiconductor device. In another embodiment, a resistor includes a resistor material layer extending between a first bond pad and a second bond pad of a semiconductor device. The two embodiments can be used alone or together. A related method for generating the resistors is also disclosed.

Abstract: A semiconductor device is provided having a high performance resistance element. In an N-type well isolated by an insulating film, two higher concentration N-type regions are formed. An interlayer insulating film is also formed. In a plurality of openings in the interlayer insulating film, one electrode group having a plurality of electrodes is formed on one N-type region, while a second electrode group having a plurality of electrodes is formed on the other N-type region. The relationship between the two N-type regions is between an island region and an annular region surrounding the island. The annular region of the N-type well between the island region and the annular region serves as a resistor R. Thus, discharge channels for charges applied excessively because of ESD or the like evenly exist in the periphery (four regions) of the one N-type region.

Abstract: A semiconductor integrated circuit having a resistor is disclosed in which the resistor is formed by a series connection of one element having a positive temperature coefficient and another element having a negative temperature coefficient.

Abstract: A semiconductor device incorporates a resistor on a structure that uses diffusion layers for sustaining the breakdown voltage thereof to realizes a very resistive element that exhibits a high breakdown voltage and high electrical resistance, includes a spiral very resistive element buried in an interlayer insulator film. A first end of the very resistive element is connected to a drain electrode wiring and the second end of the very resistive element is grounded. An intermediate point of the very resistive element is connected to ae voltage comparator of a control IC. The semiconductor device according to the invention facilitates reducing the components parts costs, assembly costs and size of a switching power supply that includes a very resistive element.

Abstract: The semiconductor device comprises a resistance element 26 formed of polysilicon film formed on a silicon substrate 10, which includes a resistor part 26a having a resistance value set at a prescribed value, contact parts 26b formed on both sides of the resistor part 26a and connected to a line for applying a fixed potential, and a heat radiation part 26c connected to the contact part 26b, whereby the semiconductor device can include the resistance element having a small parasitic capacitance and good heat radiation.