With Resistive Gate Electrode Patents (Class 257/364)
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Patent number: 11417747Abstract: In an example, a transistor device is provided. The transistor device includes a plurality of transistor cells each including a gate electrode and each at least partially integrated in a semiconductor body that includes a wide bandgap semiconductor material. The transistor device includes a gate pad arranged on top of the semiconductor body, and a plurality of gate runners each arranged on top of the semiconductor body and each connected to gate electrodes of at least some of the plurality of transistor cells. Each gate runner of the plurality of gate runners has a longitudinal direction, and at least one of the gate runners includes at least a section in which a resistivity per area increases in the longitudinal direction as a distance to the gate pad along the gate runner increases.Type: GrantFiled: October 16, 2020Date of Patent: August 16, 2022Assignee: INFINEON TECHNOLOGIES AGInventors: Thomas Aichinger, Wolfgang Bergner, Ralf Siemieniec, Frank Wolter
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Patent number: 11189685Abstract: Provided is a resistance element, including: a semiconductor substrate; a first insulating film stacked on the semiconductor substrate; a resistance layer selectively stacked on the first insulating film; a first auxiliary film separated from the resistance layer; a second auxiliary film separated from the resistance layer in a direction different from that of the first auxiliary film; a second insulating film stacked on the first insulating film to cover the resistance layer, and the first auxiliary film and the second auxiliary film; a first electrode connected to the resistance layer and stacked on the second insulating film disposed on an upper side of the first auxiliary film; and a second electrode connected to the resistance layer by being separated from the first electrode and stacked on the second insulating film on the upper side of the second auxiliary film.Type: GrantFiled: June 27, 2019Date of Patent: November 30, 2021Assignee: FUJI ELECTRIC CO., LTD.Inventors: Masaru Saito, Masaharu Yamaji, Osamu Sasaki, Hitoshi Sumida
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Patent number: 11009417Abstract: A piezoresistive sensor includes a piezoresistive region to which first conductivity type impurity has been introduced, the piezoresistive region being formed in a semiconductor layer; a protection region to which second conductivity type impurity has been introduced, the protection region covering a top of a region in which the piezoresistive region is formed, the protection region being formed in the semiconductor layer; and contact regions to which the first conductivity type impurities have been introduced, the contact regions being connected to the piezoresistive region, the contact regions being formed so as to reach a surface of the semiconductor layer except a region in which the protection region is formed, in which the following inequality holds: impurity concentration of the piezoresistive region<impurity concentration of the protection region<impurity concentrations of the contact regions.Type: GrantFiled: March 1, 2019Date of Patent: May 18, 2021Assignee: AZBIL CORPORATIONInventors: Masayuki Yoneda, Hirofumi Tojo
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Field-effect transistor having a bypass electrode connected to the gate electrode connection section
Patent number: 10672876Abstract: A field-effect transistor includes a source electrode, a drain electrode, a semiconductor structure including a channel provided between the source electrode and the drain electrode in a first direction. Gate main portions have a first gate main portion length in the first direction and a second gate main portion length in a second direction. Connection portions are alternatively connected to the gate main portions respectively in the second direction. Each of the connection portions has a first connection portion length in the first direction and a second connection portion length in the second direction. The first connection portion length is longer than the first gate main portion length. The second connection portion length is shorter than the second gate main portion length. An external connection section is to apply electric power to the gate electrode. A bypass electrode connects the external connection section to each of the connection portions.Type: GrantFiled: November 9, 2017Date of Patent: June 2, 2020Assignee: NICHIA CORPORATIONInventor: Masashi Tanimoto -
Patent number: 10566327Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a first region and a second region; forming a first fin-shaped structure on the first region and a second fin-shaped structure on the second region; forming a patterned mask on the second region; and performing a process to enlarge the first fin-shaped structure so that the top surfaces of the first fin-shaped structure and the second fin-shaped structure are different.Type: GrantFiled: August 30, 2017Date of Patent: February 18, 2020Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chun-Hao Lin, Hsin-Yu Chen, Shou-Wei Hsieh
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Patent number: 10508958Abstract: The potential difference between a piezo-resistive portion and a shield film is to be reduced. A semiconductor device is provided, including: a semiconductor substrate having provided therein a hollowed portion, a piezo-resistive portion provided in a region of the semiconductor substrate above the hollowed portion; an insulating film provided above the piezo-resistive portion; and a conductive shield film provided above the piezo-resistive portion with the insulating film intervening therebetween, wherein two different parts of the shield film are connected to different potentials. In this manner, the potential difference between a piezo-resistive portion and a shield film can be reduced.Type: GrantFiled: February 28, 2018Date of Patent: December 17, 2019Assignee: FUJI ELECTRIC CO., LTD.Inventor: Takahide Tanaka
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Patent number: 10109739Abstract: A FinFET including a substrate, a plurality of insulators and a gate stack is provided. The substrate comprises a plurality of trenches and at least one semiconductor fin between the trenches, wherein the semiconductor fin comprises at least one groove, and the at least one groove is located on a top surface of the semiconductor fin. The insulators are disposed in the trenches. The gate stack partially covers the semiconductor fin, the at least one groove and the insulators.Type: GrantFiled: April 15, 2016Date of Patent: October 23, 2018Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ching-Hua Kuan, Chen-Chieh Chiang, Chi-Cherng Jeng
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Patent number: 9620369Abstract: A method for fabricating a semiconductor device, wherein the method comprises steps as follows: A dummy gate with a poly-silicon gate electrode and a passive device having a poly-silicon element layer are firstly provided. A hard mask layer is then formed on the dummy gate and the passive device. Next, a first etching process is performed to remove a portion of the hard mask layer to expose a portion of the poly-silicon element layer. Subsequently, an inner layer dielectric (ILD) is formed on the dummy gate and the poly-silicon element layer, and the ILD is flattened by using the hard mask layer as a polishing stop layer. Thereafter, a second etching process is performed to remove the poly-silicon gate electrode, and a metal gate electrode is formed on the location where the poly-silicon gate electrode was initially disposed.Type: GrantFiled: December 11, 2013Date of Patent: April 11, 2017Inventors: Chieh-Te Chen, Shih-Fang Tzou, Jiunn-Hsiung Liao, Yi-Po Lin
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Patent number: 9368975Abstract: Systems, methods, and apparatus are provided for tuning in wireless power transfer circuits. One aspect of the disclosure provides an apparatus for tuning. The apparatus includes a field effect transistor having a gate, source, and drain, where the field effect transistor is configured to electrically engage a tuning element to an AC power path. In some embodiments, one of the source or drain contacts is at an alternating current voltage.Type: GrantFiled: March 15, 2013Date of Patent: June 14, 2016Assignee: QUALCOMM IncorporatedInventors: Cody B. Wheeland, Linda S. Irish, William H. Von Novak, III, Gabriel Isaac Mayo
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Patent number: 9041114Abstract: In one embodiment, a semiconductor device includes a semiconductor substrate, and a gate insulator arranged on the semiconductor substrate. The device further includes a gate electrode including a semiconductor layer and a metal layer which are sequentially arranged on the gate insulator. The device further includes a contact plug arranged on the gate electrode to penetrate the metal layer, and having a bottom surface at a level lower than an upper surface of the semiconductor layer.Type: GrantFiled: August 30, 2013Date of Patent: May 26, 2015Assignee: KABUSHIKI KAISHA TOSHIBAInventor: Kenichi Ide
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Patent number: 8975663Abstract: There is provided a semiconductor device such that it is possible to average the temperatures of a plurality of semiconductor chips simply by providing gate resistors. The semiconductor device includes a semiconductor module wherein a plurality of circuit substrates on which are mounted one or more semiconductor chips having a gate terminal and a gate resistor connected to the gate terminal are disposed in parallel, wherein the disposition distance of the gate resistor from the semiconductor chip is set based on the temperature of the semiconductor chip.Type: GrantFiled: August 12, 2013Date of Patent: March 10, 2015Assignee: Fuji Electric Co., Ltd.Inventor: Yujin Okamoto
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Patent number: 8890251Abstract: A semiconductor device includes a substrate, and a gate line, located over the substrate, which includes a first conductive layer and one or more second conductive pattern layers located in the first conductive layer. The second conductive pattern layer comprises a metal layer to thus reduce resistance of a gate line.Type: GrantFiled: August 29, 2012Date of Patent: November 18, 2014Assignee: SK Hynix Inc.Inventors: Ki Hong Lee, Seung Ho Pyi, Il Young Kwon
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Patent number: 8877645Abstract: Methods of forming an integrated circuit structure utilizing a selectively formed and at least partially oxidized metal cap over a gate, and associated structures. In one embodiment, a method includes providing a precursor structure including a transistor having a metal gate; forming an etch stop layer over an exposed portion of the metal gate; at least partially oxidizing the etch stop layer; and forming a dielectric layer over the at least partially oxidized etch stop layer.Type: GrantFiled: September 15, 2011Date of Patent: November 4, 2014Assignee: International Business Machines CorporationInventors: Chih-Chao Yang, David V. Horak, Charles W. Koburger, III, Shom Ponoth
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Patent number: 8847304Abstract: A semiconductor device includes a plurality of conductive layers and a plurality of insulating layers formed alternately with each other, at least one channel layer passing through the plurality of conductive layers and the plurality of insulating layers, and at least one first charge blocking layer surrounding the at least one channel layer, wherein a plurality of first regions, interposed between the at least one channel layer and the plurality of conductive layers, and a plurality of second regions, interposed between the at least one channel layer and the plurality of insulating layers, are alternately defined on the at least one first charge blocking layer, and each of the plurality of first regions has a greater thickness than each of the plurality of second regions.Type: GrantFiled: July 15, 2013Date of Patent: September 30, 2014Assignee: SK Hynix Inc.Inventors: Ki Hong Lee, Seung Ho Pyi, Seok Min Jeon
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Patent number: 8835294Abstract: The present disclosure provides a method of fabricating a semiconductor device that includes providing a semiconductor substrate, forming a gate structure on the substrate, the gate structure including a dummy gate, removing the dummy gate from the gate structure thereby forming a trench, forming a work function metal layer partially filling the trench, forming a fill metal layer filling a remainder of the trench, performing a chemical mechanical polishing (CMP) to remove portions of the metal layers outside the trench, and implanting Si, C, or Ge into a remaining portion of the fill metal layer.Type: GrantFiled: March 16, 2010Date of Patent: September 16, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Han-Guan Chew, Ming Zhu, Lee-Wee Teo, Harry Hak-Lay Chuang, Yi-Ren Chen
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Patent number: 8816439Abstract: A gate structure of a semiconductor device includes a first low resistance conductive layer, a second low resistance conductive layer, and a first type conductive layer disposed between and directly contacting sidewalls of the first low resistance conductive layer and the second low resistance conductive layer.Type: GrantFiled: October 19, 2010Date of Patent: August 26, 2014Assignee: United Microelectronics Corp.Inventors: Chih-Hao Yu, Li-Wei Cheng, Che-Hua Hsu, Tian-Fu Chiang, Cheng-Hsien Chou, Chien-Ming Lai, Yi-Wen Chen, Chien-Ting Lin, Guang-Hwa Ma
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Patent number: 8796745Abstract: A semiconductor device containing an extended drain MOS transistor with an integrated snubber formed by forming a drain drift region of the MOS transistor, forming a snubber capacitor including a capacitor dielectric layer and capacitor plate over the extended drain, and forming a snubber resistor over a gate of the MOS transistor so that the resistor is connected in series between the capacitor plate and a source of the MOS transistor.Type: GrantFiled: July 3, 2012Date of Patent: August 5, 2014Assignee: Texas Instruments IncorporatedInventor: Christopher Boguslaw Kocon
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Patent number: 8766366Abstract: A method of fabricating a semiconductor device includes forming an interlayer dielectric on a substrate, the interlayer dielectric including first and second openings respectively disposed in first and second regions formed separately in the substrate; forming a first conductive layer filling the first and second openings; etching the first conductive layer such that a bottom surface of the first opening is exposed and a portion of the first conductive layer in the second opening remains; and forming a second conductive layer filling the first opening and a portion of the second opening.Type: GrantFiled: October 2, 2012Date of Patent: July 1, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Hoonjoo Na, Sangjin Hyun, Yugyun Shin, Hongbae Park, Sughun Hong, Hye-Lan Lee, Hyung-seok Hong
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Patent number: 8742475Abstract: In one aspect of the present invention, a field effect transistor (FET) device includes a first FET including a dielectric layer disposed on a substrate, a first portion of a first metal layer disposed on the dielectric layer, and a second metal layer disposed on the first metal layer, a second FET including a second portion of the first metal layer disposed on the dielectric layer, and a boundary region separating the first FET from the second FET.Type: GrantFiled: July 20, 2012Date of Patent: June 3, 2014Assignee: International Business Machines CorporationInventors: Dechao Guo, Shu-Jen Han, Chung-Hsun Lin, Yanfeng Wang
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Patent number: 8742507Abstract: A variable resistive element configured to reduce a forming voltage while reducing a variation in forming voltage among elements, a method for producing it, and a highly integrated nonvolatile semiconductor memory device provided with the variable resistive element are provided. The variable resistive element includes a resistance change layer (first metal oxide film) and a control layer (second metal oxide film) having contact with a first electrode sandwiched between the first electrode and a second electrode. The control layer includes a metal oxide film having a low work function (4.5 eV or less) and capable of extracting oxygen from the resistance change layer. The first electrode includes a metal having a low work function similar to the above metal, and a material having oxide formation free energy higher than that of an element included in the control layer, to prevent oxygen from being thermally diffused from the control layer.Type: GrantFiled: June 26, 2013Date of Patent: June 3, 2014Assignee: Sharp Kabushiki KaishaInventor: Yukio Tamai
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Patent number: 8716802Abstract: A semiconductor device structure including a substrate, a resistor, and a first gate structure is provided. The substrate includes a resistor region and a metal-oxide-semiconductor (MOS) transistor region. The resistor is disposed on the substrate within the resistor region. The resistor includes a first dielectric layer, a metal layer, a second dielectric layer, and a semiconductor layer sequentially stacked on the substrate. The first gate structure is disposed on the substrate within the MOS transistor region. The first gate structure includes the first dielectric layer, the metal layer, and the semiconductor layer sequentially stacked on the substrate.Type: GrantFiled: August 9, 2010Date of Patent: May 6, 2014Assignee: United Microelectronics Corp.Inventors: Kai-Ling Chiu, Chih-Yu Tseng, Victor Chiang Liang, You-Ren Liu, Chih-Chen Hsueh
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Publication number: 20140070269Abstract: There is provided a semiconductor device such that it is possible to average the temperatures of a plurality of semiconductor chips simply by providing gate resistors. The semiconductor device includes a semiconductor module wherein a plurality of circuit substrates on which are mounted one or more semiconductor chips having a gate terminal and a gate resistor connected to the gate terminal are disposed in parallel, wherein the disposition distance of the gate resistor from the semiconductor chip is set based on the temperature of the semiconductor chip.Type: ApplicationFiled: August 12, 2013Publication date: March 13, 2014Applicant: FUJI ELECTRIC CO., LTD.Inventor: Yujin OKAMOTO
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Patent number: 8664741Abstract: Provided is a high voltage semiconductor device that includes a PIN diode structure formed in a substrate. The PIN diode includes an intrinsic region located between a first doped well and a second doped well. The first and second doped wells have opposite doping polarities and greater doping concentration levels than the intrinsic region. The semiconductor device includes an insulating structure formed over a portion of the first doped well. The semiconductor device includes an elongate resistor device formed over the insulating structure. The resistor device has first and second portions disposed at opposite ends of the resistor device, respectively. The semiconductor device includes an interconnect structure formed over the resistor device. The interconnect structure includes: a first contact that is electrically coupled to the first doped well and a second contact that is electrically coupled to a third portion of the resistor located between the first and second portions.Type: GrantFiled: June 14, 2011Date of Patent: March 4, 2014Assignee: Taiwan Semiconductor Manufacturing Company Ltd.Inventors: Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai, Chih-Chang Cheng, Ruey-Hsin Liu
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Patent number: 8633566Abstract: A repairable memory cell in accordance with one or more embodiments of the present disclosure includes a storage element positioned between a first and a second electrode, and a repair element positioned between the storage element and at least one of the first electrode and the second electrode.Type: GrantFiled: April 19, 2011Date of Patent: January 21, 2014Assignee: Micron Technology, Inc.Inventor: Scott E. Sills
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Patent number: 8558348Abstract: A method of forming a memory device includes forming a first interlayer insulating layer on a semiconductor substrate, forming a first electrode in the first interlayer insulating layer, the first electrode having a top surface of a rectangular shape extending in a first direction, and forming a variable resistance pattern on the first electrode, the variable resistance pattern having a bottom surface of a rectangular shape extending in a second direction crossing the first direction, the bottom surface of the variable resistance pattern contacting the first electrode, wherein the area of contact between the lower electrode and the variable resistance pattern is substantially equal to a multiplication of a minor axis length of a top surface of the first electrode and a minor axis length of a bottom surface of the variable resistance pattern.Type: GrantFiled: August 13, 2012Date of Patent: October 15, 2013Assignee: Samsung Electronics Co., Ltd.Inventors: Gyuhwan Oh, Dong-Hyun Im, Soonoh Park, Dongho Ahn, Young-Lim Park, Eun-Hee Cho
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Publication number: 20130240994Abstract: A semiconductor device includes a substrate, and a gate line, located over the substrate, which includes a first conductive layer and one or more second conductive pattern layers located in the first conductive layer. The second conductive pattern layer comprises a metal layer to thus reduce resistance of a gate line.Type: ApplicationFiled: August 29, 2012Publication date: September 19, 2013Inventors: Ki Hong LEE, Seung Ho Pyi, Il Young Kwon
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Patent number: 8530317Abstract: A replacement gate process for fabricating a semiconductor device with metal gates includes forming a dummy gate stack, patterning dummy gates, doping source and drain regions for the gates, and forming an inter-level dielectric layer that overlays the source and drain regions. The sacrificial layer of the dummy gates is removed to form trenches using a three stage process. The first stage begins the trenches, whereby trenches entrance corners are exposed. The second stage is an etch that rounds the corners. The third stage is a main etch for the sacrificial layer, which is typically polysilicon. The corner rounding of the second stage improves the performance of the third stage and results in a better metal back fill including a reduction in pit defects. The process improves overall device yield in comparison to an otherwise equivalent process that omits the corner rounding step.Type: GrantFiled: August 16, 2012Date of Patent: September 10, 2013Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Po-Chi Wu, Buh-Kuan Fang
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Publication number: 20130134519Abstract: A semiconductor device includes a conductive film formed on an insulating film, and a first polysilicon film formed on the conductive film. A stacked film including the conductive film and the first polysilicon film forms a first pattern including a central region, and end regions each located at a side of the central region. A silicide film is formed on at least the central region of the stacked film. A discontinuity is formed in a central region of the conductive film. The conductive film is separated into the two portions by the discontinuity.Type: ApplicationFiled: January 28, 2013Publication date: May 30, 2013Applicant: PANASONIC CORPORATIONInventor: Panasonic Corporation
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Patent number: 8432001Abstract: Provided is an electric field information reading head for reading information from a surface electric charge of an information storage medium, the electric field information reading head comprising a semiconductor substrate having a resistance region formed in a central part at one end of a surface facing a recording medium, the resistance region being lightly doped with impurities, and source and drain regions formed on both sides of the resistance region, the source region and the drain region being more highly doped with impurities than the resistance region. The source region and the drain region extend along the surface of the semiconductor substrate facing the recording medium, and electrodes are connected electrically with the source region and the drain region respectively. In addition, provided is a method of fabricating the electric field information reading head and a method of mass-producing the electric field information reading head on a wafer.Type: GrantFiled: May 10, 2007Date of Patent: April 30, 2013Assignee: Seagate Technology LLCInventors: Ju-hwan Jung, Hyoung-soo Ko, Hong-sik Park, Yong-su Kim, Seung-bum Hong
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Patent number: 8373232Abstract: A device (10) to detect and measure static electric charge (q) on an object (100) being positioned in a distance (r.) from an input electrode (11) of the device (10) comprises at least one MOS field transistor (20). The input electrode (11) is connected with the gate electrode (21) of the MOS-FET (20) to detect said electrical charge. The MOS-FET (20) can comprise a gate oxide layer underneath the gate (21) and over the source (22) and drain (23) areas having a sufficient thickness to allow the MOS field transistor (20) to withstand several kilovolts (kV) of voltage and to avoid the loss of charges by tunnel effect due to the high potential of the gate electrode during ESD events.Type: GrantFiled: September 1, 2010Date of Patent: February 12, 2013Assignee: Microdul AGInventors: José Solo De Zaldivar, Philip John Poole
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Patent number: 8344344Abstract: Provided are resistive memory devices and methods of fabricating the same. The resistive memory devices and the methods are advantageous for high integration because they can provide a multilayer memory cell structure. Also, the parallel conductive lines of adjacent layers do not overlap each other in the vertical direction, thus reducing errors in program/erase operations.Type: GrantFiled: May 4, 2010Date of Patent: January 1, 2013Assignee: Electronics and Telecommunications Research InstituteInventor: Sung-Yool Choi
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Patent number: 8232169Abstract: A resistive element having two vertical resistive portions placed in two holes formed in the upper portion of a substrate and a horizontal resistive portion placed in a buried cavity connecting the bottoms of the holes.Type: GrantFiled: January 14, 2011Date of Patent: July 31, 2012Assignee: STMicroelectronics S.A.Inventor: Christine Anceau
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Publication number: 20120181612Abstract: The present disclosure involves a method. The method includes providing a substrate including a top surface. The method also includes forming a gate over the top surface of the substrate. The formed gate has a first height measured from the top surface of the substrate. The method also includes etching the gate to reduce the gate to a second height. This second height is substantially less than the first height. The present disclosure also involves a semiconductor device. The semiconductor device includes a substrate. The substrate includes a top surface. The semiconductor device also includes a first gate formed over the top surface of the substrate. The first gate has a first height. The semiconductor device also includes a second gate formed over the top surface of the substrate. The second gate has a second height. The first height is substantially less than the second height.Type: ApplicationFiled: January 13, 2011Publication date: July 19, 2012Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Jing-Hwang Yang, Chun-Heng Liao, Hsin-Li Cheng, Liang-Kai Han
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Patent number: 8120114Abstract: In one aspect, an apparatus may include a metal gate of a transistor. An etch stop layer may be selectively formed over the metal gate. The etch stop layer may include a metal compound. An insulating layer may be over the etch stop layer. A conductive structure may be included through the insulating layer to the metal gate. Methods of making such transistors are also disclosed.Type: GrantFiled: December 27, 2006Date of Patent: February 21, 2012Assignee: Intel CorporationInventors: Andrew Ott, Sean King, Ajay Sharma
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Patent number: 8102003Abstract: A resistance memory element which memorizes a high resistance state and a low resistance state and is switched between the high resistance state and the low resistance state by an application of a voltage includes a first electrode layer of titanium nitride film, a resistance memory layer formed on the first electrode layer and formed of titanium oxide having a crystal structure of rutile phase, and a second electrode layer formed on the resistance memory layer.Type: GrantFiled: May 28, 2009Date of Patent: January 24, 2012Assignee: Fujitsu LimitedInventors: Chikako Yoshida, Hideyuki Noshiro, Takashi Iiduka
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Publication number: 20110241118Abstract: A high-k metal gate electrode is formed with reduced gate voids. An embodiment includes forming a replaceable gate electrode, for example of amorphous silicon, having a top surface and a bottom surface, the top surface being larger than the bottom surface, removing the replaceable gate electrode, forming a cavity having a top opening larger than a bottom opening, and filling the cavity with metal. The larger top surface may be formed by etching the bottom portion of the amorphous silicon at greater temperature than the top portion, or by doping the top and bottom portions of the amorphous silicon differently such that the bottom has a greater lateral etch rate than the top.Type: ApplicationFiled: March 30, 2010Publication date: October 6, 2011Applicant: GLOBALFOUNDRIES IncInventors: Man Fai Ng, Bin Yang
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Patent number: 8030718Abstract: The present disclosure provides a semiconductor device. The semiconductor device includes a semiconductor substrate having a source region and a drain region, defining a first dimension from the source to drain; and a gate stack disposed on the semiconductor substrate and partially interposed between the source region and the drain region. The gate stack includes a high k dielectric layer disposed on the semiconductor substrate; a first metal feature disposed on the high k dielectric layer, the first metal gate feature having a first work function and defining a second dimension parallel with the first dimension; and a second metal feature having a second work function different from the first work function and defining a third dimension parallel with the first dimension, the third dimension being less than the second dimension.Type: GrantFiled: April 15, 2009Date of Patent: October 4, 2011Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Huan-Tsung Huang, Shyh-Horng Yang, Yuri Masuoka, Ken-Ichi Goto
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Patent number: 7977705Abstract: In one embodiment, the invention provides substrates that are structured so that devices fabricated in a top layer thereof have properties similar to the same devices fabricated in a standard high resistivity substrate. Substrates of the invention include a support having a standard resistivity, a semiconductor layer arranged on the support substrate having a high-resistivity, preferably greater than about 1000 Ohms-cm, an insulating layer arranged on the high-resistivity layer, and a top layer arranged on the insulating layer. The invention also provides methods for manufacturing such substrates.Type: GrantFiled: May 21, 2009Date of Patent: July 12, 2011Assignee: S.O.I.Tec Silicon on Insulator TechnologiesInventors: Bich-Yen Nguyen, Carlos Mazure
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Patent number: 7902605Abstract: A resistive element having two vertical resistive portions placed in two holes formed in the upper portion of a substrate and a horizontal resistive portion placed in a buried cavity connecting the bottoms of the holes.Type: GrantFiled: December 5, 2006Date of Patent: March 8, 2011Inventor: Christine Anceau
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Patent number: 7790555Abstract: A semiconductor device manufacturing method includes a field oxide insulation film forming step, an electrode forming step, and a resistor forming step. The field oxide insulation film forming step comprises forming a field oxide insulation film on a surface of the semiconductor substrate so that a portion which corresponds to a side surface portion for each of active regions formed on the surface of the semiconductor substrate, which opposes a rotation center of the surface of the semiconductor substrate in spin-coating of a photoresist in the electrode forming step, and which is located at a front side of a centrifugal force acting direction along the surface of the semiconductor substrate has a curved surface that is convex in a forward direction of the centrifugal force along the surface of the semiconductor substrate as seen in plan view of the semiconductor substrate.Type: GrantFiled: May 21, 2007Date of Patent: September 7, 2010Assignee: Seiko Instruments Inc.Inventors: Akiko Tsukamoto, Hisashi Hasegawa, Jun Osanai
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Patent number: 7750407Abstract: A semiconductor device includes a substrate and a memory cell formed on the substrate. The memory cell includes a word line. The semiconductor device also includes a protection area formed in the substrate, a conductive structure configured to extend the word line to the protection area, and a contact configured to short the word line and the protection area.Type: GrantFiled: December 18, 2006Date of Patent: July 6, 2010Assignee: Spansion LLCInventors: Wei Zheng, Jean Yang, Mark Randolph, Ming Kwan, Yi He, Zhizheng Liu, Meng Ding
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Patent number: 7745890Abstract: A semiconductor device and system for a hybrid metal fully silicided (FUSI) gate structure is disclosed. The semiconductor system comprises a PMOS gate structure, the PMOS gate structure including a first high-? dielectric layer, a P-metal layer, a mid-gap metal layer, wherein the mid-gap metal layer is formed between the high-? dielectric layer, the P-metal layer and a fully silicided layer formed on the P-metal layer. The semiconductor system further comprises an NMOS gate structure, the NMOS gate structure includes a second high-? dielectric layer, the fully silicided layer, and the mid-gap metal layer, wherein the mid-gap metal layer is formed between the high-? dielectric and the fully silicided layer.Type: GrantFiled: September 28, 2007Date of Patent: June 29, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Hua Yu, Cheng-Tung Lin, Cheng-Hung Chang, Hsiang-Yi Wang, Chen-Nan Yeh
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Publication number: 20100109085Abstract: Memory elements and methods for making memory elements. One method of making a memory element includes forming a first electrode, forming an electrically conductive current densifying element and a memory cell on the first electrode, the memory cell and the current densifying element adjacent to each other. A second electrode is formed over the current densifying element and the memory cell. The memory elements may be resistance random access memory elements.Type: ApplicationFiled: March 20, 2009Publication date: May 6, 2010Applicant: SEAGATE TECHNOLOGY LLCInventors: Jinyoung Kim, Yongchul Ahn, Muralikrishnan Balakrishnan, Tangshiun Yeh, Antoine Khoueir
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Patent number: 7683433Abstract: An apparatus and method of manufacture for metal-oxide semiconductor (MOS) transistors is disclosed. Devices in accordance with the invention are operable at voltages below 2V. The devices are area efficient, have improved drive strength, and have reduced leakage current. A dynamic threshold voltage control scheme comprised of a forward biased diode in parallel with a capacitor is used, implemented without changing the existing MOS technology process. This scheme controls the threshold voltage of each transistor. In the OFF state, the magnitude of the threshold voltage of the transistor increases, keeping the transistor leakage to a minimum. In the ON state, the magnitude of the threshold voltage decreases, resulting in increased drive strength. The invention is particularly useful in MOS technology for both bulk and silicon on insulator (SOI) CMOS. The use of reverse biasing of the well, in conjunction with the above construct to further decrease leakage in a MOS transistor, is also shown.Type: GrantFiled: September 19, 2006Date of Patent: March 23, 2010Assignee: Semi Solution, LLCInventors: Ashok Kumar Kapoor, Robert Strain, Reuven Marko
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Publication number: 20100052058Abstract: A semiconductor device and method for fabricating a semiconductor device protecting a resistive structure in gate replacement processing is disclosed. The method comprises providing a semiconductor substrate; forming at least one gate structure including a dummy gate over the semiconductor substrate; forming at least one resistive structure including a gate over the semiconductor substrate; exposing a portion of the gate of the at least one resistive structure; forming an etch stop layer over the semiconductor substrate, including over the exposed portion of the gate; removing the dummy gate from the at least one gate structure to create an opening; and forming a metal gate in the opening of the at least one gate structure.Type: ApplicationFiled: March 11, 2009Publication date: March 4, 2010Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chen-Pin Hsu, Chung-Long Cheng, Kong-Beng Thei, Harry Chuang
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Publication number: 20090189221Abstract: Provided are a semiconductor device and a method for manufacturing the semiconductor device. The semiconductor device includes: a gate electrode formed of polysilicon on a substrate with a gate insulating layer interposed between the gate electrode and the substrate; a source region and a drain region formed on the substrate on either side of the gate electrode; a PMD (poly-metal dielectric) liner nitride layer having a non-stoichiometric structure formed on the gate electrode, the source region, and the drain region; and an interlayer insulating layer formed on the PMD liner nitride layer.Type: ApplicationFiled: February 9, 2009Publication date: July 30, 2009Inventor: Gwang Su Kim
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Publication number: 20090184373Abstract: A semiconductor device is provided which has a semiconductor substrate. An active cell area having at least one active cell is formed in the semiconductor substrate, wherein at least sections of the active cell area are surrounded by an edge termination region. An integrated gate runner structure is arranged at least partially in the edge termination region and has at least one low electrical resistance portion and at least one high electrical resistance portion which are electrically connected in series with each other.Type: ApplicationFiled: January 18, 2008Publication date: July 23, 2009Applicant: Infineon Technologies Austria AGInventors: Winfried Kaindl, Michael Treu, Holger Kapels, Carolin Tolksdorf, Armin Willmeroth
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Patent number: 7563682Abstract: An LDMOS transistor device in an integrated circuit comprises a semiconductor substrate (10), a gate region (1) including a gate semiconductor layer region (2; 2?; 151) on top of a gate insulation layer region (3; 141), source (4) and drain (5, 7) regions, and a channel (6; 12) arranged beneath the LDMOS gate region, the channel interconnecting the LDMOS source and drain regions and having a laterally graded doping concentration. In order to obtain a lower parasitic capacitance coupling from the gate semiconductor region, the gate semiconductor layer region is provided with a laterally graded net doping concentration (P+N+; N+N?). A method for fabrication of the inventive LDMOS transistor device is further disclosed.Type: GrantFiled: May 13, 2008Date of Patent: July 21, 2009Assignee: Infineon Technologies AGInventors: Torkel Arnborg, Ulf Smith
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Publication number: 20090173999Abstract: A field effect transistor (FET) comprising a gate structure that includes at least one gate having a varying sheet resistance in a direction between a source contact and a drain contact. In an illustrative embodiment, the FET can be configured to operate as a radio frequency switch. In this case, the FET can provide improved performance with respect to both the off-state capacitances and radio frequency isolations over similar FETs implemented with typical gates.Type: ApplicationFiled: January 8, 2009Publication date: July 9, 2009Inventors: Remis Gaska, Alexei Koudymov, Michael Shur, Grigory Simin
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Publication number: 20090146171Abstract: A semiconductor light-emitting device and a method for manufacturing the same can include a soft silicon resin encapsulating an LED chip with a thin overcoat of microparticles located on the silicon resin to prevent dirt and dust from attaching to the silicon resin. The semiconductor light-emitting device can include a base board having at least one LED chip, a reflector fixed on the base board so as to enclose the LED chip, a soft silicon resin having a tacky surface disposed in the reflector, and an overcoat of microparticles on the silicon resin. Thus, manufacturing lead time can be reduced because the microparticles can attach to the silicon resin in a thin and single layer and a solidifying process for an extra layer on top of the silicon resin is not necessary. The overcoat of microparticles can prevent dirt and dust from attaching to the silicon resin, and can decrease optical variability in an inclined direction from an optical axis of the device.Type: ApplicationFiled: December 2, 2008Publication date: June 11, 2009Inventor: Tsutomu Okubo